Mounting structure for a ceramic barrel

Abstract

The utility model discloses a mounting structure for ceramic barrel, mounting structure includes the frame body, and the top of frame body is provided with the mounting cavity, and is provided with the cavity structure of T shape structure of the mounting ceramic barrel in the mounting cavity, the top of cavity structure is provided with the mounting fixture, and the top of mounting fixture is provided with the upper pin of cooperation with the pin hole of ceramic barrel upper setting, and the bottom of mounting fixture is provided with the lower pin of cooperation with the locating pin hole of cavity structure upper setting, and lower pin and locating pin hole are connected through the thread, and the bottom of cavity structure is provided with the fixed ring of cooperation with ceramic barrel for fixing ceramic barrel, half moon fixed ring, seal ring and fixed seal cover, the utility model can accurate control the installation process of ceramic barrel.

Description

Technical Field

[0001] This utility model relates to the technical field of mounting fixtures, specifically to a mounting structure for ceramic buckets. Background Technology

[0002] In the existing technology, the installation of ceramic buckets used in semiconductor manufacturing processes usually requires two people to work together manually. One person first holds the ceramic bucket above the installation cavity, and then the other person fixes the ceramic bucket below the installation cavity. During the process of fixing the ceramic bucket, the two people also need to cooperate with each other to ensure that the ceramic bucket is centered in the installation cavity and does not shift. Such an installation process is not only time-consuming and labor-intensive, but also very likely to cause rework due to improper installation. Utility Model Content

[0003] To overcome the aforementioned problems, the purpose of this utility model is to provide an installation structure for ceramic barrels, so as to achieve precise control of the ceramic barrel installation process.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is: an installation structure for ceramic buckets, the installation structure including a frame, an installation cavity provided at the top of the frame, and a T-shaped cavity structure for installing ceramic buckets provided in the installation cavity;

[0005] The top of the cavity structure is provided with an installation fixture, the top of the installation fixture is provided with an upper pin that mates with a pin hole provided on the ceramic bucket; the bottom of the installation fixture is provided with a lower pin that mates with a positioning pin hole provided on the cavity structure, and the lower pin and the positioning pin hole are connected by threads.

[0006] The lower part of the cavity structure is provided with a lifting mechanism that drives the ceramic bucket to rise and fall. The lower part of the ceramic bucket passes through the lifting mechanism through a cavity provided on the lifting mechanism. The bottom end of the lifting mechanism is provided with a clamping mechanism for clamping the ceramic bucket.

[0007] The bottom of the cavity structure is provided with a fixing ring, a crescent-shaped fixing ring, a sealing ring, and a fixing sealing cover for fixing the ceramic bucket.

[0008] During installation, first install the installation fixture to the designated position on the cavity structure. After the lower pin and the positioning pin hole are connected by threads, fix them. Manually place the ceramic bucket into the cavity structure and align the upper pin with the pin hole. The bottom end of the ceramic bucket passes through the cavity and through the lifting mechanism. Manually install and fix the fixing ring, half-moon fixing ring, sealing ring and fixing sealing cover onto the ceramic bucket in sequence. The clamping mechanism clamps the ceramic bucket. The lifting mechanism drives the ceramic bucket to rise to the designated position. Remove the installation fixture to complete the installation.

[0009] Preferably, the mounting cavity and the frame are fixed together by a support column and a nut that cooperates with the support column.

[0010] Preferably, the fixed sealing cover is fixed by sealing screws.

[0011] Preferably, the sealing ring is fixed by fixing bolts.

[0012] Preferably, a spring washer is also provided between the fixed sealing cover and the sealing screw.

[0013] Preferably, the lifting mechanism is a lifting motor or lifting cylinder with a crescent-shaped cavity.

[0014] Preferably, the clamping mechanism is a crescent-shaped barrel screw locking mechanism.

[0015] Preferably, the bottom of the frame is provided with freely movable feet, and the feet are provided with locking parts.

[0016] The beneficial effects of this utility model are: this installation structure only requires the addition of an installation fixture, a lifting mechanism and a clamping mechanism to achieve precise installation of ceramic buckets. Operators can complete the installation without much effort, which not only saves manpower but also improves the installation accuracy. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this embodiment;

[0018] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of AA;

[0019] Figure 3 This is a three-dimensional structural diagram of this embodiment;

[0020] Figure 4 This is a three-dimensional structural diagram of the mounting fixture in this embodiment;

[0021] Figure 5 This is a schematic diagram of the installation fixture in this embodiment.

[0022] In the diagram: 1. Frame; 2. Foot; 3. Fixing washer; 4. Ceramic bucket; 5. Mounting cavity; 6. Cavity structure; 7. Support column; 8. Nut; 9. Mounting fixture; 10. Upper pin; 11. Lower pin; 12. Fixing sealing cover; 13. Half-moon fixing ring; 14. Fixing ring; 15. Sealing ring; 16. Clamping mechanism; 17. Spring washer; 18. Fixing bolt; 19. Sealing screw; 20. Lifting mechanism; 21. Cavity; 22. Positioning pin hole. Detailed Implementation

[0023] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0024] See Figures 1-5 This embodiment discloses an installation structure for ceramic buckets. The installation structure includes a frame 1, and an installation cavity 5 is provided at the top of the frame 1. The installation cavity 5 is provided with a T-shaped cavity structure 6 for installing ceramic buckets 4.

[0025] The top of the cavity structure 6 is provided with an installation fixture 9, the top of the installation fixture 9 is provided with an upper pin 10 that mates with a pin hole provided on the ceramic bucket 4; the bottom of the installation fixture 9 is provided with a lower pin 11 that mates with a positioning pin hole 22 provided on the cavity structure 6, and the lower pin 11 and the positioning pin hole 22 are connected by threads.

[0026] The lower part of the cavity structure 6 is provided with a lifting mechanism 20 that drives the ceramic bucket 4 to rise and fall. The lower part of the ceramic bucket 4 passes through the lifting mechanism 20 through a cavity 21 provided on the lifting mechanism 20. The bottom end of the lifting mechanism 20 is provided with a clamping mechanism 16 for clamping the ceramic bucket 4.

[0027] The bottom of the cavity structure 6 is provided with a fixing ring 14, a crescent-shaped fixing ring 13, a sealing ring 15, and a fixing sealing cover 12 that cooperate with the ceramic bucket 4 to fix the ceramic bucket 4.

[0028] During installation, first install the installation fixture 9 to the designated position of the cavity structure 6. After the lower pin 11 is fixed to the positioning pin hole 22 by thread connection, manually place the ceramic bucket 4 into the cavity structure 6 and align the upper pin 10 with the pin hole on the ceramic bucket 4. At this time, the bottom end of the ceramic bucket 4 passes through the cavity 21 and the lifting mechanism 20. Manually install and fix the fixing ring 14, the crescent fixing ring 13, the sealing ring 15 and the fixing sealing cover 12 onto the ceramic bucket 4 in sequence. Then, the clamping mechanism 16 retracts and clamps the bottom end of the ceramic bucket 4. The lifting mechanism 20 drives the ceramic bucket 4 to rise to the designated position (higher than the height of the installation fixture 9 and the cavity structure 6 before placing the ceramic bucket 4). Finally, remove the installation fixture 9 to complete the installation.

[0029] In one embodiment, the mounting cavity 5 is fixed to the frame 1 by a support column 7 and a nut 8 that cooperates with the support column 7. A fixing washer 3 is also fitted on the support column 7 to ensure the sealing and stability between the nut 8 and the support column 7.

[0030] In one embodiment, the fixed sealing cover 12 is fixed by a sealing screw 19, which serves as a seal. A spring washer 17 is also provided between the fixed sealing cover 12 and the sealing screw 19, which further serves as a seal.

[0031] In one embodiment, the sealing ring 15 is fixed by a fixing bolt 18.

[0032] In one embodiment, the lifting mechanism 20 is a lifting motor or lifting cylinder with a crescent-shaped cavity 21, the cavity 21 rising and falling with the lifting mechanism 20.

[0033] In one embodiment, the clamping mechanism 27 is a crescent-shaped screw locking mechanism for the barrel. The contraction of the clamping mechanism 27 can clamp and release the ceramic barrel 4 to meet the needs of the lifting mechanism 20.

[0034] In one embodiment, the bottom of the frame 1 is provided with a freely movable foot 2, which facilitates the movement of the installation mechanism. The foot 2 is provided with a locking part, which locks the foot 2 after it is moved to the designated position to facilitate operation.

[0035] In one embodiment, the mounting structure further includes several bellows, which can protect moving or non-moving components. For components requiring dust protection, bellows sealing rings and / or bellows elastic gaskets can be provided on the bellows. This application does not impose any limitations.

[0036] The lifting mechanism 20 and the clamping mechanism 16 are started and controlled by a starting power supply installed on the frame 1. The required air source can be provided by an air compressor installed on the outside of the frame 1. This application does not make any limitations.

[0037] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A mounting structure for ceramic barrels, characterized in that, The installation structure includes a frame, and the top of the frame is provided with an installation cavity, and the installation cavity is provided with a T-shaped cavity structure for installing ceramic buckets; The top of the cavity structure is provided with an installation fixture, the top of the installation fixture is provided with an upper pin that mates with a pin hole provided on the ceramic bucket; the bottom of the installation fixture is provided with a lower pin that mates with a positioning pin hole provided on the cavity structure, and the lower pin and the positioning pin hole are connected by threads. The lower part of the cavity structure is provided with a lifting mechanism that drives the ceramic bucket to rise and fall. The lower part of the ceramic bucket passes through the lifting mechanism through a cavity provided on the lifting mechanism. The bottom end of the lifting mechanism is provided with a clamping mechanism for clamping the ceramic bucket. The bottom of the cavity structure is provided with a fixing ring, a crescent-shaped fixing ring, a sealing ring, and a fixing sealing cover for fixing the ceramic bucket. During installation, first install the installation fixture to the designated position on the cavity structure. After the lower pin and the positioning pin hole are connected by threads, fix them. Manually place the ceramic bucket into the cavity structure and align the upper pin with the pin hole. The bottom end of the ceramic bucket passes through the cavity and through the lifting mechanism. Manually install and fix the fixing ring, half-moon fixing ring, sealing ring and fixing sealing cover onto the ceramic bucket in sequence. The clamping mechanism clamps the ceramic bucket. The lifting mechanism drives the ceramic bucket to rise to the designated position. Remove the installation fixture to complete the installation.

2. The mounting structure for ceramic barrels according to claim 1, characterized in that, The mounting cavity and the frame are fixed together by support columns and nuts that cooperate with the support columns.

3. The mounting structure for ceramic barrels according to claim 1, characterized in that, The fixed sealing cover is secured by sealing screws.

4. The mounting structure for ceramic barrels according to claim 1, characterized in that, The sealing ring is fixed by fixing bolts.

5. The mounting structure for ceramic barrels according to claim 3, characterized in that, A spring washer is also provided between the fixed sealing cover and the sealing screw.

6. The mounting structure for ceramic barrels according to claim 1, characterized in that, The lifting mechanism is a lifting motor or lifting cylinder with a crescent-shaped cavity.

7. The mounting structure for ceramic barrels according to claim 1, characterized in that, The clamping mechanism is a crescent-shaped barrel screw locking mechanism.

8. The mounting structure for ceramic barrels according to claim 1, characterized in that, The bottom of the frame is provided with freely movable feet, and the feet are provided with locking parts.

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