A conveying device and a coating apparatus

Abstract

The utility model discloses a kind of conveying device and coating equipment, comprising: interactive chamber is connected at least two process chambers respectively through interactive window, conveying module is used to make each first station in interactive chamber along flow line and stop when moving to any one interactive window, handling module is used to make manipulator in interactive chamber along first direction horizontal movement, and first direction is turned to make towards any one interactive window, rotating platform in process chamber is used to make each second station stop when turning to interactive window, first station and second station are used to set conveying object, manipulator is used to carry conveying object from the first station and the second station of one of the two sides of any one interactive window and stop on another one in it. The utility model can carry out efficient and accurate material conveying under not breaking vacuum.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating processing technology, and in particular to a conveying device and coating equipment. Background Technology

[0002] Currently, coating equipment is mainly divided into two types: single-chamber coating equipment and multi-chamber continuous coating equipment. Single-chamber coating equipment requires separate auxiliary conveying facilities, which are costly to install and are often idle during the process, resulting in low utilization. Furthermore, transferring products between different single-chamber coating units for different coating processes requires breaking the vacuum, which can easily introduce contaminants into the vacuum coating chamber. Existing multi-chamber continuous coating equipment can only perform continuous coating operations in a flow-line manner. This not only requires high-level process control but also limits its production capabilities; once the equipment configuration is determined, the type of process and the order of different processes cannot be changed, resulting in the production of only specific products under that process configuration. Utility Model Content

[0003] The purpose of this utility model is to overcome the above-mentioned defects in the existing technology and to provide a conveying device and a coating equipment.

[0004] To achieve the above objectives, the technical solution of this utility model is as follows:

[0005] This utility model provides a conveying device, including: an interactive chamber and a conveying system disposed in the interactive chamber;

[0006] The interactive chamber is connected to at least two process chambers through an interactive window, and the interactive chamber is equipped with a first chamber door;

[0007] The conveying system includes:

[0008] The conveying module includes a closed annular conveyor line with a plurality of first stations arranged sequentially on the conveyor line. The conveying module is used to make each first station move synchronously along the conveyor line and to make each first station stop when it reaches the first chamber door and any one of the interaction windows.

[0009] The transport module includes a rotating platform disposed inside the flow line and a robot arm disposed on the rotating platform. The transport module is used to move the robot arm horizontally in a first direction and vertically in a second direction, and to rotate the rotating platform so that the first direction is oriented toward any of the interactive windows, wherein the first direction passes through the rotation center of the rotating platform.

[0010] The process chamber is equipped with a rotating frame, which has multiple second workstations evenly distributed along its circumference. The rotating frame is used to drive each second workstation to rotate synchronously and to make each second workstation stop when it reaches the corresponding interactive window.

[0011] The first chamber door is used for loading and unloading transported objects, the first workstation and the second workstation are used for setting the transported objects, and the robotic arm is used to move the transported objects from one of the first workstation and the second workstation, which are stopped on either side of any of the interactive windows, to the other.

[0012] Furthermore, the transfer line includes a first closed annular track, which is horizontally arranged. Each of the first workstations is connected in sequence and located on the first track. A drive mechanism is provided on one side of the first track. The drive mechanism is used to drive any of the first workstations to move along the first track, thereby causing each of the first workstations to move synchronously along the first track. The drive is paused when any of the first workstations reaches the first chamber door or any of the interactive windows.

[0013] Furthermore, each of the first workstations is provided with a first fixing component, and the first fixing components of each of the first workstations are connected in sequence and movably mounted on the first track. The driving mechanism includes a driving part and a transmission worm gear. A slider for cooperating with the transmission worm gear is provided on one side of the first fixing component. At any given time, at least two sliders of the first fixing components are engaged on the transmission worm gear. The driving part is used to drive the transmission worm gear to rotate, thereby causing the sliders engaged on the transmission worm gear and the first fixing components connected to it to move on the first track, thereby causing each of the first fixing components to move synchronously along the first track.

[0014] Furthermore, the interactive window is equipped with a position detection unit, which is used to detect the arrival signal of each of the first workstations.

[0015] Furthermore, the first fixing component includes a first body and a fixture rotatably disposed in the first body. The fixture has a positioning groove on its top surface, a first guide groove on the top of the positioning groove, and a through hole on the bottom of the positioning groove. The object to be transported includes a clamp, which includes a vertically arranged rod. The lower end of the rod has a positioning part, and the lower end of the positioning part has a laterally retractable guide part. The upper end of the positioning part has a laterally protruding shoulder. The fixture is used to vertically insert and engage with the positioning part on the lower end of the rod through the positioning groove to position the clamp during placement. The shoulder is used to support the side wall of the first guide groove. The through hole is used for the guide part to pass through. When the positioning part is engaged in the positioning groove, the shoulder also extends to the top surface of the fixture.

[0016] Furthermore, the second workstation is provided with a second fixing component, which includes a latch on the upper end of the rotating frame and a second body correspondingly provided on the lower end of the rotating frame. The latch is used to engage laterally with the upper end of the string rod. The second body is rotatably provided with a rotating shaft. The upper end of the rotating shaft is provided with a second guide groove. The second guide groove is used to engage vertically with the guide part on the lower end of the string rod to position the fixture during placement. The upper side of the guide part is provided with multiple locking blocks along the circumferential direction. The upper side wall of the second guide groove is provided with corresponding slots for vertically engaging the locking blocks. The lower end of the locking block has a first guide structure, and the upper side wall of the slot has a second guide structure.

[0017] Furthermore, the robotic arm includes an X-axis transfer module and a Y-axis transfer module. The X-axis transfer module is provided with a linear second guide rail, and the Y-axis transfer module is provided with a linear third guide rail. The second guide rail is disposed on the rotating platform along the first direction, and a support is movably disposed on the second guide rail. The third guide rail is disposed on the support along the second direction, and a robotic arm is movably disposed on the third guide rail. The front end of the robotic arm is provided with a gripper for holding the transported object.

[0018] This utility model also provides a coating equipment, including at least two process chambers and the above-mentioned conveying device. The conveying device is connected to each of the process chambers through an interactive window provided on the interactive chamber. The process chambers are used to perform coating processes on the coating objects loaded on the conveying objects set on the rotating frame.

[0019] Furthermore, the process chamber and the interaction chamber share the same vacuum system.

[0020] Furthermore, the process chamber is provided with at least one coating source.

[0021] This utility model has the following advantages:

[0022] (1) By setting up a conveying device, materials (conveying objects loaded with coating objects (products)) can be provided to multiple process chambers. This not only improves the utilization rate of the conveying device itself, but also improves the operating efficiency of the coating equipment and saves process time. It avoids the problems of high cost and low utilization rate of traditional single-chamber coating equipment with separate auxiliary conveying facilities. It also avoids the waste of process time in the vacuum breaking and vacuuming stages caused by the separate setting of auxiliary conveying facilities for multiple process chambers. This expands the production capacity.

[0023] (2) By setting up an interactive chamber connected to multiple process chambers, when materials are moved from one chamber to another, there is no need to break the vacuum, which reduces the time required for frequent vacuum breaking and vacuuming, which would require additional heating and baking processes. In addition, during the interactive process, there is no need to open the chamber door to the outside, thus effectively avoiding the risk of external pollution sources entering the process chamber and causing pollution.

[0024] (3) By setting up a ring-shaped transfer line for conveying and transporting objects in the interactive chamber, and setting up a rotating platform with a robot arm inside the transfer line, the objects can be accurately transported to any desired chamber. Furthermore, by setting up different coating sources, the coating process configuration of different process chambers can be different, which further increases the combination and thus effectively solves the limitation of existing multi-chamber continuous coating equipment that can only carry out continuous coating operations in a flow manner and cannot change the type of process or the order of different processes. As a result, a better coating effect can be obtained, and the diversity of products that this utility model can be applied to is greatly improved.

[0025] (4) By designing guide structures (first guide groove and second guide groove) on the fixed components (first fixed component and second fixed component) of the first station and the second station, and designing corresponding guide parts on the lower end of the fixture, the positioning difficulty when the robot moves the material to the first station and the second station can be reduced, and the fixture can generate adaptive centering, realize automatic vertical alignment between the fixture and the fixed component, significantly reduce the fit tolerance between the fixture and the fixed component, thereby reducing the concentricity deviation and the swing amplitude after loading the product, and improving the coating accuracy.

[0026] In summary, this invention enables efficient and accurate material handling without disrupting a vacuum environment, significantly reducing material transportation time and the risk of contaminant entry, as well as minimizing human intervention and increasing production capacity. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the installation structure of a conveying device in a coating equipment according to a preferred embodiment of the present invention.

[0028] Figures 2-3 This is a schematic diagram of the installation structure of a conveying system in an interactive chamber, according to a preferred embodiment of the present invention.

[0029] Figure 4 This is a schematic diagram of a rotating frame according to a preferred embodiment of the present invention.

[0030] Figure 5 This is a schematic diagram of the engagement state of a connecting rod and a fixture according to a preferred embodiment of the present invention.

[0031] Figure 6 for Figure 4 A magnified structural diagram of the middle G section.

[0032] Figure 7 This is a schematic diagram of the planar layout of a coating equipment with three process chambers, according to a preferred embodiment of the present invention. Detailed Implementation

[0033] The specific embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0034] refer to Figures 1-4 This utility model discloses a conveying device, comprising: an interactive chamber 2 and a conveying system disposed within the interactive chamber 2. The interactive chamber 2 is provided with a first chamber door 21 and at least two independently disposed interactive windows 22. Each interactive window 22 is used to independently connect to one process chamber 1, thereby allowing the interactive chamber 2 to connect to at least two process chambers 1 respectively through the interactive windows 22. The first chamber door 21 is used for loading and unloading the conveyed object.

[0035] The conveying system includes a conveying module 5 and a handling module 6 located in the interaction chamber 2. The conveying module 5 has a circulation line 52 and multiple first workstations 51 cooperating on the circulation line 52. The circulation line 52 is configured as a closed loop, and each first workstation 51 is sequentially arranged along the circulation line 52. The first workstations 51 are used to hold the objects to be conveyed, i.e., to allow for turnover during the conveying of the objects. The conveying module 5 enables each first workstation 51 to move synchronously along the circulation line 52, and to stop each first workstation 51 upon reaching the first chamber door 21 and any one of the interaction windows 22, so that objects can be loaded and unloaded at the first workstation 51 through the first chamber door 21 and through the interaction window 22.

[0036] The handling module 6 includes a rotating platform 62 and a robotic arm 61 mounted on the rotating platform 62. The rotating platform 62 is located inside the flow line 52 and can rotate independently relative to the flow line 52. When the rotating platform 62 rotates, the robotic arm 61 rotates synchronously with it. The handling module 6 is used to move the robotic arm 61 horizontally along a first direction and vertically along a second direction, and to rotate the rotating platform 62 so that the first direction faces any interactive window 22. The first direction passes through the rotation center of the rotating platform 62, meaning it is radially positioned along the rotating platform 62. The first direction is fixed relative to the rotating platform 62, meaning it is always located on a certain physical radial direction of the rotating platform 62. Figure 1 The first direction is horizontal. By rotating the rotating platform 62, the orientation of the first direction relative to the flow line 52 or the interactive chamber 2 can be adjusted (that is, the horizontal movement direction of the robot 61 relative to the flow line 52 or the interactive chamber 2 can be adjusted), so that the first direction can be oriented in any horizontal direction, allowing the robot 61 to move horizontally in any desired direction along the first direction.

[0037] Each process chamber 1 is equipped with a rotating frame 3, which can rotate horizontally around its center of rotation within the process chamber 1. The rotating frame 3 has multiple second workstations 4 evenly distributed along its circumference. In other words, ignoring machining and installation errors, each second workstation 4 is located on a circle of the same radius on the rotating frame 3. The second workstations 4 are used to position the transported object, allowing it to undergo the coating process on the rotating frame 3. During the transport of the object, the rotating frame 3 rotates itself, causing each second workstation 4 to rotate synchronously horizontally, and each second workstation 4 stops when it reaches an interaction window 22 corresponding to its respective process chamber 1, allowing the object to be transported between the first workstation 51 and the second workstation 4 via the interaction window 22.

[0038] The robotic arm 61 is used to grasp and transport objects, moving them from one of the first workstations 51 and the second workstation 4, which are located on either side of the interaction window 22, to the other. For example, when there is one first workstation 51 and one second workstation 4 on each side of the interaction window 22, and a transport object is placed on the first workstation 51 while the second workstation 4 is empty, the robotic arm 61 is used to grasp the transport object from the first workstation 51, transport the grasped object through the interaction window 22 to the second workstation 4, and set it up. Alternatively, when there is one first workstation 51 and one second workstation 4 on each side of the interaction window 22, and the first workstation 51 is empty while the second workstation 4 has a transport object set up, the robot arm 61 is used to cross over the empty first workstation 51, grab the transport object from the second workstation 4 through the interaction window 22, and move the grabbed transport object to the empty first workstation 51 through the interaction window 22 for setting.

[0039] In some embodiments, one interactive window 22 is connected to only one process chamber 1, and any two interactive windows 22 are not connected to the same process chamber 1.

[0040] In some embodiments, one interactive chamber 2 may be connected to multiple process chambers 1 simultaneously. For example, one interactive chamber 2 may be connected to two, three, four, or five process chambers 1, or more process chambers simultaneously. Figure 7 An example planar arrangement is shown where one interactive chamber connects to three process chambers, but it is not limited to this.

[0041] In some embodiments, the connection between the interaction chamber 2 and the process chamber 1 is controlled by a valve 23 located on the interaction window 22. Each process chamber 1 is independently provided with a second chamber door.

[0042] In some embodiments, the transfer line 52 is horizontally mounted at the bottom 24 of the interaction chamber 2 (see reference). Figure 2 On the conveyor belt 52, each first station 51 is slidably mounted on the conveyor belt 52. The rotating platform 62 is horizontally mounted in the interactive chamber 2 and rotatably mounted on the bottom 24 inside the interactive chamber 2. The rotating platform 62 can be driven to rotate horizontally by an electric motor.

[0043] In some embodiments, the transfer line 52 includes a first annular closed track 521; the first track 521 is horizontally disposed on the bottom 24 inside the interaction chamber 2, and each first workstation 51 is sequentially connected and slidably disposed on the first track 521. A drive mechanism 53 is provided on one side of the first track 521; the drive mechanism 53 is used to drive any first workstation 51 passing through it to move along the first track 521, thereby causing each first workstation 51 to move synchronously along the first track 521. Furthermore, when any first workstation 51 reaches the first chamber door 21 or any interaction window 22, the drive mechanism 53 will pause driving the first workstation 51. That is, through the periodic switching control of the drive mechanism 53 running, stopping, re-running, and re-stopping, any first workstation 51 will temporarily stop when it reaches the first chamber door 21 and any interaction window 22, so as to load, unload, and transport the transported objects.

[0044] In some embodiments, each first station 51 is slidably disposed on the first track 521. The first stations 51 can be connected by a movable connection. For example, any two adjacent first stations 51 can be connected by a hinge so that they can move smoothly on the curved flow line 52 while maintaining a relatively constant distance between adjacent first stations 51.

[0045] In some embodiments, a first fixing component 511 is provided on the first station 51. The first fixing components 511 of each first station 51 are connected in sequence and are movably (slidably) disposed on the first track 521. The drive mechanism 53 includes a drive part 532 and a transmission part; a sliding part 516 for cooperating with the transmission part is provided on the side of the first fixing component 511 near the transmission part.

[0046] In some embodiments, the drive unit 532 may be, for example, an electric motor. The transmission unit may be, for example, a transmission worm 531, with a first track 521 having a straight track segment on one side of the transmission worm 531, and this straight track segment being parallel to the transmission worm 531. The sliding unit 516 may be, for example, a slider, which, when engaged in the inter-tooth groove (groove between adjacent worm teeth) on the side of the transmission worm 531, forms a sliding engagement with the transmission worm 531. At any given time, at least two sliders of the first fixing components 511 are engaged on the transmission worm 531, and the drive unit 532 is connected to one end of the transmission worm 531 (…). Figure 2 The middle (right end) is used to drive the transmission worm 531 to rotate, thereby driving the slider and the first fixed component 511 connected to the transmission worm 531 to move on the first track 521, thereby driving each first fixed component 511 to move synchronously along the first track 521.

[0047] In some embodiments, the first track 521 may be formed into a closed loop in the shape of a square, and the four corners of the square may have rounded transitions, such as... Figure 1 , Figure 2 and Figure 3 As shown.

[0048] In some embodiments, a position detection unit 514 is provided at the interactive window 22, such as Figure 2 and Figure 3 As shown. The position detection unit 514 is used to detect the arrival signal of each first station 51 when it reaches the interaction window 22. For example, the position detection unit 514 can be a proximity sensor. The proximity sensor can be located on the bottom 24 inside the interaction chamber 2 and on one side of the first track 521. An electromagnetic induction plate 515 can be provided on the corresponding side of the first fixing component 511. When each first fixing component 511 moves close to the proximity sensor, the proximity sensor can detect the arrival signal of each first fixing component 511 reaching the interaction window 22 by sensing the electromagnetic induction plate 515 on the first fixing component 511. At this time, the drive part 532 of the drive mechanism 53 will stop operating, causing the transmission worm gear 531 to stop rotating, so that each first fixing component 511 loses driving force and remains stationary on the first track 521. The drive mechanism 53 resumes driving the first fixed component 511 only after the robot arm 61 has completed one round of operations (e.g., the robot arm 61 removes the transported object from a first station 51 at the interaction window 22, moves it to the corresponding transfer frame 3 in the process chamber 1, stops it at a second station 4 at the same interaction window 22, and returns the robot arm 61 to its original position). Preferably, the proximity sensor is positioned so that each passing first fixed component 511 stops at an appropriate location facing the interaction window 22. Multiple proximity sensors can be provided; for example, proximity sensors can be provided at each interaction window 22 and at the first chamber door 21.

[0049] refer to Figure 5 In conjunction with references Figure 2 and Figure 3In some embodiments, the first fixing component 511 includes a first body 512 and a fixture 513 rotatably disposed within the first body 512. The first body 512 has a bearing 517, and the fixture 513 is rotatably engaged with the bearing 517, thereby rotatably disposed within the first body 512. The top surface of the fixture 513 has a positioning groove 518 located within the fixture 513; the top of the positioning groove 518 has a first guide groove 519, and the bottom of the positioning groove 518 has a through hole. The transport object includes a clamp 7 that loads the coating object, and the clamp 7 includes a vertically arranged rod 71. The clamp 7 is used to load the coating object, which can be a product to be coated. The lower end of the rod 71 has a positioning portion 74 for engaging with the positioning groove 518; the lower end of the positioning portion 74 has a guide portion 73 that laterally contracts (i.e., reduces lateral dimensions); and the upper end of the positioning portion 74 has a shoulder portion 75 that laterally protrudes (i.e., expands lateral dimensions).

[0050] When a transport object is placed at the first workstation 51, the first fixing component 511 is used to position the lower end of the connecting rod 71. Specifically, the fixture 513 is used to vertically engage with the positioning part 74 on the lower end of the connecting rod 71 through the positioning groove 518 to position the clamp 7 during placement. The shoulder 75 is used to support the lower end of the connecting rod 71 on the inclined side wall of the first guide groove 519 after it enters the positioning groove 518 of the fixture 513, which can effectively reduce the engagement clearance and improve rotational stability. The through hole is used for the guide part 73 to pass through. When the positioning part 74 is engaged in the positioning groove 518, the shoulder 75 can also extend to the top surface of the fixture 513, which can improve the positioning stability of the clamp 7.

[0051] The first guide groove 519 may be a conical groove (an inverted trapezoidal groove), and the shoulder 75 has a conical surface that mates with the groove wall of the conical groove.

[0052] Because a flared first guide groove 519 is provided on the fixture 513, and the size of the guide portion 73 at the lower end of the rod 71 is smaller than the size of the positioning groove 518, when the lower end of the rod 71 of the fixture 7 is placed into the fixture 513 for positioning and engagement, the rod 71 does not need to be placed into the fixture 513 under absolutely vertical conditions, and the rod 71 can be placed into the fixture 513 even with a certain degree of offset, thereby improving the success rate. After the rod 71 is placed into the fixture 513, the engagement between the first guide groove 519 and the shoulder 75 can adaptively adjust concentricity during descent, effectively reducing the fit tolerance and thus improving accuracy.

[0053] refer to Figure 4 , Figure 6 In conjunction with references Figure 1In some embodiments, each second station 4 on the rotating frame 3 is provided with a second fixing component 41. The second fixing component 41 includes a latch 411 located on the outer side of the upper plate 33 at the upper end of the rotating frame 3 and a second body (not shown) correspondingly located on the lower plate 34 at the lower end of the rotating frame 3. The latch 411 is used for lateral engagement with the upper end of the connecting rod 71. The latch 411 may be designed as a lateral opening structure with an arc-shaped guide, and the opening size of the latch 411 is larger than the diameter of the upper end of the connecting rod 71. The second body is mounted on the bottom surface of the lower plate 34. A rotating shaft 412 is rotatably provided in the second body, and the upper end of the rotating shaft 412 passes through a through hole provided on the lower plate 34, extending from bottom to top through the lower plate 34. The upper end of the rotating shaft 412 is provided with a second guide groove 413 located in the rotating shaft 412. The second guide groove 413 is used to vertically insert and cooperate with the guide part 73 on the lower end of the rod 71 to position the clamp 7 during placement. Figure 4 and Figure 6 This shows the state before the guide portion 73 on the lower end of the connecting rod 71 falls into the second guide groove 413 of the rotating shaft 412, indicating the state before mating.

[0054] The second guide groove 413 can be a tapered groove, and the guide part 73 can have a tapered end that cooperates with the tapered groove.

[0055] When the clamp 7's connecting rod 71 is set on the second fixing component 41, the robot arm 61 delivers the vertically clamped connecting rod 71 to the second fixing component 41. First, the upper end of the connecting rod 71 enters the bayonet portion 411. Utilizing the arc-shaped guide structure of the bayonet portion 411, the connecting rod 71 can easily reach the bottom end of the bayonet portion 411. At this time, the lower end of the connecting rod 71 is basically aligned with the second guide groove 413. Then, the robot arm 61 moves down and places the lower end of the connecting rod 71 into the second guide groove 413 of the rotating shaft 412.

[0056] Because a second guide groove 413 is provided on the upper end of the rotating shaft 412, and the tip size of the guide part 73 at the lower end of the rod 71 is small, when the lower end of the rod 71 of the fixture 7 is placed into the rotating shaft 412 for positioning and engagement, the rod 71 does not need to be placed into the rotating shaft 412 under absolutely vertical conditions, and the rod 71 can be placed into the rotating shaft 412 even with a certain degree of offset, thereby improving the success rate. After the rod 71 is placed into the fixture 513, the engagement between the second guide groove 413 and the guide part 73 can adaptively adjust concentricity during descent, effectively reducing the fit tolerance and thus improving accuracy.

[0057] In some embodiments, the upper side of the guide portion 73 is provided with a plurality of locking blocks 731 along the circumferential direction, and the upper side wall of the second guide groove 413 is provided with a plurality of locking slots 414 for vertically engaging with the locking blocks 731. When the guide portion 73 on the lower end of the rod 71 falls into the second guide groove 413 of the rotating shaft 412, the locking blocks 731 also fall into the locking slots 414, forming a circumferential locking engagement. Thus, when the rotating shaft 412 is driven to rotate, it can drive the rod 71 to rotate synchronously, so that the product loaded on the fixture 7 can be coated accordingly.

[0058] In some embodiments, the lower end of the card block 731 has a first guide structure, and the upper end of the side wall of the card slot 414 has a second guide structure, which can guide the card block 731 to slide into the card slot 414 when the guide part 73 falls into the second guide groove 413.

[0059] refer to Figures 1-3 In some embodiments, the robotic arm 61 includes an X-axis transfer module 611 and a Y-axis transfer module 613. The X-axis transfer module 611 has a linear second guide rail 615, and the Y-axis transfer module 613 has a linear third guide rail 616. The second guide rail 615 is mounted on the rotating platform 62 along a horizontal first direction, and a support 618 is movably mounted on the second guide rail 615. The third guide rail 616 is mounted on the support 618 along a vertical second direction. A robotic arm 612 is movably mounted on the third guide rail 616, and a gripper 614 for holding and transporting objects is provided at the front end of the robotic arm 612. The X-axis transfer module 611 and the Y-axis transfer module 613 can be electric cylinder mechanisms. A counterweight 617 for maintaining balance can be provided on the support 618. A circumferential ball bearing structure can be provided below the rotating platform 62 to support the rotating platform 62 and ensure the horizontal balance accuracy of the rotating platform 62. Within the maximum X-axis stroke of the robotic arm 61, the rotating platform 62 can rotate, allowing its interaction range to cover all the process chambers 1 that it docks with, thus enabling automatic handling actions for different process chambers 1 to be performed within the stroke range.

[0060] Traditional conveying machinery typically relies entirely on guide rails for transport, making it difficult to change the position of the rails once they are fixed, and thus making docking difficult. This invention, however, uses a robotic arm 61 mounted on a rotatable platform 62 to compensate for this limitation, resulting in greater tolerance for point-to-point docking, enabling flexible docking with higher accuracy and success rate, thereby compensating for mechanical errors.

[0061] In some embodiments, the robotic arm 612 is configured as a frame shape with an opening facing the gripping side, meaning the robotic arm 612 has two arms, an upper arm and a lower arm. A gripper 614 is provided on the upper and lower ends of the frame opening (i.e., the front ends of the two arms), and the gripper 614 is horizontally forked. The rod 71 has two horizontally protruding brackets 72. The gripper 614 can insert the rod 71 from below the brackets 72, and then rise to abut against the bottom of the brackets 72, clamping the rod 71 and lifting it from the first station 51 or the second station 4. The height of the gripper 614 can be adjusted by moving the robotic arm 612 vertically along the third guide rail 616. By moving the robotic arm 612 horizontally along the second guide rail 615, the gripper 614 can fork the rod 71 under the bracket 72, and after lifting the rod 71, it moves horizontally again along the second guide rail 615 to transport the object from the first station 51 to the second station 4, or by reversing the movement, the object can be transported from the second station 4 to the first station 51. When the gripper 614 grips and lifts the object (rod 71) at one of the first stations 51 located at the interaction window 22, the first station 51 is idle, forming a transport channel to the interaction window 22. This allows the robotic arm 61 to pass over the idle first station 51 through this transport channel to transport the object. Figure 3 The illustration shows an example where gripper 614 clamps and lifts a connecting rod 71 located at a first station 51 in the interaction window 22 (not shown), leaving the first station 51 in an empty state. After setting the connecting rod 71, the robot arm 61 further lowers the gripper 614 to separate it from the bracket 72 and retracts it from the connecting rod 71, disengaging it from the fixture 7.

[0062] This invention, by providing guide structures (guide part 73, first guide groove 519, arc-shaped guide slot part 411, and second guide groove 413) on the rod 71 and on the first fixing component 511 and the second fixing component 41 that cooperate with the rod 71, increases the initial fit margin between the rod 71 and the first fixing component 511 and the second fixing component 41 when setting the clamp 7. This allows the clamp 7 to be more easily placed into the fixture 513 of the first fixing component 511, the slot part 411 of the second fixing component 41, and the rotating shaft 412 by the robot arm 61, ensuring a high success rate of transport. After placement, the clamp 7 can adaptively seek its center, achieving automatic vertical alignment between the clamp 7 and the first fixing component 511 and the second fixing component 41. This significantly reduces the fit tolerance between the clamp 7 and the first fixing component 511 and the second fixing component 41, thereby reducing concentricity deviation and the swaying amplitude after loading the product, and ensuring transport accuracy.

[0063] This invention discloses a coating apparatus, comprising at least two process chambers and the aforementioned conveying device. The conveying device is connected to each process chamber via an interactive window located on the interactive chamber. The process chambers are used to perform coating processes on coating objects loaded on a conveying object mounted on a rotating frame.

[0064] refer to Figure 1 In some embodiments, the coating equipment includes two process chambers 1. The two process chambers 1 can be arranged on both sides of the interactive chamber 2 of the conveying device, and are independently connected to the interactive chamber 2 through an interactive window 22 disposed between the process chambers 1 and the interactive chamber 2. The interactive window 22 is provided with a valve 23 for controlling the connection and disconnection between the process chambers 1 and the interactive chamber 2.

[0065] In some embodiments, the coating apparatus includes three process chambers, such as Figure 7 As shown. Alternatively, the coating apparatus may include four or five process chambers, but is not limited to these. Each process chamber is arranged around the interaction chamber. Each process chamber has its own second chamber door.

[0066] In some embodiments, process chamber 1 and interactive chamber 2 share the same vacuum system. When the valve 23 between any one process chamber 1 and interactive chamber 2 is open, and the first chamber door 21 and the second chamber door are closed, the vacuum system can simultaneously evacuate both process chamber 1 and interactive chamber 2. When any one valve 23 is closed, the process chamber 1 corresponding to that valve 23 can be processed independently. Figure 1 When the valves 23 between the two process chambers 1 and the interactive chamber 2 are both open, and the first chamber door 21 and the second chamber doors of the two process chambers 1 are both closed, the object can be transferred between the two process chambers 1 through the interactive chamber 2 without breaking the vacuum.

[0067] In some embodiments, the process chamber 1 is provided with at least one coating source, including but not limited to a cathode target, an ion source, etc., so that different types of coating processes can be performed.

[0068] The following describes in detail one conveying method of this utility model, taking the example of one conveying device supplying materials to two process chambers.

[0069] refer to Figures 1-6 For ease of explanation, let's assume... Figure 1The process chamber 1 located to the left of the interaction chamber 2 is the first process chamber 11, and the other process chamber 1 located to the right of the interaction chamber 2 is the second process chamber 12. The interaction window 22 between the first process chamber 11 and the interaction chamber 2 is the first interaction window 221, and the interaction window 22 between the second process chamber 12 and the interaction chamber 2 is the second interaction window 222. The rotating frame 3 provided in the first process chamber 11 is the first rotating frame 31, and the rotating frame 3 provided in the second process chamber 12 is the second rotating frame 32. Multiple second workstations 4 are respectively provided on the first rotating frame 31 and the second rotating frame 32. The transported objects include a first transported object, a second transported object, and / or a third transported object. The first transported object, the second transported object, and the third transported object each include a fixture 7 that loads the coated object (product).

[0070] In some embodiments, a conveying method of the present invention includes:

[0071] First, the conveying device is installed and connected to the two process chambers 1 through one interactive chamber 2, so that the interactive chamber 2 is connected to the first process chamber 11 through the first interactive window 221, and to the second process chamber 12 through the second interactive window 222. The first process chamber 11 is provided with a first rotating frame 31, and the second process chamber 12 is provided with a second rotating frame 32.

[0072] When it is necessary to move the object, the conveying module 5 of the conveying system controls each first station 51 to move synchronously along the flow line 52, and makes each first station 51 stop (pause) when it reaches the position of the first chamber door 21, the first interaction window 221 and the second interaction window 222 of the interaction chamber 2.

[0073] Then, using external automated facilities (external automated robotic arms), the first transport objects are placed one by one on the empty first workstations 51 when they are stopped at the position of the first chamber door 21 (the clamp 7 is placed into the fixture 513 of the first fixed component 511 through the lower end of the connecting rod 71) until the total number of the first transport objects loaded is equal to the total number of the second workstations 4 provided on the first rotating frame 31.

[0074] Next, the first rotating frame 31 is rotated by the rotating frame control mechanism, and each second station 4 on the first rotating frame 31 pauses when it reaches the position of the first interactive window 221. In the initial state, one of the second stations 4 can be used as the reference station, and the reference station is positioned directly opposite the first interactive window 221. Using this as the rotation zero point, the rotating frame control mechanism controls the first rotating frame 31 to rotate gradually at the same rotation angle as the standard arc angle between two adjacent second stations 4, and pauses the rotation once after each rotation angle, so that each second station 4 on the first rotating frame 31 can pause when it reaches the first interactive window 221.

[0075] Next, the transport module 6 controls the rotating platform 62 to face the first interaction window 221, causing the robot arm 61 to move horizontally along the first direction. It then removes the first transport objects from each of the first workstations 51 when the robot arm is stopped at the first interaction window 221, and sequentially transports them to the first process chamber 11 through the first interaction window 221, placing them on each of the second workstations 4 of the first rotating frame 31 when the robot arm is stopped at the first interaction window 221. Specifically, the robot arm 61 first removes the first transport object from one of the first workstations 51 when the robot arm is stopped at the first interaction window 221, and during the pause at the first workstation 51, transports this first transport object to the first process chamber 11 through the first interaction window 221, placing it on one of the second workstations 4 of the first rotating frame 31 when the robot arm is stopped at the first interaction window 221. Then, the robot arm 61 retracts and resets. Next, the rotating frame control mechanism controls the first rotating frame 31 to continue rotating, causing the next second station 4 to rotate to the position of the first interactive window 221 and pause. The transport module 6 controls each first station 51 to continue moving one station, causing the next first station 51 to move to the position stopped at the first interactive window 221. At this time, the robot arm 61 moves horizontally along the first direction, removes the first transport object set on the next first station 51 when it is stopped at the first interactive window 221 as the second transport object, and transports the second transport object to the first process chamber 11 through the first interactive window 221 during the pause of the first station 51, and sets it on the next second station 4. Then, the robot arm 61 retracts and resets. The operation is repeated in this manner to transport all the first transport objects on each first station 51 to each second station 4. If it is necessary to send the first transport objects (transport objects) on each second station 4 to each first station 51 in the interactive chamber 2, simply reverse the operation.

[0076] In some embodiments, a conveying method of the present invention may further include:

[0077] The second transported objects are then placed one by one at each of the first workstations 51 when they stop at the first chamber door 21, until the total number of the second transported objects loaded is equal to the total number of the second workstations 4 provided on the second rotating frame 32.

[0078] The second rotating frame 32 is rotated, and each second station 4 on the second rotating frame 32 pauses when it reaches the position of the second interaction window 222. The rotating platform 62 is rotated so that the first direction faces the second interaction window 222, and the robot arm 61 moves horizontally along the first direction to remove the second transport objects set on each first station 51 when it stops at the position of the second interaction window 222 one by one. During the pause at the first station 51, the objects are sequentially transported through the second interaction window 222 into the second process chamber 12 and sequentially set on each second station 4 of the second rotating frame 32 when it stops at the position of the second interaction window 222.

[0079] It should be noted that the order of transferring the first transported object to the first process chamber 11 and the order of transferring the second transported object to the second process chamber 12 can be interchanged. Furthermore, the order of transferring the first transported object to the second process chamber 12 and the order of transferring the second transported object to the first process chamber 11 can also be interchanged.

[0080] In some embodiments, a conveying method of the present invention may further include:

[0081] The rotating platform 62 is rotated so that the first direction faces the first interaction window 221, and the robot arm 61 enters the first process chamber 11 along the first direction. It removes the first transport objects one by one from each of the second workstations 4 of the first rotating frame 31 when it is positioned at the first interaction window 221, and sequentially transports them through the first interaction window 221 into the interaction chamber 2, placing them sequentially on the corresponding number of empty first workstations 51 when they are positioned at the first interaction window 221. Then, using external automated facilities, the robot removes the first transport objects one by one from each of the first workstations 51 when they are positioned at the first chamber door 21, and sends them out of the interaction chamber 2.

[0082] Furthermore, the rotating platform 62 is rotated so that the first direction faces the second interaction window 222, allowing the robotic arm 61 to enter the second process chamber 12 along the first direction. The robotic arm 61 then removes the second transport objects one by one from each of the second workstations 4 of the second rotating frame 32 when it is positioned at the second interaction window 222, and sequentially transports them through the second interaction window 222 into the interaction chamber 2. These objects are then sequentially placed on the corresponding number of empty first workstations 51 when the robotic arm is positioned at the second interaction window 222. Then, using external automated facilities, the robotic arm removes the second transport objects one by one from each of the first workstations 51 when the robotic arm is positioned at the first chamber door 21, and sends them out of the interaction chamber 2.

[0083] It should be noted that the order of sending the first transported object from the first process chamber 11 to the interaction chamber 2 and then out, and the order of sending the second transported object from the second process chamber 12 to the interaction chamber 2 and then out, can be interchanged.

[0084] This invention eliminates the need for manual material handling, saving labor costs and significantly improving equipment automation. It also effectively reduces the failure rate of material handling while increasing its precision. Furthermore, by rationally configuring vacuuming time, conveying time, breaking-through time, and baking time, this invention utilizes time differences to make use of pre-production preparation time (such as vacuuming and impurity removal) that is unfavorable for production, enabling alternating material transport. From the perspective of equipment utilization, if multiple processes require the use of all configured process chambers, full-load operation is possible. If only a portion of the process chambers are used for coating, the remaining process chambers will not be idle and waste capacity; they can be used to produce other single-process materials according to the aforementioned time difference concept. This facilitates both the rational combination of processes and the refined management of production. Furthermore, in a structural configuration, for example, using one interactive chamber connecting two process chambers, the time difference can be utilized (only the initial vacuuming time cannot be saved). This allows for the loading and unloading of materials from both process chambers while saving on a single conveying device. The more times materials are fed, the higher the utilization rate (during the operation of the first process chamber 11 with the first valve 231 closed, the second valve 232 can be opened to allow material exchange between the interactive chamber 2 and the second process chamber 12, thus ensuring high-efficiency processing through intermittent sequential operation). For equipment layouts with more than two process chambers, the operation method is the same as described above. Process combinations can be arranged according to different chambers to obtain superior film layers. In traditional continuous-line coating equipment, the application of multiple film layers can only be performed sequentially according to a fixed pattern without modification. However, in this invention, a cluster pattern replaces the fixed pattern. The diversity brought by the flexible combination of process modes is unprecedented. The flexible and varied formulas can not only meet market film layer demands but also improve equipment utilization. Traditional continuous line coating equipment can only operate in a sequential manner, while this invention adopts a cluster mode, which can perform both joint coating operations and individual operations, thus reducing almost all equipment downtime.

[0085] In summary, this invention, by incorporating a conveying device, can supply materials to multiple process chambers, thereby enabling the application of different coating processes to the materials. Furthermore, this invention allows for efficient and accurate material conveying without disrupting the vacuum environment, significantly reducing material transport time, the risk of contaminant entry, and minimizing manual intervention, thus increasing production capacity.

[0086] The above are merely preferred embodiments of the present utility model. These embodiments are not intended to limit the scope of protection of the present utility model. Therefore, any equivalent changes made based on the description and drawings of the present utility model should also be included within the scope of protection of the present utility model.

Claims

1. A conveying device, characterized in that, include: An interactive chamber and a conveying system located within the interactive chamber; The interactive chamber is connected to at least two process chambers through an interactive window, and the interactive chamber is equipped with a first chamber door; The conveying system includes: The conveying module includes a closed annular conveyor line with a plurality of first stations arranged sequentially on the conveyor line. The conveying module is used to make each first station move synchronously along the conveyor line and to make each first station stop when it reaches the first chamber door and any one of the interaction windows. The transport module includes a rotating platform disposed inside the flow line and a robot arm disposed on the rotating platform. The transport module is used to move the robot arm horizontally in a first direction and vertically in a second direction, and to rotate the rotating platform so that the first direction is oriented toward any of the interactive windows, wherein the first direction passes through the rotation center of the rotating platform. The process chamber is equipped with a rotating frame, which has multiple second workstations evenly distributed along its circumference. The rotating frame is used to drive each second workstation to rotate synchronously and to make each second workstation stop when it reaches the corresponding interactive window. The first chamber door is used for loading and unloading transported objects, the first workstation and the second workstation are used for setting the transported objects, and the robotic arm is used to move the transported objects from one of the first workstation and the second workstation, which are stopped on either side of any of the interactive windows, to the other.

2. The conveying device according to claim 1, characterized in that, The transfer line includes a first circular closed track, which is horizontally arranged. Each first workstation is connected in sequence and located on the first track. A drive mechanism is provided on one side of the first track. The drive mechanism is used to drive any of the first workstations to move along the first track, thereby causing each first workstation to move synchronously along the first track. The drive is paused when any of the first workstations reaches the first chamber door or any of the interactive windows.

3. The conveying device according to claim 2, characterized in that, The first workstation is provided with a first fixed component. The first fixed components of each first workstation are connected in sequence and movably mounted on the first track. The driving mechanism includes a driving part and a transmission worm. A slider for cooperating with the transmission worm is provided on one side of the first fixed component. At any time, at least two sliders of the first fixed components are engaged on the transmission worm. The driving part is used to drive the transmission worm to rotate, thereby causing the sliders engaged on the transmission worm and the first fixed components connected to it to move on the first track, thereby causing each first fixed component to move synchronously along the first track.

4. The conveying device according to claim 1, characterized in that, The interactive window is equipped with a position detection unit, which is used to detect the arrival signal of each of the first workstations.

5. The conveying device according to claim 3, characterized in that, The first fixing component includes a first body and a fixture rotatably disposed in the first body. The fixture has a positioning groove on its top surface, a first guide groove on the top of the positioning groove, and a through hole on the bottom of the positioning groove. The object to be transported includes a clamp, which includes a vertically arranged rod. The lower end of the rod has a positioning part, and the lower end of the positioning part has a laterally retractable guide part. The upper end of the positioning part has a laterally protruding shoulder. The fixture is used to vertically insert and engage with the positioning part on the lower end of the rod through the positioning groove to position the clamp during placement. The shoulder is used to support the side wall of the first guide groove. The through hole is used for the guide part to pass through. When the positioning part is engaged in the positioning groove, the shoulder also extends to the top surface of the fixture.

6. The conveying device according to claim 5, characterized in that, The second workstation is provided with a second fixing component, which includes a latch on the upper end of the rotating frame and a second body on the lower end of the rotating frame. The latch is used to engage laterally with the upper end of the string rod. The second body is rotatably provided with a rotating shaft. The upper end of the rotating shaft is provided with a second guide groove. The second guide groove is used to engage vertically with the guide part on the lower end of the string rod to position the fixture during placement. The upper side of the guide part is provided with multiple locking blocks along the circumferential direction. The upper side wall of the second guide groove is provided with corresponding slots for vertically engaging the locking blocks. The lower end of the locking block has a first guide structure, and the upper side wall of the slot has a second guide structure.

7. The conveying device according to claim 1, characterized in that, The robotic arm includes an X-axis transfer module and a Y-axis transfer module. The X-axis transfer module is provided with a linear second guide rail, and the Y-axis transfer module is provided with a linear third guide rail. The second guide rail is disposed on the rotating platform along the first direction, and a support is movably disposed on the second guide rail. The third guide rail is disposed on the support along the second direction, and a robotic arm is movably disposed on the third guide rail. The front end of the robotic arm is provided with a gripper for holding the object being transferred.

8. A coating apparatus, characterized in that, It includes at least two process chambers and a conveying device as described in any one of claims 1-7, wherein the conveying device is connected to each of the process chambers through an interactive window provided on the interactive chamber, and the process chambers are used to perform a coating process on a coating object loaded on a conveying object provided on a rotating frame.

9. The coating equipment according to claim 8, characterized in that, The process chamber and the interaction chamber share the same vacuum system.

10. The coating equipment according to claim 8, characterized in that, The process chamber is equipped with at least one coating source.

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