Wafer robot end float anti-shake stabilizer

Abstract

The utility model relates to the field of semiconductor manufacturing technology discloses wafer robot end air floatation anti -shake stabilizer, including fixed shell, the inside fixed connection of fixed shell has air bag, the inner wall fixed connection of air bag has fixed axle, the left side communication of air bag has the gas pipe, the other end communication of gas pipe has air compressor, the top fixed connection of air compressor has filter, the top communication of filter has the air inlet pipe, the bottom fixed connection of air bag has pressure relief pipe. In the utility model, air is filtered and compressed and then is delivered to the air bag, the fixed axle is fixed in the air after the air bag is filled with compressed air, when the fixed axle end is impacted, a large impact force is borne through the pressure relief pipe and air is discharged, a large amount of impact force is slowed down, the device is supported and damped by using gas, cost is reduced, service life is improved, and the effect that frequent maintenance is not needed is achieved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to an air-floating anti-shake stabilizer for the end effector of a wafer robotic arm. Background Technology

[0002] Wafers are the core substrate for semiconductor chip manufacturing. They are typically made from high-purity single-crystal silicon through processes such as crystal pulling, slicing, grinding, and polishing. They are circular thin slices with a surface finish at the nanometer level and extremely high crystal integrity. The disorder of atomic arrangement must be controlled at an extremely low level to ensure the stable performance of subsequent chip circuits. As the substrate of chips, the quality of wafers directly determines the yield of chips. Crystal defects can cause short circuits in integrated circuits. Therefore, the production process must be carried out in an ultra-clean environment with strict control over impurity content and surface contamination.

[0003] In automated wafer fabrication, anti-shake stabilizers for robotic arms are required. Existing anti-shake stabilizers for wafer robotic arms integrate an array of multiple vibration sensors and electro-actuators at the end of the robotic arm. The vibration sensors can sensitively capture the vibration characteristic signals of various points on the robotic arm and generate mechanical movements at the corresponding points to reduce the adverse effects of the robotic arm's own vibration, ensuring that the end of the robotic arm remains highly stable when handling wafers. However, existing mechanical shock absorption relies on mechanical parts to directly bear the impact force and reduce vibration. Over time, this can cause parts to deform, resulting in a short service life, frequent maintenance and upkeep, wasted manpower, and increased operating costs. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides an air-floating anti-shake stabilizer for the end effector of a wafer robotic arm, which aims to improve the problem that mechanical shock absorption in the prior art will cause parts to deform and have a short service life under long-term use.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: a wafer manipulator end effector with air flotation anti-shake stabilizer, comprising a fixed shell, an air bladder fixedly connected inside the fixed shell, a fixed shaft fixedly connected to the inner wall of the air bladder, an air supply pipe connected to the left side of the air bladder, an air compressor connected to the other end of the air supply pipe, a filter fixedly connected to the top of the air compressor, an air inlet pipe connected to the top of the filter, a fixed block threadedly connected to the bottom of the air compressor, a pressure relief pipe fixedly connected to the bottom of the air bladder, a protective box fixedly connected to the outer wall of the air compressor, a rotating arm fixedly connected to the right side of the fixed shell, and a cooling structure fixedly connected to the outer wall of the fixed shaft, the cooling structure being used to control the equipment temperature.

[0006] As a further description of the above technical solution:

[0007] The cooling structure includes an insulation shell, the inner wall of which is fixedly connected to the outer wall of a fixed shaft. A condenser is fixedly connected to the inner wall of the insulation shell, a connecting pipe is slidably connected to the outer wall of the condenser, a pipe clamp is slidably connected to the outer wall of the connecting pipe, a cooler is connected to the outer wall of the connecting pipe, an equipment shell is fixedly connected to the outer wall of the cooler, a rotating shaft is fixedly connected to the top of the equipment shell, and a maintenance door is rotatably connected to the outer wall of the rotating shaft.

[0008] As a further description of the above technical solution:

[0009] The top of the air compressor has a threaded hole, and a screw is threaded onto the inner wall of the threaded hole.

[0010] As a further description of the above technical solution:

[0011] An extension block is fixedly connected to the right side of the fixed shaft, and a robotic arm is fixedly connected to the left side of the rotating arm.

[0012] As a further description of the above technical solution:

[0013] A control panel is fixedly connected to the left side of the robotic arm, and buttons are slidably connected to the outer wall of the control panel.

[0014] As a further description of the above technical solution:

[0015] A stabilizing shell is fixedly connected to the right side of the expansion block, and a motor housing is fixedly connected to the top of the stabilizing shell.

[0016] As a further description of the above technical solution:

[0017] A servo motor is fixedly connected to the inner wall of the motor housing, and a drive gear is fixedly connected to the output end of the servo motor.

[0018] As a further description of the above technical solution:

[0019] The outer wall of the driving spherical gear is meshed with a driven spherical gear, and the outer wall of the driven spherical gear is fixedly connected with a soft clamp.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, the filter is activated to draw air in through the air inlet pipe, where it is filtered to remove particles and oil mist. The air then enters the air compressor, where it is compressed and delivered to the air bladder. Once the air bladder is filled with compressed air, the fixed shaft is suspended in the air and fixed in place. When the fixed shaft is subjected to an impact, the pressure relief pipe absorbs the large impact force and discharges the air, thus mitigating a large amount of impact force. This achieves the effect of using gas to support the equipment and reduce vibration, while also reducing costs, increasing service life, and eliminating the need for frequent maintenance.

[0022] 2. In this utility model, the outer wall of the fixed shell is wrapped with condenser tubes so that the condensate circulating inside absorbs heat from the outside and dissipates low temperature. The condenser tubes are connected to the inside of the refrigerator through connecting pipes. When the refrigerator is started, the condensate inside is cooled and then circulated for cooling. The outer wall of the refrigerator is fixed with the equipment shell to protect the refrigerator. The equipment shell has a maintenance door that can be turned over by rotating the shaft for easy use. This achieves the function of controlling the temperature around the air flotation mechanism and extending its service life. Attached Figure Description

[0023] Figure 1 This is a front perspective view of the air-float anti-shake stabilizer at the end of the wafer manipulator proposed in this utility model;

[0024] Figure 2 This is a partial structural diagram of the fixing shell of the end effector air-float anti-shake stabilizer for wafer robotic arms proposed in this utility model;

[0025] Figure 3 This is a partial structural exploded view of the air compressor of the end-effector air-float anti-shake stabilizer for the wafer manipulator proposed in this utility model;

[0026] Figure 4 This is a partial structural diagram of the soft clip of the air-float anti-shake stabilizer at the end of the wafer manipulator proposed in this utility model;

[0027] Figure 5 This is a partial structural diagram of the condenser tube of the end-effector air-float anti-shake stabilizer for the wafer robotic arm proposed in this utility model.

[0028] Legend:

[0029] 1. Fixed shell; 2. Cooling structure; 201. Insulation shell; 202. Condenser pipe; 203. Pipe clamp; 204. Connecting pipe; 205. Refrigerator; 206. Equipment shell; 207. Rotating shaft; 208. Maintenance door; 3. Airbag; 4. Pressure relief pipe; 5. Air supply pipe; 6. Air compressor; 7. Filter; 8. Inlet pipe; 9. Fixing block; 10. Protective box; 11. Fixed shaft; 12. Rotating arm; 13. Threaded hole; 14. Screw; 15. Extension block; 16. Servo motor; 17. Motor shell; 18. Driving spur gear; 19. Driven spur gear; 20. Soft clamp; 21. Control panel; 22. Button; 23. Robotic arm; 24. Stabilizing shell. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see the appendix Figure 1 Appendix Figure 2 and attached Figure 3 An embodiment of this utility model provides: a wafer robotic arm end air-floating anti-shake stabilizer, including a fixed shell 1, an airbag 3 fixedly connected inside the fixed shell 1, a fixed shaft 11 fixedly connected to the inner wall of the airbag 3, an air supply pipe 5 connected to the left side of the airbag 3, an air compressor 6 connected to the other end of the air supply pipe 5, a filter 7 fixedly connected to the top of the air compressor 6, an air inlet pipe 8 connected to the top of the filter 7, a fixed block 9 threadedly connected to the bottom of the air compressor 6, a pressure relief pipe 4 fixedly connected to the bottom of the airbag 3, a protective box 10 fixedly connected to the outer wall of the air compressor 6, a rotating arm 12 fixedly connected to the right side of the fixed shell 1, and a cooling structure 2 fixedly connected to the outer wall of the fixed shaft 11. The cooling structure 2 is used to control the temperature of the equipment.

[0032] Specifically, the end effector of the wafer robotic arm, the air-float anti-shake stabilizer, consists of multiple components, including a fixed housing 1 that protects and confines the airbag 3 inside. A fixed shaft 11 is fixedly connected to the inner wall of the airbag 3. The impact force transmitted from the fixed shaft 11 to the airbag 3 can be effectively reduced by the internal compressed air, significantly reducing the impact force on the device. An air supply pipe 5 is connected to the left side of the airbag 3, which is responsible for delivering compressed air to the airbag 3 to achieve the inflation of the airbag 3. The other end of the air supply pipe 5 is connected to an air compressor 6, which is responsible for providing a stable source of compressed air. A filter 7 is fixedly connected to the top of the air compressor 6. The function of the filter 7 is to ensure that the air entering the system is filtered and free of impurities, thereby avoiding contamination of the airbag 3 and reducing its service life. The top of the filter 7 is connected to an air inlet pipe 8. Air pipe 8 introduces external air into filter 7 for purification. A fixing block 9 is threadedly connected to the bottom of air compressor 6 to secure it and ensure stable operation. A pressure relief pipe 4 is fixedly connected to the bottom of air bladder 3 to release excess gas when the internal pressure is too high, preventing equipment damage. A protective box 10 is fixedly connected to the outer wall of air compressor 6 to ensure long-term stable operation. A rotating arm 12 is fixedly connected to the right side of fixed shell 1, allowing the equipment to rotate with the arm and enabling precise wafer handling at different positions. A cooling structure 2 is also fixedly connected to the outer wall of fixed shaft 11 to control the overall temperature of the equipment, preventing performance degradation or damage due to overheating and ensuring optimal operation.

[0033] Please see the appendix Figure 1 Appendix Figure 2 and attached Figure 5 The cooling structure 2 includes an insulation shell 201. The inner wall of the insulation shell 201 is fixedly connected to the outer wall of the fixed shaft 11. A condenser pipe 202 is fixedly connected to the inner wall of the insulation shell 201. A connecting pipe 204 is slidably connected to the outer wall of the condenser pipe 202. A pipe clamp 203 is slidably connected to the outer wall of the connecting pipe 204. A cooler 205 is connected to the outer wall of the cooler 205. An equipment shell 206 is fixedly connected to the outer wall of the cooler 205. A rotating shaft 207 is fixedly connected to the top of the equipment shell 206. A maintenance door 208 is rotatably connected to the outer wall of the rotating shaft 207.

[0034] Specifically, the cooling structure 2 includes an insulation shell 201. The inner wall of the insulation shell 201 is fixedly connected to the outer wall of the fixed shaft 11. A condenser pipe 202 is fixedly connected to the inner wall of the insulation shell 201. The condenser pipe 202 allows the internal coolant to flow and absorb heat to lower the temperature. A connecting pipe 204 is slidably connected to the outer wall of the condenser pipe 202. A pipe clamp 203 is slidably connected to the outer wall of the connecting pipe 204, so that the condenser pipe 202 is fixedly connected to the cooler 205. The cooler 205 is responsible for cooling the coolant and circulating it to achieve the cooling effect. An equipment shell 206 is fixedly connected to the outer wall of the cooler 205. The equipment shell 206 protects the internal equipment. A rotating shaft 207 is fixedly connected to the top of the equipment shell 206. The rotating shaft 207 is used to drive the opening and closing of the maintenance door 208 to facilitate equipment maintenance and ensure the operation of the system.

[0035] Please see the appendix Figure 1 Appendix Figure 2 and attached Figure 3 The bottom of the air compressor 6 is provided with a threaded hole 13, and the inner wall of the threaded hole 13 is threaded with a screw 14. The right side of the fixed shaft 11 is fixedly connected with an extension block 15, the left side of the rotating arm 12 is fixedly connected with a mechanical arm 23, the left side of the mechanical arm 23 is fixedly connected with a control panel 21, and the outer wall of the control panel 21 is slidably connected with a button 22.

[0036] Specifically, at the bottom of the air compressor 6, threaded holes 13 are specially designed. The inner walls of these threaded holes 13 are tightly connected to screws 14 by threads to ensure a firm fit. On the right side of the fixed shaft 11, an extension block 15 is fixedly connected to increase functionality. A robotic arm 23 is fixedly connected to the left side of the rotating arm 12. The robotic arm 23 can perform various operations. A control panel 21 is also fixedly connected to the left side of the robotic arm 23. Buttons 22 are slidably connected to the outer wall of the control panel 21, making operation easy.

[0037] Please see the appendix Figure 1 Appendix Figure 4 A stabilizing shell 24 is fixedly connected to the right side of the expansion block 15. A motor shell 17 is fixedly connected to the top of the stabilizing shell 24. A servo motor 16 is fixedly connected to the inner wall of the motor shell 17. A driving spur gear 18 is fixedly connected to the output end of the servo motor 16. A driven spur gear 19 is meshed with the outer wall of the driving spur gear 18. A soft clamp 20 is fixedly connected to the outer wall of the driven spur gear 19.

[0038] Specifically, on the right side of the expansion block 15, a stabilizing shell 24 is fixedly connected. The top of the stabilizing shell 24 is fixed to the motor shell 17. A servo motor 16 is fixedly installed on the inner wall of the motor shell 17. The servo motor 16 is an MSMF5AZL1V2M model. The output end of the servo motor 16 is tightly connected to a driving spur gear 18. The outer wall of the driving spur gear 18 is meshed with a driven spur gear 19. A soft clamp 20 is fixed on the outer wall of the driven spur gear 19, enabling the entire structure to operate.

[0039] Working principle: First, during equipment use, the filter 7 is activated to draw air in through the air inlet pipe 8. After the air is drawn into the filter 7, it is filtered to remove particles and oil mist. Then, the filtered air enters the air compressor 6. The air compressor 6 compresses the air and delivers it along the air supply pipe 5 to the air bladder 3. After the air bladder 3 is filled with compressed air, the fixed shaft 11 is floated and fixed. When the fixed shaft 11 is impacted, the impact force is transmitted along the fixed shaft 11 to the air bladder 3 and reduced by the air. If the impact force is too large for the air bladder 3 to withstand, the pressure relief pipe 4 absorbs the large impact force and discharges the air, thus reducing a large amount of impact force. This achieves the effect of using gas to support the equipment and reduce vibration.

[0040] During equipment use, the outer wall of the fixed shell 1 is wrapped with condenser tubes 202. Condensate flows inside the condenser tubes 202. The condensate absorbs heat from the outside and releases low temperature to lower the surrounding temperature. The condenser tubes 202 are connected to the inside of the cooler 205 through the connecting pipe 204 and are fixed with pipe clamps 203. The cooler 205 is started to cool the condensate inside, and then the condensate is transported to the condenser tubes 202 through the other end for circulation and cooling. The outer wall of the cooler 205 is fixed with the equipment shell 206 to protect the cooler 205. The equipment shell 206 has a maintenance door 208 which can be flipped by the rotating shaft 207 for easy access. This achieves the function of controlling the temperature around the air flotation mechanism and extending its service life.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer robotic arm end effector with air-floating anti-shake stabilizer, comprising a fixed housing (1), characterized in that: An airbag (3) is fixedly connected inside the fixed shell (1). A fixed shaft (11) is fixedly connected to the inner wall of the airbag (3). An air supply pipe (5) is connected to the left side of the airbag (3). An air compressor (6) is connected to the other end of the air supply pipe (5). A filter (7) is fixedly connected to the top of the air compressor (6). An air inlet pipe (8) is connected to the top of the filter (7). A fixed block (9) is threadedly connected to the bottom of the air compressor (6). A pressure relief pipe (4) is fixedly connected to the bottom of the airbag (3). A protective box (10) is fixedly connected to the outer wall of the air compressor (6). A rotating arm (12) is fixedly connected to the right side of the fixed shell (1). A cooling structure (2) is fixedly connected to the outer wall of the fixed shaft (11). The cooling structure (2) is used to control the temperature of the equipment.

2. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 1, characterized in that: The cooling structure (2) includes an insulation shell (201), the inner wall of the insulation shell (201) is fixedly connected to the outer wall of the fixed shaft (11), a condenser (202) is fixedly connected to the inner wall of the insulation shell (201), a connecting pipe (204) is slidably connected to the outer wall of the condenser (202), a pipe clamp (203) is slidably connected to the outer wall of the connecting pipe (204), a cooler (205) is connected to the outer wall of the cooler (205), an equipment shell (206) is fixedly connected to the outer wall of the cooler (205), a rotating shaft (207) is fixedly connected to the top of the equipment shell (206), and a maintenance door (208) is rotatably connected to the outer wall of the rotating shaft (207).

3. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 1, characterized in that: The top of the air compressor (6) is provided with a threaded hole (13), and a screw (14) is threadedly connected to the inner wall of the threaded hole (13).

4. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 1, characterized in that: An extension block (15) is fixedly connected to the right side of the fixed shaft (11), and a mechanical arm (23) is fixedly connected to the left side of the rotating arm (12).

5. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 4, characterized in that: The left side of the robotic arm (23) is fixedly connected to a control panel (21), and a button (22) is slidably connected to the outer wall of the control panel (21).

6. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 4, characterized in that: A stabilizing shell (24) is fixedly connected to the right side of the expansion block (15), and a motor shell (17) is fixedly connected to the top of the stabilizing shell (24).

7. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 6, characterized in that: A servo motor (16) is fixedly connected to the inner wall of the motor housing (17), and a drive spherical gear (18) is fixedly connected to the output end of the servo motor (16).

8. The end effector air-float anti-shake stabilizer for wafer robotic arms according to claim 7, characterized in that: The outer wall of the driving sprocket (18) is meshed with a driven sprocket (19), and the outer wall of the driven sprocket (19) is fixedly connected with a soft clamp (20).

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