Protective tool

Abstract

The utility model provides a kind of protection fixture, applied to vacuum equipment.The vacuum equipment includes vacuum cavity cover and vacuum chamber, the vacuum cavity cover and the vacuum chamber are equipped with the sealing surface for mutual sealing cooperation.The protection fixture includes fixture body and at least one fixing part, each the fixing part is used to detachably fixed on the sealing surface with the fixture body, so that the fixture body protects the sealing surface.In the application, the fixture body is placed on the sealing surface of the vacuum cavity cover or the vacuum chamber, and then fixed by at least one fixing part, so that the fixture body can protect the sealing surface and the sealing ring on the sealing surface, effectively ensure that the sealing surface and the sealing ring are not damaged, reduce the downtime of the vacuum equipment due to vacuum abnormality, and improve the reliability and productivity of the production line.

Description

Technical Field

[0001] This utility model relates to the field of battery manufacturing equipment technology, and in particular to a protective fixture. Background Technology

[0002] Vacuum equipment is an indispensable part of the solar cell manufacturing process, especially for HJT cells. Numerous vacuum devices are required in the CVD and PVD processes to meet process requirements. However, once the vacuum chamber is opened, human error can damage the sealing rings and surfaces, leading to vacuum anomalies and equipment shutdowns, thus impacting production line capacity. Utility Model Content

[0003] Therefore, it is necessary to provide a protective fixture to address the problem in existing vacuum equipment where damage to the sealing ring and / or sealing surface can lead to vacuum abnormalities, resulting in downtime and affecting production line capacity.

[0004] The technical solution is as follows:

[0005] On one hand, a protective fixture is provided for use in vacuum equipment, the vacuum equipment including a vacuum chamber cover and a vacuum chamber, both of which are provided with sealing surfaces for mutual sealing and cooperation; the protective fixture includes a fixture body and at least one fixing member, each of the fixing members being used to detachably fix the fixture body to the sealing surface, so that the fixture body protects the sealing surface.

[0006] In the above embodiments, the protective fixture, when the vacuum equipment is opened, places its body on the sealing surface of the vacuum chamber cover or chamber and secures it with at least one fastener. This protects the sealing surface and its sealing ring, effectively preventing damage and reducing the risk of vacuum equipment downtime due to vacuum anomalies, thus improving production line reliability and capacity. Furthermore, the fixture body is detachable for installation and reuse, enhancing its practicality.

[0007] The technical solution will be further explained below:

[0008] In one embodiment, the fastener includes an abutting portion and a connecting portion. The abutting portion is configured to engage with the side of the fixture body away from the sealing surface when the fixture body is detachably fixed to the sealing surface. The connecting portion is configured to be fixedly connected to the vacuum chamber cover or the vacuum chamber when the fixture body is detachably fixed to the sealing surface.

[0009] In one embodiment, the fixture body is provided with at least one mounting hole, the sealing surface is provided with at least one threaded hole, each threaded hole is provided corresponding to each mounting hole, the connecting part is provided as a screw, and each screw is configured to pass through each mounting hole and be threadedly connected to each threaded hole when the fixture body is detachably fixed to the sealing surface.

[0010] In one embodiment, the outline shape of the fixture body is adapted to the outline shape of the sealing surface.

[0011] In one embodiment, the fixture body is configured as a ring structure and includes at least two fixture segments, each of which is detachably fixed to the sealing surface by the fastener.

[0012] In one embodiment, each of the fixture segments is provided with at least two mounting portions, each of the mounting portions being used for mounting and fixing the fastener.

[0013] In one embodiment, the side of the fixture body facing the sealing surface is configured as a connecting surface, and the protective fixture further includes a flexible support assembly mounted on the connecting surface and configured to contact the sealing surface when the fixture body is detachably fixed to the sealing surface.

[0014] In one embodiment, the fixture body is configured as a ring structure, and the flexible support component includes a first annular flexible member and a second annular flexible member respectively installed on the inner and outer sides of the connecting surface. The first annular flexible member and the second annular flexible member are configured to form a sealed protective space with the connecting surface and the sealing surface when the fixture body is detachably fixed to the sealing surface.

[0015] In one embodiment, the fixture body includes at least two fixture segments, the first annular flexible member includes at least two inner flexible segments, and the inner flexible segments are installed on the inner side of each fixture segment; the second annular flexible member includes at least two outer flexible segments, and the outer flexible segments are installed on the outer side of each fixture segment; when the fixture segments are connected end to end in sequence to form the annular structure, the two inner flexible segments on two adjacent fixture segments are sealed together, and the two outer flexible segments on two adjacent fixture segments are sealed together.

[0016] In one embodiment, the thickness of the flexible support component is set to 2 mm to 5 mm along the normal direction of the connecting surface. Attached Figure Description

[0017] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of a vacuum chamber cover according to one embodiment.

[0020] Figure 2 This is a schematic diagram of the structure of a protective fixture according to one embodiment.

[0021] Figure 3 for Figure 2 A schematic diagram showing that all protective fixtures are installed on the vacuum chamber cover.

[0022] Figure 4 for Figure 2 A schematic diagram of the structure in which the protective fixture is mounted on the vacuum chamber cover.

[0023] Figure 5 for Figure 4 A schematic diagram of the structure of the first long side fixture segment.

[0024] Figure 6 for Figure 4 A schematic diagram of the structure of the second long side fixture segment.

[0025] Figure 7 for Figure 4 A schematic diagram of the short side fixture segment in the diagram.

[0026] Explanation of reference numerals in the attached figures:

[0027] 10. Protective fixture; 100. Fixture body; 110. Mounting part; 111. Mounting hole; 120. Fixture section; 121. First long side fixture section; 122. Second long side fixture section; 123. Short side fixture section; 130. Connecting surface; 200. Fixing member; 210. Contact part; 220. Connecting part; 300. Flexible support assembly; 310. First annular flexible member; 311. Inner flexible section; 320. Second annular flexible member; 321. Outer flexible section; 20. Vacuum chamber cover; 21. Sealing surface; 22. Annular groove; 23. Threaded hole. Detailed Implementation

[0028] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0029] like Figure 1 As shown, in one embodiment, a vacuum device includes a vacuum chamber cover 20 and a vacuum chamber, both of which are provided with sealing surfaces 21 for mutual sealing and cooperation.

[0030] It should be noted that the sealing surface 21 on the vacuum chamber cover 20 refers to the area on the vacuum chamber cover 20 used for sealing contact with the vacuum chamber. Similarly, the sealing surface 21 on the vacuum chamber refers to the area on the vacuum chamber used for sealing contact with the vacuum chamber cover 20.

[0031] like Figure 1 Optionally, an annular groove 22 is provided on the sealing surface 21. The vacuum equipment also includes a sealing ring, which is installed in the annular groove 22 and is used to improve the sealing performance between the vacuum chamber cover 20 and the vacuum chamber.

[0032] The number of annular grooves 22 and the number of sealing rings can be flexibly adjusted according to actual usage needs. For example, the number of annular grooves 22 on a single sealing surface 21 can be zero, one, or two.

[0033] like Figure 1 As shown, in this specific embodiment, there are two annular grooves 22, and both annular grooves 22 are coaxially arranged on the sealing surface 21 of the vacuum chamber cover 20.

[0034] like Figure 2 , Figure 3 and Figure 4 As shown, in one embodiment, a protective fixture 10 is provided, including a fixture body 100 and at least one fastener 200. Each fastener 200 is used to detachably fix the fixture body 100 to the sealing surface 21, so that the fixture body 100 protects the sealing surface 21.

[0035] In the above embodiments, the protective fixture 10, when the vacuum equipment is opened, places the fixture body 100 on the vacuum chamber cover 20 or the sealing surface 21 of the vacuum chamber, and then fixes it with at least one fixing member 200. This allows the fixture body 100 to protect the sealing surface 21 and the sealing ring on the sealing surface 21, effectively ensuring that the sealing surface 21 and the sealing ring are not damaged, reducing the downtime of the vacuum equipment due to vacuum abnormalities, and improving the reliability and capacity of the production line. In addition, the fixture body 100 is installed and fixed in a detachable manner, allowing for repeated use and improving the practicality of the protective fixture 10.

[0036] It should be noted that when the vacuum equipment is opened, the sealing surface 21 on the vacuum chamber cover 20 can be protected with protective fixtures 10 as needed, and the sealing surface 21 on the vacuum chamber can also be protected with protective fixtures 10 as needed. For example, when both the sealing surface 21 on the vacuum chamber cover 20 and the sealing surface 21 on the vacuum chamber need to be protected, two sets of protective fixtures 10 are required to be installed on the sealing surface 21 on the vacuum chamber cover 20 and the sealing surface 21 on the vacuum chamber, respectively.

[0037] The fastener 200 can be configured as a fixing screw, fixing pin, fixing clamp, or other detachable fixing structure. The number of fasteners 200 can be flexibly adjusted according to actual usage needs.

[0038] like Figure 2 , Figure 3 and Figure 4 As shown, the fixing member 200 further includes an abutting portion 210 and a connecting portion 220. The abutting portion 210 is configured to abut against the side of the fixture body 100 away from the sealing surface 21 when the fixture body 100 is detachably fixed to the sealing surface 21. The connecting portion 220 is configured to be fixedly connected to the vacuum chamber cover 20 or the vacuum chamber when the fixture body 100 is detachably fixed to the sealing surface 21. In this way, the fixture body 100 is installed and fixed by the abutting of the fixing member 200, that is, the fixing member 200 and the fixture body 100 are detachable, which improves the convenience of manufacturing, replacing and maintaining the protective fixture 10.

[0039] It should be noted that when the fixture body 100 is detachably fixed to the sealing surface 21, the connecting part 220 can be fixedly connected to the side of the vacuum chamber cover 20 or the vacuum chamber where the sealing surface 21 is provided, or it can be fixedly connected to other sides of the vacuum chamber cover 20 or the vacuum chamber.

[0040] like Figure 2 and Figure 4As shown, optionally, the fixture body 100 has at least one mounting hole 111. The sealing surface 21 has at least one threaded hole 23, with each threaded hole 23 corresponding to each mounting hole 111. The connecting part 220 is a screw, and each screw is configured to pass through each mounting hole 111 and be threadedly connected to each threaded hole 23 when the fixture body 100 is detachably fixed to the sealing surface 21. In this way, the screw is connected to the vacuum chamber cover 20 or the vacuum chamber by screwing, ensuring that the fixture body 100 will not move on the sealing surface 21 after installation and fixing, thereby improving the reliability of the fixture 10.

[0041] In this specific embodiment, the fastener 200 is a Torx screw. This facilitates the installation and removal of the protective fixture 10.

[0042] Specifically, in this embodiment, when the sealing surface 21 is provided with two coaxial and spaced-apart annular grooves 22, each threaded hole 23 is located between the two annular grooves 22 and is spaced apart along the circumference of the annular grooves 22.

[0043] Specifically, in this embodiment, when the number and positional relationship of the threaded holes 23 on the vacuum chamber cover 20 are the same as the number and positional relationship of the threaded holes 23 on the vacuum chamber, the protective fixture 10 can be used on both the vacuum chamber cover 20 and the vacuum chamber.

[0044] like Figure 3 and Figure 4 As shown, in one embodiment, the outline shape of the jig body 100 is adapted to the outline shape of the sealing surface 21. In this way, the jig body 100 can protect the entire sealing surface 21, improving the reliability of the jig 10.

[0045] In this specific embodiment, the fixture body 100 is configured as a ring structure. When the fixture body 100 is detachably fixed to the sealing surface 21, each fixing member 200 is spaced apart along the circumference of the fixture body 100.

[0046] The fixture body 100 can be configured as a single piece or as a separate piece. In this embodiment, the fixture body 100 is made of aluminum alloy.

[0047] like Figure 3 and Figure 4As shown, the fixture body 100 further includes at least two fixture segments 120, each fixture segment 120 being detachably fixed to the sealing surface 21 by a fastener 200. Thus, the fixture body 100 can be installed and fixed to the sealing surface 21 by splicing, facilitating the manufacturing and assembly of the fixture body 100. Furthermore, by selecting different numbers and shapes of fixture segments 120, different specifications of fixture bodies 100 can be formed, enabling the protective fixture 10 to be applicable to various vacuum equipment and improving its practicality.

[0048] It should be noted that the jig segment 120 can have various shapes and sizes, as long as multiple jig segments 120 can be matched to form a ring structure.

[0049] like Figure 2 and Figure 4 As shown, optionally, each fixture segment 120 is provided with at least two mounting portions 110, each mounting portion 110 being used for mounting and fixing the fastener 200. In this way, utilizing the principle of fixing a straight line at two points, it ensures that each fixture segment 120, after being mounted and fixed on the sealing surface 21, will not move relative to the sealing surface 21, avoiding friction between the fixture segment 120 and the sealing surface 21 and thus preventing damage to the sealing surface 21, thereby improving the reliability of the protective fixture 10.

[0050] In this embodiment, the mounting part 110 is correspondingly configured as a mounting hole 111. In other embodiments, the mounting part 110 may also be configured as a mounting groove or a mounting surface, etc.

[0051] like Figure 2 and Figure 4 As shown, in one embodiment, the side of the jig body 100 facing the sealing surface 21 is configured as a connecting surface 130. The protective jig 10 also includes a flexible support assembly 300, which is mounted on the connecting surface 130 and configured to contact the sealing surface 21 when the jig body 100 is detachably fixed to the sealing surface 21. Thus, the flexible support assembly 300 can separate the jig body 100 from the sealing surface 21, preventing friction between the jig body 100 and the sealing surface 21 to generate metal particles, thereby preventing metal particles from damaging the sealing surface 21 and the sealing ring on the sealing surface 21, and improving the reliability of the protective jig 10.

[0052] The thickness of the flexible support component 300 along the normal direction of the connecting surface 130 can be flexibly adjusted according to actual usage needs. Specifically, in this embodiment, the thickness of the flexible support component 300 along the normal direction of the connecting surface 130 is set to 2mm to 5mm.

[0053] like Figure 2 and Figure 3As shown, the flexible support assembly 300 further includes a first annular flexible member 310 and a second annular flexible member 320 respectively installed on the inner and outer sides of the connecting surface 130. The first annular flexible member 310 and the second annular flexible member 320 are configured to form a sealed protective space with the connecting surface 130 and the sealing surface 21 when the fixture body 100 is detachably fixed to the sealing surface 21. In this way, the protective fixture 10 can completely isolate the sealing surface 21 from the external environment, ensuring that foreign objects in the external environment will not enter the sealed protective space and damage the sealing surface 21, thereby further improving the reliability of the protective fixture 10.

[0054] like Figure 2 and Figure 3 As shown, optionally, the fixture body 100 includes at least two fixture segments 120. The first annular flexible member 310 includes at least two inner flexible segments 311, with an inner flexible segment 311 installed on the inner side of each fixture segment 120. The second annular flexible member 320 includes at least two outer flexible segments 321, with an outer flexible segment 321 installed on the outer side of each fixture segment 120. When the fixture segments 120 are sequentially connected end-to-end to form an annular structure, the two inner flexible segments 311 on two adjacent fixture segments 120 are sealed together, and the two outer flexible segments 321 on two adjacent fixture segments 120 are also sealed together.

[0055] Both the inner flexible segment 311 and the outer flexible segment 321 can be made of rubber or silicone, etc. The lengths of both the inner and outer flexible segments 311 and 321 can be flexibly adjusted according to actual usage needs. The inner flexible segment 311 can be installed on the inner side of the fixture segment 120 via snap-fit, adhesive, insertion, or other fixing methods. The outer flexible segment 321 can be installed on the outer side of the fixture segment 120 via snap-fit, adhesive, insertion, or other fixing methods.

[0056] like Figure 2 , Figure 5 , Figure 6 and Figure 7As shown, specifically in this embodiment, the fixture body 100 includes two first long-side fixture segments 121, two second long-side fixture segments 122, and two short-side fixture segments 123. Inner flexible segments 311 are provided on the inner sides of the two first long-side fixture segments 121, the two second long-side fixture segments 122, and the two short-side fixture segments 123. Outer flexible segments 321 are provided on the outer sides of the two first long-side fixture segments 121, the two second long-side fixture segments 122, and the two short-side fixture segments 123. When a first long side jig segment 121, a second long side jig segment 122, a short side jig segment 123, another first long side jig segment 121, another second long side jig segment 122, and another short side jig segment 123 are sequentially connected to form a ring structure, the six inner flexible segments 311 are sequentially sealed and connected to form a first annular flexible member 310, and the six outer flexible segments 321 are sequentially sealed and connected to form a second annular flexible member 320.

[0057] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0058] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0059] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0060] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0061] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0062] It should also be understood that, in interpreting the connection or positional relationships of components, although not explicitly described, connection and positional relationships are interpreted to include a range of error, which should be within the acceptable deviation range of a specific value as determined by a person skilled in the art. For example, "approximately," "about," or "substantially" can mean within one or more standard deviations, without limitation herein.

[0063] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A protective fixture applied to a vacuum device, the vacuum device comprising a vacuum chamber cover (20) and a vacuum chamber, wherein both the vacuum chamber cover (20) and the vacuum chamber are provided with sealing surfaces (21) for mutual sealing and fitting, characterized in that, The protective fixture (10) includes a fixture body (100) and at least one fastener (200), each of the fasteners (200) being used to detachably fix the fixture body (100) to the sealing surface (21) so that the fixture body (100) protects the sealing surface (21).

2. The protective fixture according to claim 1, characterized in that, The fastener (200) includes an abutting part (210) and a connecting part (220). The abutting part (210) is configured to abut against the side of the fixture body (100) away from the sealing surface (21) when the fixture body (100) is detachably fixed to the sealing surface (21). The connecting part (220) is configured to be fixedly connected to the vacuum chamber cover (20) or the vacuum chamber when the fixture body (100) is detachably fixed to the sealing surface (21).

3. The protective fixture according to claim 2, characterized in that, The fixture body (100) is provided with at least one mounting hole (111), and the sealing surface (21) is provided with at least one threaded hole (23). Each threaded hole (23) is provided in correspondence with each mounting hole (111). The connecting part (220) is provided as a screw. Each screw is configured to pass through each mounting hole (111) and be threadedly connected to each threaded hole (23) when the fixture body (100) is detachably fixed to the sealing surface (21).

4. The protective fixture according to claim 1, characterized in that, The outline shape of the fixture body (100) is adapted to the outline shape of the sealing surface (21).

5. The protective fixture according to any one of claims 1 to 4, characterized in that, The fixture body (100) is configured as a ring structure and includes at least two fixture segments (120), each of the fixture segments (120) being detachably fixed to the sealing surface (21) by the fastener (200).

6. The protective fixture according to claim 5, characterized in that, Each of the fixture segments (120) is provided with at least two mounting portions (110), each of the mounting portions (110) being used to install and fix the fastener (200).

7. The protective fixture according to any one of claims 1 to 3, characterized in that, The jig body (100) has a side facing the sealing surface (21) configured as a connecting surface (130). The protective jig (10) also includes a flexible support assembly (300) mounted on the connecting surface (130) and configured to contact the sealing surface (21) when the jig body (100) is detachably fixed to the sealing surface (21).

8. The protective fixture according to claim 7, characterized in that, The fixture body (100) is configured as an annular structure, and the flexible support component (300) includes a first annular flexible member (310) and a second annular flexible member (320) respectively installed on the inner and outer sides of the connecting surface (130). The first annular flexible member (310) and the second annular flexible member (320) are configured to form a sealed protective space with the connecting surface (130) and the sealing surface (21) when the fixture body (100) is detachably fixed on the sealing surface (21).

9. The protective fixture according to claim 8, characterized in that, The fixture body (100) includes at least two fixture segments (120), the first annular flexible member (310) includes at least two inner flexible segments (311), and the inner flexible segment (311) is installed on the inner side of each fixture segment (120). The second annular flexible member (320) includes at least two outer flexible segments (321), and the outer flexible segment (321) is installed on the outer side of each fixture segment (120). When each fixture segment (120) is connected end to end in sequence to form the annular structure, the two inner flexible segments (311) on two adjacent fixture segments (120) are sealed and connected, and the two outer flexible segments (321) on two adjacent fixture segments (120) are sealed and connected.

10. The protective fixture according to claim 7, characterized in that, Along the normal direction of the connecting surface (130), the thickness of the flexible support component (300) is set to 2 mm to 5 mm.

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