Chamber temperature control system for a pecvd apparatus

Abstract

The utility model relates to PECVD equipment field discloses a chamber temperature control system of PECVD equipment, including heater, sidewall heating wire, cooling waterway and the control module of controlling each element operation. Among them, the chamber cover upper end surface and the cavity lower surface are inlayed with several heaters and the tiling cooling waterway, is provided with sidewall heating wire and sidewall cooling waterway on the sidewall of chamber cover and cavity. The control module includes controller, pneumatic control valve, reversing valve, solenoid valve and temperature sensor. When needing to reduce temperature, close heater and sidewall heating wire heating, and the cooling water in cooling waterway is cooled by passing in cooling water, when needing to increase temperature, the cooling water in cooling waterway is emptied with compressed gas, and heater and sidewall heating wire heating are opened. The utility model increases the control module of heating, cooling and the layout of heating element and cooling waterway to realize better control cavity temperature, can greatly shorten equipment downtime, machine time simultaneously, improves equipment utilization.

Description

Technical Field

[0001] This utility model relates to the field of PECVD equipment, and in particular to a chamber temperature control system for PECVD equipment. Background Technology

[0002] During PECVD coating, the chamber needs to maintain a certain coating temperature. The stability of the chamber temperature has a significant impact on the coating process. To reduce the impact of chamber temperature fluctuations on the process, common solutions on the market simply involve adding insulation to the chamber to keep it warm, reduce heat loss, and thus contribute to temperature stability.

[0003] To meet the demands of high-capacity PECVD, PECVD chambers on the market are gradually becoming larger, with larger external surface areas. During coating processes, the chamber temperature dissipates too quickly, and simply adding insulation material is insufficient to meet the insulation requirements of such large chambers. When the equipment is shut down, the large chamber volume and the added insulation layer result in a long cooling time. Furthermore, the restart time after shutdown is also lengthy. Therefore, a new temperature control solution is needed to address the issue of uncontrollable chamber temperature, reduce the impact of chamber temperature variations on the process, and improve equipment utilization. Utility Model Content

[0004] The purpose of this invention is to provide a chamber temperature control system for PECVD equipment, which adds heating and cooling control modules, as well as the layout of heating elements and cooling water circuits, thereby achieving better control of the chamber temperature and greatly shortening equipment downtime and restart time, and improving equipment utilization.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model discloses a chamber temperature control system for a PECVD equipment, comprising heaters, sidewall heating wires, cooling water circuits, and a control module for controlling the operation of each component. The chamber includes a chamber cover and a chamber body. The cooling water circuit includes a horizontal cooling water circuit and a sidewall cooling water circuit. Several heaters and the horizontal cooling water circuits are embedded in the upper surface of the chamber cover and the lower surface of the chamber body. The sidewall heating wires and sidewall cooling water circuits are disposed on the sidewalls of the chamber cover and the chamber body. The control module includes a controller for controlling the heating power of the heaters and sidewall heating wires, a pneumatic control valve for controlling the on / off state of the cooling water and compressed gas, several directional valves for changing the medium in the water circuit and changing the drain outlet, a solenoid valve for controlling the on / off state of the pneumatic control valve and the directional valves, and a temperature sensor for collecting the temperature of the chamber.

[0007] When cooling is required, the controller shuts off the heater and side wall heating wires, and cool water is introduced into the cooling water circuit for cooling; when heating is required, compressed gas is used to purge the cool water in the cooling water circuit, and the heater and side wall heating wires are turned on.

[0008] Furthermore, the pneumatic control valve is a normally closed two-position two-way pneumatic control valve, including a first pneumatic control valve and a second pneumatic control valve; the reversing valve is a two-position three-way reversing valve, including a first reversing valve and a second reversing valve; and the solenoid valve is a normally closed two-position three-way solenoid valve, including a first solenoid valve, a second solenoid valve, and a third solenoid valve. The inlet ends of the first, second, and third solenoid valves are respectively connected to compressed air, and their outlet ends are respectively connected to an exhaust pipe; the working end of the first solenoid valve is connected to the control end of the first pneumatic control valve, the working end of the second solenoid valve is connected to the control end of the second pneumatic control valve, and the working end of the third solenoid valve is connected to the control ends of the first and second reversing valves. The inlet of the first pneumatically controlled valve is connected to the cooling water inlet, and the outlet is connected to the normally open end of the first directional valve. The working end of the first directional valve is connected to the inlet of the cooling water circuit. The outlet of the cooling water circuit is connected to the working end of the second directional valve. The normally closed end of the second directional valve is connected to the wastewater discharge pipe, and the normally open end is connected to the cooling water recovery pipe. A flow meter and a water thermometer are installed on the cooling water recovery pipe. The inlet of the second pneumatically controlled valve is connected to compressed air, and the outlet is connected to the normally closed end of the first directional valve. A gas check valve is also installed between the outlet of the second pneumatically controlled valve and the normally closed end of the first directional valve.

[0009] Furthermore, the cooling water channels and sidewall heating wires are arranged in an "S" shape, and the heater is located at the bend of the "S" shaped route of the flat cooling water channels.

[0010] Furthermore, the output power of the heater and the sidewall heating wire are controlled separately.

[0011] Furthermore, the cavity is also provided with a layer of insulation cotton, and a cover is provided on the outside of the insulation cotton.

[0012] Furthermore, the heater is a mica heater.

[0013] The advantages of this utility model are:

[0014] This invention heats or cools the cavity and cavity cover by installing heaters, heating wires, and cooling water circuits outside the cavity, and by arranging temperature sensors to collect the cavity temperature in real time. The cavity temperature is then controlled by a control system, achieving controllable cavity temperature. Furthermore, the combination of heaters, sidewall heating wires, and flat cooling water circuits improves the uniformity of the cavity temperature. This system reduces the impact of external temperature changes on the coating process, ensuring stability, and also speeds up equipment downtime and restart time, improving equipment utilization. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a cross-sectional view of the front side of this utility model.

[0017] Figure 2 This is a top view of the cross-sectional structure of the present invention along the upper side.

[0018] Figure 3 It is the electrical control diagram of the control system.

[0019] Figure 4 It is the logic diagram of the control system.

[0020] Explanation of key component symbols:

[0021] 1. Cavity cover; 2. Cavity body; 3. Cooling water inlet; 4. Heater; 5. Insulation cotton; 6. Shield; 7. Flat cooling water channel; 8. Side wall cooling water channel; 9. Side wall heating wire; 10. Temperature sensor; 11. Cooling water channel inlet; 12. Cooling water channel outlet; 13. First solenoid valve; 14. Second solenoid valve; 15. Third solenoid valve; 16. First pneumatic control valve; 17. Second pneumatic control valve; 18. First reversing valve; 19. Second reversing valve; 20. Compressed air; 21. Flow meter; 22. Water thermometer; 23. Wastewater discharge pipe; 24. Cooling water recovery pipe. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] In this utility model, unless otherwise stated, directional terms such as "up," "down," "left," and "right" are generally understood in conjunction with the accompanying drawings and the directions shown in actual applications.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0025] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0026] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of the various ranges, the endpoint values ​​of the various ranges and individual point values, and individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. The terms "optional" and "discretionary" mean that they may or may not be included (or may or may not be present).

[0027] like Figure 1 , Figure 2 As shown, this utility model discloses a chamber temperature control system for a PECVD equipment, which includes a heater 4, a side wall heating wire 9, a cooling water circuit, insulation cotton 5, a shield 6, and a control module for controlling the operation of each component.

[0028] The chamber includes a chamber cover 1 and a chamber body 2, and the cooling water circuit includes a flat cooling water circuit 7 and a side wall cooling water circuit 8.

[0029] Several heaters 4 and flat cooling water channels 7 are embedded in the upper end face of the cavity cover 1 and the lower surface of the cavity 2. Side wall heating wires 9 and side wall cooling water channels 8 are provided on the side walls of the cavity cover 1 and the cavity 2. The cooling water channels and side wall heating wires 9 are arranged in an "S" shape, and the heaters 4 are located at the bends of the "S" shaped route of the flat cooling water channels 7, so that heating and cooling are more uniform.

[0030] The insulation cotton 5 is placed on the outside of the cavity 2 to lock in the temperature of the cavity 2, and the cover 6 is placed on the outside of the insulation cotton 5 to protect the insulation cotton 5 and prevent temperature convection.

[0031] like Figure 3 , Figure 4 As shown, the control module includes a controller for adjusting the heating power of the heater 4 and the side wall heating wire 9, a pneumatic control valve for controlling the on / off state of the cooling water and compressed gas, several directional valves for changing the medium in the water circuit and changing the drain outlet, a solenoid valve for controlling the on / off state of the pneumatic control valve and the directional valve, and a temperature sensor 10 for collecting the temperature of the chamber.

[0032] When cooling is required, the controller shuts off the heater 4 and the side wall heating wire 9, and cool water is introduced into the cooling water circuit for cooling; when heating is required, compressed gas is used to purge the cool water in the cooling water circuit, and the heater 4 and the side wall heating wire 9 are turned on for heating.

[0033] Specifically, the pneumatic control valve is a normally closed two-position two-way pneumatic control valve, including a first pneumatic control valve 16 and a second pneumatic control valve 17.

[0034] The directional control valve is a two-position three-way directional control valve, including a first directional control valve 18 and a second directional control valve 19.

[0035] The solenoid valve is a normally closed two-position three-way solenoid valve, including a first solenoid valve 13, a second solenoid valve 14, and a third solenoid valve 15.

[0036] The inlet ends of the first solenoid valve 13, the second solenoid valve 14, and the third solenoid valve 15 are respectively connected to the compressed air 20, and the outlet ends are respectively connected to the exhaust pipe.

[0037] The working end of the first solenoid valve 13 is connected to the control end of the first pneumatic control valve 16, the working end of the second solenoid valve 14 is connected to the control end of the second pneumatic control valve 17, and the working end of the third solenoid valve 15 is connected to the control ends of the first reversing valve 18 and the second reversing valve 19.

[0038] The inlet of the first pneumatic control valve 16 is connected to the cooling water inlet 3, and the outlet is connected to the normally open end of the first directional valve 18. The working end of the first directional valve 18 is connected to the inlet 11 of the cooling water circuit. The outlet 12 of the cooling water circuit is connected to the working end of the second directional valve 19. The normally closed end of the second directional valve 19 is connected to the wastewater discharge pipe 23, and the normally open end is connected to the cooling water recovery pipe 24. The cooling water recovery pipe 24 is equipped with a flow meter 21 and a water thermometer 22 for real-time monitoring of the cooling water temperature and flow rate, respectively. The inlet of the second pneumatic control valve 17 is connected to compressed air 20, and the outlet is connected to the normally closed end of the first directional valve 18. A gas check valve is also provided between the outlet of the second pneumatic control valve 17 and the normally closed end of the first directional valve 18.

[0039] When the chamber cover 1 and the chamber body 2 need to be heated, the first solenoid valve 13 is de-energized and the first pneumatic control valve 16 is closed to cut off the water supply; at the same time, the second solenoid valve 14 is energized and the second pneumatic control valve 17 is opened to allow air to flow into the cooling water circuit; simultaneously, the third solenoid valve 15 is energized and the first reversing valve 18 is opened to switch the cooling water circuit inlet to compressed air 20, and the second reversing valve 19 is opened to switch the cooling water circuit outlet to the wastewater discharge pipe 23, thereby enabling the cooling water circuit inlet to be emptied into the wastewater discharge pipe 23, ensuring that the heating of the chamber cover 1 or the chamber body 2 is not affected.

[0040] When the chamber cover 1 and chamber 2 need to be cooled, the first solenoid valve 13 is energized and gas is supplied, the first pneumatic control valve 16 is opened to supply cooling water, the second solenoid valve 14 and the third solenoid valve 15 are de-energized and gas is cut off, the first reversing valve 18 connects the cooling water inlet to the cooling water, and the second reversing valve 19 connects the cooling water outlet to the cooling water recovery pipe 24; thus, cooling water is supplied to the cooling water circuit and circulated for cooling, thereby achieving the cooling effect of the chamber cover 1 or chamber 2.

[0041] For better temperature control, the output power of heater 4 and sidewall heating wire 9 is controlled separately. Heater 4 is a mica heater.

[0042] like Figure 4 As shown, the control logic of the control system is as follows:

[0043] Temperature sensor 10 collects the chamber temperature in real time and compares it with the set temperature range for each zone. When the temperature is too low, the heating power is increased, and compressed gas is introduced into the cooling water circuit to vent the cooling water. When the temperature is too low, the heating power is reduced, and cooling water is introduced into the cooling water circuit for cooling. When the temperature is within the set temperature range, the set heating power is output. This is a closed-loop stroke control system.

[0044] In summary, this invention heats or cools the cavity and its cover by arranging heaters and cooling water channels outside the cavity, and then wraps it with insulation cotton and a cover for heat preservation. Simultaneously, temperature sensors are used to collect real-time temperature data, enabling controllable cavity temperature. This reduces the impact of external temperature changes on the coating process and ensures stability. This temperature control system also speeds up equipment downtime and restart time, improving equipment utilization.

[0045] The preferred embodiments of this utility model have been described in detail above; however, this utility model is not limited thereto. Within the scope of the technical concept of this utility model, various simple modifications can be made to the technical solution of this utility model, including combining the various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed by this utility model and are all within the protection scope of this utility model.

Claims

1. A chamber temperature control system for a PECVD device, characterized in that: It includes a heater, sidewall heating wires, cooling water circuits, and a control module for controlling the operation of each component; the chamber includes a chamber cover and a chamber body, and the cooling water circuits include a flat cooling water circuit and a sidewall cooling water circuit. The upper end face of the cavity cover and the lower surface of the cavity are inlaid with a number of heaters and flat cooling water channels. The side walls of the cavity cover and the cavity are provided with side wall heating wires and side wall cooling water channels. The control module includes a controller for controlling the heating power of the heater and the side wall heating wire, a pneumatic control valve for controlling the on / off state of the cooling water and compressed gas, several directional valves for changing the medium in the water circuit and changing the drain outlet, a solenoid valve for controlling the on / off state of the pneumatic control valve and the directional valve, and a temperature sensor for collecting the temperature of the chamber. When cooling is required, the heater and the side wall heating wire are turned off, and cooling water is introduced into the cooling water circuit for cooling. When heating is required, the cooling water in the cooling water circuit is emptied with compressed gas, and the heater and the side wall heating wire are turned on.

2. The chamber temperature control system of the PECVD equipment according to claim 1, characterized in that: The pneumatic control valve is a normally closed two-position two-way pneumatic control valve, including a first pneumatic control valve and a second pneumatic control valve; the reversing valve is a two-position three-way reversing valve, including a first reversing valve and a second reversing valve; and the solenoid valve is a normally closed two-position three-way solenoid valve, including a first solenoid valve, a second solenoid valve, and a third solenoid valve. The inlet ends of the first, second, and third solenoid valves are respectively connected to compressed air, and the outlet ends are respectively connected to the exhaust pipe; the working end of the first solenoid valve is connected to the control end of the first pneumatic control valve, the working end of the second solenoid valve is connected to the control end of the second pneumatic control valve, and the working end of the third solenoid valve is connected to the control ends of the first and second directional valves. The inlet of the first pneumatic valve is connected to the cooling water inlet, and the outlet is connected to the normally open end of the first directional valve. The working end of the first directional valve is connected to the inlet of the cooling water circuit. The outlet of the cooling water circuit is connected to the working end of the second directional valve. The normally closed end of the second directional valve is connected to the wastewater discharge pipe, and the normally open end is connected to the cooling water recovery pipe. A flow meter and a water thermometer are installed on the cooling water recovery pipe. The inlet of the second pneumatic control valve is connected to compressed air, and the outlet is connected to the normally closed end of the first directional valve; a gas check valve is also provided between the outlet of the second pneumatic control valve and the normally closed end of the first directional valve.

3. The chamber temperature control system of the PECVD equipment according to claim 1, characterized in that: The cooling water channels and side wall heating wires are arranged in an "S" shape, and the heater is located at the bend of the "S" shaped route of the flat cooling water channels.

4. The chamber temperature control system of the PECVD equipment according to claim 1, characterized in that: The output power of the heater and the sidewall heating wire is controlled separately.

5. The chamber temperature control system of the PECVD equipment according to claim 1, characterized in that: The cavity is also covered with a layer of insulation cotton, and a cover is provided on the outside of the insulation cotton.

6. The chamber temperature control system of the PECVD equipment according to claim 1, characterized in that: The heater is a mica heater.

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