A high-purity quartz tube fixing mechanism for semiconductor manufacturing

Abstract

The utility model discloses a kind of high-purity quartz tube fixing mechanism special for semiconductor manufacturing, it is related to quartz tube fixing technical field, including pull extension base and first support frame, the top of pull extension base is fixedly connected with first support frame, and the top of first support frame is fixedly connected with clamping protection mechanism, the clamping protection mechanism includes the fixed support of being set to the top position of first support frame, and the outer surface of fixed support is fixedly connected with cold-resistant material layer, the outer surface of cold-resistant material layer is fixedly connected with heat-resistant material layer, and the inner surface of fixed support is fixedly connected with annular air bag, cold-resistant material layer keeps good flexibility and strength, prevent fixed support brittle damage due to low temperature, compared with the existing ordinary use fixing mechanism, vibration, displacement in manufacturing process are effectively resisted, production process precision is guaranteed, and adapt to temperature change in semiconductor manufacturing, and protect quartz tube surface integrity, ensure that its performance is not affected.

Description

Technical Field

[0001] This utility model relates to the field of quartz tube fixing technology, specifically a high-purity quartz tube fixing mechanism for semiconductor manufacturing. Background Technology

[0002] Quartz tubes are special industrial glass made of silicon dioxide, a very excellent basic material. Quartz glass has a series of excellent physical and chemical properties. Among them, semiconductor manufacturing quartz tubes are tubular devices made of high-purity quartz, which are resistant to high temperatures and have strong chemical stability. In chip manufacturing, they are used to support wafers and provide a stable reaction environment for processes such as etching and deposition. In manufacturing, the quartz tube fixing mechanism achieves stable fixing and protection of the quartz tube through the cooperation of multiple components. However, the existing fixing mechanism has certain defects.

[0003] For example, a quartz tube fixing mechanism for total sulfur analysis using a tubular furnace method, as described in application number CN202320907043.2, includes a lower heating chamber, an upper cover plate, and a heating drive unit. The lower heating chamber and the upper cover plate are hinged to form a heating cavity. A heater is installed inside the lower heating chamber, and the input end of the heater is connected to an external heating drive unit. The lower heating chamber is located on a support base. This application optimizes the quartz tube fixing mechanism by employing a more robust fixing mechanism, such as clamps with increased strength and stability, and adding limiting devices to ensure the quartz tube remains stable in a high-temperature environment without shifting or falling off. The connection method is also optimized, allowing the quartz tube to be adjusted via the limiting device, preventing stretching or compression of the connectors due to slight differences in the quartz tube or titration cell, thereby reducing damage to the outlet end of the quartz tube. However, this fixing mechanism cannot effectively cope with vibrations and high-temperature expansion during semiconductor manufacturing. The quartz tube is prone to loosening and displacement, affecting the precision of the production process and product quality. Furthermore, it is easily deformed and aged at high temperatures, reducing the fixing effect and even damaging the quartz tube.

[0004] Therefore, in view of this, we have studied and improved the existing structure to address its shortcomings, and proposed a high-purity quartz tube fixing mechanism specifically for semiconductor manufacturing. Utility Model Content

[0005] The purpose of this utility model is to provide a high-purity quartz tube fixing mechanism for semiconductor manufacturing, in order to solve the problems mentioned in the background art, such as the inability to effectively cope with vibration, high temperature expansion and other situations in the semiconductor manufacturing process, the easy loosening and displacement of quartz tubes, which affect the precision of the production process and product quality, and the easy deformation and aging at high temperatures, which reduces the fixing effect and even damages the quartz tube.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a high-purity quartz tube fixing mechanism for semiconductor manufacturing, comprising a pull-out extension base and a first support frame, characterized in that the top of the pull-out extension base is fixedly connected to the first support frame, and the top of the first support frame is fixedly connected to a clamping and protective mechanism, the clamping and protective mechanism comprising a fixed bracket disposed at the top position of the first support frame, and the outer surface of the fixed bracket is fixedly connected to a cold-resistant material layer, the outer surface of the cold-resistant material layer is fixedly connected to a heat-resistant material layer, and the inner surface of the fixed bracket is fixedly connected to an annular airbag, the outer surface of the annular airbag being fixedly connected to an inflation nozzle.

[0007] Preferably, the inner surface of the annular airbag is provided with a quartz tube body, and the inner surface of the pull-out extension base is provided with fastening bolts.

[0008] Preferably, a second support frame is fixedly connected to the top of the pull-out extension base, and a temperature control mechanism is provided on the top of the second support frame.

[0009] Preferably, the temperature control mechanism includes a fixing clamp located at the top of the second support frame, and a heat insulation pad is fixedly connected to the outer surface of the fixing clamp, and a shape memory alloy sheet is fixedly connected to the outer surface of the heat insulation pad.

[0010] Preferably, a hollow reinforcing plate is fixedly connected to the top of the pull-out extension base, and an anti-collision damping is fixedly connected to the inner surface of the hollow reinforcing plate.

[0011] Preferably, the bottom of the pull-out extension base is threaded with a threaded rod, and the bottom of the threaded rod is fixedly connected with a shock-absorbing rod.

[0012] Preferably, the bottom of the shock absorber is fixedly connected to a caster wheel, and a handle is provided on one side of the pull-out extension base.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model, through the design of a pull-out extension base and a clamping protection mechanism, avoids the fixed bracket from breaking due to low-temperature embrittlement, ensuring the integrity of the fixed structure. At the same time, it isolates high-temperature conduction, prevents the fixed bracket from softening and deforming, and ensures the stability of the quartz tube body. It avoids scratches and stress concentration caused by rigid clamping, and provides buffering when the equipment vibrates, preventing the quartz tube body from shifting or breaking. It ensures the accuracy of wafer bearing and process reaction during production. The pull-out extension base improves the flexibility and compatibility of the mechanism. Whether it is a short-specification quartz tube for laboratory research or an ultra-long reaction tube for mass production, it can be quickly switched and installed, greatly improving the equipment reuse rate and production efficiency, and reducing the equipment investment cost of enterprises.

[0015] 2. Through the setting of the temperature control mechanism, when the temperature rises, the shape of the memory alloy sheet changes according to the preset temperature, automatically adjusting the clamping force on the quartz tube to adapt to the thermal expansion and contraction of the quartz tube. The heat insulation pad can prevent the heat of the alloy sheet from being conducted to the main body of the quartz tube, thus greatly improving the stability of the fixing mechanism in high-temperature environments. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0017] Figure 2 This is a schematic diagram of the clamping and protective mechanism 3 of this utility model;

[0018] Figure 3 This is a schematic diagram of the temperature control mechanism 7 of this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the pull-out extension base 1 of this utility model.

[0020] In the diagram: 1. Pull-out extension base; 2. First support frame; 3. Clamping and protective mechanism; 301. Fixed bracket; 302. Cold-resistant material layer; 303. Heat-resistant material layer; 304. Annular airbag; 305. Inflation nozzle; 4. Quartz tube body; 5. Fastening bolt; 6. Second support frame; 7. Temperature control mechanism; 701. Fixed clamp; 702. Heat insulation pad; 703. Shape memory alloy sheet; 8. Hollowed-out reinforcing plate; 9. Anti-collision damping; 10. Threaded rod; 11. Shock absorber rod; 12. Caster wheel; 13. Handle. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] like Figures 1-2As shown, a high-purity quartz tube fixing mechanism for semiconductor manufacturing includes a pull-out extension base 1 and a first support frame 2. The top of the pull-out extension base 1 is fixedly connected to the first support frame 2, and the top of the first support frame 2 is fixedly connected to a clamping and protective mechanism 3. The clamping and protective mechanism 3 includes a fixed bracket 301 disposed at the top of the first support frame 2, and a cold-resistant material layer 302 is fixedly connected to the outer surface of the fixed bracket 301. A heat-resistant material layer 303 is fixedly connected to the outer surface of the cold-resistant material layer 302, and the inner surface of the fixed bracket 301... An annular airbag 304 is fixedly connected to the surface of the annular airbag 304, and an inflation nozzle 305 is fixedly connected to the outer surface of the annular airbag 304. In low-temperature environments, the cold-resistant material layer 302 maintains good flexibility and strength, preventing the fixing bracket 301 from becoming brittle and damaged due to low temperatures. In high-temperature environments, the heat-resistant material layer 303 can effectively block heat and prevent the fixing bracket 301 from deforming due to high temperatures. The flexible material of the annular airbag 304 can be slightly deformed according to the shape of the quartz tube body 4 to apply pressure evenly, which can firmly fix the quartz tube body 4 without damaging its surface.

[0023] like Figure 4 As shown, a quartz tube body 4 is provided on the inner surface of the annular airbag 304, and a fastening bolt 5 is provided on the inner surface of the pull-out extension base 1. A second support frame 6 is fixedly connected to the top of the pull-out extension base 1, and a temperature control mechanism 7 is provided on the top of the second support frame 6. Pull out the extension plate of the pull-out extension base 1 in the horizontal direction, adjust it to the appropriate position according to the length of the quartz tube body 4, align the fastening bolt 5 with and pass through the positioning hole of the pull-out extension base 1 and the extension plate, and tighten the bolt so that its thread engages with the hole wall to achieve rigid fixation.

[0024] Furthermore, the temperature control mechanism 7 includes a fixing clamp 701 located at the top of the second support frame 6, and a heat insulation pad 702 is fixedly connected to the outer surface of the fixing clamp 701. A shape memory alloy sheet 703 is fixedly connected to the outer surface of the heat insulation pad 702. The fixing clamp 701 is sleeved on the quartz tube to fix the shape memory alloy sheet 703 and the heat insulation pad 702. At room temperature, the shape memory alloy sheet 703 maintains a certain shape and plays an auxiliary role in fixing the quartz tube.

[0025] Furthermore, a hollow reinforcing plate 8 is fixedly connected to the top of the pull-out extension base 1, and an anti-collision damper 9 is fixedly connected to the inner surface of the hollow reinforcing plate 8. A threaded rod 10 is threadedly connected to the bottom of the pull-out extension base 1, and a shock-absorbing rod 11 is fixedly connected to the bottom of the threaded rod 10. The hollow reinforcing plate 8 is made of high-strength metal. When it is impacted, the anti-collision damper 9 effectively resists deformation and prevents the impact force from acting directly on the quartz tube body 4, playing a key protective role. By rotating the threaded rod 10, the support height can be changed, which can flexibly adapt to uneven placement surfaces and ensure that the pull-out extension base 1 always remains horizontal.

[0026] Furthermore, the bottom of the shock absorber 11 is fixedly connected to a caster wheel 12, and a handle 13 is provided on one side of the pull-out extension base 1. The shock absorber 11 has built-in elastic elements, which consume vibration energy through compression and rebound when encountering vibration, reducing the shaking of the pull-out extension base 1 and enhancing the stability of the overall fixing mechanism from a multi-point support level.

[0027] Working principle: When using this semiconductor manufacturing-specific high-purity quartz tube fixing mechanism, first move the fixing mechanism to the designated position, flexibly adjust the orientation using the casters 12 and handles 13, and pull out the extension plate of the pull-out extension base 1 horizontally according to the length of the quartz tube body 4. Fix it with fastening bolts 5 through the positioning holes, and adjust the height of the pull-out extension base 1 by rotating the threaded rod 10 to keep it horizontal. After ensuring the mechanism is placed stably, pass the quartz tube body 4 through the fixing bracket 301 and fixing clamp 701 of the clamping and protective mechanism 3. Then, the first support frame 2 and the second support frame 6 cooperate, and the annular airbag on the fixing bracket 301... After being inflated through the inflation nozzle 305, 304 fits tightly against the quartz tube. The cold-resistant material layer 302 and the heat-resistant material layer 303 adapt to different temperature environments. At the same time, the fixing clamp 701 of the temperature control mechanism 7 is fixed to the outer surface of the quartz tube body 4. The heat insulation pad 702 and the shape memory alloy sheet 703 work together. When the temperature changes, the shape memory alloy sheet 703 automatically adjusts its tightness to maintain the stability of the quartz tube body 4. Finally, the hollow reinforcing plate 8 and the anti-collision damper 9 resist external impacts, and the shock absorption rod 11 further ensures the fixing stability and safety of the quartz tube body 4. This is the working principle of the high-purity quartz tube fixing mechanism for semiconductor manufacturing.

Claims

1. A high-purity quartz tube fixing mechanism for semiconductor manufacturing, comprising a pull-out extension base (1) and a first support frame (2), characterized in that, The top of the pull-out extension base (1) is fixedly connected to a first support frame (2), and the top of the first support frame (2) is fixedly connected to a clamping and protective mechanism (3). The clamping and protective mechanism (3) includes a fixed bracket (301) located at the top of the first support frame (2), and a cold-resistant material layer (302) is fixedly connected to the outer surface of the fixed bracket (301). A heat-resistant material layer (303) is fixedly connected to the outer surface of the cold-resistant material layer (302), and an annular airbag (304) is fixedly connected to the inner surface of the fixed bracket (301). An inflation nozzle (305) is fixedly connected to the outer surface of the annular airbag (304).

2. The high-purity quartz tube fixing mechanism for semiconductor manufacturing according to claim 1, characterized in that, The inner surface of the annular airbag (304) is provided with a quartz tube body (4), and the inner surface of the pull-out extension base (1) is provided with fastening bolts (5).

3. The high-purity quartz tube fixing mechanism for semiconductor manufacturing according to claim 1, characterized in that, The top of the pull-out extension base (1) is fixedly connected to a second support frame (6), and a temperature control mechanism (7) is provided on the top of the second support frame (6).

4. The high-purity quartz tube fixing mechanism for semiconductor manufacturing according to claim 3, characterized in that, The temperature control mechanism (7) includes a fixing clamp (701) located at the top of the second support frame (6), and a heat insulation pad (702) is fixedly connected to the outer surface of the fixing clamp (701), and a shape memory alloy sheet (703) is fixedly connected to the outer surface of the heat insulation pad (702).

5. The high-purity quartz tube fixing mechanism for semiconductor manufacturing according to claim 1, characterized in that, The top of the pull-out extension base (1) is fixedly connected to a hollow reinforcing plate (8), and the inner surface of the hollow reinforcing plate (8) is fixedly connected to an anti-collision damper (9).

6. The high-purity quartz tube fixing mechanism for semiconductor manufacturing according to claim 1, characterized in that, The bottom of the pull-out extension base (1) is threaded with a threaded rod (10), and the bottom of the threaded rod (10) is fixedly connected with a shock-absorbing rod (11).

7. The high-purity quartz tube fixing mechanism for semiconductor manufacturing according to claim 6, characterized in that, The bottom of the shock absorber (11) is fixedly connected to a caster wheel (12), and a handle (13) is provided on one side of the pull-out extension base (1).

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