Ceramic heating disc printing glue auxiliary positioning device

Abstract

The utility model discloses a kind of ceramic heating disc printing glue auxiliary positioning device, it is related to the technical field of semiconductor equipment, comprising: pedestal, with bearing surface, the pedestal is from the bearing surface and is provided with stepped through-hole, the stepped through-hole includes first hole and second hole set in this way, the diameter of the second hole is less than the diameter of the first hole;Limiting plate is connected on the pedestal, limiting through-hole is set concentrically with the stepped through-hole in the limiting plate, the diameter of the limiting through-hole is less than the diameter of the first hole, the utility model is positioned by stepped hole and limiting plate double, so that the support cylinder of ceramic heating disc does not easily occur in printing glue process Shaking or displacement, ensure the uniformity of printing glue.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, specifically to a ceramic heating plate printing adhesive auxiliary positioning device. Background Technology

[0002] The heating plate is a key component of thin film deposition equipment. During wafer thin film deposition, the wafer is placed above the heating plate, which serves to stably support the wafer and provide it with uniform heating.

[0003] A heating plate typically consists of a ceramic base plate and a support cylinder. The support cylinder is fixed to one surface of the base plate and its function is to allow electrical components such as heating wires and sensors to pass through. The bonding process between the support cylinder and the base plate varies depending on factors such as materials. Taking ceramic heating plates as an example, in some processes, adhesives are used to achieve bonding between the two.

[0004] In adhesive bonding processes, the specific steps involve printing adhesive onto both the end of the support cylinder and the surface of the substrate, followed by bonding them at high temperature. Ensuring the uniformity of the adhesive during printing is crucial, as it directly affects the quality of the bonding.

[0005] However, in related technologies, when making test specimens, the support cylinder is usually just placed on a platform. This fixing method is not stable and reliable enough, resulting in poor printing effect of the adhesive and inconvenience in operation. Utility Model Content

[0006] In view of this, the present invention provides a ceramic heating plate printing adhesive auxiliary positioning device to solve the problem that the support cylinder is not stable enough on the platform, resulting in poor printing effect of adhesive.

[0007] This utility model provides a ceramic heating plate printing adhesive auxiliary positioning device, including:

[0008] A base having a bearing surface, the base having a stepped through hole formed from the bearing surface, the stepped through hole including a first hole and a second hole arranged therebetween, the diameter of the second hole being smaller than the diameter of the first hole;

[0009] A limiting plate is connected to the base. The limiting plate has a limiting through hole that is concentric with the step through hole. The diameter of the limiting through hole is smaller than the diameter of the first hole.

[0010] This utility model's technical solution utilizes a stepped through-hole design on the base, where the diameter of the second hole is smaller than the diameter of the first hole. This design ensures that when the support cylinder is inserted into the stepped through-hole, the annular boss is blocked by the stepped surface of the through-hole, achieving initial vertical (axial) positioning of the support cylinder. The limiting through-hole on the limiting plate is concentrically positioned with the stepped through-hole, and its diameter matches the outer diameter of the annular boss on the support cylinder. This further radially restricts the position of the support cylinder, allowing for precise positioning of the ceramic heating plate's support cylinder within the device. This provides an accurate positional reference for subsequent adhesive printing, ensuring the accuracy and consistency of the printing position and thus improving printing quality.

[0011] This invention utilizes a dual positioning system of stepped through-holes and a limiting plate to prevent the support cylinder of the ceramic heating plate from easily shaking or shifting during the printing process. This stable positioning ensures that uneven printing or positional deviations are not caused by changes in the support cylinder's position during printing, thereby improving the stability and reliability of the printing operation and ultimately increasing the product yield.

[0012] Optionally, the base has a groove, the stepped through hole is disposed at the bottom of the groove, and the limiting plate is detachably embedded in the groove.

[0013] In the above solution, the limiting plate is detachably embedded in the groove. When the limiting plate is worn, damaged, or needs to be replaced to adapt to different specifications of ceramic heating plates, it can be easily removed from the groove for replacement, repair, or adjustment, which greatly improves the maintainability of the device.

[0014] In addition, the groove provides a precise embedding position for the limiting plate, which helps to further ensure the concentricity of the limiting through hole and the stepped through hole on the limiting plate, thereby improving the positioning accuracy of the ceramic heating plate support cylinder, making the printing operation more precise and improving product quality.

[0015] Optionally, the limiting plate is made of Teflon material.

[0016] Using the above solution, the polymer material exhibits good wear resistance, self-lubrication, and a certain degree of flexibility. As a limiting plate, its wear resistance ensures that the limiting through-hole will not wear rapidly due to frequent friction with the annular boss of the support cylinder during long-term use, maintaining good limiting accuracy. Self-lubrication makes the insertion and removal of the support cylinder through the limiting through-hole smoother, reducing jamming. Flexibility provides a certain buffering effect when the support cylinder is inserted, further protecting it, and also accommodates minor dimensional deviations in the support cylinder, improving positioning reliability.

[0017] Optionally, the base includes a bottom plate and an intermediate plate stacked together, with the second hole disposed on the bottom plate and the first hole disposed on the intermediate plate.

[0018] The above solution places the first and second holes of the stepped through-hole on different plates, namely the base plate and the intermediate plate. Compared to machining a complete stepped through-hole on a single, integral base, this method reduces the machining difficulty.

[0019] Furthermore, since the working conditions and stress conditions of the first and second holes may differ, this design allows for the selection of different materials based on their respective needs. For example, the second hole may require a material with higher hardness to ensure wear resistance during long-term use, while the first hole may have requirements for certain other material properties. By selecting materials separately, functional requirements can be met while controlling costs to a certain extent, thus optimizing material utilization.

[0020] Optionally, the base plate is made of metal, and an annular pad is provided on the inner wall of the first hole, the annular pad abutting against the base plate.

[0021] In the above solution, a robust and stable support foundation is provided by a metal base plate, ensuring the structural strength and stability of the entire device. An annular pad is placed on the metal base plate to effectively prevent the hard metal base plate from directly contacting the support cylinder during insertion. This prevents scratches, wear, and other damage to the bottom surface of the annular boss of the support cylinder caused by the metal base plate during insertion or use, thus extending the service life of the support cylinder.

[0022] Optionally, the intermediate plate is made of bakelite or acrylic. The annular pad made of bakelite or acrylic is softer than metal, which can avoid damage to the support cylinder.

[0023] Optionally, the base further includes a top plate, which is disposed on the side of the intermediate plate opposite to the bottom plate, and the groove is formed on the top plate. This arrangement allows for the selection of different limiting plates to be placed in the groove depending on the size of the support cylinder.

[0024] Optionally, a support frame is also included, on which the base is mounted, and the bottom of the support frame has feet. In the above solution, the base is raised by the support frame, creating a certain spatial distance between the entire ceramic heating plate printing auxiliary positioning device and the working plane. The feet lift the support frame off the ground, facilitating handling using forklifts, pallet trucks, or other equipment when necessary, thus reducing the difficulty of handling.

[0025] Optionally, the base is provided with a plurality of positioning structures around the limiting plate, the positioning structures being used to connect with the printing tool.

[0026] The above solution, by setting a positioning structure around the limiting plate on the base and connecting it with the printing tool, can ensure that the relative position of the printing tool and the ceramic heating plate support cylinder is accurately fixed.

[0027] Optionally, the positioning structure includes: a positioning post.

[0028] In the above scheme, the positioning post acts as a positioning structure, providing a clear guide for the printing tool. When the printing tool is installed, the positioning post guides it into accurate position, ensuring precise relative positioning between the printing tool and the support cylinder. Specifically, the printing tool can be equipped with positioning holes that mate with the positioning post. Inserting the positioning post into these holes allows the printing tool to be positioned quickly and accurately in both horizontal and vertical directions, ensuring the accuracy of the printing ink placement and thus improving printing quality.

[0029] Optionally, the positioning structure further includes an adjusting shim, which is sleeved on the positioning post.

[0030] In the above scheme, adjusting shims are fitted onto the positioning posts. By increasing or decreasing the number of shims or changing the thickness of a single shim, the distance between the printing tool and the base can be flexibly adjusted, ensuring that the working head of the printing tool maintains a suitable printing distance from the annular boss end face of the ceramic heating plate support cylinder. With this setup, when printing on support cylinders of different models, adjusting the shims ensures that the working head of the printing tool and the surface of the support cylinder to be printed are at the optimal printing height, guaranteeing the uniformity and accuracy of the printing. Attached Figure Description

[0031] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0032] Figure 1 This is a perspective view of a ceramic heating plate printing adhesive auxiliary positioning device according to an embodiment of the present utility model;

[0033] Figure 2 for Figure 1 The cross-section diagram shown;

[0034] Figure 3 for Figure 1 A magnified view of a portion of the image;

[0035] Figure 4 For heating plate;

[0036] Explanation of reference numerals in the attached figures:

[0037] 1. Base; 2. Stepped through hole; 3. First hole; 4. Second hole; 5. Limiting plate; 6. Limiting through hole; 7. Groove; 8. Base plate; 9. Intermediate plate; 10. Annular pad; 11. Top plate; 12. Support frame; 13. Support leg; 14. Positioning structure; 141. Positioning column; 142. Adjusting shim; 15. Support cylinder; 16. Annular boss; 17. Ceramic base plate. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0039] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0040] like Figure 1 The image shows a specific implementation of a ceramic heating plate printing auxiliary positioning device provided in this embodiment, comprising: a base 1 and a limiting plate 5. The base 1 has a bearing surface, and a stepped through hole 2 is formed on the bearing surface of the base 1.

[0041] like Figure 2 As shown, the stepped through hole 2 includes a first hole 3 and a second hole 4 arranged accordingly.

[0042] like Figure 2 As shown, the diameter of the second hole 4 is smaller than the diameter of the first hole 3.

[0043] like Figure 1-3 As shown, the limiting plate 5 is connected to the base 1, and the limiting plate 5 has a limiting through hole 6 that is concentrically arranged with the step through hole 2. The diameter of the limiting through hole 6 is smaller than the diameter of the first hole 3.

[0044] The technical solution of this embodiment can be used to position the support cylinder 15 of the ceramic heating plate.

[0045] like Figure 4 As shown, the ceramic heating plate includes a support cylinder 15 and a ceramic base plate 17. One end of the support cylinder 15 has an annular boss 16. Before the support cylinder 15 is bonded to the ceramic base plate 17, the end face of the end of the support cylinder 15 with the annular boss 16 needs to be printed with adhesive.

[0046] The technical solution of this embodiment, through the design of the stepped through hole 2 on the base 1, has a second hole 4 with a diameter smaller than the first hole 3. This allows the annular boss 16 to be blocked by the stepped surface of the stepped through hole 2 when the support cylinder 15 is inserted into it, thus achieving initial positioning of the support cylinder 15 in the vertical direction (axial direction). The limiting through hole 6 on the limiting plate 5 is concentrically set with the stepped through hole 2, and the diameter of the limiting through hole 6 matches the outer diameter of the annular boss 16 of the support cylinder 15, further restricting the position of the support cylinder 15 radially. This allows the support cylinder 15 of the ceramic heating plate to be accurately positioned in the device, providing an accurate positional reference for subsequent printing, ensuring the accuracy and consistency of the printing position, and thus improving the printing quality.

[0047] In this embodiment, the dual positioning of the stepped through-hole 2 and the limiting plate 5 ensures that the support cylinder 15 of the ceramic heating plate will not easily shake or shift during the printing process. This stable positioning ensures that during the printing operation, the position of the support cylinder 15 will not cause problems such as uneven printing or positional deviation, thereby improving the stability and reliability of the printing operation and helping to increase the product yield.

[0048] like Figure 2 , Figure 3 As shown, the base 1 has a groove 7, the stepped through hole 2 is disposed at the bottom of the groove 7, and the limiting plate 5 is detachably embedded in the groove 7. When the limiting plate 5 is worn, damaged, or needs to be replaced to adapt to different specifications of ceramic heating plates, it can be removed from the groove 7 for replacement, repair, or adjustment, which greatly improves the maintainability of the device.

[0049] In addition, the groove 7 provides a precise embedding position for the limiting plate 5, which helps to further ensure the concentricity of the limiting through hole 6 and the stepped through hole 2 on the limiting plate 5, thereby improving the positioning accuracy of the ceramic heating plate support cylinder 15, making the printing operation more precise and improving product quality.

[0050] Of course, the above description is not limiting. In some alternative embodiments, the groove 7 on the base 1 may be omitted, and the limiting plate 5 may cover the upper surface of the base 1.

[0051] like Figure 2 , Figure 4As shown, the limiting plate 5 is made of Teflon. This design allows the polymer material to exhibit good wear resistance, self-lubrication, and a certain degree of flexibility. As a limiting plate 5, its wear resistance ensures that the limiting through-hole 6 will not wear rapidly due to frequent friction with the annular boss 16 of the support cylinder 15 during long-term use, maintaining good limiting accuracy. Self-lubrication makes the insertion and removal of the support cylinder 15 into and out of the limiting through-hole 6 smoother, reducing jamming. Flexibility provides a buffering effect when the support cylinder 15 is inserted, further protecting it, and also accommodates minor dimensional deviations in the support cylinder 15, improving positioning reliability.

[0052] Of course, the above description is not limiting. In some alternative embodiments, the limiting plate 5 can be made of materials with good wear resistance, self-lubrication and flexibility, other than polymer materials, such as graphene.

[0053] like Figure 2 , Figure 3 As shown, the base 1 includes a bottom plate 8 and an intermediate plate 9 stacked together. The second hole 4 is disposed on the bottom plate 8, and the first hole 3 is disposed on the intermediate plate 9. This arrangement places the first hole 3 and the second hole 4 of the stepped through hole 2 on different plates, namely the bottom plate 8 and the intermediate plate 9. Compared to machining a complete stepped through hole 2 on a single, integral base 1, this method reduces the machining difficulty.

[0054] Furthermore, since the working conditions and stress conditions of the first hole 3 and the second hole 4 may differ, this arrangement allows for the selection of different materials according to their respective needs. For example, the second hole 4 may require a material with higher hardness to ensure wear resistance during long-term use, while the first hole 3 has requirements for certain other material properties. By selecting materials separately, functional requirements can be met while controlling costs to a certain extent, thus optimizing material utilization.

[0055] Of course, the above description is not limiting. In some alternative embodiments, the base plate 8 and the intermediate plate 9 of the base 1 are combined into one plate and a stepped through hole 2 is provided.

[0056] like Figure 2 , Figure 3As shown, the base plate 8 is made of metal, specifically stainless steel or aluminum. The intermediate plate 9 is made of bakelite or acrylic, such as paper-based bakelite or transparent acrylic. An annular pad 10 is provided on the inner wall of the first hole 3, and the annular pad 10 abuts against the base plate 8. This arrangement provides a sturdy and stable support foundation through the metal base plate 8, ensuring the structural strength and stability of the entire device. The annular pad 10 of the intermediate plate 9 is positioned between the bottom surface of the annular boss 16 of the support cylinder 15 and the metal base plate 8. The annular pad 10, made of bakelite or acrylic, is relatively softer than metal. When the support cylinder 15 is inserted, it effectively prevents the harder metal base plate 8 from directly contacting the support cylinder 15, preventing scratches, wear, or other damage to the bottom surface of the annular boss 16 of the support cylinder 15 during insertion or use, thus extending the service life of the support cylinder 15.

[0057] Of course, the above description is not limiting. In some alternative embodiments, the base plate 8 may be made of ceramic material, such as alumina ceramic, the intermediate plate 9 may be made of nylon board or bakelite board, and the annular pad 10 may be removed.

[0058] like Figure 1-3 As shown, the base 1 also includes a top plate 11, which is disposed on the side of the intermediate plate 9 opposite to the bottom plate 8, and the groove 7 is formed on the top plate 11. This arrangement allows for the selection of different limiting plates 5 to be placed in the groove 7 according to the size of the support cylinder 15.

[0059] Of course, the above description is not limiting. In some alternative embodiments, the top plate 11 and the limiting plate 5 are combined into one plate.

[0060] like Figure 1 , Figure 2 As shown, it also includes a support frame 12, on which the base 1 is mounted, and the bottom of the support frame 12 has legs 13. This arrangement raises the base 1 via the support frame 12, creating a spatial gap between the entire ceramic heating plate printing auxiliary positioning device and the working surface. The legs 13 lift the support frame 12 off the ground, facilitating handling using forklifts, pallet trucks, or other equipment, thus reducing the difficulty of transport.

[0061] Of course, the above description is not limiting. In some alternative embodiments, the support frame 12 can be replaced with a tripod, and the legs 13 can be replaced with casters.

[0062] like Figure 1 , Figure 2As shown, a plurality of positioning structures 14 are provided on the base 1 around the limiting plate 5, and the positioning structures 14 are used to connect with the printing tool. With this arrangement, by setting the positioning structures 14 on the base 1 around the limiting plate 5 and connecting them with the printing tool, the relative position of the printing tool and the ceramic heating plate support cylinder 15 can be accurately fixed.

[0063] Of course, the above description is not limiting. In some alternative embodiments, the positioning structure 14 may be replaced with an anti-slip texture.

[0064] like Figure 1 , Figure 2 As shown, the positioning structure 14 includes a positioning post 141. The positioning post 141, as the positioning structure 14, provides a clear guide for the printing tool. When the printing tool is installed, the positioning post 141 guides it into accurate position, ensuring the precise relative position between the printing tool and the support cylinder 15. Specifically, the printing tool can be provided with positioning holes that mate with the positioning post 141. Inserting the positioning post 141 into the positioning hole allows the printing tool to be positioned quickly and accurately in both horizontal and vertical directions, ensuring the accuracy of the printing ink position and thus improving the printing ink quality.

[0065] Of course, the above description is not limiting. In some alternative embodiments, the positioning post 141 may be replaced with a positioning hole.

[0066] like Figure 1 , Figure 2 As shown, the positioning structure 14 also includes an adjusting shim 142, which is fitted onto the positioning post 141. With this configuration, the adjusting shim 142, fitted onto the positioning post 141, allows for flexible adjustment of the distance between the printing tool and the base 1 by increasing or decreasing the number of shims or changing the thickness of a single shim. This ensures that the working head of the printing tool maintains a suitable printing distance from the end face of the annular boss 16 of the ceramic heating plate support cylinder 15. During use, when printing on support cylinders 15 of different models, the adjusting shim 142 ensures that the working head of the printing tool and the surface of the support cylinder 15 to be printed are at the optimal printing height, guaranteeing the uniformity and accuracy of the printing.

[0067] Of course, the above description is not limiting, and in some alternative embodiments, the adjusting shim 142 may be removed.

[0068] How to use:

[0069] Insert the support cylinder 15 of the ceramic heating plate into the stepped through hole 2 of the base 1, so that the annular boss 16 is blocked by the stepped surface, and then further position the support cylinder 15 through the limiting through hole 6 of the limiting plate 5.

[0070] The printing tool is connected to the base 1 via the positioning structure 14 (such as the positioning post 141 engaging with the positioning hole). The distance between the printing tool and the base 1 is adjusted as needed by adjusting the shim 142 so that the working head of the printing tool and the end face of the annular boss 16 of the support cylinder 15 are at a suitable printing height.

[0071] Start the printing tool and apply adhesive to the end face of the annular boss 16 of the support cylinder 15 to ensure that the adhesive is applied accurately and evenly.

[0072] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the present invention.

Claims

1. A ceramic heating plate printing auxiliary positioning device, characterized in that, include: The base (1) has a bearing surface, and the base (1) has a stepped through hole (2) from the bearing surface. The stepped through hole (2) includes a first hole (3) and a second hole (4) arranged thereon. The diameter of the second hole (4) is smaller than the diameter of the first hole (3). A limiting plate (5) is connected to the base (1). The limiting plate (5) has a limiting through hole (6) that is concentrically arranged with the step through hole (2). The diameter of the limiting through hole (6) is smaller than the diameter of the first hole (3).

2. The ceramic heating plate printing auxiliary positioning device according to claim 1, characterized in that, The base (1) has a groove (7), the stepped through hole (2) is disposed at the bottom of the groove (7), and the limiting plate (5) is detachably embedded in the groove (7).

3. The ceramic heating plate printing auxiliary positioning device according to claim 2, characterized in that, The limiting plate (5) is made of Teflon material.

4. The ceramic heating plate printing auxiliary positioning device according to claim 2, characterized in that, The base (1) includes a bottom plate (8) and an intermediate plate (9) stacked together, the second hole (4) is disposed on the bottom plate (8), and the first hole (3) is disposed on the intermediate plate (9).

5. The ceramic heating plate printing auxiliary positioning device according to claim 4, characterized in that, The base plate (8) is made of metal plate, and an annular pad (10) is provided on the inner wall of the first hole (3), and the annular pad (10) abuts against the base plate (8).

6. The ceramic heating plate printing auxiliary positioning device according to claim 5, characterized in that, The base (1) also includes a top plate (11), which is disposed on the side of the intermediate plate (9) away from the bottom plate (8), and the groove (7) is formed on the top plate (11).

7. The ceramic heating plate printing auxiliary positioning device according to claim 1, characterized in that, It also includes a support frame (12), the base (1) is mounted on the support frame (12), and the bottom of the support frame (12) is provided with legs (13).

8. The ceramic heating plate printing auxiliary positioning device according to any one of claims 1-7, characterized in that, The base (1) is provided with a plurality of positioning structures (14) around the limiting plate (5), and the positioning structures (14) are used to connect with the printing tool.

9. The ceramic heating plate printing auxiliary positioning device according to claim 8, characterized in that, The positioning structure (14) includes: a positioning post (141).

10. The ceramic heating plate printing auxiliary positioning device according to claim 9, characterized in that, The positioning structure (14) further includes an adjusting shim (142), which is sleeved on the positioning post (141).

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