Coupling heater and hot zone of a single crystal furnace

Abstract

The application relates to the technical field of single crystal furnaces, and particularly provides a coupled heater and a single crystal furnace heat field. The coupled heater comprises an upper heater and a lower heater which are independently controlled, and the lower heater is located below the upper heater. The upper heater comprises an upper heating zone and an upper coupling zone arranged at the lower end of the upper heating zone. The lower heater comprises a lower heating zone and a lower coupling zone arranged at the upper end of the lower heating zone. The upper coupling zone and the lower coupling zone are cross-coupled with each other, and a coupled heating zone is formed between the upper heating zone and the lower heating zone. According to the scheme, three longitudinal temperature zones with increasing heating temperatures from bottom to top can be constructed in the height direction of the crucible through the coupled heating zone, the temperature fault of the traditional double-layer structure is eliminated, the heat convection in the crucible is reduced, the scouring of the crucible is reduced, and the crystal pulling stability is improved.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace technology, and in particular to a coupling heater and a single crystal furnace thermal field. Background Technology

[0002] In the field of single-crystal silicon growth, precise control of the thermal temperature gradient is a key factor affecting crystal quality. Traditional single-crystal furnace heating systems often employ a dual-layer independent temperature control structure, which uses two sets of resistance heaters to separately regulate the upper high-temperature zone and the lower low-temperature zone. This type of structure can only form a basic temperature gradient between the upper and lower zones, but in practical applications, the temperature gradient between the two zones still has significant drawbacks: a sudden temperature drop easily occurs at the boundary between adjacent temperature zones, leading to intensified thermal convection within the crucible. This not only accelerates the erosion of the crucible wall but also affects the stability of crystal growth. Utility Model Content

[0003] Based on this, the present invention provides a coupled heater and a single crystal furnace thermal field to solve the problem that existing heaters are prone to sudden temperature drops, which leads to increased thermal convection inside the crucible, accelerates the erosion of the crucible wall, and affects the stability of crystal growth.

[0004] On the one hand, the present invention provides a coupling heater, which includes an upper heater and a lower heater that are independently controlled, wherein the lower heater is located below the upper heater;

[0005] The upper heater includes an upper heating zone and an upper coupling zone disposed at the lower end of the upper heating zone;

[0006] The lower heater includes a lower heating zone and a lower coupling zone disposed at the upper end of the lower heating zone;

[0007] The upper coupling region and the lower coupling region are cross-coupled with each other to form a coupling heating region between the upper heating region and the lower heating region.

[0008] In one embodiment, the upper heater includes a plurality of first heating petals arranged in a circular pattern, the plurality of first heating petals forming the upper heating region and the upper coupling region, wherein the number of first heating petals constituting the upper coupling region is less than the number of first heating petals constituting the upper heating region;

[0009] The lower heater includes a plurality of second heating petals arranged in a circular pattern. The plurality of second heating petals surround the lower coupling region and the lower heating region. The number of second heating petals constituting the lower coupling region is less than the number of second heating petals constituting the lower heating region.

[0010] In one embodiment, the sum of the number of the first heating petals constituting the upper coupling region and the number of the second heating petals constituting the lower coupling region is equal to the number of the first heating petals constituting the upper heating region and equal to the number of the second heating petals constituting the lower heating region.

[0011] In one embodiment, the plurality of first heating lobes include a plurality of first long lobes and a plurality of first short lobes. The length of the first long lobes is greater than the length of the first short lobes, and the tops of the first long lobes and the first short lobes are flush. The portion of the first long lobes corresponding to the first short lobes forms a first overlapping heating portion, and the portion of the bottom protruding from the first short lobes forms a first extended heating portion. Each first short lobe and each first overlapping heating portion together form the upper heating area, and each first extended heating portion forms the upper coupling area.

[0012] The plurality of second heating lobes include a plurality of second long lobes and a plurality of second short lobes. The length of the second long lobes is greater than the length of the second short lobes, and the bottoms of the second long lobes and the second short lobes are flush. The portion of the second long lobes corresponding to the second short lobes forms a second overlapping heating portion, and the portion of the second long lobes protruding from the second short lobes forms a second extended heating portion. Each second short lobe and each second overlapping heating portion together form the lower heating area, and each second extended heating portion forms the lower coupling area.

[0013] In one embodiment, each of the first long lobes and each of the first short lobes are alternately connected in series and are evenly distributed circumferentially, and a first coupling groove is formed between each two adjacent first extended heating portions.

[0014] Each of the second long lobes and each of the second short lobes are alternately connected in series and are evenly distributed in the circumferential direction. A second coupling groove is formed between each two adjacent second extended heating parts.

[0015] Each of the first extended heating portions is embedded in each of the second coupling grooves, and each of the second extended heating portions is embedded in each of the first coupling grooves, such that the first long lobe and the second short lobe correspond to each other in the axial direction, and the first short lobe and the second long lobe correspond to each other in the axial direction.

[0016] In one embodiment, the sum of the lengths of the first short lobe and the second long lobe in the axial direction is equal to the sum of the lengths of the second short lobe and the first long lobe in the axial direction.

[0017] In one embodiment, the widths of the first long lobe, the first short lobe, the second long lobe, and the second short lobe are all the same.

[0018] In one embodiment, in the height direction, there is a gap in the axial direction between each of the first heating petals and each of the second heating petals opposite to them in the axial direction.

[0019] In one embodiment, the upper heater has two first feet extending to the lower heater, the two first feet being connected to the positive and negative terminals of a first power supply, respectively, and there is a gap between the first feet and the lower heater.

[0020] The lower heater is provided with two second feet extending downwards from it, and the two second feet are respectively connected to the positive and negative terminals of the second power supply;

[0021] The first foot plate and the second foot plate are evenly distributed in the circumferential direction.

[0022] On the other hand, the present invention also provides a single crystal furnace hot zone, which includes the coupling heater of any of the above embodiments.

[0023] Compared with the prior art, this utility model has at least the following beneficial effects:

[0024] This invention relates to a coupling heater. The upper heater is divided into an upper heating zone and an upper coupling zone, and the lower heater is divided into a lower heating zone and a lower coupling zone. These upper and lower coupling zones are cross-coupled, creating a coupling heating zone between the upper and lower heating zones. Within this coupling heating zone, the thermal fields from the upper and lower heaters are superimposed, generating an intermediate temperature between the high temperature of the upper heating zone and the low temperature of the lower heating zone. This allows the two-stage heater to create three longitudinal temperature zones along the height of the crucible, eliminating the temperature discontinuity of traditional double-layer structures, reducing thermal convection within the crucible, decreasing erosion of the crucible, and improving crystal pulling stability. Attached Figure Description

[0025] Figure 1 This is a front view of the coupling heater in one embodiment;

[0026] Figure 2 This is a three-dimensional schematic diagram of the coupling heater in one embodiment;

[0027] Figure 3 This is a schematic diagram of the upper heater in one embodiment;

[0028] Figure 4 This is a front view of the upper heater in one embodiment;

[0029] Figure 5 This is a schematic diagram of the lower heater in one embodiment;

[0030] Figure 6 This is a front view of the lower heater in one embodiment;

[0031] Figure 7 This is a split schematic diagram of the coupling heater in one embodiment.

[0032] The reference numerals in the accompanying drawings include:

[0033] 100 - Upper heater; 110 - First heating lobe; 111 - First short lobe; 112 - First long lobe; 1121 - First extended heating section; 1122 - First overlapping heating section; 113 - First coupling groove; 120 - First foot plate;

[0034] 200 - Lower heater; 210 - Second heating lobe; 211 - Second short lobe; 212 - Second long lobe; 2121 - Second extended heating section; 2122 - Second overlapping heating section; 213 - Second coupling groove; 220 - Second foot plate;

[0035] A - Upper heating zone; B - Lower heating zone; C - Coupled heating zone; C1 - Upper coupling zone; C2 - Lower coupling zone. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0037] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model.

[0038] The structures, proportions, sizes, etc., illustrated in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this utility model. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0039] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0040] As described in the background section, although the traditional double-layer independent temperature control structure can form a basic temperature gradient, a sudden drop in temperature is likely to occur at the junction of adjacent temperature zones, which leads to intensified thermal convection inside the crucible. This not only accelerates the erosion of the crucible wall but also affects the stability of crystal growth.

[0041] In view of this, this utility model provides a coupling heater, which includes an upper heater 100 and a lower heater 200 that are independently controlled, with the lower heater 200 located below the upper heater 100;

[0042] The upper heater 100 includes an upper heating zone A and an upper coupling zone C1 disposed at the lower end of the upper heating zone A;

[0043] The lower heater 200 includes a lower heating zone B and a lower coupling zone C2 disposed at the upper end of the lower heating zone B;

[0044] Among them, the upper coupling region C1 and the lower coupling region C2 are cross-coupled with each other to form the coupling heating region C between the upper heating region A and the lower heating region B.

[0045] According to the coupling heater provided in this embodiment, the upper heater 100 is divided into an upper heating zone A and an upper coupling zone C1, and the lower heater 200 is divided into a lower heating zone B and a lower coupling zone C2. The upper coupling zone C1 and the lower coupling zone C2 are cross-coupled with each other, so that the coupling heater forms a coupling heating zone C in the area between the upper heating zone A and the lower heating zone B. The coupling heating zone C is generated by the superposition of part of the thermal field of the upper heater 100 and part of the thermal field of the lower heater 200, which can produce an intermediate temperature between the high temperature of the upper heating zone A and the low temperature of the lower heating zone B. Thus, the two-stage heater of this embodiment can construct three longitudinal temperature zones in the height direction of the crucible, eliminating the temperature discontinuity of the traditional double-layer structure, reducing the heat convection in the crucible, which can not only reduce the erosion of the crucible, but also improve the stability of crystal pulling.

[0046] The coupling heater provided in the embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0047] according to Figure 1An exemplary embodiment of the coupling heater of at least one embodiment of the present invention is shown, which includes an upper heater 100 and a lower heater 200.

[0048] In this embodiment, the upper heater 100 is arranged around the upper part of the crucible in the hot zone of the single crystal furnace, and the lower heater 200 is arranged around the lower part of the crucible in the hot zone of the single crystal furnace, thus creating three longitudinally progressive temperature zones around the crucible.

[0049] In this embodiment, the upper heater 100 and the lower heater 200 are connected to different power sources to achieve independent control of each other, so as to match the heating requirements of the crucible at different stages. For example, in the melting stage, the upper heater 100 and the lower heater 200 can be turned on simultaneously to heat the crucible with high power; in the crystal growth stage, the upper heater 100 maintains high power, while the lower heater 200 reduces power and heats at a low temperature to reduce erosion of the bottom of the crucible and reduce thermal shock. In this case, the upper heater 100 and the lower heater 200 can form three temperature gradient intervals with gradient continuity in the longitudinal direction, eliminating the temperature abrupt interface between the two temperature gradient intervals of the traditional two-stage heater. The gradient can be transitioned through the intermediate coupled heating zone to avoid thermal convection disturbance to the crucible.

[0050] The different power sources mentioned above in this embodiment may include a first power source and a second power source. The first power source is connected to the upper heater 100, and the second power source is connected to the lower heater 200.

[0051] For details, see Figure 2 Both the upper heater 100 and the lower heater 200 are configured as cylindrical structures that can surround the outside of the crucible. Furthermore, it is preferable that the cylindrical structures containing the upper heater 100 and the lower heater 200 have the same diameter and are coaxially arranged to facilitate coupling between them.

[0052] For more details, see Figure 3 and Figure 5 In this embodiment, the upper heater 100 is formed by a plurality of first heating petals 110 arranged in a circumferential manner, and the lower heater 200 is formed by a plurality of second heating petals 210 arranged in a circumferential manner. Here, each of the first heating petals 110 and the second heating petals 210 is made of a heating material, such as graphite, carbon fiber, etc.

[0053] Among them, see Figure 4 Each of the first heating petals 110 forms an upper heating zone A and an upper coupling zone C1. In the height direction of the crucible, the upper heating zone A and the upper coupling zone C1 are arranged from top to bottom. Specifically, in terms of the height region of the crucible, the upper heating zone A corresponds to the upper part of the crucible, and the upper coupling zone C1 corresponds to the middle part of the crucible.

[0054] Furthermore, in this embodiment, the upper heating zone A corresponding to the upper part of the crucible is a high-temperature heating zone, while the upper coupling zone C1 corresponding to the middle part of the crucible is a coupling region. This coupling region is used to couple with the lower heater 200 to form a medium-temperature heating zone. Based on this, to ensure that the temperature of the coupling region is lower than the temperature of the upper heating zone A, the heating power of the upper coupling zone C1 in the upper heater 100 should be lower than the heating power of the upper heating zone A.

[0055] For example, see Figure 3 and Figure 4 The number of first heating petals 110 constituting the upper coupling region C1 is less than the number of first heating petals 110 constituting the upper heating region A, so that the total heating area of ​​the upper heating region A is greater than the total heating area of ​​the upper coupling region C1, and thus the heating power of the upper heating region A is greater than the heating power of the upper coupling region C1.

[0056] See also Figure 3 and Figure 4 In one specific example, the plurality of first heating lobes 110 include a plurality of first long lobes 112 and a plurality of first short lobes 111, which are arranged circumferentially to form a cylindrical structure. The length of the first long lobes 112 is greater than the length of the first short lobes 111, and the tops of the first long lobes 112 and the first short lobes 111 are flush. The bottom of the first long lobes 112 protrudes below the first short lobes 111. The portion of the first long lobes 112 corresponding to the height of the first short lobes 111 (i.e., the upper part of the first long lobes 112) forms a first overlapping heating portion 1122. The portion of the first long lobes 112 that protrudes downward below the first short lobes 111 can be regarded as an extension extending downward from the upper heating zone A, and this extension is the first extended heating portion 1121. According to this structural design, each first short lobe 111 and each first overlapping heating part 1122 together form the upper heating zone A. That is, the heating area of ​​the upper heating zone A is formed by the superposition of the heating areas of each first short lobe 111 and the upper part of each first long lobe 112, i.e., the first overlapping heating part 1122. The upper coupling zone C1 is formed by the lower part of each first long lobe 112, i.e., the first extended heating part 1121. That is, the heating area of ​​the upper coupling zone C1 is only formed by the superposition of the heating areas of the lower part of each first long lobe 112. Compared with the upper heating zone A, it lacks each first short lobe 111, and its overall heating area is smaller than that of the upper heating zone A. Therefore, its heating power is smaller than that of the upper heating zone A.

[0057] For more details, see Figure 3In the circumferential direction, each first short lobe 111 and each first long lobe 112 is connected in series end to end to form a cylindrical structure. Except for the series-connected sections, each first short lobe 111 and each first long lobe 112 is spaced apart. The series-connected sections can be understood as the connecting parts between adjacent first short lobes 111 and first long lobes 112. This series-connected design ensures that each first short lobe 111 and each first long lobe 112 receives the same current, guaranteeing heating uniformity. The spaced-apart design avoids the risk of cracking of the upper heater 100 due to thermal expansion. At the same time, the interval between each heating lobe should not be too large to ensure that the heating effect is approximately the same at each circumferential position, guaranteeing heating uniformity.

[0058] Further, see Figure 3 In this embodiment, the first long lobes 112 and the first short lobes 111 are alternately connected in series in the circumferential direction and are evenly distributed circumferentially. This makes the distribution of short and long lobes in the upper heating zone A uniform, which facilitates the provision of a uniform heating effect through the upper heating zone A; at the same time, it also makes the first extended heating parts 1121 arranged circumferentially at equal intervals in the upper coupling zone C1, which provides a basis for the coupling of the upper heater 100 and the lower heater 200.

[0059] Further, see Figure 3 In the circumferential direction, the width of each first long lobe 112 is the same as the width of each first short lobe 111, which is also to ensure the heating uniformity of the upper heater 100 in the circumferential direction.

[0060] Further, see Figure 3 Each first long lobe 112 and first short lobe 111 is provided with a U-shaped groove in the middle. The U-shaped groove divides each first long lobe 112 / first short lobe 111 into left and right parts. The function of the U-shaped groove is similar to that of the gap between adjacent heating lobes. It also serves as a space for thermal expansion deformation, avoiding cracking caused by the concentration of internal stress when the material expands due to heat. It also serves as a gas channel for gas flow in the furnace.

[0061] Furthermore, in this embodiment, the length of the first long lobe 112 is about twice the length of the first short lobe 111, so that the length of the first extended heating part 1121 of the first long lobe 112 is basically the same as the length of the first short lobe 111 and the length of the first overlapping heating part 1122. This makes the length of the upper heating region A and the length of the upper coupling region C1 basically the same, providing a basis for constructing an upper heating region A, a coupling heating region C and a lower heating region B of equal length, which is more conducive to the construction of a progressive longitudinal gradient temperature zone.

[0062] In this embodiment, the lower heater 200 has a similar structure to the upper heater 100, the main difference being that the coupling region of the lower heater 200 is located above the heating region. The following mainly describes the differences in the lower heater 200; for similar parts, please refer to the aforementioned description of the upper heater 100.

[0063] See Figure 5 and Figure 6 The plurality of second heating lobes 210 include a plurality of second long lobes 212 and a plurality of second short lobes 211, which are arranged circumferentially to form a cylindrical structure. The length of the second long lobes 212 is greater than the length of the second short lobes 211, and the lower portions of the second long lobes 212 and the second short lobes 211 are flush. The top of the second long lobes 212 protrudes above the second short lobes 211. The portion of the second long lobes 212 corresponding in height to the second short lobes 211 (i.e., the lower portion of the second long lobes 212) forms a second overlapping heating portion 2122, and the portion of the second long lobes 212 protruding upward above the second short lobes 211 forms a second extended heating portion 2121. According to this structural design, each second short lobe 211 and each second overlapping heating part 2122 together form the lower heating zone B. That is, the heating area of ​​the lower heating zone B is formed by the superposition of the heating areas of each second short lobe 211 and the lower part of each second long lobe 212, i.e., the second overlapping heating part 2122. The lower coupling zone C2 is formed by the upper part of each second long lobe 212, i.e., the second extended heating part 2121. That is, the heating area of ​​the lower coupling zone C2 is formed by the superposition of the heating areas of the lower part of each second long lobe 212. Compared with the lower heating zone B, it lacks each second short lobe 211, and its overall heating area is smaller than that of the lower heating zone B. Therefore, its heating power is smaller than that of the lower heating zone B.

[0064] Similarly, such as Figure 6 As shown, in this embodiment, the lower coupling region C2 and the lower heating region B are arranged from top to bottom along the height direction of the crucible. Specifically, in terms of the height region of the crucible, the lower heating region B corresponds to the lower part of the crucible, and the lower coupling region C2 corresponds to the middle part of the crucible.

[0065] In this embodiment, the upper coupling region C1 of the upper heater 100 and the lower coupling region C2 of the lower heater 200 both correspond to the middle region of the crucible and are cross-coupled in this region to form a coupled heating region C.

[0066] For details, see Figure 3 and Figure 5 In the upper coupling region C1, a first coupling groove 113 is formed between every two adjacent first extended heating parts 1121; see also Figure 5 and Figure 6In the lower coupling region C2, a second coupling groove 213 is formed between every two adjacent second extended heating portions 2121. The number of first coupling grooves 113 is the same as the number of second extended heating portions 2121, and their widths are matched. Similarly, the number of second coupling grooves 213 is the same as the number of first extended heating portions 1121, and their widths are matched. (See also...) Figure 7 When assembling the upper heater 100 and the lower heater 200, each of the first extended heating parts 1121 in the upper coupling region C1 is embedded into each of the second coupling grooves 213 in the lower coupling region C2, opposite to the second short lobe 211; each of the second extended heating parts 2121 in the lower coupling region C2 is embedded into each of the first coupling grooves 113 in the upper coupling region C1, opposite to the first short lobe 111. That is, each of the first long lobe 112 and each of the second short lobe 211 corresponds to each other in the axial direction and is aligned with each of the first short lobe 111 and each of the second long lobe 212 in the axial direction. In this way, the cross coupling of each of the first extended heating parts 1121 and each of the second extended heating parts 2121 can be realized.

[0067] The sum of the number of first heating lobes 110 constituting the upper coupling region C1 and the number of second heating lobes 210 constituting the lower coupling region is equal to the number of first heating lobes 110 constituting the upper heating region A and the number of second heating lobes 210 constituting the lower heating region B. In other words, the sum of the number of first extended heating portions 1121 constituting the upper coupling region C1 and the number of second extended heating portions 2121 constituting the lower coupling region C2 is equal to the sum of the number of first short lobes 111 and first overlapping heating portions 1122 constituting the upper heating region A and the sum of the number of second segment lobes 212 and second overlapping heating portions 2122 constituting the lower heating region B.

[0068] Furthermore, in this embodiment, the length of the second short lobe 211 is the same as the length of the first short lobe 111, and the length of the second long lobe 212 is the same as the length of the first long lobe 112. That is, the length of the second long lobe 212 is approximately twice the length of the second short lobe 211, making the length of the second extended heating portion 2121 substantially the same as the length of the first extended heating portion 1121. Moreover, the sum of the axial lengths of the first short lobe 111 and the second long lobe 121 is equal to the sum of the axial lengths of the second short lobe 211 and the first long lobe 111. This arrangement makes the coupling between the upper heater 100 and the lower heater 200 tighter, and the distribution of each heating region more uniform, which is beneficial for establishing a temperature gradient.

[0069] Furthermore, the widths of the first long lobe 112, the first short lobe 111, the second long lobe 212, and the second short lobe 211 are all the same. This ensures that the heating areas of the upper heating zone A, the lower heating zone B, and the coupled heating zone C are all identical. Based on this identical heating area, by controlling the heating power of the upper heater 100 and the lower heater 200 to be different, a longitudinal gradient temperature zone can be generated, making the construction of the longitudinal gradient temperature zone simpler.

[0070] See Figure 1 and Figure 2 In both the height and circumferential directions, each first heating petal 110 of the upper heater 100 has a gap with each second heating petal 210 of the lower heater 200. For example, along the height direction, there is an axial gap between each first heating petal 110 and each second heating petal 210 opposite it in the axial direction; that is, there is an axial gap between each first long petal 112 and each second short petal 211 opposite it in the axial direction, and there is an axial gap between each first short petal 111 and each second long petal 212 opposite it in the axial direction. Along the circumferential direction, there is a gap between each first extended heating portion 1121 and each second extended heating portion 2121. This arrangement avoids contact between the heating petals of different heaters, prevents short circuits, ensures that the current flows along the designed path, and guarantees controllable power distribution.

[0071] Further, see Figure 1 and Figure 2 In this embodiment, the distance between adjacent first short lobes 111 and first long lobes 112 is equal to the distance between adjacent first extended heating portions 1121 and second extended heating portions 2121; and the distance between adjacent second short lobes 211 and second long lobes 212 is also equal to the distance between adjacent first extended heating portions 1121 and second extended heating portions 2121. This arrangement ensures that the first heating lobes 110 and second heating lobes 210 are perfectly aligned vertically, providing uniform heating.

[0072] See Figure 1 In this embodiment, the coupled heating zone C is formed by superimposing a portion of the structure of the upper heater 100 (first extended heating part 1121) and a portion of the structure of the lower heater 200 (second extended heating part 2121). Therefore, when the upper heater 100 and the lower heater 200 use different power for heating, the heating temperature generated by the coupled heating zone C will be between the heating temperatures of the upper heating zone A and the lower heating zone B.

[0073] Further, see Figure 1Because the coupled heating zone C is precisely connected between the upper heating zone A and the lower heating zone B, when the upper heater 100 and the lower heater 200 operate synchronously, three temperature zones with progressively increasing temperatures from bottom to top can be constructed along the height of the crucible: the low-temperature zone where the lower heating zone B is located, the medium-temperature zone where the coupled heating zone C is located, and the high-temperature zone where the upper heating zone A is located. This design achieves a three-layer vertical temperature gradient through two independently controlled heaters. Compared to the two-layer vertical temperature gradient formed by existing technologies, it can reduce sudden temperature drops and decrease thermal convection within the crucible, thereby reducing erosion of the crucible and improving crystal pulling stability.

[0074] In this embodiment, both the upper heater 100 and the lower heater 200 are provided with feet. The feet are used to provide support and positioning for the heaters and to connect to the electrodes. Specifically, see... Figures 1 to 6 The upper heater 100 has two first feet 120 oppositely arranged on it. Both first feet 120 extend downwards from the upper heater 100 to below the lower heater 200, and are respectively connected to the positive and negative terminals of a first power supply. An electrical isolation gap exists between the first feet 120 and the lower heater 200. The lower heater 200 has two second feet 220 oppositely arranged on it, and the two second feet 220 are respectively connected to the positive and negative terminals of a second power supply. The first feet 120 and the second feet 220 are evenly distributed in the circumferential direction, and each foot has a horizontal support structure at its bottom to facilitate support for the upper heater 100 and the lower heater 200.

[0075] On the other hand, the present invention also provides a single crystal furnace hot zone, which includes the coupling heater of any of the above embodiments.

[0076] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0077] The above embodiments merely illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A coupling heater, characterized in that, It includes an upper heater (100) and a lower heater (200) that are independently controlled, with the lower heater (200) located below the upper heater (100); The upper heater (100) includes an upper heating zone (A) and an upper coupling zone (C1) disposed at the lower end of the upper heating zone (A); The lower heater (200) includes a lower heating zone (B) and a lower coupling zone (C2) disposed at the upper end of the lower heating zone (B); The upper coupling region (C1) and the lower coupling region (C2) are cross-coupled with each other to form a coupling heating region (C) between the upper heating region (A) and the lower heating region (B).

2. The coupling heater according to claim 1, characterized in that... , The upper heater (100) includes a plurality of first heating petals (110) arranged in a circular pattern. The plurality of first heating petals (110) surround the upper heating region (A) and the upper coupling region (C1). The number of first heating petals (110) constituting the upper coupling region (C1) is less than the number of first heating petals (110) constituting the upper heating region (A). The lower heater (200) includes a plurality of second heating petals (210) arranged in a circular pattern. The plurality of second heating petals (210) surround the lower coupling region (C2) and the lower heating region (B). The number of second heating petals (210) constituting the lower coupling region (C2) is less than the number of second heating petals (210) constituting the lower heating region (B).

3. The coupling heater according to claim 2, characterized in that, The sum of the number of the first heating petals (110) constituting the upper coupling region (C1) and the number of the second heating petals (210) constituting the lower coupling region (C2) is equal to the number of the first heating petals (110) constituting the upper heating region (A) and equal to the number of the second heating petals (210) constituting the lower heating region (B).

4. The coupling heater according to claim 3, characterized in that... , The plurality of first heating lobes (110) include a plurality of first long lobes (112) and a plurality of first short lobes (111). The length of the first long lobes (112) is greater than the length of the first short lobes (111), and the tops of the first long lobes (112) and the first short lobes (111) are flush. The portion of the first long lobes (112) corresponding to the first short lobes (111) forms a first overlapping heating portion (1122), and the portion of the bottom protruding from the first short lobes (111) forms a first extended heating portion (1121). Each of the first short lobes (111) and each of the first overlapping heating portions (1122) together form the upper heating area (A), and each of the first extended heating portions (1121) forms the upper coupling area (C1). The plurality of second heating lobes (210) include a plurality of second long lobes (212) and a plurality of second short lobes (211). The length of the second long lobes (212) is greater than the length of the second short lobes (211), and the bottoms of the second long lobes (212) and the second short lobes (211) are flush. The portion of the second long lobes (212) corresponding to the second short lobes (211) forms a second overlapping heating portion (2122), and the portion of the top protruding from the second short lobes (211) forms a second extended heating portion (2121). Each second short lobe (211) and each second overlapping heating portion (2122) together form the lower heating area (B), and each second extended heating portion (2121) forms the lower coupling area (C2).

5. The coupling heater according to claim 4, characterized in that... , Each of the first long lobes (112) and each of the first short lobes (111) are alternately connected in series and are evenly distributed in the circumference. A first coupling groove (113) is formed between each two adjacent first extended heating parts (1121). Each of the second long lobes (212) and each of the second short lobes (211) are alternately connected in series and are evenly distributed in the circumference. A second coupling groove (213) is formed between each two adjacent second extended heating parts (2121). Each of the first extended heating portions (1121) is embedded in each of the second coupling grooves (213), and each of the second extended heating portions (2121) is embedded in each of the first coupling grooves (113), such that the first long lobe (112) and the second short lobe (211) correspond to each other in the axial direction, and the first short lobe (111) and the second long lobe (212) correspond to each other in the axial direction.

6. The coupling heater according to claim 5, characterized in that... , The sum of the lengths of the first short lobe (111) and the second long lobe (212) in the axial direction is equal to the sum of the lengths of the second short lobe (211) and the first long lobe (112) in the axial direction.

7. The coupling heater according to claim 6, characterized in that... , The widths of the first long lobe (112), the first short lobe (111), the second long lobe (212), and the second short lobe (211) are all the same.

8. The coupling heater according to claim 7, characterized in that... , There is a gap in the axial direction between each of the first heating petals (110) and each of the second heating petals (210) opposite to them in the axial direction.

9. The coupling heater according to claim 1, characterized in that... , The upper heater (100) has two first foot plates (120) that extend to the lower heater (200) and are respectively connected to the positive and negative terminals of the first power supply. There is a gap between the first foot plates (120) and the lower heater (200). The lower heater (200) is provided with two second foot plates (220) extending downward therefrom, and the two second foot plates (220) are respectively connected to the positive and negative terminals of the second power supply; Each of the first foot plates (120) and each of the second foot plates (220) are evenly distributed in the circumferential direction.

10. A hot zone for a single crystal furnace, characterized in that... It includes the coupling heater of any one of claims 1-9.

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