Spraying device and ALD coating equipment

Abstract

The utility model provides a kind of spraying device and ALD coating equipment, wherein spraying device includes spraying plate, air passage component and blocking component, spraying plate is equipped with for the air inlet for process gas to enter, and spraying face for with passivation boat air inlet end butting;Air passage component is arranged inside spraying plate, for guiding process gas from air inlet to flow to spraying face;Blocking component is arranged on spraying face, for preventing process gas from the gap between spraying plate and passivation boat air inlet end to escape;The utility model effectively reduces the process gas escape of spraying device and passivation boat butt joint, improves process gas utilization, reduces process gas input amount, to reach the purpose of saving process gas raw material and reducing cost.

Description

Technical Field

[0001] This utility model belongs to the field of solar cell manufacturing technology, and more specifically, it relates to a spraying device and an ALD coating equipment. Background Technology

[0002] With the continuous development of the semiconductor, integrated circuit, and photovoltaic industries, ALD (Atomic Layer Deposition) technology has been significantly promoted as a key thin film deposition process. Compared with traditional CVD (Chemical Vapor Deposition) and PVD (Physical Vapor Deposition) technologies, ALD exhibits unique advantages in the thin film preparation field of the photovoltaic industry due to its low-temperature process and high-precision and high-uniformity coating capabilities. While ensuring coating quality, the structure of the module inside the reaction chamber can be optimized to improve equipment efficiency and capacity, and reduce operating costs.

[0003] In existing technologies, the spray device of an ALD coating equipment delivers process gas to a passivation boat within the reaction chamber through spray holes to achieve thin film deposition on the passivation surfaces of the solar cells inside the passivation boat. However, existing spray devices suffer from a problem where process gas escapes from the interface between the spray device and the passivation boat during gas delivery, affecting the process performance. Utility Model Content

[0004] The present invention aims to provide a spraying device and an ALD coating equipment to reduce the occurrence of process gas escape.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a spraying device, including:

[0007] The spray plate is provided with an air inlet for the process gas to enter and a spray surface for docking with the air inlet end of the passivation boat.

[0008] The air duct component, located inside the spray plate, is used to guide the process gas from the air inlet to the spray surface;

[0009] A blocking component is installed on the spray surface to prevent process gases from escaping from the gap between the spray plate and the air inlet of the passivation boat.

[0010] Furthermore, the blocking component consists of four blocking strips connected in sequence, which are installed around the spray surface; or, the blocking component consists of three blocking strips connected in sequence, which are installed around the spray surface except for the bottom edge.

[0011] Furthermore, the air duct component includes an air intake channel, multiple air distribution channels, and multiple spray channel groups. The air intake channel is connected to the air inlet and extends along a first direction. Each air distribution channel is connected to the air intake channel and extends along a second direction. Each spray channel group is connected to each air distribution channel and extends along a third direction until it penetrates the spray surface. The first direction, the second direction, and the third direction intersect each other.

[0012] Furthermore, the air inlet is divided into a first air inlet and a second air inlet, and the air passage component is divided into a first air passage component that communicates with the first air inlet and a second air passage component that communicates with the second air inlet, and the first air passage component and the second air passage component are not connected to each other.

[0013] Furthermore, the first airway component includes a first air intake channel, multiple first air distribution channels, and multiple sets of first spray channel groups; the second airway component includes a second air intake channel, multiple second air distribution channels, and multiple sets of second spray channel groups. Each first air distribution channel has a first closed end that connects to each set of first spray channel groups, and each second air distribution channel has a second closed end that connects to each set of second spray channel groups. The first closed ends and the second closed ends are arranged alternately in a first direction.

[0014] Furthermore, each first air distribution channel has a first open end that connects with the first air inlet channel and the first open end extends through one side of the spray plate, and each second air distribution channel has a second open end that connects with the second air inlet channel and the second open end extends through the other side of the spray plate, and the spray plate is provided with a sealing assembly for sealing the first open end and the second open end.

[0015] Furthermore, each group of first spray channels includes multiple first spray units spaced apart along the second direction, and each group of second spray channels includes multiple second spray units spaced apart along the second direction. The first spray units and the second spray units are arranged alternately in the first direction to form multiple rows of spray units corresponding to the multiple air inlets at the air inlet end of the passivation boat.

[0016] Furthermore, the spray surface includes multiple spray areas that are connected one-to-one with the air inlets of multiple stacked passivation boats, and the air duct component includes multiple interconnected air duct modules for guiding process gas from the air inlet to the corresponding spray area.

[0017] This utility model also proposes an ALD coating equipment, including a reaction chamber, a passivation boat located in the reaction chamber and loaded with a battery cell box, a spray device disposed at the air inlet end of the passivation boat, and an air extraction device disposed at the air outlet end of the passivation boat, wherein the spray device adopts the spray device described above.

[0018] Furthermore, the passivation boat is provided with multiple cell loading channels and at least one gas flow channel located between two adjacent cell loading channels. Multiple cell boxes are placed in each cell loading channel, and the passivation surface of the cell in each cell box is flush with the gas flow channel.

[0019] Compared with existing technologies, the beneficial effects of the spraying device and ALD coating equipment provided by this utility model are as follows: By adding a blocking component to the spraying surface, this utility model effectively reduces the escape of process gas at the junction of the spraying device and the passivation boat. This design improves the utilization rate of process gas and reduces the amount of process gas introduced, thereby achieving the purpose of saving process gas raw materials and reducing costs. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the spraying device docking with the stacked passivation boat in Embodiment 1 of this utility model;

[0022] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0023] Figure 3 This is a front view of the spraying device in Embodiment 1 of this utility model;

[0024] Figure 4 for Figure 3 Enlarged view of point B in the middle;

[0025] Figure 5 This is a schematic diagram of the passivation device in Embodiment 1 of this utility model;

[0026] Figure 6 This is a schematic diagram of the passivation boat in Embodiment 2 of this utility model;

[0027] Figure 7 This is a front view of the spraying device in Embodiment 2 of this utility model;

[0028] Figure 8 This is a front view of the spraying device in Embodiment 3 of this utility model;

[0029] Figure 9 This is a schematic diagram of the passivation boat in Embodiment 4 of this utility model;

[0030] Figure 10This is a front view of the spraying device in Embodiment 4 of this utility model;

[0031] Figure 11 for Figure 10 Enlarged view of point C in the middle;

[0032] The main markings in the attached figures are as follows:

[0033] 100. Spraying device; 200. Passivation boat; 300. Battery cell box; 400. Reaction chamber;

[0034] 11. Sprayer plate; 13. Barrier components;

[0035] 31. Surface to be passivated;

[0036] 111. Spray surface; 112. Spray nozzle;

[0037] 113. First air intake; 114. Second air intake;

[0038] 121. First air intake channel; 122. First air distribution channel; 123. First spray channel;

[0039] 124. Second air intake channel; 125. Second air distribution channel; 126. Second spray channel;

[0040] 131. Barrier strip;

[0041] 1231, First spray unit; 1232, Second spray unit. Detailed Implementation

[0042] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0043] Example 1

[0044] Please refer to the following: Figures 1 to 4 The spray device 100 proposed in this embodiment mainly includes a spray plate 11, an air passage component, and a blocking component 13. The spray plate 11 has an air inlet for process gas to enter and a spray surface 111 for docking with the air inlet end of the passivation boat. The air passage component is disposed inside the spray plate 11 to guide the process gas from the air inlet to the spray surface 111. The blocking component 13 is disposed on the spray surface 111 to prevent the process gas from escaping from the gap between the spray plate 11 and the air inlet end of the passivation boat.

[0045] In this spraying device 100, by adding a blocking component 13 to the spraying surface 111, the escape of process gas at the junction of the spraying device 100 and the passivation boat 200 is effectively reduced. This design improves the utilization rate of process gas and reduces the amount of process gas introduced, thereby achieving the purpose of saving process gas raw materials and reducing costs.

[0046] It should be noted that, as Figure 1 As shown, to more clearly demonstrate the spray surface 111 of the spray device 100, a distance is intentionally left between the spray device 100 and the passivation boat 200. Furthermore, in actual production, the spray device 100 is not completely flush with the air inlet end of the passivation boat; a certain gap is always maintained between them. The spray device 100 proposed in this invention is equipped with a blocking component 13 to effectively prevent process gas from escaping through the gap.

[0047] In this embodiment, as Figure 1 , Figure 3 As shown, the blocking component 13 consists of three sequentially connected blocking strips 131, which are installed around the spray surface 111 except for the bottom edge. It should be noted that since the boat frame in the passivation boat 200 can prevent process gases from escaping from the bottom of the passivation boat 200, blocking strips 131 do not need to be provided at the bottom edge of the spray surface 111.

[0048] In this embodiment, as Figure 3 As shown, the upper side of the spray plate 11 is provided with a first air inlet 113 and a second air inlet 114. The first air inlet 113 is used to allow the precursor gas A and the inert gas to enter alternately in a pulsed manner, and the second air inlet 114 is used to allow the precursor gas B and the inert gas to enter alternately in a pulsed manner. In practical applications, the pulsed alternating air intake can be achieved by using a valve (such as a two-way valve or a three-way valve) to control the delivery of the precursor gas first, followed by the delivery of the inert gas.

[0049] Meanwhile, the air duct component is divided into a first air duct component communicating with the first air inlet 113 and a second air duct component communicating with the second air inlet 114, and the first air duct component and the second air duct component are not interconnected. This design ensures that the precursor gases A and B are accurately injected into the passivation boat 200 through their respective independent air duct components, thereby effectively avoiding the problem of reduced coating quality caused by using the same air duct component to sequentially introduce precursor gases A and B.

[0050] Among them, such as Figure 1 , Figure 3As shown, the first air passage component includes a first air intake channel 121, a plurality of first air equalization channels 122, and a plurality of first spray channel groups. The first air intake channel 121 communicates with the first air inlet 113 and extends along a first direction. Each first air equalization channel 122 communicates with the first air intake channel 121 and extends along a second direction. Each group of first spray channels communicates with each first air equalization channel 122 and extends along a third direction until it penetrates the spray surface 111. The first direction, the second direction, and the third direction intersect each other.

[0051] Similarly, the second air intake channel 124 is connected to the second air intake port 114 and extends along the first direction, each second air distribution channel 125 is connected to the second air intake channel 124 and extends along the second direction, and each group of second spray channels 126 is connected to each second air distribution channel 125 and extends along the third direction until it penetrates the spray surface 111.

[0052] Moreover, each first air distribution channel 122 has a first closed end that connects to each group of first spray channels, and each second air distribution channel 125 has a second closed end that connects to each group of second spray channels, with the first closed end and the second closed end arranged alternately in the first direction.

[0053] Furthermore, each first air distribution channel 122 has a first open end that connects with the first air intake channel 121 and the first open end extends through one side of the spray plate 11. Each second air distribution channel 125 has a second open end that connects with the second air intake channel 124 and the second open end extends through the other side of the spray plate 11. The spray plate 11 is provided with a sealing assembly for sealing the first open end and the second open end.

[0054] This design makes the first and second air duct components more compact, reducing the space required inside the spray plate 11 and thus reducing the overall size of the spray device 100, making it lighter and easier to install. Simultaneously, the first and second air duct components with the above structure allow the precursor gases A and B to be sprayed in parallel, vertically, through multiple diversions and uniform distribution after entering their respective independent air duct components. During this process, precursor gases A and B are buffered within their respective independent air ducts, ensuring uniform concentration and achieving uniform spraying, effectively improving coating uniformity.

[0055] Moreover, such as Figure 1 , Figure 3 and Figure 4As shown, each group of first spray channels includes two first spray units 1231 spaced apart along the second direction. Each first spray unit 1231 consists of three first spray channels 123, and the air outlets of these three first spray channels 123 form three spray holes 112 on the spray surface 111. Similarly, each group of second spray channels includes two second spray units 1232 spaced apart along the second direction. Each second spray unit 1232 consists of three second spray channels 126, and the air outlets of these three second spray channels 126 form three spray holes 112 on the spray surface 111. The first spray units 1231 and the second spray units 1232 are arranged alternately in the first direction to form two rows of spray units corresponding to the two air inlets at the air inlet end of the passivation boat.

[0056] This design enables the spray device 100 to spray process gas into two gas channels in the passivation boat 200, which is suitable for high-efficiency mass passivation of solar cells and significantly improves production capacity.

[0057] Meanwhile, the spray surface 111 includes two spray areas that are connected one-to-one with the air inlets of the two stacked passivation boats. The air duct component includes two interconnected air duct modules for guiding the process gas from the air inlet to the corresponding spray area. It should be understood that the upper half of the first air duct component and the upper half of the second air duct component together form one air duct module, and the lower half of the first air duct component and the lower half of the second air duct component together form another air duct module.

[0058] This design enables the spray device 100 to simultaneously inject process gas into the gas channels of two passivation boats 200 stacked above and below, thereby effectively increasing production capacity and reducing equipment operating costs.

[0059] Please refer to the following: Figure 1 , Figure 5 The ALD coating equipment proposed in this embodiment includes a reaction chamber 400, a passivation boat 200 located in the reaction chamber 400 and loaded with a battery cell box 300, a spray device 100 provided at the air inlet end of the passivation boat, and an air extraction device provided at the air outlet end of the passivation boat.

[0060] The specific structure of the spray device 100 has been described in detail above and will not be repeated here. The exhaust device adopts an existing structural design, which can not only effectively guide the process gas sprayed into the passivation boat 200 through the spray device 100, but also increase the flow rate of the process gas in the latter half of the passivation boat 200, thereby helping to improve the coating uniformity of the battery cells at different positions in the front, middle and rear sections of the passivation boat 200.

[0061] Meanwhile, the passivation boat 200 has a large capacity for carrying cells. Specifically, the passivation boat 200 has three cell loading channels and two gas channels located between two adjacent cell loading channels. Each cell loading channel holds six cell cassettes 300. In each cell cassette 300, only the surface 31 to be passivated is exposed, and the surface 31 to be passivated is flush with the gas channel, which helps to ensure the uniformity of the coating on the cell.

[0062] Example 2

[0063] Please refer to the following: Figure 1 , Figure 6 and Figure 7 The difference between this embodiment and Embodiment 1 is that the spraying device 100 only needs to spray process gas into the two gas channels of a passivation boat 200.

[0064] like Figure 1 , Figure 7 As shown, the spray device 100 proposed in this embodiment mainly includes a spray plate 11, an air passage component, and a blocking component 13.

[0065] The spray plate 11 has a first air inlet 113 and a second air inlet 114 on its upper side. The first air inlet 113 is used to allow the precursor gas A and the inert gas to enter alternately in pulses, and the second air inlet 114 is used to allow the precursor gas B and the inert gas to enter alternately in pulses. The front side of the spray plate 11 has a spray surface 111 for docking with the air inlet end of the passivation boat.

[0066] The blocking component 13 consists of three blocking strips 131 connected in sequence. The three blocking strips 131 are installed on the three sides of the spray surface 111 except for the bottom edge, which can effectively reduce the escape of process gas.

[0067] The air duct component is divided into a first air duct component communicating with the first air inlet 113 and a second air duct component communicating with the second air inlet 114, and the first air duct component and the second air duct component are not interconnected. The first air duct component includes a first air intake channel 121, a plurality of first air equalization channels 122 and a plurality of groups of first spray channels. The first air intake channel 121 communicates with the first air inlet 113 and extends along a first direction. Each first air equalization channel 122 communicates with the first air intake channel 121 and extends along a second direction. Each group of first spray channels communicates with each first air equalization channel 122 and extends along a third direction until it penetrates the spray surface 111, wherein the first direction, the second direction and the third direction intersect each other. Similarly, the second air intake channel 124 is connected to the second air intake port 114 and extends along the first direction, each second air distribution channel 125 is connected to the second air intake channel 124 and extends along the second direction, and each group of second spray channels 126 is connected to each second air distribution channel 125 and extends along the third direction until it penetrates the spray surface 111.

[0068] Moreover, in this airway component, each first air distribution channel 122 has a first closed end that connects to each group of first spray channels, and each second air distribution channel 125 has a second closed end that connects to each group of second spray channels 126, with the first closed end and the second closed end arranged alternately in the first direction.

[0069] Furthermore, in this airway component, each first air distribution channel 122 has a first open end that connects with the first air intake channel 121 and the first open end penetrates one side of the spray plate 11, each second air distribution channel 125 has a second open end that connects with the second air intake channel 124 and the second open end penetrates the other side of the spray plate 11, and the spray plate 11 is provided with a sealing assembly for sealing the first open end and the second open end.

[0070] Moreover, such as Figure 1 , Figure 4 and Figure 7 As shown, in this air duct component, each group of first spray channels includes two first spray units 1231 spaced apart along a second direction. Each spray unit consists of three first spray channels 123, and the air outlet ends of these three first spray channels 123 form three spray holes 112 on the spray surface 111. Similarly, each group of second spray channels includes two second spray units 1232 spaced apart along a second direction. Each second spray unit 1232 consists of three second spray channels 126, and the air outlet ends of these three second spray channels 126 form three spray holes 112 on the spray surface 111. The first spray units 1231 and second spray units 1232 are arranged alternately in a first direction to form two rows of spray units corresponding to the two air inlets at the air inlet end of the passivation boat.

[0071] Example 3

[0072] Please refer to the following: Figure 7 , Figure 8 The difference between this embodiment and embodiment two is that the blocking component 13 is composed of four blocking strips 131 connected in sequence. The four blocking strips 131 are installed around the spray surface 111 to better prevent process gas from escaping at the junction of the spray device 100 and the passivation boat 200.

[0073] Example 4

[0074] Please refer to the following: Figures 6 to 7 and Figures 9 to 11 The difference between this embodiment and Embodiment 2 is that the spray device 100 only needs to spray process gas into one gas flow channel of a passivation boat 200. Each group of first spray channels consists of a plurality of first spray channels 123 spaced apart along the second direction, and each group of second spray channels consists of a plurality of second spray channels 126 spaced apart along the second direction.

[0075] The spray device and ALD coating equipment proposed in this invention effectively reduce the escape of process gases by adding a blocking component to the spray device, thereby improving the utilization rate of process gases and reducing costs. Furthermore, the gas duct components of the spray device are available in various forms, allowing for precise matching not only with passivation boats of different flow channel structures but also with stacked passivation boats, thus meeting diverse production needs.

[0076] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A spraying device, characterized in that, include: A spray plate, wherein the spray plate is provided with an air inlet for process gas to enter, and a spray surface for docking with the air inlet end of the passivation boat; An air duct component, disposed inside the spray plate, is used to guide process gas from the air inlet to the spray surface; A blocking component is disposed on the spray surface to prevent process gas from escaping from the gap between the spray plate and the air inlet of the passivation boat.

2. The spraying device as described in claim 1, characterized in that, The blocking component consists of four blocking strips connected in sequence, which are installed around the spray surface; or, the blocking component consists of three blocking strips connected in sequence, which are installed around the spray surface except for the bottom edge.

3. The spraying device as described in claim 1 or 2, characterized in that, The air duct component includes an air intake channel, multiple air distribution channels, and multiple spray channel groups. The air intake channel communicates with the air inlet and extends along a first direction. Each air distribution channel communicates with the air intake channel and extends along a second direction. Each spray channel group communicates with each air distribution channel and extends along a third direction until it penetrates the spray surface. The first direction, the second direction, and the third direction intersect each other.

4. The spraying device as described in claim 3, characterized in that, The air inlet is divided into a first air inlet and a second air inlet. The air passage component is divided into a first air passage component that communicates with the first air inlet and a second air passage component that communicates with the second air inlet. The first air passage component and the second air passage component are not connected to each other.

5. The spraying device as described in claim 4, characterized in that, The first airway component includes a first air inlet channel, multiple first air distribution channels, and multiple sets of first spray channel groups. The second airway component includes a second air inlet channel, multiple second air distribution channels, and multiple sets of second spray channel groups. Each first air distribution channel has a first closed end that connects to each set of first spray channel groups, and each second air distribution channel has a second closed end that connects to each set of second spray channel groups. The first closed end and the second closed end are arranged alternately in the first direction.

6. The spraying device as described in claim 5, characterized in that, Each first air distribution channel has a first open end that connects to the first air inlet channel, and the first open end extends through one side of the spray plate. Each second air distribution channel has a second open end that connects to the second air inlet channel, and the second open end extends through the other side of the spray plate. The spray plate is provided with a sealing assembly for sealing the first open end and the second open end.

7. The spraying device as described in claim 5, characterized in that, Each first spray channel group includes a plurality of first spray units spaced apart along the second direction, and each second spray channel group includes a plurality of second spray units spaced apart along the second direction. The first spray units and the second spray units are arranged alternately in the first direction to form multiple rows of spray units corresponding to the plurality of air inlets at the air inlet end of the passivation boat.

8. The spraying device as described in claim 1, characterized in that, The spray surface includes multiple spray areas that are connected one-to-one with the air inlets of multiple stacked passivation boats. The air duct component includes multiple interconnected air duct modules for guiding process gas from the air inlet to the corresponding spray area.

9. An ALD coating apparatus, comprising a reaction chamber, a passivation boat containing a battery cell cassette located within the reaction chamber, a spray device disposed at the air inlet of the passivation boat, and an exhaust device disposed at the air outlet of the passivation boat, characterized in that, The spraying device is the spraying device as described in any one of claims 1-8.

10. The ALD coating equipment as described in claim 9, characterized in that, The passivation boat is provided with multiple cell loading channels and at least one gas flow channel located between two adjacent cell loading channels. Multiple cell loading channels are placed in each cell loading channel, and the passivation surface of the cell in each cell loading channel is flush with the gas flow channel.

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