Heating device for coating in a sputtering chamber

Abstract

The utility model discloses a kind of heating devices for sputtering chamber indoor coating, including turntable main body, the turntable main body rotatably set in vacuum sputtering chamber, fast heater and even heater are equipped on turntable main body, the fast heater is used to quickly promote local area temperature, the even heater includes resistance heating element, the resistance heating element is installed in the radial outer edge area of turntable main body. By even heater and fast heater combination, stable and even temperature distribution can be realized on turntable main body, and the improvement of this temperature uniformity has positive influence on the coating quality of the turntable type coating machine.

Description

Technical Field

[0001] This utility model relates to the field of rotary vacuum coating technology, specifically to a heating device for coating in a sputtering chamber. Background Technology

[0002] In vacuum coating processes, the uniformity of temperature within the sputtering chamber is crucial to coating quality. However, existing coating heating devices typically employ only infrared radiation lamps. While infrared radiation lamps can rapidly heat the workpiece to the suitable coating temperature, their radiation angle and intensity distribution exhibit some non-uniformity. Relying solely on infrared radiation lamps cannot achieve uniform heating of the workpiece, especially as heat dissipates from the radial outer edge of the turntable into the cooler sputtering chamber, causing a temperature drop in that area and further exacerbating the temperature non-uniformity, thus affecting the coating quality and effect. Furthermore, existing designs, which only incorporate rapid heating devices on the turntable, suffer from low heating efficiency and difficulty in precisely controlling the temperature. Therefore, a novel heating device for sputtering chamber coating is needed, capable of rapidly and uniformly heating the sputtering chamber. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a heating device for indoor sputtering coating.

[0004] The technical solution of this utility model is as follows: it includes a turntable body that is rotatably disposed in a vacuum sputtering chamber, a rapid heater and a uniform heater disposed on the turntable body, wherein the rapid heater is used to rapidly increase the temperature of a local area, and the uniform heater includes a resistance heating element, wherein the resistance heating element is installed in the radial outer edge region of the turntable body.

[0005] A further technical solution is that the resistance heating element is provided in multiple groups, and the multiple groups of resistance heating elements are evenly distributed in the radial outer edge area of ​​the turntable body along the circumference.

[0006] A further technical solution is as follows: the resistance heating element is a heating wire, the heating wire is fixed by an upward-facing mounting cover, and the mounting cover is connected to the turntable body by several support feet.

[0007] A further technical solution is that the heating wire is coiled in a serpentine pattern around the circumference of the turntable body inside the mounting cover.

[0008] A further technical solution is that a plate-shaped heat insulation layer is installed inside the mounting cover below the heating wire.

[0009] A further technical solution is that the heating wire is fixed above the plate-shaped heat insulation layer by a bracket, and the bracket is provided with a slot corresponding to the heating wire.

[0010] A further technical solution is as follows: the resistance heating element is a heating wire, which is coiled into a triangle. Multiple sets of triangular heating wires are evenly distributed along the circumference of the turntable body, and the heating wire density is highest in the outermost radial region, while the heating wire density is lower closer to the center of the turntable body.

[0011] A further technical solution is that the rapid heater uses an infrared radiation lamp.

[0012] A further technical solution is that multiple sets of infrared radiation lamps are evenly distributed circumferentially in the radial outer edge region of the turntable body.

[0013] A further technical solution is that the infrared radiation lamp is installed and fixed by a lampshade with the opening facing upwards.

[0014] The beneficial technical effects of this utility model are: the rapid heater can quickly heat the workpiece to be coated to the required temperature, thereby improving the coating efficiency in the sputtering chamber; the uniform heater combined with the rapid heater increases the temperature of the radial outer edge area of ​​the turntable body, while also compensating for the uneven heating of the rapid heater, thus achieving uniform temperature distribution in the sputtering chamber and ensuring the quality and efficiency of the coating. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a partial schematic diagram of the uniform heater of this utility model;

[0017] Figure 3 This is a schematic diagram of the specific structure of the uniform heater of this utility model;

[0018] The components are: 1. Turntable body; 2. Rapid heater; 21. Lamp cover; 3. Uniform heater; 31. Resistance heating element; 32. Mounting cover; 33. Plate-shaped heat insulation layer; 34. Bracket; 35. Slot. Detailed Implementation

[0019] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0020] like Figure 1 As shown, the heating device for coating in a sputtering chamber according to the present invention includes a turntable body 1, which is rotatably disposed in a vacuum sputtering chamber. A heating device is provided in the radial outer edge region of the turntable body 1, and the heating device is used to achieve a stable and uniform temperature distribution of the turntable body 1 in the radial direction.

[0021] The heating device includes a rapid heater 2 and a uniform heater 3. The rapid heater 2 has high energy density and can generate high temperatures in a localized area, allowing the workpiece to reach a suitable coating temperature in a short time. In this embodiment, the rapid heater 2 is an infrared radiation lamp. The workpiece absorbs the infrared rays emitted by the infrared radiation lamp and converts them into heat energy.

[0022] Preferably, the infrared radiation lamps are provided in multiple groups, and the multiple groups of infrared radiation lamps are evenly distributed in the radial outer edge area of ​​the turntable body 1 along the circumference.

[0023] Preferably, the infrared radiation lamp is installed and fixed by a lamp cover 21 with the opening facing upward. The lamp cover 21 can concentrate the infrared rays emitted by the infrared radiation lamp to a certain extent, so as to enhance the radiation intensity on the workpiece to be coated.

[0024] Because the radiation angle and intensity distribution of infrared radiation lamps are somewhat uneven, uniform heating of the workpiece to be coated cannot be achieved solely by infrared radiation lamps. In particular, the radial outer edge region of the turntable body 1 dissipates heat into the lower-temperature vacuum sputtering chamber, further causing a temperature drop in this area and affecting the quality and effect of the coating. In this embodiment, the uniform heater 3 uses a resistance heating element 31 to compensate for heat loss and the uneven heating of the infrared radiation lamps. The resistance heating element 31 is a heating wire installed in the radial outer edge region of the turntable body 1. The power connector connected to the heating wire is located on the other side of the turntable body 1.

[0025] By providing slow and continuous heat through heating wires, the temperature of the radial outer edge area of ​​the turntable body 1 is kept at a relatively stable and suitable level for coating, thereby improving the stability of the coating process and product quality.

[0026] In this embodiment, as Figure 2 and Figure 3 As shown, the heating wire is mounted and fixed by an upward-facing mounting cover 32, which is connected to the turntable body 1 via several support feet. The mounting cover 32 can concentrate the heat generated by the heating wire to reduce heat loss and thus improve heating efficiency. Moreover, the relatively enclosed space helps to form a more stable temperature field, avoiding temperature fluctuations caused by excessive heat loss and improving coating quality.

[0027] Furthermore, to increase the heating power of the heating wire and enhance the heat coverage area, the heating wire is coiled in a serpentine pattern around the circumference of the turntable body 1 inside the mounting cover 32. Moreover, the distribution and intensity of heat can be precisely controlled by adjusting the density of the heating wire arrangement to achieve the best heating effect.

[0028] Furthermore, to protect the turntable body 1 and other components from high-temperature damage from the heating wire, two plate-shaped heat insulation layers 33 are stacked sequentially at intervals below the heating wire inside the mounting cover 32. These plate-shaped heat insulation layers 33 are adapted to the mounting cover 32 and the coiling area of ​​the heating wire. The serpentine coiled heating wire is fixed to the upper plate-shaped heat insulation layer 33 by a bracket 34. The bracket 34 has corresponding slots 35 on the heating wire, ensuring that the heating wire can be tightly secured within the slots 35, maintaining its stable position and preventing short circuits caused by mutual contact. By adjusting the distribution of the slots 35, the heating wire can be coiled at appropriate intervals, thereby providing a uniform heating environment for the workpiece to be coated and ensuring coating quality.

[0029] Furthermore, multiple sets of heating wires are provided, which are evenly distributed along the circumference of the radial outer edge area of ​​the turntable body 1. Each set of heating wires can be controlled independently. By adjusting their power separately, the temperature of different circumferential areas of the turntable body 1 can be precisely controlled, thereby achieving flexible zoned temperature control.

[0030] In another embodiment, the heating wire is coiled into a triangle, and multiple sets of triangular heating wires are evenly distributed along the circumference of the turntable body 1, so that the heating wire density is highest in the outermost radial region of the turntable body 1, and the heating wire density is lower closer to the center of the turntable body 1.

[0031] By combining the uniform heater 3 with the rapid heater 2, a stable and uniform temperature distribution can be achieved on the turntable body 1. This improved temperature uniformity has a positive impact on the coating quality of high-precision optical filters produced on this turntable coating machine.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A heating device for indoor coating in a sputtering chamber, characterized in that: It includes a rotatable turntable body (1) disposed in a vacuum sputtering chamber, a rapid heater (2) disposed on the turntable body (1), and a uniform heater (3). The rapid heater (2) is used to rapidly increase the temperature of a local area. The uniform heater (3) includes a resistance heating element (31) which is installed in the radial outer edge region of the turntable body (1).

2. The heating device for indoor coating in sputtering chambers according to claim 1, characterized in that: The resistance heating element (31) is provided in multiple groups, and the multiple groups of resistance heating elements (31) are evenly distributed in the radial outer edge area of ​​the turntable body (1) along the circumference.

3. The heating device for indoor coating in sputtering chambers according to claim 1, characterized in that: The resistance heating element (31) is a heating wire, which is fixed by an upward-facing mounting cover (32). The mounting cover (32) is connected to the turntable body (1) by several support feet.

4. The heating device for indoor coating in sputtering chambers according to claim 3, characterized in that: The heating wire is circumferentially coiled around the inside of the mounting cover (32) along the main body of the turntable (1).

5. A heating device for indoor coating in a sputtering chamber according to claim 4, characterized in that: A plate-shaped heat insulation layer (33) is installed inside the mounting cover (32) below the heating wire.

6. A heating device for indoor coating in a sputtering chamber according to claim 5, characterized in that: The heating wire is fixed above the plate-shaped heat insulation layer (33) by a bracket (34), and the bracket (34) is provided with a slot (35) corresponding to the heating wire.

7. A heating device for indoor coating in sputtering chambers according to claim 6, characterized in that: The resistance heating element (31) is a heating wire. The heating wire is coiled into a triangle. Multiple sets of triangular heating wires are evenly distributed along the circumference of the turntable body (1). The heating wire density is highest in the outermost radial region and lower closer to the center of the turntable body (1).

8. A heating device for indoor coating in a sputtering chamber according to claim 1, characterized in that: The rapid heater (2) uses an infrared radiation lamp.

9. A heating device for indoor coating in sputtering chambers according to claim 8, characterized in that: Multiple sets of infrared radiation lamps are evenly distributed circumferentially in the radial outer edge region of the turntable body (1).

10. A heating device for indoor coating in sputtering chambers according to claim 8, characterized in that: The infrared radiation lamp is installed and fixed by a lamp cover (21) with the opening facing upward.

Images