Purging device and solar cell production system

Abstract

The application relates to a blowing device and a solar cell production system. The blowing device comprises a supporting base, a conveying mechanism, an air inlet structure and a recovery structure. The supporting base is provided with a containing cavity; the conveying mechanism is connected to the supporting mechanism and is used for conveying a carrier into the containing cavity along a first direction; the air inlet structure is connected to the supporting base and is provided with an air inlet cavity, an air inlet and an air outlet which are in communication with the air inlet cavity; the air inlet is in communication with an air source; the air outlet is in communication with the containing cavity; the air outlet is located above the conveying mechanism along a second direction; the second direction is the height direction of the supporting base itself; the second direction intersects the first direction; the recovery structure is connected to the supporting base and is provided with a recovery opening which is in communication with the containing cavity. The air source supplies air to the air outlet through the air inlet structure, dust or debris and other impurities on the carrier can be blown away, and the impurities can be collected by the recovery structure, thereby reducing the influence of the impurities on the deposition process of the battery piece.

Description

Technical Field

[0001] This application relates to the field of purging equipment technology, and in particular to a purging device and a solar cell production system. Background Technology

[0002] The manufacturing process of solar cells requires the use of carrier plates to support the solar cells as they enter the deposition equipment for coating. However, carrier plates are prone to adhering to dust, debris, and other impurities, leading to problems such as scratches, chipping, and coating contamination on the solar cells placed on them.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0004] Therefore, it is necessary to provide a purging device and a solar cell production system to address the problem that dust and debris easily adhere to the carrier plate, causing scratches, chipping, and coating contamination of the solar cells placed on the carrier plate.

[0005] In a first aspect, a purging device includes:

[0006] Support base, wherein the support base is provided with a receiving cavity;

[0007] A conveying mechanism connected to the support base, the conveying mechanism being used to convey a carrier into the receiving cavity along a first direction;

[0008] An air intake structure is connected to the support base. The air intake structure includes an air intake chamber and an air inlet and an air outlet communicating with the air intake chamber. The air inlet is connected to an air source, and the air outlet is connected to the receiving cavity. The air outlet is located above the conveying mechanism along a second direction, which is the height direction of the support base itself, and intersects with the first direction.

[0009] A recycling structure is connected to the support base, and the recycling structure is provided with a recycling port that communicates with the receiving cavity.

[0010] In one embodiment, the support base is provided with a slot communicating with the receiving cavity along the second direction, and the air intake structure is inserted into the slot.

[0011] In one embodiment, the air intake structure includes a first part, a second part, and a third part connected together. Along the second direction, the first part is disposed at the top of the second part, and the third part is disposed at the bottom of the second part. The third part is inserted into the slot, and the second part abuts against the surface of the support base and covers the slot. The first part has a first sub-cavity and has the air inlet, the second part has a second sub-cavity, and the third part has a third sub-cavity and the air outlet. The first sub-cavity, the second sub-cavity, and the third sub-cavity communicate to form the air intake chamber.

[0012] In one embodiment, the cross-sectional area of ​​the first sub-cavity along the second direction gradually increases from the air inlet toward the second portion.

[0013] In one embodiment, the cross-sectional area of ​​the second sub-cavity along the second direction gradually decreases from the first portion toward the third portion.

[0014] In one embodiment, the first part includes a connecting flange and an expansion body, the expansion body having a first sub-cavity and the air inlet, the connecting flange being located at the top of the expansion body along the second direction and at the outer periphery of the air inlet, and the expansion body being located at the top of the second part along the second direction.

[0015] In one embodiment, the third part includes a connector and a nozzle, the connector being connected to the bottom of the second part along the second direction, the connector having the third sub-cavity, and the nozzle having the air outlet, the nozzle communicating with the connector.

[0016] In one embodiment, the nozzles include a plurality of nozzles, which are spaced apart along a third direction. Each nozzle is connected to the connector. The third direction intersects the second direction and the first direction in pairs, and the three directions are not coplanar.

[0017] In one embodiment, the conveying mechanism includes a power component and a transmission assembly driven to rotate by the power component. The power component is connected to the support base, and the output end of the power component is driven to connect to the transmission assembly. The transmission assembly is located in the receiving cavity and is rotatably connected to the support base. The transmission assembly is used to transport the vehicle along the first direction.

[0018] And / or, the recycling structure includes a recycling body and a recycling pipe, the recycling body is located below the support base along the second direction, the recycling body is provided with the recycling port, the recycling body is also provided with a recycling cavity, the recycling cavity is connected to the recycling port, and the recycling pipe is located on the side of the recycling body and is connected to the recycling cavity.

[0019] In a second aspect, a solar cell production system includes a purging device as described in the first aspect.

[0020] The aforementioned purging device can remove impurities from the carrier. The carrier is placed on a conveying mechanism, which then transports it into the receiving cavity of the support base. Connecting the air source to the air inlet of the air intake structure allows air to enter through the air inlet and exit towards the carrier, blowing away dust, debris, and other impurities. These impurities can then be collected by the recovery structure. In this way, the purging device cleans the carrier, reducing the impact of impurities on the solar cell deposition process. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the disclosed drawings without creative effort.

[0022] Figure 1 This is a three-dimensional structural diagram of a purging device provided in an embodiment of this application.

[0023] Figure 2 This is a top view of a purging device provided in an embodiment of this application.

[0024] Figure 3 for Figure 2 A cross-sectional view along the AA direction.

[0025] Figure 4 for Figure 2 A cross-sectional view along the BB direction.

[0026] Figure 5 This is a schematic diagram of a support base provided in an embodiment of this application.

[0027] Figure 6 This is a schematic diagram of a transmission component provided in an embodiment of this application.

[0028] Explanation of reference numerals in the attached drawings: 100, purging device; 1, support base; 11, receiving cavity; 12, slot; 13, support platform; 14, support leg; 2, conveying mechanism; 21, transmission assembly; 211, first transmission wheel; 212, second transmission wheel; 213, rotating shaft; 214, bearing plate; 2141, slide rail; 3, air intake structure; 31, air intake cavity; 32, air inlet; 33, air outlet; 34, first part; 341, first sub-cavity; 342, connecting flange; 343, expansion body; 35, second part; 351, second sub-cavity; 36, third part; 361, third sub-cavity; 362, connecting body; 363, nozzle; 4, recovery structure; 41, recovery port; 42, recovery body; 421, recovery cavity; 43, recovery pipe. Detailed Implementation

[0029] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0030] Solar cell manufacturing processes, such as chemical vapor deposition (CVD) or physical vapor deposition (PVD), require carrier plates to support the solar cells before they are deposited in the appropriate deposition equipment. However, carrier plates are prone to adhering to dust, debris, and other impurities, leading to scratches, chipping, and coating contamination on the solar cells placed on them.

[0031] Based on the above issues, please refer to Figure 1 In a first aspect, embodiments of this application provide a purging device 100. The purging device 100 includes a support base 1, a conveying mechanism 2, an air intake structure 3, and a recovery structure 4. The support base 1 is provided with a receiving cavity 11, and the conveying mechanism 2 is connected to the support mechanism. The conveying mechanism 2 is used to move along a first direction (e.g., ...). Figure 1 The carrier is conveyed into the receiving cavity 11 in the Y direction (as shown). The air intake structure 3 is connected to the support base 1; please refer to [reference needed]. Figure 3 and Figure 4 The air intake structure 3 is provided with an air intake chamber 31 and an air inlet 32 ​​and an air outlet 33 connected to the air intake chamber 31. The air inlet 32 ​​is connected to an air source, and the air outlet 33 is connected to the receiving cavity 11. The air outlet 33 is located along the second direction of the conveying mechanism 2 (e.g., Figure 3 and Figure 4 Above the Z-direction (as shown), the second direction is the height direction of the supporting base 1 itself, and the second direction intersects with the first direction; please refer to Figure 3The recycling structure 4 is connected to the support base 1 and has a recycling port 41 that communicates with the receiving cavity 11. The carrier is placed on the conveying mechanism 2, which then conveys the contents into the receiving cavity 11 of the support base 1. An air source is connected to the air inlet 32 ​​of the air inlet structure 3, allowing air to enter through the air inlet 33 and blow air towards the carrier. This disperses dust, debris, and other impurities on the carrier, which are then collected by the recycling structure 4. In this way, the purging device 100 cleans the carrier, reducing the impact of impurities on the cell deposition process.

[0032] Please see Figure 5 In an optional embodiment, the support base 1 includes a support platform 13 and support legs 14, with the support legs 14 located at the four corners of the support platform 13. The support platform 13 has a receiving cavity 11, and the conveying mechanism 2 is connected to the support platform 13. The air intake structure 3 and the recovery structure 4 are both connected to the support platform 13.

[0033] Please see Figure 5 In an optional embodiment, the support platform 13 is along a first direction (e.g., Figure 5 The container 2 has an inlet and an outlet on both sides of the Y direction (as shown) that are connected to the receiving cavity 11. The conveying mechanism 2 conveys the carrier into the receiving cavity 11 from the inlet to the outlet.

[0034] Please see Figure 6 In some embodiments, the conveying mechanism 2 includes a power component and a transmission assembly 21 driven to rotate by the power component. The power component is connected to the support base 1, and the output end of the power component is driven to connect to the transmission assembly 21. The transmission assembly 21 is rotatably connected to the support base 1, and the transmission assembly 21 is used to move along a first direction (e.g., Figure 6 (Y direction shown) Transport vehicle. In optional embodiments, the power unit may be a rotary electric motor, a rotary hydraulic motor, or a rotary pneumatic motor, etc. The transmission assembly may be a synchronous belt and synchronous pulley transmission assembly, a gear and chain transmission assembly, or a screw and slide rail transmission assembly, etc.

[0035] Please see Figure 6In an optional embodiment, the transmission assembly 21 includes a first transmission wheel 211, a second transmission wheel 212, a rotating shaft 213, and a support plate 214. The first transmission wheel 211 is located outside the receiving cavity 11, while the second transmission wheel 212 and the support plate 214 are both located inside the receiving cavity 11. The rotating shaft 213 is rotatably connected to the side wall of the support base 1. One end of the rotating shaft 213 along its length is located outside the receiving cavity 11 and connected to the first transmission wheel 211, while the other end is located inside the receiving cavity 11 and connected to the second transmission wheel 212. Slide rails 2141 are recessed on both sides of the support plate 214, and the second transmission wheel 212 is slidably engaged with the slide rails 2141. A power component drives the first transmission wheel 211 to rotate, and the first transmission wheel 211 drives the second transmission wheel 212 to rotate via the rotating shaft 213, thereby causing the support plate 214 to move along a first direction.

[0036] Please see Figure 6 In an optional embodiment, the first drive wheel 211, the second drive wheel 212, and the shaft 213 include components along a first direction (e.g., Figure 6 Multiple sets of transmission wheels (shown in the Y direction) are spaced apart, with each set consisting of a first transmission wheel 211, a second transmission wheel 212, and a rotating shaft 213. All second transmission wheels 212 are slidably engaged with the slide rails 2141 of the support plate 214.

[0037] In an optional embodiment, the power unit may include multiple components, each of which drives one of the first transmission wheels 211 to rotate. Alternatively, the power unit may include one component, and the transmission assembly 21 may also include a transmission belt that is wound around all of the first transmission wheels 211. By driving one of the first transmission wheels 211, the power unit can drive all of the first transmission wheels 211 to rotate via the transmission belt.

[0038] Please see Figure 3 In an optional embodiment, the recycling structure 4 may be disposed on the support platform 13 of the support base 1 along the second direction (e.g., Figure 3 The bottom of the recycling structure 4 (shown in the Z direction) or on the side of the support platform 13. This embodiment does not limit the location of the recycling structure 4.

[0039] Please see Figure 3 In some embodiments, the recycling structure 4 includes a recycling body 42 and a recycling pipe 43, the recycling body 42 being located on the support base 1 along a second direction (e.g., Figure 3Below the Z-direction shown, the recycling body 42 is provided with a recycling port 41 and a recycling chamber 421, which is connected to the recycling port 41. A recycling pipe 43 is located on the side of the recycling body 42 and is connected to the recycling chamber 421. The recycling port 41 and the recycling chamber 421 of the recycling body 42 can collect impurities that fall from the conveying mechanism 2 or need to be recycled, preventing impurities from scattering. The recycling pipe 43 can guide the impurities in the recycling chamber 421 to a designated location for unified processing, achieving efficient processing of impurities.

[0040] Please see Figure 3 In an optional embodiment, the recovery chamber 421 of the recovery body 42 is funnel-shaped, and the recovery chamber 421 is along the second direction (e.g., Figure 3 The cross-sectional area along the Z direction (as shown) gradually decreases from the recovery port 41 to the direction away from the support platform 13. One end of the recovery pipe 43 along its own length direction is connected to the recovery body 42 along the second direction (as shown). Figure 3 The bottom of the chamber is connected in the Z direction (as shown). This allows impurities to enter the recovery body 42 along the wall of the recovery chamber 421, facilitating collection of impurities by the recovery body 42 and the recovery pipe 43.

[0041] The air intake structure 3 in the embodiments of this application will be described in detail below:

[0042] Please see Figure 4 In an optional implementation, the intake structure 3 may include an air intake along a first direction (e.g., Figure 4 Multiple air intake structures 3 (as shown in the Y direction) are spaced apart, for example, two, three, four, etc. Setting multiple air intake structures 3 can increase the air intake volume, thereby improving purging efficiency.

[0043] Please see Figure 5 In some embodiments, the support base 1 is along the second direction (e.g., Figure 5 A slot 12, which communicates with the receiving cavity 11, is provided through the Z direction shown, and the air intake structure 3 is inserted into the slot 12. This structure allows the air intake structure 3 to be easily installed on the support base 1, achieving a stable installation of the air intake structure 3 and preventing the air intake structure 3 from loosening or shifting due to vibration or other reasons during the operation of the purging device 100.

[0044] Please see Figure 5 In an optional implementation, the slot 12 may include a first direction (e.g., Figure 5 Multiple slots (as shown in the Y direction) are spaced apart, for example, two, three, four, etc. The number of slots 12 corresponds to the number of intake structures 3.

[0045] Please see Figure 3In some embodiments, the intake structure 3 includes a first portion 34, a second portion 35, and a third portion 36 connected together, along a second direction (e.g., Figure 3 In the Z direction (as shown), the first part 34 is located at the top of the second part 35, and the third part 36 is located at the bottom of the second part 35. The third part 36 is inserted into the slot 12. The second part 35 abuts against the surface of the support base 1 and covers the slot 12. The first part 34 has a first sub-cavity 341 and an air inlet 32. The second part 35 has a second sub-cavity 351. The third part 36 has a third sub-cavity 361 and an air outlet 33. The first sub-cavity 341, the second sub-cavity 351, and the third sub-cavity 361 are connected to form an air intake chamber 31. The first sub-cavity 341 of the first part 34, the second sub-cavity 351 of the second part 35, and the third sub-cavity 361 of the third part 36 are interconnected to form the air intake chamber 31. This design can guide the gas to flow along a specific path, making the air intake smoother and more stable. The gas enters from the air inlet 32 ​​of the first part 34, is transmitted through the three cavities in sequence, and finally flows out from the air outlet 33 of the third part 36. The third part 36 is inserted into the slot 12, and the second part 35 abuts against the surface of the support base 1 and covers the slot 12. This structure achieves a tight connection between the air intake structure 3 and the support base 1. On the one hand, the insertion of the third part 36 into the slot 12 provides stable support, preventing the air intake structure 3 from shifting due to vibration or other reasons during equipment operation; on the other hand, the covering of the slot 12 by the second part 35 provides a good seal, effectively preventing gas leakage from the connection between the slot 12 and the air intake structure 3, ensuring the sealing of the air intake chamber 31, and improving air intake efficiency and equipment performance. Along the second direction, the first part 34, the second part 35, and the third part 36 are arranged sequentially, which can make full use of the space around the support base 1. The first part 34 is located at the top, which allows for easy installation of the air inlet 32 ​​to connect to an external air source. The second part 35 is located in the middle and abuts against the surface of the support base 1, which serves to seal the air without taking up too much space. The third part 36 is located at the bottom and is inserted into the slot 12 into the receiving cavity 11 of the support base. This ensures a stable installation and makes more reasonable use of the space in the entire air intake structure 3, making the overall structure of the equipment more compact.

[0046] Please see Figure 4 In some embodiments, the first sub-cavity 341 is along the second direction (e.g., Figure 4The cross-sectional area in the Z direction (as shown) gradually increases from the air inlet 32 ​​towards the second part 35. This gradual increase in the cross-sectional area of ​​the first sub-cavity 341 provides more space for gas diffusion and uniform distribution within it. As the gas flows towards the second part 35, it enters the second sub-cavity 351 more evenly, resulting in a more uniform airflow distribution throughout the entire air inlet cavity 31 and ensuring a stable and uniform gas supply to all parts.

[0047] Please see Figure 4 In some embodiments, the first part 34 includes a connecting flange 342 and an expansion body 343. The expansion body 343 is provided with a first sub-cavity 341 and an air inlet 32. The connecting flange 342 is located on the expansion body 343 along a second direction (e.g., Figure 4 The expansion body 343 is located at the top of the second part 35 along the second direction (as shown in the Y direction) and on the outer periphery of the air inlet 32. Figure 4 The top of the intake structure 3 (shown in the Y direction). The connection flange 342 facilitates the connection of the intake structure 3 to an external air source or other related components. Using bolts, nuts, and other fasteners, the intake structure 3 is easily connected to the air source equipment, ensuring the stability and sealing of the connection and preventing gas leakage. Simultaneously, the connection flange 342 is located on the outer periphery of the intake port 32; this layout allows for a uniform distribution of connection force, preventing uneven local stress from affecting the normal operation of the intake structure 3.

[0048] Please see Figure 4 In an optional embodiment, the expander 343 is provided with a first sub-cavity 341 and an air inlet 32, and the first sub-cavity 341 is along a second direction (e.g., Figure 4 The cross-sectional area in the Y direction (as shown) gradually increases from the air inlet 32 ​​towards the second part 35. This expansion structure allows the incoming gas to be buffered and diffused within the expansion body 343, slowing down the airflow speed, reducing the gas pressure, and allowing the gas to enter the first sub-cavity 341 more evenly, thereby improving the intake efficiency and stability of the entire intake structure 3.

[0049] Please see Figure 3 In an optional implementation, along a third direction (e.g.) Figure 3 In the X direction (as shown), the first part 34 may include multiple parts spaced apart, such as two, three, four, etc. Setting multiple first parts 34 can increase the air intake and improve the purging efficiency.

[0050] Please see Figure 1 and Figure 3 In an optional embodiment, the second portion 35 is elongated and extends along a third direction (e.g., Figure 1 and Figure 3Extending in the X direction (as shown), multiple first parts 34 can be spaced out above the second part 35, and multiple third parts 36 can be spaced out below the second part 35.

[0051] Please see Figure 4 In some embodiments, the second sub-cavity 351 is along a second direction (e.g., Figure 4 The cross-sectional area in the Z direction (as shown) gradually decreases from the first part 34 to the third part 36. When gas enters the second sub-cavity 351 from the first sub-cavity 341 with a larger cross-sectional area, and the cross-sectional area of ​​the second sub-cavity 351 gradually decreases, the gas velocity gradually increases. This allows the gas to achieve a higher velocity when entering the third sub-cavity 361 and finally exiting from the outlet 33, thereby enhancing the purging effect of the purging device 100 and more effectively removing dust, impurities, etc. from the equipment. The design of gradually decreasing cross-sectional area guides the gas to flow more concentratedly towards the third part 36, enhancing the gas directionality. This allows the gas to reach the parts that need purging or action more accurately, reducing gas diffusion and waste, improving gas utilization efficiency, and thus enhancing the overall performance of the equipment.

[0052] Please see Figure 4 In some embodiments, the third part 36 includes a connector 362 and a nozzle 363, the connector 362 being connected to the second part 35 along a second direction (e.g., Figure 4 At the bottom of the connector 362 (shown in the Z direction), a third sub-cavity 361 is provided, and the nozzle 363 has an outlet 33, which is connected to the connector 362. As an intermediate component, the connector 362 increases the connection area between the nozzle 363 and the second part 35, facilitating the connection between the second part 35 and the nozzle 363. The third sub-cavity 361 in the connector 362 provides a stable transmission channel for the gas. It can smoothly deliver the gas, accelerated and pressurized by the second sub-cavity 351, to the nozzle 363, ensuring the stability and continuity of the gas during transmission and reducing the possibility of gas fluctuations and leakage.

[0053] Please see Figure 3 In some embodiments, the nozzle 363 includes a plurality of nozzles 363 along a third direction (e.g., Figure 3 The nozzles are spaced apart in the X direction (as shown), and each nozzle 363 is connected to the connector 362. In the third direction (e.g., ... Figure 3 The X direction shown) and the second direction (as shown) Figure 3 (as shown in the Z direction) and the first direction (e.g.) Figure 3 The three nozzles (as shown in the Z direction) intersect each other pairwise, and are not coplanar. Multiple nozzles 363 are along a third direction (e.g., Figure 3The spacing (as shown in the X direction) allows for wider coverage, enabling the purging device 100 to purge components or spaces in different locations. Compared to a single nozzle 363, this significantly increases the purging coverage, ensuring that dust and impurities in every corner of the equipment are effectively removed. The simultaneous operation of multiple nozzles 363 increases the number of gas injection points, resulting in a more even distribution of gas across the purging area. The interaction of airflows from different nozzles 363 creates a more complex airflow field, helping to break through airflow dead zones and more thoroughly remove stubborn dust and impurities, thus enhancing the overall purging effect. Simultaneous purging by multiple nozzles 363 allows for more purging work to be completed in the same amount of time, shortening the purging operation time.

[0054] Secondly, embodiments of this application also provide a solar cell production system, including the purging device 100 as described in the first aspect. This solar cell production system further includes physical vapor deposition equipment, such as vacuum evaporation coating equipment or sputtering coating equipment. The purging device 100 is located upstream of the physical vapor deposition equipment. After the purging device 100 cleans impurities on the carrier, the carrier carries the solar cells into the physical vapor deposition equipment for coating. The above-described solar cell production system also possesses all the technical effects of the purging device 100, which will not be elaborated further here.

[0055] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0056] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0058] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0059] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0060] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A purging device (100), characterized in that The application relates to a support base (1) provided with a containing cavity (11); a conveying mechanism (2) connected to the support base (1) and used for conveying a carrier into the containing cavity (11) along a first direction; an air inlet structure (3) connected to the support base (1) and provided with an air inlet cavity (31) chamber, an air inlet port (32) and an air outlet port (33) in communication with the air inlet cavity (31) chamber, the air inlet port (32) being in communication with an air source, the air outlet port (33) being in communication with the containing cavity (11), the air outlet port (33) being located above the conveying mechanism (2) along a second direction, the second direction being a height direction of the support base (1) itself, and the second direction intersecting the first direction; and a recovery structure (4) connected to the support base (1) and provided with a recovery port (41) in communication with the containing cavity (11). The support base (1) is provided with a clamping groove (12) in communication with the containing cavity (11) along the second direction, and the air inlet structure (3) is inserted into the clamping groove (12). The air inlet structure (3) comprises a first part (34), a second part (35) and a third part (36) connected to each other, along the second direction, the first part (34) being arranged on the top of the second part (35), the third part (36) being arranged on the bottom of the second part (35), the third part (36) being inserted into the clamping groove (12), the second part (35) abutting against the surface of the support base (1) and covering the clamping groove (12), the first part (34) being provided with a first sub-cavity (341) and having the air inlet port (32), the second part (35) being provided with a second sub-cavity (351), the third part (36) being provided with a third sub-cavity (361) and the air outlet port (33), the first sub-cavity (341), the second sub-cavity (351) and the third sub-cavity (361) being in communication to form the air inlet cavity (31) chamber. The cross-sectional area of the first sub-cavity (341) along the second direction gradually increases from the air inlet port (32) to the second part (35). The cross-sectional area of the second sub-cavity (351) along the second direction gradually decreases from the first part (34) to the third part (36). The first part (34) comprises a connecting flange (342) and an expansion body (343), the expansion body (343) being provided with the first sub-cavity (341) and the air inlet port (32), the connecting flange (342) being arranged on the top of the expansion body (343) along the second direction and located on the outer periphery of the air inlet port (32), and the expansion body (343) being arranged on the top of the second part (35) along the second direction.

2. Purging device (100) according to claim 1, characterized in that ​ 3. Purging device (100) according to claim 2, characterized in that ​ 4. The purging device (100) according to claim 3, characterized in that ​ 5. Purging device (100) according to claim 3, characterized in that ​ 6. Purging device (100) according to claim 3, characterized in that ​ 7. Purging device (100) according to claim 3, characterized in that The third part (36) comprises a connecting body (362) and a nozzle (363), the connecting body (362) is connected to the bottom of the second part (35) along the second direction, the connecting body (362) is provided with the third sub-cavity (361), the nozzle (363) is provided with the gas outlet (33), and the nozzle (363) is communicated with the connecting body (362).

8. Purging device (100) according to claim 7, characterized in that The nozzle (363) comprises a plurality of nozzles (363) which are arranged at intervals along a third direction, each nozzle (363) is communicated with the connecting body (362), the third direction intersects with the second direction and the first direction two by two, and the three directions are not coplanar.

9. Purging device (100) according to any one of claims 1 to 8, characterized in that The conveying mechanism (2) comprises a power component and a transmission assembly (21) driven to rotate by the power component, the power component is connected to the support base (1), an output end of the power component is drivingly connected to the transmission assembly (21), the transmission assembly (21) is rotationally connected to the support base (1), and the transmission assembly (21) is used for transporting the carrier along the first direction; And / or, the recovery structure (4) comprises a recovery main body (42) and a recovery pipeline (43), the recovery main body (42) is located below the support base (1) along the second direction, the recovery main body (42) is provided with the recovery port (41), the recovery main body (42) is further provided with a recovery cavity (421), the recovery cavity (421) is communicated with the recovery port (41), and the recovery pipeline (43) is arranged on the side of the recovery main body (42) and is communicated with the recovery cavity (421).

10. A solar cell production system characterized by comprising: a substrate cleaning device; a substrate drying device; a substrate coating device; a substrate heating device; and a substrate cooling device. The blowing device (100) comprises the blowing device (100) according to any one of claims 1 to 9.

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