Piezoelectric micropump, heat dissipation circulation system and electronic device

Abstract

The application discloses a piezoelectric micro-pump, a heat dissipation circulation system and electronic equipment, and relates to the technical field of piezoelectric devices. The piezoelectric micro-pump comprises a lower driving assembly, a lower pump body assembly, a transition communication plate, an upper pump body assembly and an upper driving assembly which are sequentially stacked. The upper driving assembly cooperates with the upper pump body assembly to form an upper cavity, and the lower driving assembly cooperates with the lower pump body assembly to form a lower cavity. The upper pump body assembly forms a plurality of upper one-way valve channels, the lower pump body assembly forms a plurality of lower one-way valve channels, the lower driving assembly is provided with a water inlet and a water outlet, and the upper cavity and the lower cavity are connected in series through the upper one-way valve channels, the lower one-way valve channels and the transition communication plate, so that the piezoelectric micro-pump forms a one-way flow channel from the water inlet to the water outlet. The pressure change of the upper cavity is opposite to the pressure change of the lower cavity. The piezoelectric micro-pump has the advantages of large flow and high back pressure output.

Description

Technical Field

[0001] This application relates to the field of piezoelectric equipment technology, and in particular to a piezoelectric micropump, a heat dissipation circulation system, and electronic equipment. Background Technology

[0002] Current piezoelectric micropumps often require increasing the volume of the cavity to achieve high flow rates, which leads to an increase in the overall size of the device and makes it difficult to achieve high back pressure output due to reduced drive efficiency. In contrast, if a small cavity design is used to improve back pressure capacity within a limited space, it will inevitably result in a smaller flow rate.

[0003] Therefore, there is a need to provide a piezoelectric micropump that can guarantee both high back pressure output and large flow rate. Utility Model Content

[0004] The main objective of this application is to propose a piezoelectric micropump, a heat dissipation circulation system, and electronic equipment, which aims to at least improve the technical problem in the related art that piezoelectric micropumps are difficult to achieve both high back pressure and large flow output.

[0005] To achieve the above objectives, according to some embodiments of this application, this application provides a piezoelectric micropump, including a lower drive assembly, a lower pump body assembly, a transition connecting plate, an upper pump body assembly, and an upper drive assembly arranged in sequence.

[0006] The upper drive assembly and the upper pump body assembly cooperate to form an upper cavity, and the lower drive assembly and the lower pump body assembly cooperate to form a lower cavity. The upper pump body assembly forms multiple upper one-way valve channels, and the lower pump body assembly forms multiple lower one-way valve channels. The lower drive assembly has an inlet and an outlet. The upper cavity and the lower cavity are connected in series through the upper one-way valve channels, the lower one-way valve channels, and the transition connecting plate, so that the piezoelectric micropump forms a one-way flow channel from the inlet to the outlet. The pressure change in the upper cavity is opposite to the pressure change in the lower cavity.

[0007] In some embodiments, the lower drive assembly includes a lower piezoelectric ceramic, a lower vibrating plate, and a lower cavity plate. The lower cavity plate is disposed on the side of the lower vibrating plate facing the lower pump body assembly. The lower cavity plate has a lower cavity hole and a first water inlet sub-hole and a first water outlet sub-hole respectively disposed on the outer periphery of the lower cavity hole. The lower cavity hole cooperates with the lower vibrating plate and the lower pump body assembly to form the lower cavity. The lower vibrating plate has a second water inlet sub-hole corresponding to the first water inlet sub-hole and a second water outlet sub-hole corresponding to the first water outlet sub-hole. The first water inlet sub-hole and the second water inlet sub-hole form the water inlet, and the first water outlet sub-hole and the second water outlet sub-hole form the water outlet.

[0008] In some embodiments, the lower vibrating plate forms a lower receiving groove on the side opposite to the lower cavity plate, the lower piezoelectric ceramic is disposed in the lower receiving groove, and the groove opening of the lower receiving groove extends out of the lower piezoelectric ceramic.

[0009] In some embodiments, the upper drive assembly includes an upper piezoelectric ceramic, an upper vibrating plate, and an upper cavity plate. The upper vibrating plate has an upper receiving groove formed on the side opposite to the upper cavity plate. The upper piezoelectric ceramic is disposed in the upper receiving groove, and the opening of the upper receiving groove is higher than the upper piezoelectric ceramic. The upper cavity plate has an upper cavity hole, and the upper cavity hole cooperates with the upper vibrating plate and the upper pump body assembly to form the upper cavity.

[0010] In some embodiments, the upper pump body assembly includes a first lower pressure plate, an upper valve plate, and a first upper pressure plate stacked sequentially. The upper cavity hole cooperates with the upper vibrating plate and the first upper pressure plate to form the upper cavity. The first lower pressure plate is provided with a first sub-hole and a second sub-hole. The upper valve plate is provided with a first valve and a second valve corresponding to the first sub-hole and the second sub-hole, respectively. The first upper pressure plate is provided with a third sub-hole and a fourth sub-hole corresponding to the first valve and the second valve, respectively. The size of the first sub-hole is smaller than the size of the third sub-hole, and the size of the second sub-hole is larger than the size of the fourth sub-hole. The upper one-way valve channel includes a first upper channel and a second upper channel. The first sub-hole, the first valve, and the third sub-hole form the first upper channel, and the second sub-hole, the second valve, and the fourth sub-hole form the second upper channel. Both the first upper channel and the second upper channel are provided corresponding to the upper cavity, and the one-way conduction directions of the first upper channel and the second upper channel are opposite.

[0011] In some embodiments, the lower pump body assembly includes a second upper pressure plate, a lower valve plate, and a second lower pressure plate stacked sequentially. The lower cavity hole cooperates with the lower vibrating plate and the second upper pressure plate to form the lower cavity. The second upper pressure plate is provided with a fifth sub-hole, a sixth sub-hole, and a seventh sub-hole. The lower valve plate is provided with a third valve, a fourth valve, and a fifth valve corresponding to the fifth, sixth, and seventh sub-holes, respectively. The second lower pressure plate is provided with an eighth sub-hole, a ninth sub-hole, and a tenth sub-hole corresponding to the third, fourth, and fifth valves, respectively. The size of the fifth sub-hole is smaller than the size of the eighth sub-hole, and the size of the sixth sub-hole is larger. Regarding the size of the ninth sub-hole, the size of the seventh sub-hole is smaller than the size of the tenth sub-hole; the lower one-way valve channel includes a first lower channel, a second lower channel, and a third lower channel, the fifth sub-hole, the third valve, and the eighth sub-hole form the first lower channel, the sixth sub-hole, the fourth valve, and the ninth sub-hole form the second lower channel, and the seventh sub-hole, the fifth valve, and the tenth sub-hole form the third lower channel. The first lower channel is configured corresponding to the water inlet, and the second and third lower channels are configured corresponding to the lower cavity. The unidirectional flow direction of the second lower channel is opposite to that of the first and third lower channels.

[0012] In some embodiments, the second upper pressure plate, the lower valve plate, and the second lower pressure plate are each provided with through holes at corresponding positions, and the three through holes are connected to form a water outlet channel that communicates with the water outlet.

[0013] In some embodiments, the piezoelectric micropump further includes a transition connecting plate, the transition connecting plate being provided with a central hole and a first side hole and a second side hole respectively provided on opposite sides of the central hole, the central hole being provided corresponding to the second upper channel and the second lower channel, the first side hole being provided corresponding to the first upper channel and the first lower channel, and the second side hole being provided corresponding to the third lower channel and the through hole.

[0014] In some embodiments, the first upper channel and the first lower channel are offset, the second upper channel and the second lower channel are concentric, and the third lower channel and the water outlet channel are offset.

[0015] In some embodiments, the upper piezoelectric ceramic and the lower piezoelectric ceramic have the same polarity, and the driving signals of the upper piezoelectric ceramic and the lower piezoelectric ceramic are 180 degrees out of phase; or,

[0016] The upper piezoelectric ceramic and the lower piezoelectric ceramic have different polarities, and the driving signals of the upper piezoelectric ceramic and the lower piezoelectric ceramic are in phase.

[0017] In some embodiments, the area of ​​the upper cavity plate is defined as A, and the area of ​​the upper cavity hole is defined as B, then B / A = 0.5 to 0.75; and / or, the area of ​​the lower cavity plate is defined as C, and the area of ​​the lower cavity hole is defined as D, then D / C = 0.5 to 0.75.

[0018] According to some embodiments of this application, this application provides a heat dissipation circulation system, which includes the piezoelectric micropump described above.

[0019] According to some embodiments of this application, this application provides an electronic device that includes the heat dissipation circulation system described above.

[0020] In the above scheme, the piezoelectric micropump includes a lower drive assembly, a lower pump body assembly, a transition connecting plate, an upper pump body assembly, and an upper drive assembly stacked sequentially. The upper drive assembly and the upper pump body assembly cooperate to form an upper cavity, and the lower drive assembly and the lower pump body assembly cooperate to form a lower cavity. The upper pump body assembly forms multiple upper one-way valve channels, the lower pump body assembly forms multiple lower one-way valve channels, and the lower drive assembly forms an inlet and an outlet. The upper cavity and the lower cavity are connected in series through the upper one-way valve channels, the lower one-way valve channels, and the transition connecting plate, so that the piezoelectric micropump forms a one-way flow channel from the inlet to the outlet. The drive signals of the upper drive assembly and the lower drive assembly are 180 degrees out of phase. The upper and lower drive components of this utility model are provided with independent cavities. The structural design allows the fluid in the upper and lower cavities to move in one direction. The design of the two cavities increases the flow rate of the micro-voltage pump. At the same time, the two drive components are set so that the output pressure of the upper and lower cavities is superimposed. This utility model has the advantages of large flow rate and high back pressure output.

[0021] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the exploded structure of a piezoelectric micropump according to some embodiments of this application;

[0024] Figure 2This is a schematic diagram of the structure of a piezoelectric micropump according to some embodiments of this application;

[0025] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure at section AA;

[0026] Figure 4 This is a schematic diagram of the working structure of a piezoelectric micropump according to some embodiments of this application;

[0027] Figure 5 This is a schematic diagram of another operating state structure of the piezoelectric micropump according to some embodiments of this application;

[0028] Figure 6 This is a schematic diagram of the upper valve plate of a piezoelectric micropump according to some embodiments of this application;

[0029] Figure 7 This is a schematic diagram of the lower valve plate of a piezoelectric micropump according to some embodiments of this application;

[0030] Figure 8 This is a schematic diagram of the transition connecting plate of a piezoelectric micropump in some embodiments of this application.

[0031] Explanation of icon numbers:

[0032] 100. Piezoelectric micropump;

[0033] 10. Lower drive assembly; 11. Lower piezoelectric ceramic; 12. Lower vibrating plate; 121. Second water inlet sub-hole; 122. Second water outlet sub-hole; 123. Lower receiving tank; 13. Lower cavity plate; 131. Lower cavity hole; 132. First water inlet sub-hole; 133. First water outlet sub-hole; 20. Lower pump body assembly; 21. Second upper pressure plate; 211. Fifth sub-hole; 212. Sixth sub-hole; 213. Seventh sub-hole; 22. Lower valve plate; 221. Third valve; 222. Fourth valve; 223. Fifth valve; 23. Second lower pressure plate; 231. Eighth sub-hole; 232. Ninth sub-hole; 233. Tenth sub-hole; 24. First lower channel; 25. Second lower channel; 26. Third lower channel; 201, through hole; 30, transition connecting plate; 31, center hole; 32, first side hole; 33, second side hole; 40, upper pump body assembly; 41, first lower pressure plate; 411, first sub-hole; 412, second sub-hole; 42, upper valve plate; 421, first valve; 422, second valve; 43, first upper pressure plate; 431, third sub-hole; 432, fourth sub-hole; 44, first upper channel; 45, second upper channel; 50, upper drive assembly; 51, upper piezoelectric ceramic; 52, upper vibrating plate; 521, upper receiving groove; 53, upper cavity plate; 531, upper cavity hole; 60, upper cavity; 70, lower cavity; 80, water inlet; 90, water outlet.

[0034] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0035] The technical solutions in this embodiment will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0036] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicator will also change accordingly.

[0037] Furthermore, the use of terms such as "first," "second," etc., in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0038] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0039] Furthermore, the technical solutions of the various embodiments of this application can be combined with each other, but only if they are feasible to those skilled in the art. If a combination of technical solutions contradicts each other or cannot be implemented, it should be considered that such a combination does not exist and is not within the scope of protection claimed in this application. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.

[0040] The descriptions of directions such as "up", "down", "front", "back", "left", and "right" in this application are based on the directions shown in the figure and are only used to explain the relative positional relationship between the components in the posture shown in the figure. If the specific posture changes, the directional indication will also change accordingly.

[0041] Current piezoelectric micropumps often require increasing the volume of the cavity to achieve high flow rates, which leads to an increase in the overall size of the device and makes it difficult to achieve high back pressure output due to reduced drive efficiency. In contrast, if a small cavity design is used to improve back pressure capacity within a limited space, it will inevitably result in a smaller flow rate.

[0042] Therefore, achieving both high flow rate and high back pressure output within a limited volume remains a technical challenge.

[0043] Therefore, this application proposes a piezoelectric micropump, a heat dissipation circulation system, and an electronic device.

[0044] Reference Figures 1 to 3 According to some embodiments of this application, this application provides a piezoelectric micropump 100, including a lower drive assembly 10, a lower pump body assembly 20, a transition connecting plate 30, an upper pump body assembly 40, and an upper drive assembly 50 stacked sequentially; the upper drive assembly 50 cooperates with the upper pump body assembly 40 to form an upper cavity 60, and the lower drive assembly 10 cooperates with the lower pump body assembly 20 to form a lower cavity 70; the upper pump body assembly 40 forms a plurality of upper one-way valve channels, the lower pump body assembly 20 forms a plurality of lower one-way valve channels, and the lower drive assembly 10 forms an inlet 80 and an outlet 90; the upper cavity 60 and the lower cavity 70 are connected in series through the upper one-way valve channels, the lower one-way valve channels, and the transition connecting plate 30, so that the piezoelectric micropump 100 forms a one-way flow channel from the inlet 80 to the outlet 90; the pressure change of the upper cavity 60 is opposite to the pressure change of the lower cavity 70.

[0045] The upper and lower one-way valve channels mean that water can only pass through in one direction, and cannot pass through in the opposite direction. This ensures that water can only flow unidirectionally from the inlet 80 through the various one-way valve channels, the upper chamber 60, and the lower chamber 70, that is, it flows unidirectionally within a one-way flow channel, and finally flows out from the outlet 90. The pressure change in the upper chamber 60 is opposite to that in the lower chamber 70, meaning that when the pressure in the upper chamber 60 decreases, the pressure in the lower chamber 70 increases; conversely, when the pressure in the upper chamber 60 increases, the pressure in the lower chamber 70 decreases. The pressure change is determined by the vibration directions of the upper drive assembly 50 and the lower drive assembly 10. If the vibration of the upper drive assembly 50 causes the volume of the upper cavity 60 to decrease, the pressure increases, corresponding to the upper cavity 60 being in a water-absorbing state and the lower cavity 70 being in a water-pumping state. Conversely, if the vibration of the lower drive assembly 10 causes the volume of the lower cavity 70 to increase, the pressure decreases, corresponding to the lower cavity 70 being in a water-absorbing state and the upper cavity 60 being in a water-pumping state. The volume change patterns of the lower drive assembly 10 and the lower cavity 70 are similar.

[0046] This application employs a series drive mechanism with an upper drive assembly 50 and a lower drive assembly 10. The piezoelectric micropump 100 forms a unidirectional flow channel from the inlet 80 to the outlet 90. The pressure change in the upper cavity 60 is opposite to that in the lower cavity 70. As the upper drive assembly 50 and the lower drive assembly 10 vibrate, when the volume of the upper cavity 60 increases, the pressure decreases, and the upper cavity 60 is in a water-absorbing state. At this time, the volume of the lower cavity 70 decreases, the pressure increases, and the lower cavity 70 is in a water-pumping state. Conversely, when the volume of the upper cavity 60 decreases, the pressure increases, and the upper cavity 60 is in a water-pumping state. At this time, the volume of the lower cavity 70 increases, the pressure decreases, and the lower cavity 70 is in a water-absorbing state. Through alternating these processes, the fluid enters from the inlet 80, flows directionally between the upper cavity 60 and the lower cavity 70, and finally flows out from the outlet 90, forming a stable pumping process. In this embodiment, the upper drive assembly 50 and the lower drive assembly 10 are respectively provided with independent cavities. The structural design allows the fluid in the upper cavity 60 and the lower cavity 70 to move unidirectionally. The design of two cavities increases the flow rate of the micro-voltage pump. At the same time, the arrangement of two drive assemblies allows the output pressures of the upper cavity 60 and the lower cavity 70 to be superimposed, which has the advantages of high flow rate and high back pressure output. In some embodiments, the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11 have the same polarity, and the phase difference of the drive signals of the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11 is 180 degrees; or, the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11 have different polarities, and the phase difference of the drive signals of the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11 is the same.

[0047] There are two main ways to cause opposite pressure changes in the upper cavity 60 and the lower cavity 70:

[0048] The first implementation method is as follows: When the polarity of the upper piezoelectric ceramic 51 in the upper driving component 50 and the lower piezoelectric ceramic 11 in the lower driving component 10 are the same, by adjusting the driving signals of the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11, the phase difference between the driving signals of the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11 is made 180 degrees, thereby realizing the alternating change of pressure in the upper cavity 60 and the lower cavity 70. Here, the driving signal refers to the external driving voltage signal.

[0049] The second implementation method is to apply the same driving signal to the upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11, which is achieved by setting different polarization directions of the ceramics. For example, the polarization direction of the upper piezoelectric ceramic 51 is opposite to that of the lower piezoelectric ceramic 11.

[0050] Both methods can achieve alternating pressure changes in the upper chamber 60 and the lower chamber 70, allowing the output pressures of the two chambers to be superimposed, thus achieving high back pressure output while ensuring a large flow rate.

[0051] Reference Figure 1 and Figure 3 In some embodiments, the lower drive assembly 10 includes a lower piezoelectric ceramic 11, a lower vibrating plate 12, and a lower cavity plate 13. The lower cavity plate 13 is disposed on the side of the lower vibrating plate 12 facing the lower pump body assembly 20. The lower cavity plate 13 has a lower cavity hole 131 and a first water inlet sub-hole 132 and a first water outlet sub-hole 133 respectively disposed on the outer periphery of the lower cavity hole 131. The lower cavity hole 131 cooperates with the lower vibrating plate 12 and the lower pump body assembly 20 to form a lower cavity 70. The lower vibrating plate 12 is provided with a second water inlet sub-hole 121 corresponding to the first water inlet sub-hole 132. The lower vibrating plate 12 is provided with a second water outlet sub-hole 122 corresponding to the first water outlet sub-hole 133. The first water inlet sub-hole 132 and the second water inlet sub-hole 121 form a water inlet 80. The first water outlet sub-hole 133 and the second water outlet sub-hole 122 form a water outlet 90. The lower vibrating plate 12 has a lower piezoelectric ceramic 11 and a lower cavity plate 13 on its two sides respectively. The lower cavity plate 13 is located on the side of the lower vibrating plate 12 facing the lower pump body assembly 20. The first water inlet sub-hole 132 and the second water inlet sub-hole 121 are of equal size and coaxially arranged. The first water outlet sub-hole 133 and the second water outlet sub-hole 122 are of equal size and coaxially arranged. When the lower vibrating plate 12 and the lower cavity plate 13 are attached together, the first water inlet sub-hole 132 and the second water inlet sub-hole 121 are connected to form a water inlet 80, and the first water outlet sub-hole 133 and the second water outlet sub-hole 122 are connected to form a water outlet 90.

[0052] Reference Figure 1 and Figure 3 In some embodiments, a lower receiving groove 123 is formed on the side of the lower vibrating plate 12 away from the lower cavity plate 13, and a lower piezoelectric ceramic 11 is disposed in the lower receiving groove 123, with the groove opening of the lower receiving groove 123 extending out of the lower piezoelectric ceramic 11.

[0053] The depth of the lower receiving groove 123 is greater than the thickness of the lower piezoelectric ceramic 11. The setting of the lower receiving groove 123 extending out of the lower piezoelectric ceramic 11 means that the lower piezoelectric ceramic 11 does not extend out of the groove of the lower receiving groove 123. This is because the lower piezoelectric ceramic 11 will vibrate during actual use, and the specific vibration direction is along the central axis of the groove. In order to avoid interference between the lower piezoelectric ceramic 11 and external components when it vibrates, the lower receiving groove 123 can be set in the lower vibrating plate 12 to accommodate the lower piezoelectric ceramic 11. The installation position can be designed according to the amplitude of the lower piezoelectric ceramic 11 so that the lower piezoelectric ceramic 11 will never extend out of the groove of the lower receiving groove 123 during vibration.

[0054] Reference Figure 1 and Figure 3 In some embodiments, the upper drive assembly 50 includes an upper piezoelectric ceramic 51, an upper vibrating plate 52, and an upper cavity plate 53. An upper receiving groove 521 is formed on the side of the upper vibrating plate 52 away from the upper cavity plate 53. The upper piezoelectric ceramic 51 is disposed in the upper receiving groove 521, and the opening of the upper receiving groove 521 is higher than the upper piezoelectric ceramic 51. The upper cavity plate 53 is formed with an upper cavity hole 531, and the upper cavity hole 531 cooperates with the upper vibrating plate 52 and the upper pump body assembly 40 to form an upper cavity 60.

[0055] The depth of the upper receiving groove 521 can be designed to be greater than the thickness of the upper piezoelectric ceramic 51. The setting of the groove opening of the upper receiving groove 521 above the upper piezoelectric ceramic 51 means that the upper piezoelectric ceramic 51 does not protrude from the groove opening of the upper receiving groove 521. This is because, in actual use, the upper piezoelectric ceramic 51 will vibrate, specifically along the central axis of the groove opening. To avoid interference between the upper piezoelectric ceramic 51 and external components during vibration, an upper receiving groove 521 can be provided on the upper vibrating plate 52 to accommodate the upper piezoelectric ceramic 51. The installation position can be designed according to the amplitude of the upper piezoelectric ceramic 51, ensuring that the upper piezoelectric ceramic 51 never protrudes from the groove opening of the upper receiving groove 521 during vibration. The upper cavity 60 is formed by the upper vibrating plate 52 and the upper pump body assembly 40, which are respectively located on both sides of the upper cavity hole 531.

[0056] Reference Figure 1 , Figure 3 and Figure 4In some embodiments, the upper pump body assembly 40 includes a first lower pressure plate 41, an upper valve plate 42, and a first upper pressure plate 43 stacked sequentially. An upper cavity hole 531 cooperates with the upper vibrating plate 52 and the first upper pressure plate 43 to form an upper cavity 60. The first lower pressure plate 41 is provided with a first sub-hole 411 and a second sub-hole 412. The upper valve plate 42 is provided with a first valve 421 and a second valve 422 corresponding to the first sub-hole 411 and the second sub-hole 412, respectively. The first upper pressure plate 43 is provided with a third sub-hole 431 and a fourth sub-hole 432 corresponding to the first valve 421 and the second valve 422, respectively. The size of the first sub-hole 411 is smaller than the size of the third sub-hole 431, and the size of the second sub-hole 412 is larger than the size of the fourth sub-hole 432. The upper one-way valve channel includes a first upper channel 44 and a second upper channel 45. The first sub-hole 411, the first valve 421 and the third sub-hole 431 form the first upper channel 44, and the second sub-hole 412, the second valve 422 and the fourth sub-hole 432 form the second upper channel 45. The first upper channel 44 and the second upper channel 45 are both provided corresponding to the upper cavity 60, and the one-way conduction directions of the first upper channel 44 and the second upper channel 45 are opposite.

[0057] The upper pump body assembly 40 forms two upper one-way valve channels, namely a first upper channel 44 and a second upper channel 45. Both the first upper channel 44 and the second upper channel 45 are positioned corresponding to the upper cavity 60, and their one-way flow directions are opposite. In the one-way valve channels, water can only flow from the smaller orifice through the valve to the larger orifice, and vice versa. Specifically, in this embodiment, the first upper channel 44 allows water to flow only from bottom to top, that is, from the inlet 80 towards the upper cavity 60, while the second upper channel 45 allows water to flow only from top to bottom, that is, only from the upper cavity 60 towards the lower cavity 70. It should be noted that in this application, the upper and lower directions are as follows... Figure 3 As indicated by the middle arrow.

[0058] Reference Figure 1 , Figure 3 and Figure 5In some embodiments, the lower pump body assembly 20 includes a second upper pressure plate 21, a lower valve plate 22, and a second lower pressure plate 23 stacked sequentially. The lower cavity hole 131 cooperates with the lower vibrating plate 12 and the second upper pressure plate 21 to form a lower cavity 70. The second upper pressure plate 21 is provided with a fifth sub-hole 211, a sixth sub-hole 212, and a seventh sub-hole 213. The lower valve plate 22 is provided with a third valve 221, a fourth valve 222, and a fifth valve 223 corresponding to the fifth sub-hole 211, the sixth sub-hole 212, and the seventh sub-hole 213, respectively. The second lower pressure plate 23 is provided with an eighth sub-hole 231, a ninth sub-hole 232, and a tenth sub-hole 233 corresponding to the third valve 221, the fourth valve 222, and the fifth valve 223, respectively. The size of the fifth sub-hole 211 is smaller than the size of the eighth sub-hole 231. The size of the sixth sub-hole 212 is larger than that of the ninth sub-hole 232, and the size of the seventh sub-hole 213 is smaller than that of the tenth sub-hole 233. The lower one-way valve channel includes a first lower channel 24, a second lower channel 25, and a third lower channel 26. The fifth sub-hole 211, the third valve 221, and the eighth sub-hole 231 form the first lower channel 24. The sixth sub-hole 212, the fourth valve 222, and the ninth sub-hole 232 form the second lower channel 25. The seventh sub-hole 213, the fifth valve 223, and the tenth sub-hole 233 form the third lower channel 26. The first lower channel 24 is set corresponding to the water inlet 80, and the second lower channel 25 and the third lower channel 26 are set corresponding to the lower cavity 70. The one-way conduction direction of the second lower channel 25 is opposite to that of the first lower channel 24 and the third lower channel 26.

[0059] The lower pump assembly 20 has three lower one-way valve channels: a first lower channel 24, a second lower channel 25, and a third lower channel 26. The second lower channel 25 and the third lower channel 26 are located in relation to the lower cavity 70, and the one-way flow direction of the second lower channel 25 is opposite to that of the first lower channel 24 and the third lower channel 26. Similarly, in the one-way valve channels, water can only flow from the smaller orifice through the valve to the larger orifice. Specifically, in this embodiment, the first lower channel 24 allows water to flow only from bottom to top, that is, from the inlet 80 to the upper cavity 60. The second lower channel 25 allows water to flow only from top to bottom, that is, from the upper cavity 60 to the lower cavity 70. The third lower channel 26 allows water to flow only from bottom to top, that is, from the lower cavity 70 to the outlet 90.

[0060] Reference Figure 1 and Figure 3In some embodiments, the second upper pressure plate 21, the lower valve plate 22, and the second lower pressure plate 23 are each provided with a through hole 201 at corresponding positions. The three through holes 201 are connected to form a water outlet channel communicating with the water outlet 90. The through holes 201 are concentrically arranged and can be set to the same size. When the second upper pressure plate 21, the lower valve plate 22, and the second lower pressure plate 23 are stacked and attached together, the three through holes 201 are connected to form a water outlet channel. The water outlet channel is connected to the water outlet 90 so that water can flow into the water outlet 90.

[0061] Reference Figure 1 , Figure 3 and Figure 6 In some embodiments, the piezoelectric micropump 100 further includes a transition connecting plate 30. The transition connecting plate 30 is provided with a central hole 31 and a first side hole 32 and a second side hole 33 respectively provided on opposite sides of the central hole 31. The central hole 31 is provided corresponding to the second upper channel 45 and the second lower channel 25. The first side hole 32 is provided corresponding to the first upper channel 44 and the first lower channel 24. The second side hole 33 is provided corresponding to the third lower channel 26 and the through hole 201.

[0062] The transition connecting plate 30 serves to connect the upper one-way valve channel of the upper pump body assembly 40 and the lower one-way valve channel of the lower pump body assembly 20. Specifically, the central hole 31 is configured to correspond to the second upper channel 45 and the second lower channel 25. If the second upper channel 45 and the second lower channel 25 are open, the upper cavity 60 and the lower cavity 70 can be connected. Similarly, the first side hole 32 is configured to correspond to the first upper channel 44 and the first lower channel 24, and the second side hole 33 is configured to correspond to the third lower channel 26 and the through hole 201. In a further embodiment, the first upper channel 44 and the first lower channel 24 are staggered, the second upper channel 45 and the second lower channel 25 are concentric, and the third lower channel 26 and the water outlet channel are staggered. The central hole 31 can be circular, and the first side hole 32 can be club-shaped or teardrop-shaped. The size of the first side hole 32 gradually increases from the central hole 31 towards the edge. This allows water entering from the inlet 80 to pass through the first side hole 32 into the upper cavity 60 when the first upper channel 44 and the first lower channel 24 are open. The size of the second side hole 33 gradually decreases from the central hole 31 towards the edge. When the third lower channel 26 is opened, water from the lower cavity 70 can flow out from the outlet 90 through the outlet channel via the third lower channel 26.

[0063] It should be noted that in this embodiment, the first upper channel 44, the second upper channel 45, the first lower channel 24, the second lower channel 25, and the third lower channel 26 all function as one-way valves, effectively providing five one-way valves. Ideally, a one-way valve will only open in one direction, controlling the direction of water flow. This allows water to flow sequentially through the third valve 221, the first valve 421, the upper cavity 60, the second valve 422, the fourth valve 222, the lower cavity 70, and the fifth valve 223, finally exiting from the outlet 90. This creates a one-way flow path from the inlet 80 to the outlet 90 in the piezoelectric micropump 100. Furthermore, it should be noted that in the piezoelectric micropump 100, shut-off capability (i.e., the ability to prevent fluid backflow) is a crucial factor affecting system performance. Under high back pressure, it is difficult to effectively reduce fluid backflow, affecting pumping efficiency and system stability. This embodiment, by setting multiple valves, can effectively reduce backflow and improve the system's shut-off capability and pressurization efficiency.

[0064] The materials and shapes of each component are explained in detail below. The upper piezoelectric ceramic 51 and the lower piezoelectric ceramic 11 can be piezoelectric elements, using circular ceramic sheets bonded together with corresponding vibrating plates to form a piezoelectric oscillator. The upper vibrating plate 52 and the lower vibrating plate 12 can be made of metal, with a circular groove in the middle to improve the performance of the piezoelectric ceramic. The upper cavity plate 53 has a large circular hole in the middle as the upper cavity hole 531, forming the upper cavity 60. The lower cavity plate 13 has a large circular hole in the middle as the lower cavity hole 131, forming the lower cavity 70. The first upper pressure plate 43 and the first lower pressure plate 41 have large and small circular holes, respectively, which cooperate with the upper valve plate 42 to form upper one-way valve channels, namely the first upper channel 44 and the second upper channel 45. The second upper pressure plate 21 and the second lower pressure plate 23 also have large and small circular holes for cooperating with the lower valve plate 22 to form a lower one-way valve channel, including a first lower channel 24, a second lower channel 25, and a third lower channel 26. The edge of the second lower pressure plate 23 also has a through hole 201 for communicating with the outlet 90. The edge of the second upper pressure plate 21 not only has a through hole 201 for communicating with the outlet 90, but also a fifth sub-hole 211 for communicating with the inlet 80. The upper valve plate 42 and the lower valve plate 22 include valves and through holes 201. The valves can be wheel valves, which are composed of three traction arms and a central stop disc, and have low opening pressure and high reverse stop capability. The through hole 201 is used to connect with the outlet 90. Regarding the materials used in the construction, the first upper pressure plate 43, the first lower pressure plate 41, the second upper pressure plate 21, the second lower pressure plate 23, the upper cavity plate 53, the lower cavity plate 13, the upper valve plate 42, the lower valve plate 22, and the transition connecting plate 30 can be made of metal or plastic. Metal materials include stainless steel and iron-nickel alloys, while plastic materials include PC, PET, and PP.

[0065] In some embodiments, the area of ​​the upper cavity plate 53 is defined as A, and the area of ​​the upper cavity hole 531 is defined as B, then B / A = 0.5-0.75; and / or, the area of ​​the lower cavity plate 13 is defined as C, and the area of ​​the lower cavity hole 131 is defined as D, then D / C = 0.5-0.75.

[0066] To ensure increased flow rate of the piezoelectric micropump 100, the volumes of the upper cavity 60 and lower cavity 70 can be designed to be larger. This can be achieved by increasing the area ratio of the upper cavity hole 531 and the lower cavity hole 131 without increasing the thickness of the piezoelectric micropump 100. In this embodiment, the area of ​​the upper cavity plate 53 refers to the area of ​​the entire plate including the upper cavity hole 531, and the area of ​​the lower cavity plate 13 refers to the area of ​​the entire plate including the lower cavity hole 131. In related technologies, this ratio is generally around 0.3 when achieving high back pressure output; if it is too large, the back pressure cannot meet the requirements. In this embodiment, because a series piezoelectric ceramic is used, the back pressure can be increased. Therefore, while meeting the back pressure requirements, the volumes of the upper cavity 60 and lower cavity 70 can be made larger. This is reflected in the upper cavity plate 53 and the lower cavity plate 13 by making the areas of the upper cavity hole 531 and the lower cavity hole 131 larger. This embodiment significantly improves the cavity volume change by increasing the cavity diameter, thereby achieving high-flow-rate pumping.

[0067] To more clearly illustrate the working process of the piezoelectric micropump 100 in this application, the details are as follows. Please refer to the provided text. Figure 7 When the upper piezoelectric ceramic 51 vibrates upward, the volume of the upper cavity 60 increases and the pressure decreases. The third valve 221 and the first valve 421 open, and the upper cavity 60 is in a water-absorbing state. Simultaneously, the fifth valve 223 opens, and the lower cavity 70 is in a water-pumping state. Furthermore, the second valve 422 and the fourth valve 222 are closed at this time. Please refer to [reference needed]. Figure 8 When the piezoelectric ceramic 11 vibrates downward, the volume of the lower cavity 70 increases and the pressure decreases. The second valve 422 opens and the upper cavity 60 is in a pumping state. At the same time, the fourth valve 222 opens and the lower cavity 70 is in a water-suction state. Furthermore, at this time, the first valve 421, the second valve 422, and the fifth valve 223 are in a closed state.

[0068] According to some embodiments of this application, this application provides a heat dissipation circulation system, which includes the piezoelectric micropump 100 described above. The heat dissipation circulation system is the operating system of the chip, and the piezoelectric micropump 100 dissipates the heat generated during chip operation. Furthermore, the heat dissipation circulation system also includes a pipeline structure connected to the inlet 80 and outlet 90 of the piezoelectric micropump 100. Because the piezoelectric micropump 100 provided by this utility model has a small size and high back pressure and large flow rate, it can meet the heat dissipation requirements of high-power chips. Since the heat dissipation circulation system includes all the technical solutions of any embodiment of the piezoelectric micropump 100 described above, it possesses at least all the beneficial effects brought by all the above technical solutions, which will not be elaborated further here.

[0069] According to some embodiments of this application, this application provides an electronic device that includes the aforementioned heat dissipation circulation system. The electronic device can be a consumer electronic product, such as a smartphone, wristband, watch, iPad, or earphones. Since the electronic device incorporates all the technical solutions of any embodiment of the aforementioned heat dissipation circulation system, it possesses at least all the beneficial effects brought by all the aforementioned technical solutions, which will not be elaborated upon here.

[0070] The above description is merely an optional embodiment of this application and does not limit the scope of protection of this application. Any equivalent structural transformations made based on the content of this application's specification and drawings under the concept of this application, or direct / indirect applications in other related technical fields, are included within the scope of patent protection of this application.

Claims

1. A piezoelectric micropump, characterized in that, It includes a lower drive assembly, a lower pump body assembly, a transition connecting plate, an upper pump body assembly, and an upper drive assembly arranged in sequence. The upper drive assembly and the upper pump body assembly cooperate to form an upper cavity, and the lower drive assembly and the lower pump body assembly cooperate to form a lower cavity; the upper pump body assembly forms multiple upper one-way valve channels, the lower pump body assembly forms multiple lower one-way valve channels, and the lower drive assembly forms an inlet and an outlet. The upper cavity and the lower cavity are connected in series through the upper one-way valve channels, the lower one-way valve channels, and the transition connecting plate, so that the piezoelectric micropump forms a one-way flow channel from the inlet to the outlet. The pressure change in the upper cavity is opposite to the pressure change in the lower cavity.

2. The piezoelectric micropump according to claim 1, characterized in that, The lower drive assembly includes a lower piezoelectric ceramic, a lower vibrating plate, and a lower cavity plate. The lower cavity plate is disposed on the side of the lower vibrating plate facing the lower pump body assembly. The lower cavity plate has a lower cavity hole and a first water inlet sub-hole and a first water outlet sub-hole respectively disposed on the outer periphery of the lower cavity hole. The lower cavity hole cooperates with the lower vibrating plate and the lower pump body assembly to form the lower cavity. The lower vibrating plate has a second water inlet sub-hole corresponding to the first water inlet sub-hole and a second water outlet sub-hole corresponding to the first water outlet sub-hole. The first water inlet sub-hole and the second water inlet sub-hole form the water inlet, and the first water outlet sub-hole and the second water outlet sub-hole form the water outlet.

3. The piezoelectric micropump according to claim 2, characterized in that, The lower vibrating plate forms a lower receiving groove on the side opposite to the lower cavity plate, the lower piezoelectric ceramic is disposed in the lower receiving groove, and the groove opening of the lower receiving groove extends out of the lower piezoelectric ceramic.

4. The piezoelectric micropump according to claim 2, characterized in that, The upper drive assembly includes an upper piezoelectric ceramic, an upper vibrating plate, and an upper cavity plate. The upper vibrating plate has an upper receiving groove formed on the side opposite to the upper cavity plate. The upper piezoelectric ceramic is disposed in the upper receiving groove, and the opening of the upper receiving groove is higher than the upper piezoelectric ceramic. The upper cavity plate has an upper cavity hole, and the upper cavity hole cooperates with the upper vibrating plate and the upper pump body assembly to form the upper cavity.

5. The piezoelectric micropump according to claim 4, characterized in that, The upper pump body assembly includes a first lower pressure plate, an upper valve plate, and a first upper pressure plate stacked sequentially. The upper cavity hole cooperates with the upper vibrating plate and the first upper pressure plate to form the upper cavity. The first lower pressure plate is provided with a first sub-hole and a second sub-hole. The upper valve plate is provided with a first valve and a second valve corresponding to the first sub-hole and the second sub-hole, respectively. The first upper pressure plate is provided with a third sub-hole and a fourth sub-hole corresponding to the first valve and the second valve, respectively. The size of the first sub-hole is smaller than the size of the third sub-hole, and the size of the second sub-hole is larger than the size of the fourth sub-hole. The upper one-way valve channel includes a first upper channel and a second upper channel. The first sub-hole, the first valve, and the third sub-hole form the first upper channel, and the second sub-hole, the second valve, and the fourth sub-hole form the second upper channel. Both the first upper channel and the second upper channel are provided corresponding to the upper cavity, and the one-way conduction directions of the first upper channel and the second upper channel are opposite.

6. The piezoelectric micropump according to claim 5, characterized in that, The lower pump assembly includes a second upper pressure plate, a lower valve plate, and a second lower pressure plate stacked sequentially. The lower cavity hole cooperates with the lower vibrating plate and the second upper pressure plate to form the lower cavity. The second upper pressure plate is provided with a fifth sub-hole, a sixth sub-hole, and a seventh sub-hole. The lower valve plate is provided with a third valve, a fourth valve, and a fifth valve corresponding to the fifth, sixth, and seventh sub-holes, respectively. The second lower pressure plate is provided with an eighth sub-hole, a ninth sub-hole, and a tenth sub-hole corresponding to the third, fourth, and fifth valves, respectively. The size of the fifth sub-hole is smaller than the size of the eighth sub-hole, and the size of the sixth sub-hole is larger than the size of the fifth sub-hole. The dimensions of the nine sub-holes are such that the dimensions of the seventh sub-hole are smaller than the dimensions of the tenth sub-hole; the lower one-way valve channel includes a first lower channel, a second lower channel, and a third lower channel, the fifth sub-hole, the third valve, and the eighth sub-hole form the first lower channel, the sixth sub-hole, the fourth valve, and the ninth sub-hole form the second lower channel, and the seventh sub-hole, the fifth valve, and the tenth sub-hole form the third lower channel. The first lower channel is set corresponding to the water inlet, and the second and third lower channels are set corresponding to the lower cavity. The unidirectional flow direction of the second lower channel is opposite to that of the first and third lower channels.

7. The piezoelectric micropump according to claim 6, characterized in that, The second upper pressure plate, the lower valve plate, and the second lower pressure plate are each provided with through holes at corresponding positions, and the three through holes are connected to form a water outlet channel that is connected to the water outlet.

8. The piezoelectric micropump according to claim 7, characterized in that, The piezoelectric micropump further includes a transition connecting plate, which has a central hole and a first side hole and a second side hole respectively disposed on opposite sides of the central hole. The central hole corresponds to the second upper channel and the second lower channel, the first side hole corresponds to the first upper channel and the first lower channel, and the second side hole corresponds to the third lower channel and the through hole.

9. The piezoelectric micropump according to claim 8, characterized in that, The first upper channel and the first lower channel are offset, the second upper channel and the second lower channel are concentric, and the third lower channel and the water outlet channel are offset.

10. The piezoelectric micropump according to any one of claims 4 to 9, characterized in that, The upper piezoelectric ceramic and the lower piezoelectric ceramic have the same polarity, and the driving signals of the upper piezoelectric ceramic and the lower piezoelectric ceramic are 180 degrees out of phase. or, The upper piezoelectric ceramic and the lower piezoelectric ceramic have different polarities, and the driving signals of the upper piezoelectric ceramic and the lower piezoelectric ceramic are in phase.

11. The piezoelectric micropump according to any one of claims 4 to 9, characterized in that, Let A be the area of ​​the upper cavity plate and B be the area of ​​the upper cavity hole, then B / A = 0.5~0.75; and / or let C be the area of ​​the lower cavity plate and D be the area of ​​the lower cavity hole, then D / C = 0.5~0.

75.

12. A heat dissipation circulation system, characterized in that, The heat dissipation circulation system includes any one of claims 1 to 11.

13. An electronic device, characterized in that, The electronic device includes the heat dissipation circulation system of claim 12.

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