A clasp reshaping device

Abstract

The utility model provides a kind of snap ring shaping device, it is related to snap ring shaping technical field, including support assembly, including support seat and the connecting frame being located on support seat;Clamping assembly, including motor, the rotating seat being connected with the output shaft of motor, and the guide block being symmetrically arranged at the both ends of rotating seat, rotating seat is rotatably arranged on support seat, the opposite side of two guide blocks is respectively connected with clamping block by spring, and the clamping space for clamping snap ring is formed between the two oppositely arranged clamping blocks;Shaping component, including hydraulic push rod and the shaping piece being connected with the moving end of hydraulic push rod, the fixed end of hydraulic push rod is connected with connecting frame, and the end peripheral surface of shaping piece, which is away from hydraulic push rod, is adapted to the inner surface of snap ring.The clamping block in the utility model can adapt to the deformation of snap ring and make way, effectively avoid motion interference with snap ring, and the whole device can shape snap ring of different sizes, with high applicability.

Description

Technical Field

[0001] This utility model relates to the field of clasp shaping technology, and in particular to a clasp shaping device. Background Technology

[0002] In semiconductor vapor deposition processes, especially in the process of distributed Bragg reflector (DBR) coating, the pot retainer is a key component used to fix the wafer in conjunction with the pot. The inner surface accuracy of the retainer is one of the core elements to ensure process stability and product quality. Therefore, a shaping device is usually required to shape the inner surface of the retainer.

[0003] Currently, the commonly used circlip shaping devices in the industry mainly include rigid clamping rings and clamping rods that are adapted to the curvature of the inner surface of the circlip. During operation, two oppositely arranged rigid clamping rings apply fixed clamping from both radial sides of the circlip to securely position the circlip. Then, the clamping rods are pressed against the inner surface of the circlip by mechanical pressure to correct and shape the inner surface of the circlip.

[0004] However, the above solution has the following drawbacks in practical applications: First, the rigid clamping ring lacks a clearance structure during the forming process of the clamping rod, causing motion interference between the clamping ring and the clamping ring during deformation. This may not only damage the surface of the clamping ring but also cause irregular deformation of the inner surface after forming, seriously affecting the forming accuracy. Second, the opening size of the clamping ring and the profile of the clamping rod are both customized designs of a single specification, which can only be adapted to clamping rings of a specific diameter and cannot be universal. Faced with the multi-specification clamping ring forming needs in semiconductor production lines, it is necessary to frequently replace the clamping ring and clamping rod with the corresponding size, which reduces the efficiency of operation. Utility Model Content

[0005] Based on this, the purpose of this utility model is to provide a snap ring shaping device, which aims to solve the technical problems in existing snap ring shaping devices, where the rigid clamping ring lacks a clearance structure during the shaping process of the snap ring and the clamping rod, causing motion interference between the snap ring and the clamping ring during deformation and affecting the shaping accuracy; at the same time, the opening size of the clamping ring and the profile of the snap ring are both designed with a single specification, which can only be used for snap rings of a specific diameter and cannot be universal.

[0006] The purpose of this utility model is to provide a clasp shaping device, comprising:

[0007] The support assembly includes a support base and a connecting frame disposed on the support base;

[0008] The clamping assembly includes a motor, a rotating seat connected to the output shaft of the motor, and guide blocks symmetrically arranged at both ends of the rotating seat. The rotating seat is rotatably mounted on the support base. Clamping blocks are connected to opposite sides of the two guide blocks by springs. The two clamping blocks arranged opposite each other form a clamping space for clamping a retaining ring.

[0009] The shaping assembly includes a hydraulic push rod and a shaping component connected to the movable end of the hydraulic push rod. The fixed end of the hydraulic push rod is connected to the connecting frame. The circumferential surface of the shaping component facing away from the hydraulic push rod is adapted to the inner surface of the retaining ring.

[0010] In addition, the clasp shaping device according to the present invention may also have the following additional technical features:

[0011] Furthermore, the two guide blocks each have a stepped structure on one side, and the stepped structure includes at least three stepped layers. The multiple stepped layers are arranged in a gradually expanding manner from the end of the guide block connected to the rotating seat in a direction away from the rotating seat.

[0012] Each of the stepped layers has a clamping block on its horizontal surface and a clearance groove adapted to the clamping block on its vertical surface. A spring is provided in the clearance groove, one end of which is fixedly connected to the groove wall and the other end of which is connected to the surface of the clamping block.

[0013] Furthermore, the clamping block has a clamping surface on one side away from the vertical plane of the stepped layer. The clamping surface is an arc surface and is adapted to the circumferential outer surface of the retaining ring.

[0014] Furthermore, a first guide surface is provided on the side of the clamping block facing away from the vertical plane of the stepped layer. The first guide surface is inclined from the top of the clamping surface toward the vertical plane of the stepped layer.

[0015] Furthermore, the bottom end of the clamping block is provided with a slider, and the horizontal surface of the stepped layer is provided with a sliding groove adapted to the slider, the sliding groove being connected to the clearance groove.

[0016] Furthermore, the shaping component includes a plurality of stacked shaping blocks, the diameter of which decreases sequentially from the end of the shaping component connected to the hydraulic push rod toward the direction away from the hydraulic push rod;

[0017] Each of the shaping blocks is provided with a first abutting surface and a second abutting surface in the circumferential direction. The first abutting surface is an arc-shaped structure and is used to abut against the annular inner wall of the retaining ring. The second abutting surface is a planar structure and is used to abut against the surface of the convex plate on the inner wall of the retaining ring.

[0018] Furthermore, each of the shaping blocks is also provided with a second guide surface, which is inclined from the end of the shaping block away from the hydraulic push rod toward the central axis of the shaping component.

[0019] Furthermore, each of the shaping blocks is provided with multiple limiting grooves at intervals in the circumferential direction. The limiting grooves are arranged along the axial direction of the shaping block, and the openings of the multiple limiting grooves on two adjacent shaping blocks are arranged in a one-to-one correspondence. The limiting grooves are adapted to the protrusions on the inner wall of the retaining ring.

[0020] Furthermore, the rotating seat includes a U-shaped mounting plate and a connecting block. The outer wall of the horizontal plate portion of the U-shaped mounting plate is fixedly connected to the output shaft of the motor. The ends of the two vertical plates of the U-shaped mounting plate are fixedly connected to the bottom end of the guide block, and the connecting block extends vertically outward from the outer walls of the two vertical plates respectively.

[0021] Furthermore, the support base is provided with a mounting through hole for mounting the U-shaped mounting plate, and the inner wall of the mounting through hole is provided with an annular groove adapted to the connecting block. The rotating seat and the support base are rotatably connected by the sliding fit between the connecting block and the annular groove.

[0022] Compared to existing technologies, the advantages of this circlip shaping device are as follows: The clamping assembly of this application is an elastic clamping structure composed of a guide block, a spring, and a clamping block. During the circlip shaping process, the clamping block can adaptively adjust to the deformation of the circlip, effectively avoiding motion interference with the circlip, preventing damage to the circlip surface, and significantly improving shaping accuracy. Furthermore, the guide block has a stepped design, with a clamping block on each stepped layer, and the shaping component is formed by combining multiple stacked shaping blocks. Through the cooperation of both, circlips of different sizes can be shaped, greatly improving the applicability of the entire device and effectively increasing work efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the clasp shaping device of this utility model;

[0024] Figure 2 This is a schematic diagram of the clamping component, the retaining ring, and the shaping component in the retaining ring shaping device of this utility model;

[0025] Figure 3 This is a partial cross-sectional schematic diagram of the guide block in the clasp shaping device of this utility model;

[0026] Figure 4 This is a schematic diagram of the shaping component and the retaining ring in the retaining ring shaping device of this utility model.

[0027] The above-mentioned figures include the following reference numerals: 11-support base; 12-connecting frame; 101-mounting through hole; 21-motor; 22-rotating seat; 221-mounting plate; 222-connecting block; 23-guide block; 231-avoiding groove; 232-sliding groove; 24-clamping block; 241-clamping surface; 242-first guide surface; 25-slider; 26-spring; 31-hydraulic push rod; 32-shaping part; 321-shaping block; 322-second guide surface; 323-limiting groove; 41-ring; 411-protrusion; 412-protrusion plate.

[0028] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0029] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0030] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0032] Please see Figures 1 to 4 The image shows a clasp shaping device according to the present invention, which includes a support component, a clamping component, and a shaping component. The clamping component is used to clamp the clasp 41, and the shaping component is used to shape and correct the inner surface of the clasp 41.

[0033] The support assembly includes a support base 11 and a connecting frame 12 disposed on the support base 11. In this embodiment, the support base 11 includes a support plate, two supporting frames disposed on the lower surface of the support plate, and a connecting plate disposed between the two supporting frames. The support plate has a mounting through hole 101 in the middle, which is used to mount the U-shaped mounting plate 221 of the rotating seat 22. The inner wall of the mounting through hole 101 has an annular groove, which is adapted to the connecting block 222 of the rotating seat 22. The rotating seat 22 and the support base 11 are rotated through the sliding fit between the connecting block 222 and the annular groove, so as to facilitate the multi-angle shaping of the retaining ring 41. More specifically, the connecting frame 12 has an inverted U-shaped structure. The two ends of the connecting frame 12 are fixedly connected to the surface of the support plate, and the U-shaped space of the connecting frame 12 is provided with a clamping assembly and a shaping assembly.

[0034] The clamping assembly includes a motor 21, a rotating seat 22 connected to the output shaft of the motor 21, and guide blocks 23 symmetrically arranged at both ends of the rotating seat 22. The rotating seat 22 is rotatably mounted on the support seat 11. The two guide blocks 23 are respectively connected to clamping blocks 24 on opposite sides by springs 26. The two clamping blocks 24 arranged opposite to each other form a clamping space for clamping the retaining ring 41.

[0035] Specifically, the rotating seat 22 includes a U-shaped mounting plate 221 and a connecting block 222. The outer wall of the horizontal plate portion of the U-shaped mounting plate 221 is fixedly connected to the output shaft of the motor 21. The ends of the two vertical plates of the U-shaped mounting plate 221 are fixedly connected to the bottom end of the guide block 23. The outer walls of the two vertical plates each have a connecting block 222 extending vertically outward. The connecting block 222 engages with the annular groove on the inner wall of the mounting through hole of the support seat 11, thereby realizing the rotational installation of the rotating seat 22. As a specific example, in this embodiment, to achieve a stable installation of the motor 21, an annular fixing plate is fitted on the circumferential surface of the motor 21 near its output shaft by an interference fit. Multiple bolts pass through the annular fixing plate and are threadedly connected to the connecting plate on the support seat 11 to firmly fix the motor 21 to the support seat 11. At this time, the output shaft of the motor 21 passes through the connecting plate and connects to the horizontal plate portion of the U-shaped mounting plate 221 to ensure that the motor 21 can stably drive the rotating seat 22 to rotate.

[0036] Furthermore, each of the two guide blocks 23 has a stepped structure on one side, and the stepped structure includes at least three stepped layers. These stepped layers are arranged in a gradually expanding manner from the end of the guide block 23 connected to the rotating seat 22 away from the rotating seat 22. Each stepped layer has a clamping block 24 on its horizontal surface, and each stepped layer has a relief groove 231 adapted to the clamping block 24 on its vertical surface. A spring 26 is installed in the relief groove 231, with one end of the spring 26 fixedly connected to the groove wall of the relief groove 231 and the other end connected to the surface of the clamping block 24. This structural design allows the clamping block 24 to elastically extend and slide within the relief groove 231 under the action of the spring 26. Compared to a traditional rigid clamping ring, during the shaping process, when the retaining ring 41 deforms, the clamping block 24 can adaptively retract under the action of the spring 26, effectively avoiding motion interference with the retaining ring 41, preventing damage to the surface of the retaining ring 41, and significantly improving shaping accuracy. Meanwhile, the design of multiple stepped layers, combined with clamping blocks 24 of different sizes, can meet the clamping requirements of various specifications of retaining rings 41, solving the limitation of traditional devices that only adapt to a single specification, and improving the versatility and production efficiency of the device.

[0037] Furthermore, a clamping surface 241 is provided on the side of the clamping block 24 facing away from the vertical surface of the stepped layer. The clamping surface 241 is arc-shaped and is adapted to the circumferential outer surface of the retaining ring 41, which can provide good fit and clamping stability when clamping the retaining ring 41.

[0038] Furthermore, a first guide surface 242 is provided on the side of the clamping block 24 facing away from the vertical plane of the stepped layer. The first guide surface 242 is inclined from the top of the clamping surface 241 toward the vertical plane of the stepped layer. The angle between the first guide surface 242 and the horizontal plane is 25°-35°. As a specific example, in this embodiment, the angle between the first guide surface 242 and the horizontal plane is 30°, which facilitates the smooth entry of the retaining ring 41 into the clamping space and improves the convenience of operation.

[0039] Furthermore, the bottom end of the clamping block 24 is provided with a slider 25, and the horizontal surface of the stepped layer is provided with a groove 232 that is adapted to the slider 25. The groove 232 is connected to the clearance groove 231. This cooperative structure of slider 25 and groove 232 can play a good guiding and limiting role in the movement of the clamping block 24, ensuring that the clamping block 24 moves stably under the action of spring 26.

[0040] The shaping assembly includes a hydraulic push rod 31 and a shaping component 32 connected to the movable end of the hydraulic push rod 31. The fixed end of the hydraulic push rod 31 is connected to the connecting frame 12. The circumferential surface of the end of the shaping component 32 facing away from the hydraulic push rod 31 is adapted to the inner surface of the retaining ring 41 to precisely shape the inner surface of the retaining ring 41.

[0041] Furthermore, the shaping component 32 is an integrally formed structure, comprising multiple stacked shaping blocks 321. The diameter of the multiple shaping blocks 321 decreases sequentially from the end of the shaping component 32 connected to the hydraulic push rod 31 away from the hydraulic push rod 31. The diameter difference between two adjacent shaping blocks 321 is 3mm-8mm. The combination of multiple shaping blocks 321 can accommodate various inner diameter specifications of retaining rings 41, effectively improving the versatility of the entire device. Each shaping block 321 has a first abutting surface and a second abutting surface in its circumferential direction. The first abutting surface has an arc structure and is used to abut against the annular inner wall of the retaining ring 41. The second abutting surface has a planar structure and is used to abut against the surface of the protruding plate 412 on the inner wall of the retaining ring 41.

[0042] Furthermore, each shaping block 321 is also provided with a second guide surface 322. The second guide surface 322 is inclined from the end of the shaping block 321 away from the hydraulic push rod 31 toward the central axis of the shaping member 32. The angle between the second guide surface 322 and the radial plane of the shaping block 321 is 40°-50°. As a specific example, in this embodiment, the angle between the second guide surface 322 and the radial plane of the shaping block 321 is 45°, so as to facilitate the smooth insertion of the shaping member 32 into the retaining ring 41 for shaping operation.

[0043] Furthermore, each shaping block 321 is provided with multiple limiting grooves 323 spaced apart in the circumferential direction. The limiting grooves 323 are arranged along the axial direction of the shaping block 321, and the openings of the multiple limiting grooves 323 on two adjacent shaping blocks 321 are correspondingly arranged. The limiting grooves 323 are adapted to the protrusions 411 on the inner wall of the retaining ring 41, which can play a good positioning and limiting role for the retaining ring 41 during the shaping process, ensuring the accuracy and stability of the shaping operation. More specifically, in this embodiment, each limiting groove 323 has chamfers on both sides of the groove opening at the end away from the hydraulic push rod 31, so as to align with the protrusions 411 on the retaining ring 41.

[0044] In practical applications, the working principle of the clasp shaping device of this utility model can be summarized as follows:

[0045] First, the retaining ring 41 is placed between two guide blocks 23. Since the opposite side of the two guide blocks 23 has a stepped structure, it can accommodate retaining rings 41 of different sizes. Therefore, when placing it, external force needs to be applied manually to press the retaining ring 41 down. The outer surface of the retaining ring 41 will squeeze the clamping surface 241 of the clamping block 24 located on different stepped layers. The corresponding clamping block 24 will retract into the relief groove 231 under the squeezing force of the retaining ring 41 to release the obstruction during the pressing of the retaining ring 41. When the retaining ring 41 is pressed down to the matching stepped layer, the lower surface of the retaining ring 41 abuts against the horizontal plane of the stepped layer, and the clamping block 24 located on the stepped layer will elastically clamp and position the outer surfaces of the retaining ring 41 on both radial sides under the action of the spring 26. This elastic positioning method can fix the position of the retaining ring 41 and avoid motion interference to the retaining ring 41 during the shaping process.

[0046] Once the retaining ring 41 is securely clamped and fixed, the motor 21 is started. The output shaft of the motor 21 will drive the rotating seat 22 to rotate, which in turn drives the retaining ring 41 located between the two guide blocks 23 to rotate synchronously, so that the multiple protrusions 411 on the retaining ring 41 are aligned one by one with the multiple limiting grooves 323 on the shaping part 32. It should be noted that the alignment of the protrusions 411 and the limiting grooves 323 can be achieved by using a position sensor or other structure. Position sensors are existing technology and can be implemented by those skilled in the art, so they will not be described in detail here.

[0047] Once the retaining ring 41 is precisely aligned, the motor 21 is turned off and the hydraulic push rod 31 is activated, causing the shaping component 32 to be pushed vertically downward. During this process, the shaping block 321 on the shaping component 32, which is adapted to the size of the retaining ring 41, will enter the interior of the retaining ring 41 and abut against the inner surface of the retaining ring 41 for shaping and correction. Specifically, the second guide surface 322 on the corresponding shaping block 321 will first abut against the retaining ring 41, and the protrusion 411 on the retaining ring 41 will correspondingly enter the limiting groove 323 on the shaping block 321. As the hydraulic push rod 31 drives the shaping component 32 to press vertically downward, the inner surface of the retaining ring 41 will deform accordingly until the annular inner wall on the retaining ring 41 will be tightly abut against the first abutting surface on the corresponding shaping block 321, and the surface of the protrusion 412 on the retaining ring 41 will be tightly abut against the second abutting surface on the corresponding shaping block 321, thereby completing the shaping operation of the retaining ring 41. After the shaping operation of the retaining ring 41 is completed, the hydraulic push rod 31 will drive the shaping part 32 to return vertically upward. At this time, the motor 21 can be restarted, so that the output shaft of the motor 21 drives the rotating seat 22 to rotate in the opposite direction. The shaped retaining ring 41 returns to the initial position so that the operator can take it out and perform the shaping operation of the next retaining ring 41.

[0048] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0049] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this utility model application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model application should be determined by the appended claims.

Claims

1. A clasp shaping device, characterized in that, include: The support assembly includes a support base and a connecting frame disposed on the support base; The clamping assembly includes a motor, a rotating seat connected to the output shaft of the motor, and guide blocks symmetrically arranged at both ends of the rotating seat. The rotating seat is rotatably mounted on the support base. Clamping blocks are connected to opposite sides of the two guide blocks by springs. The two clamping blocks arranged opposite each other form a clamping space for clamping a retaining ring. The shaping assembly includes a hydraulic push rod and a shaping component connected to the movable end of the hydraulic push rod. The fixed end of the hydraulic push rod is connected to the connecting frame. The circumferential surface of the shaping component facing away from the hydraulic push rod is adapted to the inner surface of the retaining ring.

2. The clasp shaping device according to claim 1, characterized in that, The two guide blocks each have a stepped structure on one side, and the stepped structure includes at least three stepped layers. The multiple stepped layers are arranged in a gradually expanding manner from the end of the guide block connected to the rotating seat in a direction away from the rotating seat. Each of the stepped layers has a clamping block on its horizontal surface and a clearance groove adapted to the clamping block on its vertical surface. A spring is provided in the clearance groove, one end of which is fixedly connected to the groove wall and the other end of which is connected to the surface of the clamping block.

3. The clasp shaping device according to claim 2, characterized in that, The clamping block has a clamping surface on one side away from the vertical plane of the stepped layer. The clamping surface is an arc surface and is adapted to the circumferential outer surface of the retaining ring.

4. The clasp shaping device according to claim 3, characterized in that, The clamping block is provided with a first guide surface on the side opposite to the vertical surface of the stepped layer. The first guide surface is inclined from the top of the clamping surface toward the vertical surface of the stepped layer.

5. The circlip shaping device according to claim 3, characterized in that, The bottom end of the clamping block is provided with a slider, and the horizontal surface of the stepped layer is provided with a sliding groove adapted to the slider, and the sliding groove is connected to the clearance groove.

6. The clasp shaping device according to claim 1, characterized in that, The shaping component includes multiple stacked shaping blocks, the diameter of which decreases sequentially from the end of the shaping component connected to the hydraulic push rod toward the direction away from the hydraulic push rod; Each of the shaping blocks is provided with a first abutting surface and a second abutting surface in the circumferential direction. The first abutting surface is an arc-shaped structure and is used to abut against the annular inner wall of the retaining ring. The second abutting surface is a planar structure and is used to abut against the surface of the convex plate on the inner wall of the retaining ring.

7. The clasp shaping device according to claim 6, characterized in that, Each of the shaping blocks is also provided with a second guide surface, which is inclined from the end of the shaping block away from the hydraulic push rod toward the central axis of the shaping component.

8. The circlip shaping device according to claim 6, characterized in that, Each of the shaping blocks is also provided with multiple limiting grooves at intervals in the circumferential direction. The limiting grooves are arranged along the axial direction of the shaping block, and the openings of the multiple limiting grooves on two adjacent shaping blocks are arranged in a one-to-one correspondence. The limiting grooves are adapted to the protrusions on the inner wall of the retaining ring.

9. The clasp shaping device according to claim 1, characterized in that, The rotating seat includes a U-shaped mounting plate and a connecting block. The outer wall of the horizontal plate of the U-shaped mounting plate is fixedly connected to the output shaft of the motor. The ends of the two vertical plates of the U-shaped mounting plate are fixedly connected to the bottom end of the guide block. The connecting block extends vertically outward from the outer walls of the two vertical plates respectively.

10. The clasp shaping device according to claim 9, characterized in that, The support base is provided with a mounting through hole for mounting the U-shaped mounting plate. The inner wall of the mounting through hole is provided with an annular groove that is adapted to the connecting block. The rotating seat and the support base are rotated through the sliding fit between the connecting block and the annular groove.

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