Integrated single crystal furnace insulation layer

Abstract

The utility model relates to single crystal furnace heat preservation layer technical field especially relates to an integrated single crystal furnace heat preservation layer. Including single crystal furnace body, the bottom wall of single crystal furnace body is equipped with heat preservation mechanism, the heat preservation mechanism includes the mounting seat, the mounting seat and single crystal furnace body bottom wall fixed connection, the one side of mounting seat is connected with the heat preservation framework of sliding, the inner wall fixed connection of heat preservation framework has the heat preservation board, the one side of heat preservation framework is equipped with three connecting grooves, three connecting grooves evenly distribute on heat preservation framework, the position fixed connection of mounting seat corresponds three connecting grooves all has guide rod. The integrated single crystal furnace heat preservation layer has the advantage that when needing to add heat preservation layer in single crystal furnace, can fix heat preservation mechanism in single crystal furnace, through heat preservation mechanism, can improve the speed of installing heat preservation layer and installation accuracy, shorten the installation time, reduce the heating power, reduce the energy consumption.

Description

Technical Field

[0001] This utility model relates to the field of insulation layer technology for single crystal furnaces, and in particular to an integrated insulation layer for single crystal furnaces. Background Technology

[0002] The insulation layer of a single crystal furnace is a key component, primarily used for heat insulation and maintaining the high-temperature environment within the furnace to ensure temperature stability during the single crystal pulling process. Its function is to reduce heat loss and maintain the temperature gradient in the high-temperature zone, thereby affecting the quality of the single crystal.

[0003] Utility model CN216688418U discloses a heat-insulating cylinder and a single-crystal furnace. The key technical features are: a cylinder body and a blocking component. The cylinder body has a first opening and a second opening, and a feeding hole located on the side wall of the cylinder body. The blocking component is disposed on the cylinder body and controllably covers the feeding hole. This utility model also provides a single-crystal furnace. The aforementioned single-crystal furnace includes a furnace body, a furnace valve, a crucible, and the heat-insulating cylinder described in the above technical solution. The heat-insulating cylinder is disposed around the crucible, and both the heat-insulating cylinder and the crucible are located within the furnace body. The furnace valve is disposed on the side wall of the furnace body and is used to control the connection and disconnection between the furnace body and the outside environment.

[0004] Regarding the aforementioned content, the following technical defects exist: A single crystal furnace is a device used to produce single crystal materials, particularly widely used in semiconductors, optoelectronics, and solar energy. The main function of a single crystal furnace is to form single crystals with a single crystal lattice structure from raw materials through high-temperature melting and stretching processes. The graphite hot zone of a single crystal furnace mainly includes components such as a pressure ring, insulation cover, insulation hood, crucible, electrodes, and heaters. To prevent silicon leakage, protective plates and sleeves are added to the furnace bottom and support rods. However, current standard designs typically adopt… Using graphite or carbon composite materials, the thermal insulation components of the thermal field are composed of multiple layers of blanket-like graphitized and carbon fiber materials, which can withstand high temperatures and high-speed airflow. The role of the insulation layer is to ensure the temperature gradient distribution of the thermal field, which directly affects the pulling quality of single crystals and the lifespan of the thermal field. However, the current insulation layer design adopts a three-layer structure of upper, middle and lower layers, with many seams and poor insulation effect. It is difficult to accurately align the multi-layer structure during installation, and each layer has cutting burrs and powder and flocculent matter, which affect the crystal formation quality of single crystals. The overall temperature gradient is unstable, resulting in high heating power and large energy consumption of the equipment. Utility Model Content

[0005] The purpose of this invention is to solve the problems of existing technology, such as the current insulation layer design using a three-layer structure (upper, middle and lower), which has many seams, poor insulation effect, difficulty in precise alignment during multi-layer installation, and the presence of cutting burrs, powder absorption, and flocculent matter in each layer, affecting the quality of single crystal formation, unstable overall temperature gradient, resulting in high heating power and high energy consumption of the equipment.

[0006] To solve the above technical problems, this utility model provides an integrated single-crystal furnace insulation layer, comprising: a single-crystal furnace body, an insulation mechanism provided on the bottom wall of the single-crystal furnace body, the insulation mechanism including a mounting base, the mounting base being fixedly connected to the bottom wall of the single-crystal furnace body, an insulation frame slidably connected to one side of the mounting base, an insulation board fixedly connected to the inner wall of the insulation frame, three connecting slots evenly distributed on one side of the insulation frame, and guide rods fixedly connected to the mounting base at positions corresponding to the three connecting slots. The guide rod has two arc surfaces that are slidably connected to adjusting blocks. The connecting groove has slots on both sides of the inner wall of the two adjusting blocks. The adjusting blocks are slidably connected to the inner walls of the slots. The guide rod has an adjusting rod fixedly passing through its inner wall. One end of the arc surface of the adjusting rod is threadedly connected to a connecting block. The arc surface of the connecting block is rotatably connected to a rotating ring. The two inner walls of the rotating ring are rotatably connected to fixing blocks. The two fixing blocks are fixedly connected to one side of the two adjusting blocks respectively. The inner wall of the connecting block is slidably connected to a locking block. One side of the locking block is fixedly connected to an installation rod.

[0007] The aforementioned components achieve the following effects: A single crystal furnace body is a device used to produce single crystal materials, particularly widely used in semiconductors, optoelectronics, and solar energy. The main function of the furnace body is to form single crystals with a single crystal lattice structure from raw materials through high-temperature melting and stretching processes. The graphite hot zone of the furnace body mainly includes components such as pressure rings, insulation covers, insulation hoods, crucibles, electrodes, and heaters. To prevent silicon leakage, protective plates and sleeves are added to the furnace bottom and support rods. However, current standard designs typically use graphite or carbon composite materials. The thermal insulation components of the hot zone are composed of multi-layered blanket-like graphitized and carbon fiber materials, capable of withstanding high temperatures and... High-speed airflow and the role of the insulation layer in ensuring the temperature gradient distribution of the thermal field directly affect the pulling quality and thermal field lifespan of single crystals. However, the current insulation layer design uses a three-layer structure (upper, middle, and lower), resulting in numerous seams, poor insulation performance, and difficulty in precise alignment during installation. Furthermore, each layer contains burrs, powder absorption, and flocculent material, affecting the crystal formation quality of single crystals and causing an unstable overall temperature gradient. This leads to high heating power and high energy consumption. In such cases, an insulation mechanism can be used to replace the original insulation layer to insulate the single crystal furnace body, thereby improving the accuracy of the installation process. The insulation mechanism also maintains a good overall temperature gradient, minimizes heat loss, and reduces heating power and energy consumption.

[0008] Preferably, a metal block is fixedly connected to the side of the card block near the connecting block, a magnetic block is attracted to one side of the metal block, and the magnetic block is fixedly connected to the side wall of the connecting block.

[0009] The effect achieved by the above components is that when the metal block and the magnetic block are attracted, the card block can be guided to connect with the inner wall of the connecting block more quickly, thereby increasing the speed of connection between the card block and the inner wall of the connecting block.

[0010] Preferably, a force-applying block is fixedly connected to one side of the mounting rod, and the force-applying block is rectangular.

[0011] The effect achieved by the above components is that the force-adding block can improve the ease of rotating the mounting rod, and increase the speed and efficiency of rotating the mounting rod.

[0012] Preferably, a plurality of protrusions are fixedly connected to the side of the force-adding block, and the plurality of protrusions are evenly distributed on the force-adding block.

[0013] The effect achieved by the above components is that the bumps can increase the friction on the surface of the force-adding block, allowing personnel to use the force-adding block more effectively.

[0014] Preferably, a connecting ring is fixedly connected to the side of the force-adding block away from the mounting rod, and a placement rod is fixedly connected to one end of the arc surface of the single crystal furnace body, the arc surface of the placement rod being arc-shaped.

[0015] The effect achieved by the above components is that by connecting the connecting ring to the arc surface of the placement rod, the unused mounting rod can be temporarily stored.

[0016] Preferably, a contact groove is provided at one end of the arc surface of the placement rod.

[0017] The effect achieved by the above components is that the contact groove can improve the stability when the connecting ring contacts the arc surface of the placement rod.

[0018] Preferably, the adjusting block is a steel block.

[0019] The effect achieved by the above components is that the surface of the steel adjustment block is relatively hard, resulting in better performance over a long period of use.

[0020] Compared with related technologies, the integrated single-crystal furnace insulation layer provided by this utility model has the following advantages:

[0021] Beneficial effects:

[0022] By setting up an insulation mechanism, when an insulation layer needs to be added inside the single crystal furnace, the insulation mechanism can be fixed inside the single crystal furnace. The insulation mechanism can improve the speed and accuracy of the installation of the insulation layer, shorten the installation time, reduce the heating power, and reduce energy consumption. Attached Figure Description

[0023] Figure 1 A schematic diagram of the structure of an integrated single-crystal furnace insulation layer provided by this utility model;

[0024] Figure 2 for Figure 1 The diagram shown is a structural schematic of the insulation mechanism.

[0025] Figure 3 for Figure 2 The enlarged view of point A shown;

[0026] Figure 4 for Figure 1 A partial structural schematic diagram of the insulation mechanism shown;

[0027] Figure 5 for Figure 4 The enlarged view at point B is shown below;

[0028] Figure 6 for Figure 1 The diagram shows a partial disassembled structure of the insulation mechanism.

[0029] Figure 7 for Figure 1 The diagram shows a partial structural schematic of the insulation mechanism.

[0030] The following are the labeling elements in the diagram: 1. Single crystal furnace body; 2. Insulation mechanism; 201. Mounting base; 202. Insulation frame; 203. Connecting groove; 204. Guide rod; 205. Adjusting block; 206. Slot; 207. Adjusting rod; 208. Connecting block; 209. Rotating ring; 210. Fixing block; 211. Slotting block; 212. Mounting rod; 213. Metal block; 214. Magnetic block; 215. Force-applying block; 216. Placement rod; 217. Connecting ring; 218. Protrusion; 219. Contact groove; 220. Insulation board. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0032] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0033] Please see Figures 1 to 7 The present invention provides an integrated single crystal furnace insulation layer, comprising: a single crystal furnace body 1, wherein the bottom wall of the single crystal furnace body 1 is provided with an insulation mechanism 2.

[0034] In the embodiments of this utility model, please refer to Figures 2 to 7The insulation mechanism 2 includes a mounting base 201, which is fixedly connected to the bottom wall of the single crystal furnace body 1. An insulation frame 202 is slidably connected to one side of the mounting base 201. An insulation board 220 is fixedly connected to the inner wall of the insulation frame 202. Three connecting slots 203 are evenly distributed on one side of the insulation frame 202. Guide rods 204 are fixedly connected to the mounting base 201 at positions corresponding to the three connecting slots 203. Adjusting blocks 205 are slidably connected to the two arc surfaces of the guide rods 204. Slots 206 are provided on both sides of the inner wall of the connecting slots 203 corresponding to the two adjusting blocks 205. The adjusting blocks 205 are slidably connected to the inner walls of the slots 206. An adjusting block 205 is fixedly inserted through the inner wall of the guide rod 204. The rod 207 has a connecting block 208 threadedly connected to one end of its arc surface. A rotating ring 209 is rotatably connected to the arc surface of the connecting block 208. Fixed blocks 210 are rotatably connected to both inner walls of the rotating ring 209. The two fixed blocks 210 are respectively fixedly connected to one side of the two adjusting blocks 205. A locking block 211 is slidably connected to the inner wall of the connecting block 208. An installation rod 212 is fixedly connected to one side of the locking block 211. The single crystal furnace body 1 is a device used for producing single crystal materials, particularly widely used in semiconductors, optoelectronics, and solar energy. The main function of the single crystal furnace body 1 is to form single crystals with a single crystal lattice structure from raw materials through a high-temperature melting and stretching process. The graphite hot zone of the single crystal furnace body 1 mainly includes a pressure ring. The furnace body 1 contains components such as insulation covers, insulation hoods, crucibles, electrodes, and heaters. To prevent silicon leakage, protective plates and sleeves are added to the furnace bottom and support rods. However, current standard designs typically use graphite or carbon composite materials. The thermal insulation components of the hot zone are composed of multi-layered blanket-like graphitized and carbon fiber materials, capable of withstanding high temperatures and high-speed airflow. The function of the insulation layer is to ensure the temperature gradient distribution of the hot zone, which directly affects the pulling quality of the single crystal and the lifespan of the hot zone. However, the current insulation layer design uses a three-layer structure (upper, middle, and lower), resulting in numerous seams, poor insulation performance, and difficulty in precise alignment during installation. Furthermore, each layer contains cutting burrs, powder absorption, and flocculent matter, affecting the crystal formation quality of the single crystal. The overall temperature gradient is unstable, leading to high heating power and high energy consumption. At this point, the insulation mechanism 2 can replace the original insulation layer to insulate the single crystal furnace body 1, thereby improving the accuracy of the installation process. The insulation mechanism 2 maintains a good overall temperature gradient with minimal heat loss, reducing heating power and energy consumption. A metal block 213 is fixedly connected to the side of the locking block 211 near the connecting block 208. A magnetic block 214 is attracted to one side of the metal block 213 and fixedly connected to the side wall of the connecting block 208. When the metal block 213 and the magnetic block 214 attract each other, the locking block 211 can be guided to connect to the inner wall of the connecting block 208 more quickly, increasing the connection speed between the locking block 211 and the inner wall of the connecting block 208. A force-applying block 215 is fixedly connected to one side of the mounting rod 212. The force-applying block 215 is rectangular.The force-adding block 215 improves the ease of rotating the mounting rod 212, increasing its speed and efficiency. Several protrusions 218 are fixedly connected to the side of the force-adding block 215, evenly distributed on it. These protrusions 218 increase the surface friction of the force-adding block 215, allowing for better operation. A connecting ring 217 is fixedly connected to the side of the force-adding block 215 away from the mounting rod 212. One end of the arc surface of the single crystal furnace body 1 is fixed... A placement rod 216 is connected, with one end of its arc-shaped surface. A connecting ring 217 is connected to the arc-shaped surface of the placement rod 216, allowing for temporary storage of unused mounting rods 212. A contact groove 219 is provided at one end of the arc-shaped surface of the placement rod 216, improving stability when the connecting ring 217 contacts the arc-shaped surface of the placement rod 216. The adjusting block 205 is made of steel; the steel material of the adjusting block 205 provides a harder surface and better performance over long-term use.

[0035] The working principle of the integrated single crystal furnace insulation layer provided by this utility model is as follows: When it is necessary to install the insulation layer into the single crystal furnace body 1, the insulation frame 202 is placed inside the single crystal furnace body 1, so that the insulation frame 202 contacts one side of the mounting base 201, and the connecting groove 203 is aligned with the guide rod 204. At this time, the locking block 211 can be connected to the inner wall of the connecting block 208 through the mounting rod 212. The locking block 211 can be rotated by the mounting rod 212, and the locking block 211 can be frequently separated or contacted with the inner wall of the connecting block 208 through the locking block 211, thereby driving the connecting block 208 to move on the adjusting rod 207. When the connecting block 211 rotates, it causes the connecting block 208 to move on the adjusting rod 207. At this time, the rotating ring 209 can rotate on the surface of the connecting block 208 by the movement of the connecting block 208. When the connecting block 208 moves in the direction of the adjusting rod 207 by rotating on the adjusting rod 207, the fixing block 210 installed on the rotating ring 209 will cause the adjusting block 205 to slide on the guide rod 204, so that the adjusting block 205 can be connected to the inner wall of the slot 206. At this time, the insulation frame 202 together with the insulation board 220 can be fixed in the single crystal furnace body 1 through the mounting base 201.

[0036] The circuits and controls involved in this utility model are all existing technologies and will not be described in detail here.

[0037] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An integrated single-crystal furnace insulation layer, characterized in that, include: A single crystal furnace body (1) is provided with a heat preservation mechanism (2) on the bottom wall of the single crystal furnace body (1). The heat preservation mechanism (2) includes a mounting base (201), which is fixedly connected to the bottom wall of the single crystal furnace body (1). A heat preservation frame (202) is slidably connected to one side of the mounting base (201). A heat preservation board (220) is fixedly connected to the inner wall of the heat preservation frame (202). Three connecting slots (203) are opened on one side of the heat preservation frame (202). The three connecting slots (203) are evenly distributed on the heat preservation frame (202). Guide rods (204) are fixedly connected to the mounting base (201) at the positions corresponding to the three connecting slots (203). Adjusting blocks (205) are slidably connected to the two arc surfaces of the guide rods (204). The connecting groove (203) has slots (206) on both sides of the inner wall of the two adjusting blocks (205). The adjusting blocks (205) are slidably connected to the inner wall of the slots (206). The inner wall of the guide rod (204) is fixedly connected to the adjusting rod (207). One end of the arc surface of the adjusting rod (207) is threadedly connected to the connecting block (208). The arc surface of the connecting block (208) is rotatably connected to the rotating ring (209). The two inner walls of the rotating ring (209) are rotatably connected to the fixing blocks (210). The two fixing blocks (210) are fixedly connected to one side of the two adjusting blocks (205) respectively. The inner wall of the connecting block (208) is slidably connected to the locking block (211). One side of the locking block (211) is fixedly connected to the mounting rod (212).

2. The integrated single-crystal furnace insulation layer according to claim 1, characterized in that, A metal block (213) is fixedly connected to the side of the card block (211) near the connecting block (208). A magnetic block (214) is attracted to one side of the metal block (213). The magnetic block (214) is fixedly connected to the side wall of the connecting block (208).

3. The integrated single-crystal furnace insulation layer according to claim 1, characterized in that, A force-adding block (215) is fixedly connected to one side of the mounting rod (212), and the force-adding block (215) is rectangular.

4. The integrated single-crystal furnace insulation layer according to claim 3, characterized in that, The side of the force-adding block (215) is fixedly connected with several protrusions (218), and the several protrusions (218) are evenly distributed on the force-adding block (215).

5. The integrated single-crystal furnace insulation layer according to claim 3, characterized in that, A connecting ring (217) is fixedly connected to the side of the force-adding block (215) away from the mounting rod (212), and a placement rod (216) is fixedly connected to one end of the arc surface of the single crystal furnace body (1), and one end of the arc surface of the placement rod (216) is arc-shaped.

6. The integrated single-crystal furnace insulation layer according to claim 5, characterized in that, The arc surface of the placement rod (216) is provided with a contact groove (219).

7. The integrated single-crystal furnace insulation layer according to claim 1, characterized in that, The adjusting block (205) is a steel block.

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