A tray for solid precursor cylinders
By rationally arranging the upward channel and improving the channel structure in the solid precursor cylinder tray, and by adopting multiple upward through holes and threaded designs, the problem of uneven gas source concentration was solved, and a stable gas source supply and efficiency improvement were achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI QINGJIANTING TECH CO LTD
- Filing Date
- 2025-07-30
- Publication Date
- 2026-07-14
AI Technical Summary
In existing technologies, the solid precursor transport process suffers from low transport efficiency and instability, resulting in uneven gas source concentration, which fails to meet the stable supply requirements of semiconductor materials, and the unreasonable structure increases costs.
A tray for solid precursor cylinders is designed. By rationally arranging the position of the upward channel and improving the channel structure, multiple upward through holes and threaded structures are adopted to form turbulence and avoid local dead zones in gas flow above the tray, thereby achieving stable control and stable supply of gas source concentration.
It achieves stable control and supply of gas source concentration, avoids the occurrence of eddy dead zones, improves precursor utilization efficiency, and reduces costs.
Smart Images
Figure CN224494328U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of integrated circuit technology, and in particular to a tray for solid precursor cylinders. Background Technology
[0002] Atomic layer deposition (ALD) is a key process technology in semiconductor chip manufacturing. In this technology, solid precursors are sublimated at high temperatures and then enter the reaction chamber as a gaseous phase. Due to the low vapor pressure of the precursor source, a carrier gas is required to transport it to the reaction chamber to provide a stable flow rate. ALD processes have extremely stringent requirements on the concentration of the solid precursor gaseous phase; the concentration must be highly uniform and supplied with a highly stable flow rate.
[0003] Existing technologies generally suffer from low transport efficiency, unstable transport processes, and difficulties in ensuring stable concentration supply, failing to meet customer requirements for semiconductor material transport control. Furthermore, due to unreasonable structures, they reduce precursor utilization efficiency and increase costs. For example, Chinese Patent Publication No. CN116288278A, entitled "A Solid Precursor Transport Device and Method," describes a solid precursor transport device in which a partition is installed in a tray to support the solid precursor. The partition, after installation, forms an angle with the bottom of the tray, and a gap exists between the bottom surface of the partition and the bottom of the tray. This increases the contact area between the solid precursor and the gas, extending the contact time to meet application requirements.
[0004] Although the aforementioned patent solves the problem of contact between solid precursors and gas, the overall structure still has certain unreasonable aspects. For example, there may be unstable airflow, forming vortex dead zones in the path, resulting in uneven concentration.
[0005] Therefore, this utility model proposes a novel tray structure, which, through the reasonable layout of the position of the upward channel and the reasonable improvement of the structure of the upward channel, forms turbulence after the airflow passes through, avoiding the phenomenon of local flow dead zones above the tray, and realizing stable control and stable supply of gas source concentration. Utility Model Content
[0006] This invention provides a tray for solid precursor cylinders to solve the problem of local flow dead zones in the prior art, which cause unstable gas source concentration.
[0007] The technical problem solved by this utility model is achieved by the following technical solution:
[0008] A tray for solid precursor cylinders, comprising:
[0009] ontology,
[0010] Stacks are placed on the surface of the body, and the number of stacks is multiple, which divide the body into cavities for accommodating solid precursor sources;
[0011] A downward through-hole is located at the center of the body;
[0012] There are multiple upward through holes distributed on the stack body.
[0013] As a preferred technical solution, the diameter ratio of the downward through hole to the upward through hole is 5:1 to 1:1.
[0014] As a preferred technical solution, the upward through hole is provided with a threaded structure.
[0015] As a preferred technical solution, the threaded structure completely extends through the entire upward channel.
[0016] As a preferred technical solution, the ratio of the pitch of the thread structure to the diameter of the upward through hole is 1-2.
[0017] As a preferred technical solution, the threaded structure includes at least two equally spaced thread lines.
[0018] As a preferred technical solution, the thread shape of the thread structure is sawtooth or arc-shaped.
[0019] As a preferred technical solution, all the aforementioned upward through holes have the same diameter.
[0020] As a preferred technical solution, the diameter of the upward through hole increases sequentially or proportionally in the direction outward from the center of the body.
[0021] As a preferred technical solution, the diameter variation rate of the upward through hole is Dmax:Dmin=30:20.
[0022] As a preferred technical solution, the stack body includes radial stack bodies, which extend radially outward from the center of the main body, and the upward through holes placed on the radial stack bodies are radial through holes.
[0023] As a preferred technical solution, the radial through holes in the radial stack body are in at least one row.
[0024] As a preferred technical solution, the stack body includes a circumferential stack body, which is distributed in a ring shape within the main body, with its center point located at the center of the main body, and the upward through hole placed on the circumferential stack body is a circumferential through hole.
[0025] As a preferred technical solution, the circumferential through-holes in the circumferential stack are at least one ring.
[0026] As a preferred technical solution, the circumferential stack has at least one ring, and the diameter of the circumferential stack is not less than 1 / 3 of the diameter of the main body.
[0027] As a preferred technical solution, the circumferential stack has at least two rings, and the diameter of one of the circumferential stacks is equal to the diameter of the main body.
[0028] As a preferred technical solution, the stack body includes radial stack bodies and circumferential stack bodies, wherein the circumferential stack body consists of at least one ring, and the diameter of the circumferential stack body is not less than 1 / 3 of the diameter of the main body.
[0029] The radial stacks are multiple, with at least one radial stack extending outward from the center of the main body.
[0030] At least one of the radial stacks extends outward from the circumferential stack, with its extension line passing through the center of the body.
[0031] As a preferred technical solution, the circumferential stack has at least two rings, and the diameter of one of the circumferential stacks is equal to the diameter of the main body.
[0032] The beneficial effects of this utility model are:
[0033] By rationally arranging the location of the upward channel and improving its structure, the airflow forms turbulence after passing through, avoiding the phenomenon of local flow dead zones above the tray, thus achieving stable control and supply of gas source concentration. Attached Figure Description
[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0035] Figure 1 This is a top view of the tray structure of the first type of solid precursor cylinder of this utility model.
[0036] Figure 2 This is a three-dimensional structural diagram of the first type of tray for solid precursor steel cylinders according to this utility model.
[0037] Figure 3 This is a schematic cross-sectional view of the threaded structure of a tray for a solid precursor cylinder according to the present invention.
[0038] Figure 4This is one of the schematic diagrams of a molded structure for a threaded structure of a tray for a solid precursor cylinder according to this utility model.
[0039] Figure 5 This is the second schematic diagram of a molded structure for a tray with a threaded structure for a solid precursor cylinder according to this utility model.
[0040] Figure 6 This is a top view of the second type of tray of this utility model.
[0041] Figure 7 This is a top view of the third type of tray of this utility model.
[0042] Figure 8 This is a top view of the fourth type of tray of this utility model.
[0043] Figure 9 This is a top view of the fifth type of tray of this utility model.
[0044] Figure 10 This is a three-dimensional structural diagram of the fifth type of tray of this utility model.
[0045] Figure 11 This is a top view of the sixth type of tray of this utility model.
[0046] Figure 12 This is a three-dimensional structural diagram of the sixth type of tray of this utility model.
[0047] Figure 13 This is a schematic diagram of the gas disturbance velocity streamline distribution within the threaded structure of this utility model.
[0048] in:
[0049] 10-Body, 20-Stack, 30-Cavity, 40-Downward through hole, 50-Upward through hole, 60-Threaded wire;
[0050] 210 - Radial stack, 220 - Circumferential stack, 510 - Radial through hole, 520 - Circumferential through hole. Detailed Implementation
[0051] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the following description, in conjunction with specific illustrations, further elaborates on this utility model.
[0052] Example 1
[0053] Reference Figure 1-8As shown, a tray for solid precursor cylinders includes: a body 10, stacks 20, a downward through-hole 40, and an upward through-hole 50. The stacks 20 are placed on the surface of the body 10, and there are multiple stacks 20, which divide the body 10 into cavities 30 for accommodating solid precursor sources. Generally, the body 10 and the stacks 20 are an integrated structure made of non-reactive thermally conductive materials, including stainless steel, silver, silver alloys, copper, copper alloys, aluminum, aluminum alloys, lead, nickel-clad steel, graphite, pyrolytic carbon-coated graphite, silicon carbide-coated graphite, boron nitride, ceramic materials, etc., as well as combinations, mixtures, and alloys of two or more of these types of materials.
[0054] The downward through-hole 40 of this invention is located at the center of the main body 10 for downward transmission of air. Multiple upward through-holes 50 are distributed on the stack 20 for upward transmission of air.
[0055] It is worth noting that the diameter of the downward through hole 40 of this utility model is slightly larger than the diameter of the upward through hole 50. For example, the diameter ratio of the downward through hole 40 to the upward through hole 50 is 5:1 to 1:1. By adopting the above ratio, the entry of the gas source and the effective dispersion of the solid precursor source can be effectively guaranteed, and a standard concentration of gas source gas can be formed.
[0056] like Figure 13 As shown, during the upward movement of the gas source, the gas flows within the space formed by the two trays, creating a vortex dead zone. To avoid this vortex dead zone, the upward through hole 50 of this invention is provided with a threaded structure. When the gas source moves upward, it creates a turbulent airflow, thereby increasing the flow efficiency within the space formed by the two trays, avoiding the occurrence of the vortex dead zone, and thus achieving stable control and supply of gas source concentration.
[0057] like Figure 3-5 As shown, the threaded structure in this utility model completely penetrates the entire upward channel. The ratio of the thread pitch to the diameter of the upward through hole 50 is 1:1-2:1. By adopting the above structure, the upward movement speed of the gas source can be effectively improved.
[0058] The threaded structure of this invention includes at least two equally spaced thread lines 60, and the thread shape of the threaded structure is sawtooth or arc-shaped. In this embodiment, Figure 4 It contains two equally spaced thread lines 60, and the ratio of the thread pitch to the diameter of the upward through hole 50 is 2:1. Figure 5 It contains four equally spaced thread lines 60. The ratio of the thread pitch to the diameter of the upward through hole 50 is 1:1. This was simulated using software. Figure 4The threaded structure creates a faster turbulent airflow, which can better avoid the occurrence of vortex dead zones, thereby achieving stable control and supply of gas source concentration.
[0059] Reference Figure 1-2 As shown, its structure is a schematic diagram of the first type of tray for solid precursor cylinders. In this utility model, the diameters of all the upward through holes 50 are equal. The above-mentioned equalization technical solution is beneficial to the processing of the entire equipment.
[0060] Reference Figure 6 As shown, its structure is a schematic diagram of the second type of tray. From the center of the body 10 outwards, the diameter of the upward through-holes 50 increases sequentially, or proportionally. For example, the diameter change rate of the upward through-holes 50 is Dmax:Dmin = 30:20. Through software simulation, using the above-mentioned sequentially increasing technical solution, the number and area of the upward through-holes 50 per unit area of the body 10 tend to be equal, thereby improving the dispersion stability of the solid precursor source and forming a standard concentration of gas source gas.
[0061] Reference Figure 7 As shown, its structure is a schematic diagram of the third type of tray. In the direction from the center of the body 10 outward, the spacing of the upward through holes 50 decreases sequentially, or decreases proportionally. Similarly, through software simulation, by adopting the above-mentioned sequentially increasing technical solution, the number and area of the upward through holes 50 per unit area of the body 10 tend to be equal, thereby improving the dispersion stability of the solid precursor source and forming a standard concentration of gas source gas.
[0062] Reference Figure 1-2 As shown, its structure is a schematic diagram of the first type of pallet. The stack body 20 in this utility model includes radial stack bodies 210, which extend radially outward from the center of the body 10. The upward through hole 50 placed on the radial stack body 210 is a radial through hole 510. In this example, there are 8 radial stack bodies 210. The specific number can be adjusted according to the diameter of the body 10. Here, the number of radial stack bodies 210 is not limited to 8, but can also be 6, 10 or more.
[0063] In this invention, the radial through holes 510 of the radial stack 210 are in at least one row. The example image shows a single-row structure design, but it can also be designed with two or more rows.
[0064] Reference Figure 8As shown, this is a schematic diagram of the structure of the fourth type of pallet. The stack 20 in this utility model includes a circumferential stack 220, which is distributed in a ring shape within the body 10. Its center point is located at the center of the body 10. The upward through hole 50 on the circumferential stack 220 is a circumferential through hole 520. In this example, there is one ring of circumferential stack 220. The diameter of the circumferential stack 220 is not less than 1 / 3 of the diameter of the body 10. The specific number can be adjusted according to the diameter of the body 10. As shown in the figure, there are two circumferential stacks 220, where the diameter of one circumferential stack 220 is equal to the diameter of the body 10.
[0065] In this invention, the circumferential through holes 520 of the circumferential stack 220 are in at least one row. The example image shows a single-row structure design, but it can also be designed with two or more rows.
[0066] Implement column 2
[0067] Reference Figure 9-10 As shown, this is a schematic diagram of the structure of the fifth type of tray. The difference between this embodiment and the previous embodiments is that the stack 20 includes radial stacks 210 and circumferential stacks 220. The circumferential stacks 220 consist of at least one ring, and their diameter is not less than 1 / 3 of the diameter of the body 10. There are multiple radial stacks 210, with at least one radial stack 210 extending radially outward from the center of the body 10, and at least one radial stack 210 extending radially outward from the circumferential stacks 220, with its extension line passing through the center of the body 10. This combination of radial stacks 210 and circumferential stacks 220 allows for better distribution of the upward through-holes 50 across a unit area of the body 10, contributing to stable control and supply of the gas source concentration.
[0068] Implement column 3
[0069] Reference Figure 11-12 As shown, its structure is a schematic diagram of the sixth type of tray. The difference between this embodiment 3 and the aforementioned embodiment 2 is that the circumferential stack 220 has at least two rings, and the diameter of one of the circumferential stacks 220 is equal to the diameter of the body 10. In this way, when the gas source rises, the formation of a vortex dead zone at the edge of the tray is avoided, thereby achieving stable control and stable supply of gas source concentration.
[0070] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A tray for solid precursor cylinders, characterized in that, include: ontology, Stacks are placed on the surface of the body, and the number of stacks is multiple, which divide the body into cavities for accommodating solid precursor sources; A downward through-hole is located at the center of the body; There are multiple upward through holes distributed on the stack body.
2. The tray for a solid precursor cylinder according to claim 1, characterized in that, The diameter ratio of the downward through hole to the upward through hole is 5:1 to 1:
1.
3. A tray for solid precursor cylinders according to claim 1, characterized in that, The upper through hole is provided with a threaded structure.
4. A tray for solid precursor cylinders according to claim 3, characterized in that, The threaded structure includes at least two equally spaced thread lines.
5. A tray for solid precursor cylinders according to claim 4, characterized in that, The thread of the threaded structure is either sawtooth-shaped or arc-shaped.
6. A tray for solid precursor cylinders according to claim 1, characterized in that, All of the aforementioned upward through holes have the same diameter; or In the direction outward from the center of the body, the diameter of the upward through hole increases sequentially or proportionally.
7. A tray for solid precursor cylinders according to claim 1, characterized in that, The stack body includes radial stack bodies that extend outward from the center of the main body, and the upward through holes on the radial stack bodies are radial through holes.
8. A tray for solid precursor cylinders according to claim 1, characterized in that, The stack body includes a circumferential stack body, which is distributed in a ring shape within the main body, with its center point located at the center of the main body. The upward through hole placed on the circumferential stack body is a circumferential through hole.
9. A tray for solid precursor cylinders according to claim 8, characterized in that, The circumferential stack has at least two rings, and the diameter of one of the circumferential stacks is equal to the diameter of the body.
10. A tray for solid precursor cylinders according to claim 1, characterized in that, The stack body includes radial stack bodies and circumferential stack bodies, wherein the circumferential stack body consists of at least one ring, and the diameter of the circumferential stack body is not less than 1 / 3 of the diameter of the main body. The radial stacks are multiple, wherein at least one radial stack extends outward from the center of the main body. At least one of the radial stacks extends outward from the circumferential stack, with its extension line passing through the center of the body.