A furnace opening device

Abstract

The utility model discloses a hearth trepanning device, including the transverse adjustable drilling structure, it is fixedly connected through the thickened base with flange, the flange adopts expansion bolt and is fixed in hearth outer wall, and the contact surface coats 0.8 1.2mm high temperature resistant seal glue layer, the rack in drilling structure and gear engage, are driven by brake bolt, and cooperate scale ring and realize 0.05mm level micro -control feed, locking bolt ensures the positioning accuracy, and the cooperation clearance of guide slide rail and sliding block is less than or equal to 0.02mm, and adjustable support adopts hydraulic lifting rod and calibrates drill bit height and perpendicularity. Motor main part is variable frequency motor, and adapts TiN coating drill bit, and flange supports ISO-K, CF etc. standardized interface, can switch trepanning and detection equipment installation fast. The device solves the problems, such as big traditional reserved hole error, new hole position difficulty etc., realizes high accuracy trepanning and modular operation, is applicable to the scene, such as new observation window, laser window after hearth forming, improves the sealing property and operating efficiency.

Description

Technical Field

[0001] This utility model relates to the technical field of chemical vapor deposition (CVD) equipment, specifically a furnace opening device, which is suitable for opening various openings such as observation windows, laser windows, and exhaust holes on a furnace that has been built up. Background Technology

[0002] In CVD technology, the sealing of the furnace and the high-temperature environment place extremely high demands on the precision of the openings.

[0003] The traditional method of pre-drilling holes in bricks has the following problems:

[0004] Traditional pre-reserved hole positions have large errors: When pre-reserved holes are made by processing bricks, the processing error of the bricks and the stacking alignment deviation are superimposed, resulting in deviation of the hole position gap, which can easily cause gas leakage in the furnace, affect the stability of the CVD process, and even cause safety hazards.

[0005] The flexibility of adding new holes is insufficient: Traditional methods rely on pre-reserved holes when laying bricks. When new holes (such as laser windows or waste outlets) are needed in the forming furnace, there is a lack of reliable hole-opening methods, which cannot meet the needs of process changes.

[0006] Low positioning accuracy of the hole-opening device: Existing hole-opening equipment lacks a standardized positioning structure, and manual operation makes it difficult to guarantee the hole-opening position accuracy (such as the coaxiality requirement of the laser window). In addition, the lack of effective support makes components such as racks susceptible to deformation due to gravity, affecting the straightness of the hole.

[0007] Poor sealing and connection reliability: Traditional flange connections do not take into account high-temperature sealing performance and rely solely on bolt fixing, which can easily lead to air leakage; there are no dust prevention measures during the opening process, and dust enters the furnace and affects the deposition quality.

[0008] High operating efficiency and maintenance costs: The non-modular design results in poor equipment versatility. When changing drill bits or adapting to different instruments, the entire equipment needs to be disassembled, which is time-consuming and labor-intensive. In addition, the maintenance costs of easily worn parts (such as ordinary steel racks) are high.

[0009] Therefore, a furnace opening device needs to be designed to solve the problems mentioned above. Utility Model Content

[0010] The purpose of this invention is to provide a furnace opening device to solve the problems mentioned in the background art.

[0011] To achieve the above objectives, this utility model provides the following technical solution:

[0012] A furnace opening device includes a horizontally adjustable drilling structure. A thickened base is fixedly connected to one side of the drilling structure. A flange is fixedly connected to the side of the thickened base away from the drilling structure. The side of the flange away from the thickened base is fixedly installed on the outer wall of the furnace. A support frame is fixedly installed on the other side of the drilling structure.

[0013] The drilling structure includes a rack horizontally mounted between a thickened base and a support frame. A gear is meshed on the lower meshing surface of the rack. A brake bolt is fixedly connected to one axial side of the gear and is driven by the brake bolt. Several threaded holes are annularly opened on the outer surface of the gear, and the gear is locked and fixed by locking bolts through the threaded holes. A guide rail is slidably connected above the rack. A slider is set at the top of the guide rail and at the outer end of the rack. A motor body is fixedly mounted at the front of the top of the slider by an adjustable bracket. A drill bit is fixedly connected to the front output shaft end of the motor body.

[0014] The outer wall of the furnace is provided with an upper observation window located above the furnace, a lower observation window located below the furnace, a pair of laser receiving windows and laser emitting windows, and left and right waste discharge ports symmetrically distributed on both sides of the furnace through a drilling structure.

[0015] As a preferred embodiment of this utility model, the flange is fixedly connected to the outer wall of the furnace by expansion bolts with a bolt spacing of ≤80mm, and the contact surface between the flange and the furnace is coated with a high-temperature resistant sealant layer with a thickness of 0.8-1.2mm.

[0016] As a preferred embodiment of this utility model, the rack is made of 40Cr alloy structural steel, and the surface is hardened to HRC45-50. The brake bolt and the gear are connected by a keyway transmission. The transmission ratio between the gear and the rack is 1:1.5, the pitch of the brake bolt is 1.25mm, and each rotation drives the drill to move laterally by 1.875mm. The graduation ring on the outer surface of the gear has an accuracy of 0.05mm, realizing micro-control adjustment of the drilling depth.

[0017] As a preferred embodiment of this utility model, the locking bolt is an internal hexagonal head bolt, with a spring washer to prevent loosening. When the drilling machine moves to the target position, the gear is fixed to the rack by tightening the locking bolt. The locking force is ≥500N, ensuring no displacement during the drilling process.

[0018] As a preferred embodiment of this utility model, the guide rail is arranged parallel to the rack and adopts a linear guide rail structure. The clearance between the slider and the guide rail is ≤0.02mm, and the bottom of the slider is provided with double-row ball bearings with a friction coefficient ≤0.002, ensuring the stability of the drilling rig's lateral movement.

[0019] As a preferred embodiment of this utility model, the adjustable bracket adopts a hydraulic lifting rod to adjust the height of the motor body and the drill bit.

[0020] As a preferred embodiment of this utility model, the motor body is a variable frequency motor that supports 3-speed adjustment; the drill bit is coated with TiN, with a diameter range of Φ5-Φ40mm and a coaxiality of ≤0.03mm.

[0021] As a preferred embodiment of this utility model, the inner diameter of the flange is compatible with the flange interface of various windows and supports ISO-K and CF standardized interfaces. By replacing the adapter plate, it can be adapted to laser detectors and gas analyzers, realizing integrated "hole opening-installation" operation.

[0022] Compared with the prior art, the beneficial effects of this utility model are:

[0023] In this utility model, the furnace opening device can achieve the following effects: 1. High-precision positioning and opening.

[0024] The flange is fixed by expansion bolts (spacing ≤ 80mm) and fitted with a 0.8-1.2mm thick high-temperature resistant sealant layer. The positioning error is ≤ ±0.2mm, which solves the problem of traditional pre-drilled hole stacking error and ensures that the coaxiality deviation of high-precision holes such as laser windows is ≤ ±0.1mm.

[0025] 2. Micro-control drive and reliable locking

[0026] The brake bolt is driven by a 1:1.5 gear rack (1.25mm pitch, 0.05mm scale ring accuracy) to achieve 0.05mm increment feed control, meeting the requirements for precision drilling depth; the internal hexagon lock bolt (locking force ≥500N) prevents drilling displacement and solves the problem of insufficient precision in manual operation.

[0027] 3. Adaptive adjustment and safety protection

[0028] The adjustable bracket enables precise calibration of drill bit height and position within ±5mm; the variable frequency motor (3 speed settings) is compatible with different furnace materials, improving equipment safety and lifespan.

[0029] 4. Modular design for compatibility and easy maintenance

[0030] The flange supports standardized interfaces such as ISO-K and CF, and can be adapted to equipment such as laser detectors through quick-change adapter plates, realizing the integration of "drilling-installation" and shortening the process cycle by more than 50%; the TiN coated drill bit (coaxiality ≤0.03mm) supports quick replacement in 1 minute, and the modular structure reduces maintenance costs by 30%. Attached Figure Description

[0031] Figure 1This is a schematic diagram of the overall main structure of this utility model;

[0032] Figure 2 This is a schematic diagram of the internal connection structure of the slider of this utility model;

[0033] Figure 3 This is a schematic diagram of the furnace chamber and outer wall of the present invention.

[0034] In the diagram: 1. Laterally adjustable drilling structure; 2. Thickened base; 3. Flange; 4. Furnace outer wall; 5. Support frame; 11. Rack; 12. Gear; 13. Brake bolt; 14. Locking bolt; 15. Guide rail; 16. Slider; 17. Motor body; 18. Drill bit; 19. Adjustable bracket; 41. Upper observation window; 42. Lower observation window; 43. Laser receiving window; 44. Laser emitting window; 45. Left waste outlet; 46. Right waste outlet. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0036] To facilitate understanding of this utility model, a more comprehensive description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are provided. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0037] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0039] For examples, please refer to Figure 1-3 This utility model provides a technical solution:

[0040] A furnace opening device includes a horizontally adjustable drilling structure 1. A thickened base 2 is fixedly connected to one side of the drilling structure 1, and a flange 3 is fixedly connected to the side of the thickened base 2 away from the drilling structure 1. The flange 3 is fixedly connected to the outer wall 4 of the furnace by expansion bolts with a bolt spacing ≤80mm. The contact surface between the flange and the furnace is coated with a high-temperature resistant sealant layer with a thickness of 0.8-1.2mm. The side of the flange 3 away from the thickened base 2 is fixedly installed on the outer wall 4 of the furnace. The outer wall 4 of the furnace has openings located above the furnace through the drilling structure 1. The furnace includes an observation window 41, a lower observation window 42 below the furnace, a pair of laser receiving windows 43 and laser emitting windows 44, and left and right waste discharge ports 45 and 46 symmetrically distributed on both sides of the furnace. A support frame 5 is fixedly installed on the other side of the drilling structure 1. The opening positions are marked on the outer wall 4 of the furnace. The flange 3 is fixed with expansion bolts, and a 0.8-1.2mm high-temperature resistant sealant layer is applied to the contact surface between the flange and the furnace. The thickened base 2 is fixedly connected to the flange 3, and the drilling structure 1 is supported on the other side by the support frame 5 to ensure overall stability.

[0041] Specifically, the drilling structure 1 includes a rack 11 horizontally mounted between the thickened base 2 and the support frame 5. A gear 12 is meshed on the lower meshing surface of the rack 11. A brake bolt 13 is fixedly connected to one axial side of the gear 12 and is driven by the brake bolt 13. Several threaded holes are annularly formed on the outer surface of the gear 12, and the gear 12 is locked and fixed by locking bolts 14 through the threaded holes. A guide rail 15 is slidably connected above the rack 11. A slider 16 is set at the top of the guide rail 15, which is also located at the outer end of the rack 11. A motor body 17 is fixedly mounted at the front position of the top of the slider 16 by an adjustable bracket 19. A drill bit 18 is fixedly connected to the front output shaft. A rotating brake bolt 13 drives a rack 11 via a gear 12 (transmission ratio 1:1.5), which in turn drives a slider 16 to move laterally along a guide rail 15 (1.875mm per revolution, with a scale ring accuracy of 0.05mm). After reaching the target position, a locking bolt 14 (hexagonal socket head cap screw, locking force ≥500N) is used to fix the gear 12, ensuring that the drill has no displacement. The micro-control drive achieves 0.05mm-level precision adjustment, which, together with the linear guide rail (gap ≤0.02mm) and double-row ball bearings (friction coefficient ≤0.002), ensures that the hole opening position error is ≤±0.2mm, solving the problem of insufficient precision in traditional manual hole opening.

[0042] Specifically, the rack 11 is made of 40Cr alloy structural steel, and its surface is hardened to HRC45-50. The brake bolt 13 and the gear 12 are connected by a keyway transmission. The transmission ratio between the gear and the rack is 1:1.5. The pitch of the brake bolt is 1.25mm. Each rotation drives the drill to move laterally by 1.875mm. The graduation ring on the outer surface of the gear has an accuracy of 0.05mm, which realizes the micro-control adjustment of the drilling depth.

[0043] Specifically, the locking bolt 14 is an internal hexagonal head bolt, with a spring washer to prevent loosening. When the drilling machine moves to the target position, the gear 12 is fixed to the rack 11 by tightening the locking bolt 14. The tightening force is ≥500N to ensure no displacement during the drilling process.

[0044] Specifically, the guide rail 15 is arranged parallel to the rack 11 and adopts a linear guide structure. The clearance between the slider 16 and the guide rail 15 is ≤0.02mm, and the bottom of the slider is equipped with double-row ball bearings with a friction coefficient ≤0.002 to ensure the stability of the drilling rig's lateral movement.

[0045] Specifically, the adjustable bracket 19 uses a hydraulic lifting rod to adjust the height of the motor body 17 and the drill bit 18. By adjusting the height of the motor body 17 and the drill bit 18 through the adjustable bracket 19 (hydraulic lifting rod), and cooperating with the bubble level to calibrate the verticality (deviation ≤0.3°), the drill bit is ensured to be perpendicular to the furnace surface.

[0046] Specifically, the motor body 17 is a variable frequency motor, supporting 3-speed adjustment; the drill bit 18 is TiN coated, with a diameter range of Φ5-Φ40mm and coaxiality ≤0.03mm; according to the hole diameter requirements, the drill bit 18 (TiN coated, Φ5-Φ40mm, coaxiality ≤0.03mm) is replaced, the variable frequency motor (3-speed adjustment) is started, and drilling is performed at a feed speed of ≤0.3mm / s, with the depth monitored by a scale ring during the process; the carbide coated drill bit is compatible with various furnace materials, the variable frequency motor balances efficiency and accuracy, the continuous operating temperature is ≤70℃, and subsequent dust can be collected through a negative pressure system, making it environmentally friendly and safe.

[0047] Specifically, the inner diameter of flange 3 matches the flange interface of various windows and supports ISO-K and CF standardized interfaces. By replacing the adapter plate, it can be adapted to laser detectors and gas analyzers, realizing the integrated "drilling-installation" operation. After drilling, the drilling structure 1 is disassembled, and the adapter plate is replaced as needed. The laser detector, gas analyzer and other equipment are installed on flange 3 through the standardized flange interface (ISO-K / CF), completing the integrated "drilling-installation" operation. The modular design supports quick switching function, adapts to a variety of detection equipment, shortens the process cycle by more than 50%, and the flange seal ensures the furnace sealing after the equipment is installed, meeting the stability requirements of the CVD process.

[0048] The working process of this utility model is as follows: When using the CVD furnace opening device, first mark the opening position on the outer wall 4 of the furnace, fix the flange 3 with expansion bolts (bolt spacing ≤ 80mm), coat the contact surface between the flange and the furnace with a 0.8-1.2mm thick high temperature resistant sealant layer to ensure airtightness, then fix the thickened base 2 to the flange 3, install the support frame 5 on the other side, and horizontally install the rack 11 and fix it parallel to the guide rail 15 to form the support frame of the drilling structure 1;

[0049] Rotate the brake bolt 13, which drives the rack 11 via the gear 12 (transmission ratio 1:1.5), causing the slider 16 to move along the guide rail 15 (1.875mm per revolution, scale ring accuracy 0.05mm); after reaching the target position, fix the gear 12 with the locking bolt 14 (locking force ≥500N); adjust the height of the motor body 17 and the drill bit 18 via the adjustable bracket 19 (hydraulic lifting rod), and calibrate the verticality (deviation ≤0.3°) using a bubble level to ensure that the drill bit is perpendicular to the furnace surface; replace the drill bit 18 with a corresponding diameter (TiN coating, Φ5-Φ40mm), start the variable frequency motor (3-speed adjustment), drill at a micro-controlled feed speed, monitor the depth through the scale ring, and simultaneously start the negative pressure dust collection system to collect dust;

[0050] After the drilling is completed, the drilling structure 1 is disassembled, and the adapter plate is replaced through the standardized interface (ISO-K / CF) of flange 3. The laser detector, gas analyzer and other equipment are then installed to complete the integrated "drilling-installation" operation.

[0051] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A furnace opening device, comprising a laterally adjustable drilling structure (1), characterized in that: A thickened base (2) is fixedly connected to one side of the drilling structure (1), and a flange (3) is fixedly connected to the side of the thickened base (2) away from the drilling structure (1). The side of the flange (3) away from the thickened base (2) is fixedly installed on the outer wall (4) of the furnace. A support frame (5) is fixedly installed on the other side of the drilling structure (1). The drilling structure (1) includes a rack (11) installed laterally between the thickened base (2) and the support frame (5). A gear (12) is meshed on the lower meshing surface of the rack (11). A brake bolt (13) is fixedly connected to one axial side of the gear (12) and is driven by the brake bolt (13). Several threaded holes are opened in a ring on the outer surface of the gear (12). The gear (12) is locked and fixed by a locking bolt (14) through the threaded holes. A guide rail (15) is slidably connected above the rack (11). A slider (16) is provided at the top of the guide rail (15) at the outer end of the rack (11). A motor body (17) is fixedly installed at the front position of the top of the slider (16) by an adjustable bracket (19). A drill bit (18) is fixedly connected to the front output shaft end of the motor body (17). The outer wall (4) of the furnace is provided with an upper observation window (41) above the furnace, a lower observation window (42) below the furnace, a pair of laser receiving windows (43) and laser emitting windows (44), and left waste outlets (45) and right waste outlets (46) symmetrically distributed on both sides of the furnace through a drilling structure (1).

2. The furnace opening device according to claim 1, characterized in that: The flange (3) is fixedly connected to the outer wall (4) of the furnace by expansion bolts with a bolt spacing of ≤80mm, and the contact surface between the flange and the furnace is coated with a high-temperature resistant sealant layer with a thickness of 0.8-1.2mm.

3. The furnace opening device according to claim 1, characterized in that: The rack (11) is made of 40Cr alloy structural steel and its surface is hardened to HRC45-50. The brake bolt (13) and the gear (12) are connected by keyway transmission. The transmission ratio between the gear and the rack is 1:1.

5. The pitch of the brake bolt is 1.25mm. Each rotation drives the drill to move laterally by 1.875mm. The accuracy of the scale ring on the outer surface of the gear is 0.05mm, realizing the micro-control adjustment of the hole opening depth.

4. The furnace opening device according to claim 1, characterized in that: The locking bolt (14) is an internal hexagonal head bolt, with a spring washer to prevent loosening. When the drilling machine moves to the target position, the gear (12) is fixed to the rack (11) by tightening the locking bolt (14). The locking force is ≥500N to ensure no displacement during drilling.

5. The furnace opening device according to claim 1, characterized in that: The guide rail (15) is set parallel to the rack (11) and adopts a linear guide rail structure. The clearance between the slider (16) and the guide rail (15) is ≤0.02mm. The bottom of the slider is equipped with double-row balls with a friction coefficient ≤0.002, which ensures the stability of the lateral movement of the drilling rig.

6. The furnace opening device according to claim 1, characterized in that: The adjustable bracket (19) uses a hydraulic lifting rod to adjust the height of the motor body (17) and the drill bit (18).

7. The furnace opening device according to claim 1, characterized in that: The motor body (17) is a variable frequency motor that supports 3 speed adjustments; the drill bit (18) is coated with TiN, with a diameter range of Φ5-Φ40mm and a coaxiality of ≤0.03mm.

8. The furnace opening device according to claim 1, characterized in that: The inner diameter of the flange (3) is matched with the flange interface of various windows and supports ISO-K and CF standardized interfaces. By replacing the adapter plate, it can be adapted to laser detectors and gas analyzers, realizing the integrated operation of "opening-installation".

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