A gas flow uniform distribution device for semiconductor epitaxial growth

Abstract

The utility model discloses a kind of airflow uniform distribution devices for semiconductor epitaxial growth, including top cover, the top end of top cover is fixed with several air inlet pipes, the bottom end of top cover is engaged with gas mixing cover, the bottom end of gas mixing cover is engaged with bottom cover. The utility model is equipped with air inlet pipe, spiral blade, opens motor, and motor works through rotating shaft to drive spiral blade rotation, after different reactants are respectively input into the inside of device through air inlet pipe, airflow converges from around to the spiral blade at center, reduces central vortex, spiral blade rotation mixes and downwardly transports airflow, after mixed airflow enters air jet pipe through air inlet hole, and it is sprayed outside along exhaust pipe, simultaneously, rotating shaft rotation also drives air jet pipe rotation, so that air jet pipe rotates and sprays airflow, avoid airflow to form vortex or flow rate gradient in passage cavity by this mode, ensure that the concentration distribution of reactant on substrate surface is uniform.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, specifically to a gas flow uniform distribution device for semiconductor epitaxial growth. Background Technology

[0002] In semiconductor epitaxial growth (such as MOCVD, MBE, LPE, etc.), the gas flow distribution device is one of the core components. Its performance directly determines the uniformity, stability, and mixing efficiency of reactants (such as organometallic compounds and high-purity gases) on the substrate surface, as well as the thickness consistency, composition purity, and defect density of the epitaxial layer.

[0003] Currently, when gaseous reactants are delivered to the substrate surface through an airflow distribution device, the airflow distribution device often adopts a single inlet and straight channel design. This can easily lead to eddies or velocity gradients in the channel cavity (such as high velocity at the center of the substrate and slow velocity at the edge), resulting in uneven concentration distribution of reactants on the substrate surface. Utility Model Content

[0004] The purpose of this invention is to provide a uniform airflow distribution device for semiconductor epitaxial growth, thereby solving the problems mentioned in the background section. To solve these technical problems, this invention is achieved through the following technical solution:

[0005] This utility model relates to a gas flow uniform distribution device for semiconductor epitaxial growth, comprising:

[0006] The top cover has several air inlet pipes fixedly installed at its top end, and a gas mixing hood is snapped into the bottom end of the top cover, and a bottom cover is snapped into the bottom end of the gas mixing hood.

[0007] An airflow distribution component includes a motor. The bottom end of the motor is fixedly mounted at the top center of the top cover. A rotating shaft is fixedly mounted at the output end of the motor. Spiral blades are fixedly mounted on the outer wall of the rotating shaft. A retainer is fixedly mounted at the bottom end of the rotating shaft. A retainer sleeve is engaged on the outer wall of the retainer. An air jet pipe is fixedly mounted at the bottom end of the retainer. Several air inlets are opened on the vertical side of the outer wall of the air jet pipe, and several exhaust holes are opened on the horizontal side of the outer wall of the air jet pipe.

[0008] Furthermore, several of the aforementioned air intake pipes are circumferentially equidistant, and the bottom end of the air intake pipes is connected to the bottom end of the top cover.

[0009] Furthermore, the airflow distribution component also includes two limiting strips, with one side of each limiting strip fixedly disposed on both sides of the outer wall of the card holder, and the outer walls of the two limiting strips engaging with both sides of the inner wall of the card sleeve.

[0010] Furthermore, sealing rings are fixedly provided at both the upper and lower ends of the gas mixing hood, and the outer walls of the two sealing rings are respectively engaged and connected to the opposite ends of the top cover and the bottom cover.

[0011] Furthermore, several air inlets are circumferentially equidistant, with the bottom of the air inlets being higher than the inner bottom of the bottom cover, and several exhaust holes are horizontally equidistant.

[0012] Furthermore, the outer wall of the jet pipe penetrates the inner bottom end of the bottom cover and is rotatably engaged with the bottom cover.

[0013] Furthermore, it also includes a fixing component, which includes a fixing frame. A sliding rod is fixedly provided on the inner wall of the fixing frame. Springs are sleeved on both the upper and lower ends of the outer wall of the sliding rod. A lever is slidably provided on both sides of the outer wall of the sliding rod. An installation rod is fixedly provided on the opposite end of each of the two levers. An elastic block is fixedly provided on the outer wall of each of the two installation rods. An installation seat is engaged on the outer wall of each of the two elastic blocks. One side of each of the two installation seats is fixedly provided on the outer wall of the top cover and the bottom cover, respectively.

[0014] Furthermore, the opposite ends of the two springs are respectively fixedly connected to the opposite ends of the two levers, and the opposite ends of the two springs are respectively fixedly connected to the upper and lower ends of the inner wall of the fixed frame.

[0015] This utility model has the following beneficial effects:

[0016] This invention features an air inlet pipe and spiral blades. When the motor is turned on, it drives the spiral blades to rotate via a shaft. Different reactants are fed into the device through the air inlet pipe, and the airflow converges from all sides towards the central spiral blades, reducing central vortices. The rotating spiral blades mix the airflow and deliver it downwards. The mixed airflow enters the jet pipe through the air inlet and is then ejected outwards along the exhaust pipe. Simultaneously, the rotation of the shaft also drives the mounting bracket to rotate, which in turn drives the jet pipe to rotate, causing it to eject airflow while rotating. This method avoids the formation of vortices or velocity gradients in the channel cavity, ensuring a uniform concentration distribution of reactants on the substrate surface. Furthermore, the motor-driven rotation of the jet pipe reduces the impact of the airflow on the substrate surface, further improving the uniformity of reactant concentration distribution on the substrate surface. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the airflow distribution component of this utility model;

[0020] Figure 3 This is a schematic diagram of the connection structure of the gas mixing hood of this utility model;

[0021] Figure 4 This is a schematic diagram of the interconnection structure of the two levers of this utility model;

[0022] Figure 5 This is a schematic diagram of the bottom cover connection structure of this utility model.

[0023] The attached diagram lists the components represented by each number as follows:

[0024] 11. Top cover; 12. Gas mixing hood; 13. Bottom cover; 14. Inlet pipe; 15. Sealing ring; 21. Motor; 22. Shaft; 23. Spiral blade; 24. Card holder; 25. Sleeve; 26. Jet pipe; 261. Inlet port; 262. Exhaust port; 27. Limiting strip; 31. Fixing frame; 32. Slide rod; 33. Spring; 34. Toggle block; 35. Mounting rod; 36. Elastic block; 37. Mounting base. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0027] Please see Figures 1-5 As shown, this utility model is a gas flow uniform distribution device for semiconductor epitaxial growth, comprising:

[0028] The top cover 11 has several air inlet pipes 14 fixedly installed at its top end, and a gas mixing hood 12 is snapped into the bottom end of the top cover 11. A bottom cover 13 is snapped into the bottom end of the gas mixing hood 12.

[0029] The top cover 11, the gas mixing hood 12, and the bottom cover 13 together constitute an airflow distribution device.

[0030] An airflow distribution component includes a motor 21. The bottom end of the motor 21 is fixedly installed at the top center of the top cover 11. A rotating shaft 22 is fixedly installed at the output end of the motor 21. A spiral blade 23 is fixedly installed on the outer wall of the rotating shaft 22. A retainer 24 is fixedly installed at the bottom end of the rotating shaft 22. A retainer 25 is engaged on the outer wall of the retainer 24. A jet pipe 26 is fixedly installed at the bottom end of the retainer 25. Several air inlets 261 are opened on the vertical side of the outer wall of the jet pipe 26. Several exhaust holes 262 are opened on the horizontal side of the outer wall of the jet pipe 26.

[0031] The motor 21 provides the driving force required for the spiral blade 23 to rotate the mixed gas and the jet pipe 26 to rotate the jet. The outer wall of the rotating shaft 22 passes through the top cover 11 and rotates with the top cover 11. The outer diameter of the card holder 24 is adapted to the inner diameter of the card sleeve 25. The jet pipe 26 is L-shaped and the exhaust port 262 is parallel to the horizontal plane.

[0032] Several air intake pipes 14 are arranged circumferentially at equal intervals, and the bottom end of the air intake pipes 14 is connected to the bottom end of the top cover 11.

[0033] The airflow distribution component also includes two limiting strips 27, with the opposite sides of the two limiting strips 27 fixedly disposed on both sides of the outer wall of the card holder 24, and the outer walls of the two limiting strips 27 respectively engaging with both sides of the inner wall of the card sleeve 25.

[0034] The limiting strip 27 is used to limit the connection between the card holder 24 and the card sleeve 25, so that the card holder 24 can rotate together with the card sleeve 25 when it rotates. The inner walls of the card sleeve 25 are provided with limiting grooves that are compatible with the limiting strip 27 on both sides.

[0035] The gas mixing hood 12 is fixedly provided with sealing rings 15 at both the upper and lower ends, and the outer walls of the two sealing rings 15 are respectively engaged and connected with the opposite ends of the top cover 11 and the bottom cover 13.

[0036] The sealing ring 15 is used to increase the sealing between the gas mixing hood 12 and the top cover 11 and the bottom cover 13 to prevent gas leakage. The top cover 11 and the bottom cover 13 are provided with sealing grooves that are adapted to the sealing ring 15 at opposite ends.

[0037] Several air inlets 261 are circumferentially equidistant, and the bottom of the air inlets 261 is higher than the inner bottom of the bottom cover 13. Several exhaust outlets 262 are horizontally equidistant.

[0038] The outer wall of the jet pipe 26 penetrates the inner bottom end of the bottom cover 13 and is rotatably engaged with the bottom cover 13;

[0039] The bottom cover 13 is used to connect the jet pipe 26 for rotation, thereby improving the overall stability of the jet pipe 26 during rotation.

[0040] Working principle: When the reactant gas flow is sprayed onto the substrate, the motor 21 is turned on. The motor 21 drives the spiral blade 23 to rotate through the shaft 22. Different reactants are fed into the device through the air inlet pipe 14. The gas flow converges from all sides to the spiral blade 23 in the center, reducing the central vortex. The rotating spiral blade 23 mixes the gas flow and delivers it downward. The mixed gas flow enters the jet pipe 26 through the air inlet 261 and is then sprayed outward along the exhaust port 262 on the jet pipe 26. At the same time, the rotation of the shaft 22 also drives the holder 24 to rotate. The rotation of the holder 24 drives the jet pipe 26 to rotate through the sleeve 25, so that the jet pipe 26 sprays gas while rotating. In this way, the formation of vortices or velocity gradients in the channel cavity can be avoided, ensuring that the concentration distribution of reactants on the substrate surface is uniform. At the same time, the way the motor 21 drives the jet pipe 26 to rotate and spray gas can reduce the impact of the gas flow on the substrate surface, thereby further improving the uniformity of the concentration distribution of reactants on the substrate surface.

[0041] Please see Figures 1-5 As shown, this embodiment, based on the above embodiment, further includes:

[0042] The fixing component includes a fixing frame 31. A slide rod 32 is fixedly provided on the inner wall of the fixing frame 31. Springs 33 are sleeved on both the upper and lower ends of the outer wall of the slide rod 32. A lever 34 is slidably provided on both sides of the outer wall of the slide rod 32. A mounting rod 35 is fixedly provided on the opposite end of the two levers 34. An elastic block 36 is fixedly provided on the outer wall of the two mounting rods 35. A mounting seat 37 is engaged on the outer wall of the two elastic blocks 36. One side of the two mounting seats 37 is fixedly provided on the outer wall of the top cover 11 and the bottom cover 13, respectively.

[0043] There are two fixing components, which are respectively set on both sides of the outer wall of the gas mixing hood 12. One side of the fixing frame 31 is fixedly connected to the outer wall of the gas mixing hood 12. The upper and lower ends of the mounting base 37 and the fixing frame 31 are provided with locking holes that are adapted to the elastic block 36. When the elastic block 36 is engaged with the locking hole on the side of the fixing frame 31, the mounting rod 35 does not contact the mounting base 37.

[0044] The opposite ends of the two springs 33 are fixedly connected to the opposite ends of the two levers 34, and the opposite ends of the two springs 33 are fixedly connected to the upper and lower ends of the inner wall of the fixed frame 31.

[0045] Working principle: When the device needs to be disassembled, press the two elastic blocks 36 on the same side inward and move the two levers 34 in opposite directions. The movement of the levers 34 in opposite directions drives the two mounting rods 35 to move in opposite directions. The movement of the two mounting rods 35 in opposite directions drives the two elastic blocks 36 to move in opposite directions until the elastic blocks 36 engage with the locking holes on one side of the fixed frame 31, so that the mounting rods 35 are separated from the mounting base 37. Similarly, open the two mounting rods 35 on the other side, and then separate them and move them up and down to take out the top cover 11 and the bottom cover 13. In this way, the modular and detachable structure not only facilitates the disassembly and maintenance of the device, but also allows for the replacement of structural components individually.

[0046] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A gas flow uniform distribution device for semiconductor epitaxial growth, characterized in that, include: Top cover (11), the top of the top cover (11) is fixed with a plurality of air inlet pipes (14), the bottom end of the top cover (11) is fitted with a gas mixing hood (12), and the bottom end of the gas mixing hood (12) is fitted with a bottom cover (13). An airflow distribution component includes a motor (21), the bottom end of which is fixedly located at the top center of the top cover (11). A rotating shaft (22) is fixedly located at the output end of the motor (21). A spiral blade (23) is fixedly located on the outer wall of the rotating shaft (22). A retainer (24) is fixedly located at the bottom end of the rotating shaft (22). A retainer sleeve (25) is fitted onto the outer wall of the retainer (24). A jet pipe (26) is fixedly located at the bottom end of the retainer sleeve (25). Several air inlets (261) are opened on the vertical side of the outer wall of the jet pipe (26), and several exhaust holes (262) are opened on the horizontal side of the outer wall of the jet pipe (26).

2. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 1, characterized in that: Several of the air intake pipes (14) are circumferentially equidistant, and the bottom end of the air intake pipes (14) is connected to the bottom end of the top cover (11).

3. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 1, characterized in that: The airflow distribution component also includes two limiting strips (27), with the opposite sides of the two limiting strips (27) fixedly disposed on both sides of the outer wall of the card holder (24), and the outer walls of the two limiting strips (27) respectively engaging with the two sides of the inner wall of the card sleeve (25).

4. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 1, characterized in that: The gas mixing hood (12) is fixedly provided with sealing rings (15) at both the upper and lower ends. The outer walls of the two sealing rings (15) are respectively engaged and connected to the opposite ends of the top cover (11) and the bottom cover (13).

5. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 1, characterized in that: Several air inlets (261) are arranged circumferentially at equal intervals, and the bottom of the air inlets (261) is higher than the inner bottom of the bottom cover (13). Several exhaust holes (262) are arranged horizontally at equal intervals.

6. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 5, characterized in that: The outer wall of the jet pipe (26) penetrates the inner bottom end of the bottom cover (13) and is rotatably engaged with the bottom cover (13).

7. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 1, characterized in that: It also includes a fixing component, which includes a fixing frame (31). The inner wall of the fixing frame (31) is fixedly provided with a sliding rod (32). The upper and lower ends of the outer wall of the sliding rod (32) are both sleeved with springs (33). Both sides of the outer wall of the sliding rod (32) are slidably provided with a lever (34). The opposite ends of the two levers (34) are fixedly provided with mounting rods (35). The outer walls of the two mounting rods (35) are fixedly provided with elastic blocks (36). The outer walls of the two elastic blocks (36) are engaged with mounting seats (37). One side of the two mounting seats (37) is respectively fixedly provided on the outer walls of the top cover (11) and the bottom cover (13).

8. The gas flow uniform distribution device for semiconductor epitaxial growth according to claim 7, characterized in that: The opposite ends of the two springs (33) are fixedly connected to the opposite ends of the two levers (34), and the opposite ends of the two springs (33) are fixedly connected to the upper and lower ends of the inner wall of the fixed frame (31).

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