Gas inlet assembly and sputtering coating equipment

Abstract

The application relates to the field of sputtering coating equipment, and provides a gas inlet assembly and sputtering coating equipment. The gas inlet assembly comprises a gas inlet main body and a sealing plate. The gas inlet main body is provided with a first gas inlet hole and a first gas outlet hole. The gas inlet main body is provided with a first shunt groove on one side, and the first shunt groove is communicated with the first gas inlet hole and the first gas outlet hole. The sealing plate is suitable for being mounted on the side wall of the gas inlet main body and forming a first shunt channel. A first flow path of the first shunt channel is communicated with two second flow paths through a first shunt port. Each second flow path is communicated with two third flow paths through a second shunt port. The sputtering coating equipment comprises the gas inlet assembly. The application discards the traditional sleeve and welding structure, and instead uses the first shunt groove which is integrally processed on the side wall of the gas inlet main body. The assembly assembly error is eliminated, and the welding seam leakage risk is eliminated. Moreover, the first shunt groove adopts a multi-stage shunt design. The gas flow rate can be effectively reduced, the turbulent loss can be reduced, the gas transmission efficiency can be improved, and the gas can be distributed to each area in a highly uniform state.

Description

Technical Field

[0001] This utility model relates to the field of sputtering coating equipment, and further to an air intake component and sputtering coating equipment. Background Technology

[0002] The existing intake assembly has a complex structure, consisting of a first sleeve, a second sleeve, and a third sleeve from the inside out. Each sleeve has perforations to form an intake port, with the first exhaust port located at the top of the first sleeve, the second exhaust port at the bottom of the second sleeve, and the third exhaust port at the top of the third sleeve. To accommodate different gases, multiple intake assemblies are required, making the overall structure of the intake assembly more complex and occupying a larger space.

[0003] In practical applications, the ends of these three sleeves are connected to each other by welding plugs. This manufacturing process is not only complex and cumbersome, but also prone to poor uniformity. In particular, each sleeve may have an angular error during the welding process, making it difficult to guarantee the vertical correspondence of the first, second, and third vent holes, thus increasing the uncertainty of vent uniformity.

[0004] Furthermore, misalignment of the orifice positions and inconsistent diffusion angles between adjacent sleeves can lead to uneven gas output from the uppermost third vent. More seriously, the first vent is prone to blockage by sputtered coating after prolonged use, further exacerbating the uneven gas output problem. Utility Model Content

[0005] To address the aforementioned technical problems, the purpose of this utility model is to provide an air intake component and sputtering coating equipment. It abandons the traditional sleeve and welding structure, instead using a first diversion groove integrally machined on the side wall of the air intake body. This significantly simplifies the manufacturing process, eliminates component assembly errors, eliminates the risk of weld leakage, and reduces production difficulty and cost. Furthermore, the first diversion groove adopts a multi-stage diversion design. After the gas flows in from the first air intake hole, it first enters the first flow path, and then splits into two second flow paths at the first diversion port. Each second flow path then splits at the second diversion port, forming two third flow paths. Finally, four evenly distributed first air outlets are obtained within the third flow paths. This progressively divided flow channel layout not only effectively reduces gas velocity, minimizes turbulence losses, and improves gas transmission efficiency, but also ensures that the gas is distributed to each area in a highly uniform state, greatly improving the equipment's air intake efficiency and working performance.

[0006] To achieve the above objectives, this utility model provides an air intake assembly, including an air intake body and a sealing plate. The air intake body is provided with a first air intake hole and a plurality of first air outlet holes. A first diversion groove is provided on one side of the air intake body to connect the first air intake hole and the first air outlet holes.

[0007] The sealing plate is adapted to be installed on the side wall of the air intake body and cover the first diversion groove, so that the first diversion groove forms the first diversion channel. The first diversion channel includes a first flow path, a second flow path and a third flow path. The first flow path is connected to two second flow paths through a first diversion port. Each second flow path is connected to two third flow paths through a second diversion port. The first air intake hole is connected to the first flow path. Each of the third flow paths is connected to a first air outlet hole.

[0008] In some embodiments, the first flow path, the second flow path, and the third flow path are arranged in parallel relative to each other, the two second flow paths are symmetrically arranged on both sides of the first diversion port, the two third flow paths are symmetrically arranged on both sides of the second diversion port, the first air outlet is located at the top of the air intake body and symmetrically arranged on both sides of the second diversion port, and the first air inlet is located at the bottom of the air intake body.

[0009] In some embodiments, a third diversion port connected to the first air inlet is provided in the middle of the first flow path, and two sets of independent first diversion channels are formed on both sides of the third diversion port.

[0010] In some embodiments, a placement groove is provided on one side of the air intake body, and the first diversion groove is disposed at the bottom of the placement groove. Both the upper and lower ends of the sealing plate are adapted to be fixedly installed in the placement groove by a row of locking members, so that the first diversion groove forms the first diversion channel.

[0011] In some embodiments, an outlet bolt is detachably installed in the first outlet via threads.

[0012] In some embodiments, the bottom of the air intake body is further provided with an assembly groove, which is disposed on both sides of the first air intake hole, and the bottom of the assembly groove is adapted to be fixedly installed inside the reaction chamber of the sputtering device by a locking member.

[0013] In some embodiments, the air intake body is further provided with a second air intake hole and a plurality of second air outlet holes, and a second diversion groove connecting the second air intake hole and the second air outlet holes is provided on the other side of the air intake body; the second diversion groove is adapted to be covered by another sealing plate to form a second diversion channel.

[0014] In some embodiments, the second diversion channel includes a first chamber and a second chamber, the first chamber being connected to the second air inlet, the second chamber being connected to a plurality of second air outlets, and the first chamber and the second chamber being interconnected through a plurality of connecting ports.

[0015] According to another aspect of this application, a sputtering coating apparatus is further provided, including any one of the above preferred embodiments of an air intake component and a reaction chamber, wherein the air intake component is installed in the reaction chamber.

[0016] Compared with the prior art, the air intake component and sputtering coating equipment provided by this utility model have at least one of the following beneficial effects:

[0017] 1. This intake assembly abandons the traditional sleeve and welding structure, and instead uses an integrated first diversion groove machined on the side wall of the intake body, which greatly simplifies the manufacturing process, eliminates component assembly errors, eliminates the risk of weld leakage, and reduces production difficulty and cost. Moreover, the first diversion groove adopts a multi-stage diversion design. After the gas flows in from the first intake hole, it first enters the first flow path, and then splits into two second flow paths at the first diversion port. Then, each second flow path splits at the second diversion port to form two third flow paths, and finally obtains four evenly distributed first exhaust holes in the third flow path. This step-by-step flow channel layout can not only effectively reduce the gas flow velocity, reduce turbulence loss, and improve gas transmission efficiency, but also ensure that the gas is distributed to each area in a highly uniform state, which greatly improves the intake efficiency and working performance of the equipment.

[0018] 2. The first, second, and third flow paths are arranged in a relatively parallel manner within the first diversion channel, ensuring that the gas can be transported at a relatively uniform and stable flow rate throughout the diversion process, effectively reducing airflow turbulence and energy loss that may be caused by abrupt changes in flow path direction.

[0019] 3. Both the upper and lower ends of the sealing plate are fixedly installed in the placement groove by a row of locking parts. This not only ensures a tight fit between the sealing plate and the air intake body, but also allows the sealing plate to stably cover the first diversion groove.

[0020] 4. The vent bolt can be detachably installed inside the first vent, which effectively solves the problem of sputtering coating blockage. When the coating material accumulates inside the vent bolt and causes poor airflow, timely removal and replacement of the vent bolt can quickly restore the normal function of the first vent and ensure the stable operation of the air intake component.

[0021] 5. On the other side of the air intake body, there is also a second diversion groove that connects the second air intake hole and the second air outlet hole. The second diversion groove is suitable for being covered by another sealing plate to form a second diversion channel, so that the first diversion channel and the second diversion channel can share a single air intake component, saving space, improving the integration and space utilization of the equipment, and reducing costs. Attached Figure Description

[0022] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0023] Figure 1 This is an overall diagram of an air intake assembly;

[0024] Figure 2 This is a diagram showing the location of the first air intake.

[0025] Figure 3 This is an exploded view of the air intake assembly;

[0026] Figure 4 This is a structural diagram of the first diversion channel;

[0027] Figure 5 This is a structural diagram of the second diversion channel.

[0028] Explanation of icon numbers:

[0029] Air intake body 1, first diversion groove 11, first flow path 111, second flow path 112, third flow path 113, first diversion port 114, second diversion port 115, third diversion port 116, first air inlet 12, first air outlet 13, air outlet bolt 131, placement groove 14, assembly groove 15, second air inlet 16, second air outlet 17, second diversion groove 18, first chamber 181, second chamber 182, connecting port 183, sealing plate 2, locking component 21. Detailed Implementation

[0030] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0031] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0032] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0033] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0035] refer to Figures 1 to 4 This utility model provides an air intake assembly, including an air intake body 1 and a sealing plate 2. The air intake body 1 is provided with a first air intake hole 12 and a plurality of first air outlet holes 13. A first diversion groove 11 connecting the first air intake hole 12 and the first air outlet holes 13 is provided on one side of the air intake body 1. The sealing plate 2 is adapted to be installed on the side wall of the air intake body 1 and cover the first diversion groove 11, so that the first diversion groove 11 forms a first diversion channel. The first diversion channel includes a first flow path 111, a second flow path 112 and a third flow path 113. The first flow path 111 connects to two second flow paths 112 through a first diversion port 114. Each second flow path 112 connects to two third flow paths 113 through a second diversion port 115. The first air intake hole 12 connects to the first flow path 111. Each third flow path 113 connects to a first air outlet hole 13.

[0036] In this embodiment, the intake assembly abandons the traditional sleeve and welding structure, and instead uses a first diversion groove 11 integrally machined on the side wall of the intake body 1, which greatly simplifies the manufacturing process, eliminates component assembly errors, eliminates the risk of weld leakage, and reduces production difficulty and cost. Moreover, the first diversion groove 11 adopts a multi-stage diversion design. After the gas flows in from the first intake hole 12, it first enters the first flow path 111, and is divided into two second flow paths 112 at the first diversion port 114. Then, each second flow path 112 is divided at the second diversion port 115 to form two third flow paths 113. Finally, four evenly distributed first exhaust holes 13 are obtained in the third flow path 113. This step-by-step flow channel layout can not only effectively reduce the gas flow velocity, reduce turbulence loss, and improve gas transmission efficiency, but also ensure that the gas is distributed to each area in a highly uniform state, which greatly improves the intake efficiency and working performance of the equipment.

[0037] Specifically, the intake body 1 is provided with a first air inlet 12 and several first air outlets 13. In particular, a first diversion groove 11 connecting the first air inlet 12 and the first air outlets 13 is machined on one side of the intake body 1, providing a basis for subsequent gas diversion. A sealing plate 2 is then installed on the side wall of the intake body 1, forming a first diversion channel through the first flow path 111. This eliminates the need for traditional sleeves and welding structures, simplifying the manufacturing process and reducing production difficulty and cost. During actual installation, the sealing plate 2 can be precisely installed on the side wall of the intake body 1, completely covering the first diversion groove 11. Once the sealing plate 2 successfully covers the first diversion groove 11, the two work together to transform the originally open first diversion groove 11 into a sealed first diversion channel with a specific function, ensuring the sealing of the first diversion channel, eliminating the risk of weld leakage, and improving the reliability of the intake assembly.

[0038] The first diversion channel has a complex and sophisticated internal structure, specifically comprising three interconnected and closely coordinated parts: a first flow path 111, a second flow path 112, and a third flow path 113. In the first diversion channel, the first flow path 111 connects to two second flow paths 112 via a first diversion port 114, thus achieving initial gas diversion between different flow paths. Each second flow path 112 is then connected to two third flow paths 113 via corresponding second diversion ports 115, allowing the gas to further subdivide its flow path and ultimately achieve a more refined diversion effect. From the inlet end, the first inlet port 12 is directly connected to the first flow path 111, allowing external gas to smoothly enter the entire diversion system. At the outlet end, each third flow path 113 is connected to a first outlet port 13, ensuring that the diverted gas can be discharged orderly and evenly from each first outlet port 13, thereby providing a stable and uniform airflow supply to the relevant equipment or system to meet its stringent requirements for intake conditions during normal operation. The first flow path 111 employs a multi-stage flow splitting mechanism, whereby the gas, after entering the intake assembly, undergoes progressive flow splitting to ultimately form four evenly distributed third flow paths 113. Each third flow path 113 is connected to a first exhaust port 13, ensuring that the gas is distributed to each area in a highly uniform manner, thereby improving intake efficiency and operating performance. The gas introduced into the first flow splitting channel is preferably oxygen; in modified embodiments, it can also be other gases, which are not further limited herein.

[0039] Further, refer to Figure 4The first flow path 111, the second flow path 112 and the third flow path 113 are arranged in parallel relative to each other. The two second flow paths 112 are symmetrically arranged on both sides of the first diversion port 114, and the two third flow paths 113 are symmetrically arranged on both sides of the second diversion port 115. The first air outlet 13 is located at the top of the air intake body 1 and is symmetrically arranged on both sides of the second diversion port 115. The first air inlet 12 is located at the bottom of the air intake body 1.

[0040] In this embodiment, the first flow path 111, the second flow path 112, and the third flow path 113 are arranged in a relatively parallel manner within the first diversion channel, which ensures that the gas can be transmitted at a relatively uniform and stable flow rate throughout the diversion process, effectively reducing the airflow turbulence and energy loss that may be caused by sudden changes in the flow path direction.

[0041] Specifically, two second flow paths 112 are symmetrically arranged on both sides of the first diversion port 114. They extend outward from the first flow path 111 like arms, providing a path for the initial diversion of gas, allowing the airflow to be smoothly and evenly distributed into the second flow paths 112 on both sides. Two third flow paths 113 are symmetrically distributed on both sides of each second flow path 112, connected to the corresponding second flow path 112 via the second diversion port 115. This not only maintains the overall structural balance but also functionally achieves secondary gas subdivision, guiding the airflow evenly to each third flow path 113, preparing for the final exhaust stage. At this point, the first exhaust port 13 is located at the top of the intake body 1 and symmetrically distributed on both sides of the second diversion port 115. This utilizes the principles of gravity and fluid dynamics, allowing the diverted gas to be smoothly discharged from the top. The symmetrical layout also helps balance the airflow pressure, preventing excessive airflow impact on any part of the first exhaust port 13. Specifically, two second flow paths 112 are symmetrically arranged on both sides of the first branch port 114. Two third flow paths 113 are symmetrically distributed on both sides of each second flow path 112. The first flow path 111 is also symmetrically arranged relative to the first branch port 114; that is, the end of the first flow path 111 extends beyond the first branch port 114, the end of the second flow path 112 extends beyond the second branch port 115, and the end of the third flow path 113 extends beyond the first outlet port 13. This arrangement aims to provide sufficient space for gas flow, thereby preventing obstruction during gas flow. The symmetrical flow path arrangement balances gas pressure and velocity, reducing the problem of excessively high or low local pressure, thus reducing airflow resistance and improving gas flow efficiency. Simultaneously, the presence of multiple branch channels allows gas to be evenly distributed to each of the first outlet ports 13, ensuring a stable airflow supply to each first outlet port 13. The first air intake 12 is located at the bottom of the air intake body 1, at the low position of the entire air intake assembly. This facilitates the natural flow of external air under the action of gravity, providing convenience for the air intake process. It also makes it easier to filter out some larger impurities during the air intake process, because impurities are not easy to directly enter the air intake vent under the action of gravity.

[0042] Preferably, a third diversion port 116 connecting to the first air inlet 12 is further provided in the middle of the first flow path 111, and two sets of independent first diversion channels are formed on both sides of the third diversion port 116. In this embodiment, a third diversion port 116 connecting to the first air inlet 12 is provided in the middle of the first flow path 111. The arrangement of the third diversion port 116 cleverly divides the originally single first diversion channel into two independent parts in terms of function, thereby forming two sets of non-interfering and independent first diversion channels on both sides of the third diversion port 116. This not only significantly improves the diversion capacity of the entire air intake assembly, allowing gas to be diverted through different diversion channels, effectively avoiding the uneven diversion problem that may exist in a single channel, but also enhances the stability and reliability of the entire air intake system. Through this grouped diversion method, the airflow distribution of each part can be controlled more precisely, thereby meeting the stringent requirements for precise airflow distribution in different application scenarios, and providing a solid foundation for the efficient operation of related equipment. Preferably, the first diversion channel is provided with eight third flow paths 113, so that the top of the air intake body 1 is provided with eight first air outlets 13 at intervals. However, the number of the first diversion channel and the first air outlets 13 includes, but is not limited to, eight, as long as they adopt the multi-stage diversion structure of this application.

[0043] Furthermore, a placement groove 14 is provided on one side of the air intake body 1, and a first diversion groove 11 is provided at the bottom of the placement groove 14. Both the upper and lower ends of the sealing plate 2 are suitable for being fixedly installed in the placement groove 14 by a row of locking parts 21, so that the first diversion groove 11 forms a first flow path 111.

[0044] In this embodiment, both the upper and lower ends of the sealing plate 2 are fixedly installed in the placement groove 14 by a row of locking pieces 21. This not only ensures a tight fit between the sealing plate 2 and the air intake body 1, but also allows the sealing plate 2 to stably cover the first diversion groove 11.

[0045] Specifically, a placement groove 14 is provided on one side of the intake body 1, which provides a solid foundation and reliable support for the assembly and sealing of the entire intake assembly. A first diversion groove 11 is machined into the bottom of the placement groove 14, which communicates with the first air inlet 12 and several first air outlets 13 on the intake body 1, establishing an initial physical path for gas diversion. When the sealing plate 2 is securely installed in the placement groove 14, the originally open first diversion groove 11 is closed by the sealing plate 2, thus forming a first diversion channel between the two. This combination of the placement groove 14 and the sealing plate 2 not only improves the sealing performance of the entire intake assembly, ensuring no gas leakage during diversion, but also enhances the stability and reliability of the structure, enabling the entire intake assembly to better adapt to various operating conditions and environmental conditions.

[0046] It is worth noting that the bottom of the air intake body 1 is also provided with an assembly groove 15, which is located on both sides of the first air intake hole 12. The bottom of the assembly groove 15 is suitable for being fixedly installed inside the reaction chamber of the sputtering device by means of a locking member 21. By installing the locking member 21 in the assembly groove 15, the air intake assembly can be quickly installed inside the sputtering device, or easily disassembled when needed for maintenance or replacement. At this time, the assembly groove 15 is suitable for leaving space for the locking member 21 to enter and tighten, which not only improves the stability of the installation, but also facilitates disassembly and maintenance. The locking member 21 can be a bolt, screw or other suitable fastener, which fits tightly with the gas components inside the sputtering device to ensure that the air intake assembly remains stable inside the sputtering device and will not loosen due to vibration or other external forces.

[0047] Preferably, refer to Figure 1 An air outlet bolt 131 is detachably installed inside the first air outlet 13 via a thread.

[0048] In this embodiment, the vent bolt 131 is detachably installed inside the first vent 13, which effectively solves the problem of sputtering coating blockage. When the coating material accumulates inside the vent bolt 131 and causes poor airflow, timely disassembly and replacement of the vent bolt 131 can quickly restore the normal function of the first vent 13 and ensure the stable operation of the air intake component.

[0049] Specifically, the vent bolt 131 is a standard part with uniform dimensions, high interchangeability, ample market supply, and low procurement cost. In the event of clogging of the first vent 13 during sputtering coating, there is no need to customize special parts; a vent bolt 131 of the same specification can be quickly obtained from the market for replacement, shortening the maintenance cycle, reducing equipment downtime, and improving production efficiency. The threaded, detachable installation method is convenient; only a common tool such as a wrench is needed to easily tighten and loosen the vent bolt 131, enabling quick assembly and disassembly. Maintenance personnel do not require professional training and can complete the replacement work on-site, reducing reliance on professional maintenance personnel and saving labor costs. It is worth noting that the vent bolt 131 has an axially continuous air passage, which includes a head structure, a threaded structure, and a sealing structure. The head structure is typically hexagonal. The hexagonal head has multiple flat surfaces, facilitating tightening and loosening operations using a wrench or other tools. This design ensures sufficient torque can be applied during installation and disassembly while preventing slippage. Since the vent bolt 131 is a standard accessory in this field, it will not be described in detail here.

[0050] Further, refer to Figure 5The air intake body 1 is also provided with a second air intake hole 16 and several second air outlet holes 17. On the other side of the air intake body 1, a second diversion groove 18 is provided that connects the second air intake hole 16 and the second air outlet hole 17. The second diversion groove 18 is adapted to be covered by another sealing plate 2 and form a second diversion channel.

[0051] In this embodiment, the other side of the air intake body 1 is also provided with a second diversion groove 18 that connects the second air intake hole 16 and the second air outlet hole 17. The second diversion groove 18 is adapted to be covered by another sealing plate 2 and form a second diversion channel, so that the first diversion channel and the second diversion channel can share a single air intake component, saving space, improving the integration and space utilization of the equipment, and reducing costs.

[0052] Specifically, similar to the first diversion channel, the second diversion channel is also equipped with a second inlet 16, a second outlet 17, and a second diversion groove 18, enabling the second diversion channel to achieve efficient diversion and precise control. The second diversion channel and the first diversion channel can operate independently without interfering with each other, ensuring that the two gas systems can simultaneously meet the special gas requirements of different processes or equipment.

[0053] Furthermore, the integration of the first and second flow diversion channels within a single inlet assembly significantly reduces the space occupied by the equipment, improving its compactness and integration. This offers substantial advantages in space-constrained sputtering devices or complex process environments requiring the simultaneous use of multiple gases, enabling miniaturization and modular design. Moreover, sharing a single inlet assembly reduces the number and variety of required components, thereby lowering production and maintenance costs. Simultaneously, the dual-channel flow diversion allows for separate handling of different flow diversion channels during maintenance and repair, without affecting the normal operation of the other system, further enhancing equipment reliability and maintenance efficiency.

[0054] It is worth noting that in this embodiment, the gas introduced into the second distribution channel is argon. Given the characteristics of argon, its uniformity requirements are relatively poor. Therefore, the second distribution channel includes a first chamber 181 and a second chamber 182. The first chamber 181 is connected to the second inlet 16, and the second chamber 182 is connected to several second outlets 17. The first chamber 181 and the second chamber 182 are interconnected through several connecting ports 183. This distribution layout can meet its basic fluid distribution requirements while avoiding unnecessary complex structures. The first chamber 181, as the main inlet channel, receives argon from the second inlet 16 and distributes the gas evenly to the second chamber 182 through multiple connecting ports 183. The second chamber 182 further guides the gas to each of the second outlets 17, ensuring that the gas can be stably distributed to the required process area. The advantage lies in its simple and effective gas distribution mechanism, reducing reliance on complex distribution structures, thereby reducing costs and maintenance difficulty. At the same time, the multi-connecting-port design enhances the flexibility of gas distribution, enabling the system to adapt to different process requirements. Furthermore, the simplified structure improves the system's reliability and durability, reducing potential points of failure. Of course, if the gas uniformity requirements in the second diversion channel are high, it can also be consistent with the multi-stage diversion structure of the first diversion channel.

[0055] Furthermore, this application provides a sputtering coating apparatus, including an air intake assembly and a reaction chamber as described in any of the above embodiments, wherein the air intake assembly is installed within the reaction chamber.

[0056] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An air intake assembly, characterized in that, include: An air intake body is provided with a first air intake hole and a plurality of first air outlet holes, and a first diversion groove is provided on one side of the air intake body to connect the first air intake hole and the first air outlet holes; A sealing plate is adapted to be installed on the side wall of the air intake body and cover the first diversion groove, so that the first diversion groove forms a first diversion channel. The first diversion channel includes a first flow path, a second flow path, and a third flow path. The first flow path is connected to two second flow paths through a first diversion port, and each second flow path is connected to two third flow paths through a second diversion port. The first air intake hole is connected to the first flow path, and each of the third flow paths is connected to a first air outlet hole.

2. An intake assembly according to claim 1, characterized in that, The first flow path, the second flow path, and the third flow path are arranged in parallel relative to each other. The two second flow paths are symmetrically arranged on both sides of the first flow divider. The two third flow paths are symmetrically arranged on both sides of the second flow divider. The first air outlet is located on the top of the air intake body and symmetrically arranged on both sides of the second flow divider. The first air inlet is located at the bottom of the air intake body.

3. An intake assembly according to claim 2, characterized in that, The first flow path is also provided with a third flow divider in the middle, which is connected to the first air inlet. Two sets of independent first flow divider channels are formed on both sides of the third flow divider.

4. An intake assembly according to claim 1, characterized in that, The intake body has a placement groove on one side, and the first diversion groove is located at the bottom of the placement groove. Both the upper and lower ends of the sealing plate are adapted to be fixedly installed in the placement groove by a row of locking parts, so that the first diversion groove forms the first diversion channel.

5. An intake assembly according to claim 1, characterized in that, An air outlet bolt is detachably installed inside the first air outlet via a thread.

6. An intake assembly according to claim 1, characterized in that, The bottom of the air intake body is also provided with an assembly groove, which is located on both sides of the first air intake hole. The bottom of the assembly groove is adapted to be fixedly installed inside the reaction chamber of the sputtering device by a locking member.

7. An intake assembly according to any one of claims 1-6, characterized in that, The air intake body is also provided with a second air intake hole and several second air outlet holes. On the other side of the air intake body, a second diversion groove is provided to connect the second air intake hole and the second air outlet hole. The second diversion groove is adapted to be covered by another sealing plate to form a second diversion channel.

8. An intake assembly according to claim 7, characterized in that, The second diversion channel includes a first chamber and a second chamber. The first chamber is connected to the second air inlet, and the second chamber is connected to a plurality of second air outlets. The first chamber and the second chamber are interconnected through a plurality of connecting ports.

9. A sputtering coating apparatus, characterized in that, The invention includes an air intake assembly and a reaction chamber as described in any one of claims 1-8, wherein the air intake assembly is installed in the reaction chamber.

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