Single crystal edge skin surface treatment apparatus

Abstract

The utility model relates to single crystal edge skin processing field discloses a kind of single crystal edge skin surface treatment equipment, including mainboard, the top of mainboard is fixedly connected with the polishing assembly of processing, the bottom of mainboard is fixedly connected with the support assembly of keeping stable, the top of mainboard is fixedly connected with workstation, the top of mainboard is fixedly connected with connecting plate, one side of connecting plate is connected with pneumatic cylinder, the other side of pneumatic cylinder is fixedly connected with hollow cylinder, the inside of hollow cylinder is fixedly connected with connecting cylinder with sliding, the inside of connecting cylinder is connected with cross bar with sliding, the other side of cross bar is rotatably connected with connecting shaft, the both ends of connecting shaft are rotatably connected with rotating rod. In the utility model, when device is used, device can be driven by pneumatic cylinder and cross bar inside connecting cylinder telescopes, two sets of clamping plates can be driven by two sets of connecting shafts to process single crystal wafer skin surface at this time, so that device keeps fixed.

Description

Technical Field

[0001] This utility model relates to the field of single crystal edge skin treatment, and in particular to a single crystal edge skin surface treatment device. Background Technology

[0002] Monocrystalline edge skin is a byproduct of monocrystalline silicon production. In the preparation of monocrystalline silicon, techniques such as the Czochralski method or zone melting are typically used. During crystal growth, to obtain high-quality monocrystalline silicon rods, they undergo cutting, grinding, and other processing. During these processes, some edge material is generated, which is known as monocrystalline edge skin.

[0003] In the existing technology, most single crystal edge skin devices are manually ground and polished, which easily leads to uneven grinding and polishing of the device and fails to achieve a better state. Therefore, in order to address the above problems, a single crystal edge skin surface treatment device is proposed. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a single-crystal edge skin surface treatment device, which aims to improve the problem of inconvenient grinding and polishing of single-crystal edge skin surface treatment in existing technologies.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A single-crystal edge skin surface treatment device includes a main board, a grinding component for processing is fixedly connected to the top of the main board, a support component for maintaining stability is fixedly connected to the bottom of the main board, a worktable is fixedly connected to the top of the main board, a connecting plate is fixedly connected to the top of the main board, a cylinder is connected to one side of the connecting plate, a hollow cylinder is fixedly connected to the other side of the cylinder, a connecting tube is fixedly and slidably connected inside the hollow tube, a crossbar is slidably connected inside the connecting tube, a connecting shaft is rotatably connected to the other side of the crossbar, and rotating rods are rotatably connected to both ends of the connecting shaft.

[0007] As a further description of the above technical solution: the support assembly includes a support rod, the support rod is fixedly connected to the bottom of the motherboard, and a base is fixedly connected to the bottom of the support rod.

[0008] As a further description of the above technical solution: the grinding assembly includes an adjusting seat, a connecting rod rotatably connected to the top of the adjusting seat, a motor rotatably connected to one side of the connecting rod, a shrink cylinder fixedly connected to the drive end of the motor, a telescopic rod slidably connected to the bottom of the shrink cylinder, and a splash guard fixedly connected to the bottom of the telescopic rod.

[0009] As a further description of the above technical solution: a grinding disc is fixedly connected to the bottom of the splash guard, and a water outlet pipe is fixedly connected to the bottom of the splash guard.

[0010] As a further description of the above technical solution, a clamping plate is fixedly connected to the bottom of each of the two rotating rods, and an anti-slip pad is fixedly connected to the side of each of the two clamping plates that are close to each other.

[0011] As a further description of the above technical solution: a filter plate is slidably connected inside the workbench, a filter screen is fixedly connected inside the filter plate, a clamping plate is fixedly connected to both sides of the workbench, a water storage tank is fixedly connected to the bottom of the filter plate, a water pump is fixedly connected to one side of the water storage tank, and a water circulation pipe is fixedly connected to the top of the water pump.

[0012] As a further description of the above technical solution: both sides of the fixing plate are fixedly connected to the insert plate, the other end of the insert plate is slidably connected to the inside of the card plate, and the inside of the card plate is slidably connected to the insert rod.

[0013] As a further description of the above technical solution: a fixing plate is fixedly connected to one end of the filter plate, and a handle is fixedly connected to one end of the fixing plate.

[0014] This utility model has the following beneficial effects:

[0015] 1. In this utility model, through the coordinated use of the structure, when the device is in use, the device can extend and retract inside the connecting cylinder by driving the crossbar through the cylinder. At this time, the two sets of connecting shafts can drive the two sets of clamping plates to process the surface of the single crystal wafer, so that the device is kept fixed and the stability effect of the device during processing is improved. In addition, the device can extend and retract inside the hollow cylinder through the connecting cylinder, so as to adjust the device and facilitate the distance adjustment of the device, thereby improving the safety effect of the device in use.

[0016] 2. In this utility model, through the combined use of the structure, when the device is in use, during the polishing process, water is sprayed onto the single crystal wafer through the water outlet pipe for polishing. In addition, the device can filter water through the filter plate and filter screen, and the water flows into the water storage tank. At the same time, the water is circulated through the water circulation pipe and water pump. Furthermore, the operator can replace and clean the filter screen inside the device by holding the handle and pulling the fixing plate, which improves the convenience of using the device. Attached Figure Description

[0017] Figure 1 This is a perspective view of a single-crystal edge skin surface treatment device proposed in this utility model;

[0018] Figure 2 This is a schematic diagram of the anti-splash disk structure of a single-crystal edge skin surface treatment device proposed in this utility model;

[0019] Figure 3This is a schematic diagram of the connecting plate structure of a single-crystal edge skin surface treatment device proposed in this utility model;

[0020] Figure 4 This is a schematic diagram of the filter plate structure of a single-crystal edge skin surface treatment device proposed in this utility model.

[0021] Legend:

[0022] 1. Mainboard; 101. Support rod; 102. Base; 103. Adjustment seat; 104. Connecting rod; 105. Motor; 106. Workbench; 107. Water pump; 108. Water circulation pipe; 109. Shrink cylinder; 110. Telescopic rod; 111. Splash guard; 112. Water outlet pipe; 113. Grinding disc; 2. Connecting plate; 201. Cylinder; 202. Hollow cylinder; 203. Crossbar; 204. Connecting cylinder; 205. Connecting shaft; 206. Rotating rod; 207. Clamping plate; 208. Anti-slip pad; 3. Filter plate; 301. Filter screen; 302. Clamping plate; 303. Water storage tank; 304. Insert rod; 305. Inserting plate; 306. Fixing plate; 307. Pull handle. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Reference Figures 1 to 3As shown, one embodiment of this utility model provides a single-crystal edge skin surface treatment device, including a main board 1. A polishing component for processing is fixedly connected to the top of the main board 1, and a support component for maintaining stability is fixedly connected to the bottom of the main board 1. A worktable 106 is fixedly connected to the top of the main board 1, and a connecting plate 2 is fixedly connected to the top of the main board 1. A cylinder 2010 is connected to one side of the connecting plate 2, and a hollow cylinder 202 is fixedly connected to the other side of the cylinder 2010. A connecting cylinder 204 is fixedly and slidably connected inside the hollow cylinder 202, and a crossbar 203 is slidably connected inside the connecting cylinder 204. On the other side of 3, a connecting shaft 205 is rotatably connected. Both ends of the connecting shaft 205 are rotatably connected to rotating rods 206. When the device is in use, the device can drive the crossbar 203 to extend and retract inside the connecting cylinder 204 through the cylinder 201. At this time, the two sets of connecting shafts 205 can drive the two sets of clamping plates 207 to process the surface of the single crystal wafer, so that the device is kept fixed and the stability effect of the device during processing is improved. In addition, the device can extend and retract inside the hollow cylinder 202 through the connecting cylinder 204, so as to drive the device to adjust, which facilitates the distance adjustment of the device and improves the safety effect of the device.

[0025] The support assembly includes a support rod 101, which is fixedly connected to the bottom of the main board 1. A base 102 is fixedly connected to the bottom of the support rod 101. When the device is in use, it can be stabilized by the support rod 101 and the base 102, thus improving the stability of the device. The grinding assembly includes an adjustment seat 103, with a connecting rod 104 rotatably connected to the top of the adjustment seat 103. A motor 105 is rotatably connected to one side of the connecting rod 104. A shrink cylinder 109 is located at the bottom drive end of the motor 105. A telescopic rod 110 is slidably connected to the bottom of the shrink cylinder 109. A splash guard 111 is fixedly connected to the bottom of the telescopic rod 110. When the device is in use, the operator can extend and retract the telescopic rod 110 inside the shrink cylinder 109. At this time, the device can be ground by the grinding disc 113, thus improving the safety of the device.

[0026] Reference Figures 2 to 4 The bottom of the splash guard 111 is fixedly connected to a grinding disc 113 and a water outlet pipe 112. When the device is in use, the device can polish the monocrystalline surface through the grinding disc 113 and spray water on the surface through the water outlet pipe 112 to prevent cracking during the polishing process and improve the safety of the device. The bottom of the two rotating rods 206 is fixedly connected to a clamping plate 207, and the side of the two clamping plates 207 that are close to each other is fixedly connected to an anti-slip pad 208. When the device is in use, when the two sets of clamping plates 207 clamp the monocrystalline surface, the two sets of anti-slip pads 208 adhere to the monocrystalline surface, improving the stability of the device clamping.

[0027] A filter plate 3 is slidably connected inside the workbench 106, and a filter screen 301 is fixedly connected inside the filter plate 3. Card plates 302 are fixedly connected to both sides of the workbench 106. A water storage tank 303 is fixedly connected to the bottom of the filter plate 3. A water pump 107 is fixedly connected to one side of the water storage tank 303. A water circulation pipe 108 is fixedly connected to the top of the water pump 107. During the polishing process, water is sprayed onto the single crystal wafer through the water outlet pipe 112 for polishing. In addition, the device can filter the device through the filter plate 3 and the filter screen 301, and the water flows into the water storage tank 303. At the same time, the water is circulated through the water circulation pipe 108 and the water pump 107.

[0028] Both sides of the fixed plate 306 are fixedly connected to the insert plate 305. The other end of the insert plate 305 is slidably connected to the inside of the clamping plate 302. The inside of the clamping plate 302 is slidably connected to the insert rod 304. When the device is in use, the device is inserted laterally into the clamping plate 302 through the insert plate 305. At this time, the device is fixed by the insert rod 304 being inserted laterally through the insert plate 305, which improves the stability of the device.

[0029] A fixing plate 306 is fixedly connected to one end of the filter plate 3, and a handle 307 is fixedly connected to one end of the fixing plate 306. The operator can pull the fixing plate 306 by holding the handle 307 to replace and clean the filter screen 301 inside the device, which improves the convenience of using the device.

[0030] Working principle: When the device is in use, the cylinder 201 can drive the crossbar 203 to extend and retract inside the connecting cylinder 204. At this time, the two sets of connecting shafts 205 can drive the two sets of clamping plates 207 to process the surface of the single crystal wafer, keeping the device fixed and improving the stability of the device during processing. In addition, the device can extend and retract inside the hollow cylinder 202 through the connecting cylinder 204, which can drive the device to be adjusted and facilitate the distance adjustment of the device.

[0031] When the device is in use, during the polishing process, water is sprayed onto the single crystal wafer through the water outlet pipe 112 for polishing. In addition, the device can filter water through the filter plate 3 and the filter screen 301, and the water flows into the water storage tank 303. At the same time, the water is circulated through the water circulation pipe 108 and the water pump 107. In addition, the operator can replace and clean the filter screen 301 inside the device by pulling the fixing plate 306 by holding the handle 307.

[0032] When the device is in use, the operator can extend and retract the device inside the shrink cylinder 109 via the telescopic rod 110. At this time, the device can be polished by the grinding disc 113, which improves the safety of the device.

[0033] Finally, it should be noted that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A single-crystal edge skin surface treatment device, comprising a main board (1), characterized in that; A grinding assembly for processing is fixedly connected to the top of the main board (1), and a support assembly for maintaining stability is fixedly connected to the bottom of the main board (1). A workbench (106) is fixedly connected to the top of the main board (1), and a connecting plate (2) is fixedly connected to the top of the main board (1). A cylinder (201) is connected to one side of the connecting plate (2), and a hollow cylinder (202) is fixedly connected to the other side of the cylinder (201). A connecting cylinder (204) is fixedly and slidably connected inside the hollow cylinder (202), and a crossbar (203) is slidably connected inside the connecting cylinder (204). A connecting shaft (205) is rotatably connected to the other side of the crossbar (203), and a rotating rod (206) is rotatably connected to both ends of the connecting shaft (205).

2. The single-crystal edge skin surface treatment equipment according to claim 1, characterized in that: The support assembly includes a support rod (101), the support rod (101) is fixedly connected to the bottom of the main board (1), and the base (102) is fixedly connected to the bottom of the support rod (101).

3. The single-crystal edge skin surface treatment equipment according to claim 1, characterized in that: The polishing assembly includes an adjusting seat (103), a connecting rod (104) is rotatably connected to the top of the adjusting seat (103), a motor (105) is rotatably connected to one side of the connecting rod (104), a shrink cylinder (109) is fixedly connected to the drive end of the motor (105), a telescopic rod (110) is slidably connected to the bottom of the shrink cylinder (109), and a splash guard (111) is fixedly connected to the bottom of the telescopic rod (110).

4. The single-crystal edge skin surface treatment equipment according to claim 3, characterized in that: A grinding disc (113) is fixedly connected to the bottom of the splash guard (111), and a water outlet pipe (112) is fixedly connected to the bottom of the splash guard (111).

5. The single-crystal edge skin surface treatment equipment according to claim 1, characterized in that: The bottom of each of the two rotating rods (206) is fixedly connected to a clamping plate (207), and an anti-slip pad (208) is fixedly connected to the side of each of the two clamping plates (207) that are close to each other.

6. The single-crystal edge skin surface treatment equipment according to claim 1, characterized in that: A filter plate (3) is slidably connected inside the workbench (106), and a filter screen (301) is fixedly connected inside the filter plate (3). A clamping plate (302) is fixedly connected to both sides of the workbench (106). A water storage tank (303) is fixedly connected to the bottom of the filter plate (3). A water pump (107) is fixedly connected to one side of the water storage tank (303). A water circulation pipe (108) is fixedly connected to the top of the water pump (107).

7. The single-crystal edge skin surface treatment equipment according to claim 6, characterized in that: A fixing plate (306) is fixedly connected to one end of the filter plate (3), and a handle (307) is fixedly connected to one end of the fixing plate (306).

8. The single-crystal edge skin surface treatment equipment according to claim 7, characterized in that: Both sides of the fixing plate (306) are fixedly connected to the insert plate (305), and the other end of the insert plate (305) is slidably connected to the inside of the card plate (302). The inside of the card plate (302) is slidably connected to the insert rod (304).

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