A vacuum unit structure of a screw pump and a Roots pump for a vacuum device

Abstract

The utility model discloses a vacuum unit structure of screw rod pump and roots pump is composed for vacuum equipment relates to vacuum unit technical field, the vacuum unit structure includes roots pump, screw rod pump, roots pump support frame and screw rod pump support frame, roots pump support frame includes vertical frame body, and vertical frame body is provided with first support platform, and vertical frame body bottom is fixed with ground, and roots pump is fixed on first support platform, screw rod pump support frame includes movable third support platform, and screw rod pump is fixed on third support platform, and screw rod pump is located roots pump below, and screw rod pump support frame is detachably connected with roots pump support frame, the utility model solves the problem that screw rod pump is connected with roots pump and leads to low space utilization, difficult installation, inconvenient removal maintenance.

Description

Technical Field

[0001] This utility model relates to the field of vacuum unit technology, specifically to a vacuum unit structure composed of a screw pump and a Roots pump for vacuum equipment. Background Technology

[0002] With the development of society and technology, vacuum furnaces are being used more and more widely. As one of the key systems in vacuum equipment, the ease of installation and maintenance, as well as the stability of operation, are crucial for vacuum units. Screw pumps and Roots pumps can form the most common vacuum acquisition pump sets. The typical installation and connection method is a horizontal connection between the screw pump and the Roots pump via pipelines. However, in actual use, this method has the following disadvantages, mainly manifested as follows:

[0003] 1. The horizontal connection between screw pumps and Roots pumps requires a large amount of space and has low space utilization.

[0004] 2. When connecting screw pumps and Roots pumps horizontally, both the horizontal and vertical positions must be adjusted simultaneously to complete the pipeline connection, requiring high installation precision.

[0005] 3. Due to their heavy weight, screw pumps are inconvenient to move, leading to difficulties in installation and maintenance. Utility Model Content

[0006] This invention overcomes the shortcomings of the prior art by proposing a vacuum unit structure composed of a screw pump and a Roots pump for vacuum equipment, which solves the problems of low space utilization, difficult installation, and inconvenient relocation and maintenance caused by connecting the screw pump and the Roots pump.

[0007] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0008] A vacuum unit structure consisting of a screw pump and a Roots pump for vacuum equipment includes a Roots pump and a screw pump; the Roots pump and the screw pump are connected by a bellows, a vacuum electromagnetic differential pressure charging valve, and connecting pipe fittings; it also includes a Roots pump support frame and a screw pump support frame; the Roots pump support frame includes a vertical frame with a first support platform, the bottom of which is fixed to the ground; the Roots pump is fixed on the first support platform; the screw pump support frame includes a movable third support platform, on which the screw pump is fixed, located below the Roots pump, and the screw pump support frame and the Roots pump support frame are detachably connected.

[0009] Furthermore, a second support platform is provided inside the vertical frame; the second support platform is located below the first support platform; a vacuum electromagnetic differential pressure inflation valve is installed on the second support platform; and a screw pump is located below the second support platform.

[0010] Furthermore, both the first and second support platforms have through holes. The top of the vacuum electromagnetic differential pressure charging valve is connected to a bellows, and the other end of the bellows passes through the through hole on the first support platform and is connected to the Roots pump. The bottom of the vacuum electromagnetic differential pressure charging valve is connected to a connecting pipe. The lower part of the connecting pipe passes through the through hole on the second support platform and is connected to the screw pump below.

[0011] Furthermore, the bottom four corners of the third support platform are equipped with casters.

[0012] Furthermore, the Roots pump is mounted on the first support platform of the Roots pump support frame by fasteners.

[0013] Furthermore, a right-angled bend plate is fixedly connected to one side of the third support platform; the third support platform is connected to the vertical frame by fasteners passing through the right-angled bend plate.

[0014] Furthermore, the second fastener is a connecting bolt.

[0015] The beneficial effects of this utility model compared to the prior art are as follows:

[0016] This invention connects the screw pump and the Roots pump vertically via a support frame, saving the installation space required for the pump unit. The screw pump and the Roots pump are connected vertically, and the screw pump can be adjusted horizontally via casters, while the height is adjusted only via the extension and retraction of the bellows, greatly reducing the installation accuracy requirements. Casters are installed at the bottom, allowing easy movement of the screw pump and its support frame under the Roots pump support frame, facilitating the installation and maintenance of the screw pump.

[0017] This invention solves the problems of low space utilization, difficult installation, and inconvenient relocation and maintenance caused by connecting screw pumps and Roots pumps. Attached Figure Description

[0018] Figure 1 This is a structural schematic diagram of the vacuum unit structure described in this utility model;

[0019] Figure 2 This is a schematic diagram of the installation structure of the Roots pump support frame and the screw pump support frame;

[0020] Figure label:

[0021] 1-Roots pump, 2-Fastener 1, 3-Roots pump support frame, 4-Bellwall, 5-Vacuum electromagnetic differential pressure charging valve, 6-Connecting pipe fitting, 7-Fuma wheel, 8-Expansion bolt, 9-Screw pump support frame, 10-Screw pump, 11-Vertical frame, 12-First support platform, 13-Second support platform, 14-Third support platform, 15-Right angle bend plate, 16-Fastener 2. Detailed Implementation

[0022] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0023] See Figure 1 and Figure 2 This embodiment proposes a vacuum unit structure consisting of a screw pump and a Roots pump for vacuum equipment; including a Roots pump 1, a screw pump 10, a Roots pump support frame 3, a screw pump support frame 9, a right-angle bend plate 15, fastener one 2, and fastener two 16.

[0024] The Roots pump support frame 3 includes a vertical frame 11, with a first support platform 12 at the top and a second support platform 13 on the inner side of the frame 11. The second support platform 13 is located below the first support platform 12. The bottom of the vertical frame 11 is fixed to the ground by expansion bolts 8. The Roots pump 1 is mounted on the first support platform 12 of the Roots pump support frame 3 by fasteners 2. A vacuum electromagnetic differential pressure charging valve 5 is mounted on the second support platform 13. Both the first and second support platforms 12 and 13 have through holes. The top of the vacuum electromagnetic differential pressure charging valve 5 is connected to a bellows 4, and the other end of the bellows 4 passes through the through hole on the first support platform 12 and connects to the Roots pump 1. A connecting pipe 6 is connected to the bottom of the vacuum electromagnetic differential pressure charging valve 5.

[0025] The screw pump support frame 9 includes a third support platform 14, with casters 7 mounted at the four corners of its bottom. A right-angle bend plate 15 is fixedly connected to one side of the third support platform 14. The height of the third support platform 14 is lower than that of the second support platform 13. The screw pump 10 is fixed on the third support platform 14, and the casters 7 can drive the movement of the screw pump 10 and the screw pump support frame 9. A portion of the third support platform 14 of the screw pump support frame 9 is moved to the inside of the vertical frame 11, and the screw pump support frame 9 is connected to the roots pump support frame 3 by fasteners 16 passing through the right-angle bend plate 15, forming a whole. At this time, the screw pump 10 is located below the roots pump 1, that is, the roots pump 1 and the screw pump 10 are connected vertically through the roots pump support frame 3 and the screw pump support frame 9. The lower part of the connecting pipe 6 passes through the through hole opened on the second support platform 13 and connects to the screw pump 10 below.

[0026] In this embodiment, both fastener 12 and fastener 26 are connecting bolts.

[0027] The actual installation sequence of the vacuum unit structure is as follows: First, fix the Roots pump 1 on the Roots pump support frame 3. Determine the position of the Roots pump support frame 3 according to the interface of the equipment to be connected, and fix it to the ground with expansion bolts 8. Then, in a space with sufficient space, install four casters 7 on the screw pump support frame 9, and fix the screw pump 10 on the screw pump support frame 9. Next, move the screw pump 10 and the screw pump support frame 9 to the bottom of the Roots pump support frame 3 through the four casters 7. Then, connect the screw pump 10 and the Roots pump 1 through the bellows 4, the vacuum electromagnetic differential pressure charging valve 5, and the connecting pipe fittings 6. Finally, connect the screw pump support frame 9 and the Roots pump support frame 3 through the right-angle bend plate 15 and the fasteners 16, so that the vacuum unit forms a whole.

[0028] During the production of the equipment, if the screw pump 10 needs repair or maintenance, the right-angle bend plate 15 and fastener 16 are disassembled, and the Roots pump support frame 3 and screw pump support frame 9 are separated; then the bellows 4, vacuum electromagnetic differential pressure charging valve 5, and connecting pipe 6 are removed; finally, the screw vacuum pump 10 and the screw vacuum pump bracket 9 are pulled out together from under the Roots pump support frame 3, making it easier to repair and maintain the screw pump 10.

[0029] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A vacuum unit structure consisting of a screw pump and a Roots pump for vacuum equipment, comprising a Roots pump (1) and a screw pump (10); the Roots pump (1) and the screw pump (10) are connected by a bellows pipe (4), a vacuum electromagnetic differential pressure charging valve (5), and connecting pipe fittings (6); characterized in that, It also includes a Roots pump support frame (3) and a screw pump support frame (9); the Roots pump support frame (3) includes a vertical frame (11), the vertical frame (11) is provided with a first support platform (12), and the bottom of the vertical frame (11) is fixed to the ground; the Roots pump (1) is fixed on the first support platform (12); the screw pump support frame (9) includes a movable third support platform (14), the screw pump (10) is fixed on the third support platform (14), the screw pump (10) is located below the Roots pump (1), and the screw pump support frame (9) is detachably connected to the Roots pump support frame (3).

2. The vacuum unit structure for a vacuum equipment, comprising a screw pump and a Roots pump, as described in claim 1, is characterized in that... A second support platform (13) is provided on the inner side of the vertical frame (11); the second support platform (13) is located below the first support platform (12); the vacuum electromagnetic differential pressure charging valve (5) is installed on the second support platform (13); the screw pump (10) is located below the second support platform (13).

3. The vacuum unit structure for a vacuum equipment, comprising a screw pump and a Roots pump, as described in claim 2, is characterized in that... Both the first support platform (12) and the second support platform (13) have through holes. The top of the vacuum electromagnetic differential pressure charging valve (5) is connected to the bellows (4), and the other end of the bellows (4) passes through the through hole on the first support platform (12) and is connected to the Roots pump (1). The bottom of the vacuum electromagnetic differential pressure charging valve (5) is connected to a connecting pipe (6). The lower part of the connecting pipe (6) passes through the through hole on the second support platform (13) and is connected to the screw pump (10) below.

4. The vacuum unit structure composed of a screw pump and a Roots pump for vacuum equipment according to claim 1, characterized in that, The bottom four corners of the third support platform (14) are equipped with ferrules (7).

5. The vacuum unit structure composed of a screw pump and a Roots pump for vacuum equipment according to claim 1, characterized in that, The Roots pump (1) is mounted on the first support platform (12) of the Roots pump support frame (3) by fastener one (2).

6. The vacuum unit structure composed of a screw pump and a Roots pump for vacuum equipment according to claim 1, characterized in that, A right-angled plate (15) is fixedly connected to one side of the third support platform (14); the third support platform (14) is connected to the vertical frame (11) by fastener two (16) passing through the right-angled plate (15).

7. The vacuum unit structure for a vacuum equipment, comprising a screw pump and a Roots pump, as described in claim 6, is characterized in that... Fastener 2 (16) is a connecting bolt.

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