Flange-diffusion ring integrated seal structure

Abstract

This utility model relates to a flange-gas distribution ring integral sealing structure, including an upper seat, a gas distribution ring, and an aluminum ring. A connecting ring extending outward is formed at the lower end of the outer circumference of the upper seat. The gas distribution ring is located between the upper seat and the aluminum ring and is sealed. The connecting ring and the aluminum ring are detachably connected and press the upper and lower circumferences of the gas distribution ring when connected. Existing gas distribution rings require a separate flange for fixation, that is, a separate flange structure is required between the upper seat and the gas distribution ring for pressing and fixing the flange. This solution places the gas distribution ring between the upper seat and the aluminum ring, and a connecting ring is formed on the lower outer circumference of the upper seat. The gas distribution ring is pressed by fixing the connecting ring and the aluminum ring. Compared with the prior art, there is no need to set a separate flange structure for fixing the gas distribution ring, which shortens the size of the entire resonant waveguide cavity, saves space, and improves the gas injection uniformity of the gas distribution ring.

Description

Technical Field

[0001] This utility model belongs to the technical field of thin film deposition equipment, specifically relating to an integral sealing structure of flange-gas distribution ring. Background Technology

[0002] Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) are both thin film deposition techniques based on gas-phase reactions, widely used in semiconductors, optoelectronic devices, solar cells, and display technologies. ALD achieves atomically precise thin film thickness control through alternating and self-limiting surface reaction processes, while CVD grows thin films through chemical reactions of gaseous precursors on the substrate surface. With the rapid development of the semiconductor and optoelectronic industries, higher demands are being placed on the uniformity and process efficiency of high-quality thin film deposition on large-size substrates.

[0003] In existing thin film deposition equipment, the gas distribution ring device requires a separate flange for fixation. This setup elongates the axial length of the resonant waveguide cavity, affecting microwave input and the uniformity of gas intake in the gas distribution ring. Therefore, this solution was developed. Utility Model Content

[0004] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide an integral sealing structure of flange-gas distribution ring, which is compact and does not require a separate flange to fix the gas distribution ring.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a flange-gas distribution ring integral sealing structure, including an upper seat, a gas distribution ring and an aluminum ring, wherein an outwardly extending connecting ring is formed at the lower end of the outer peripheral surface of the upper seat, the gas distribution ring is located between the upper seat and the aluminum ring and is sealed, and the connecting ring and the aluminum ring are detachably connected.

[0006] Furthermore, an annular groove for installing a quartz plate separator is formed at the inner edge of the lower surface of the connecting ring, and the outer diameter of the annular groove is adapted to the diameter of the quartz plate separator.

[0007] Furthermore, a first annular notch is formed at the opening of the annular groove, the diameter of the first annular notch is adapted to the outer diameter of the air distribution ring, and the upper outer edge of the air distribution ring is engaged in the first annular notch.

[0008] Furthermore, a cavity is formed inside the upper body, the cavity extends to the lower surface of the upper body, a microwave inlet is formed at the upper end of the cavity, and the upper surface of the cavity is a cone shape with a smaller upper surface and a gradually increasing inner arc shape or a spherical shape from top to bottom;

[0009] The area enclosed by the chamber, the gas distribution ring inner cavity, and the aluminum ring inner cavity is a resonant waveguide cavity.

[0010] Furthermore, the upper seat and the aluminum ring are connected by a connector, which passes through the upper seat and is screwed into the aluminum ring for fixation.

[0011] Furthermore, a second annular notch is formed at the inner edge of the upper surface of the aluminum ring, and the gas distribution ring is fitted into the second annular notch.

[0012] Furthermore, a first annular sealing groove is formed on the upper surface of the annular notch.

[0013] Furthermore, a second annular sealing groove is formed on the upper surface of the gas distribution ring.

[0014] Furthermore, the air distribution ring includes a ring body, an air passage is formed within the ring body, and multiple spaced air outlets are formed on the inner peripheral surface of the air passage. An air inlet is formed on the outer peripheral surface of the ring body, and the air inlet and the air passage are interconnected. The larger the diameter of the air outlet is as far away from the air inlet.

[0015] Furthermore, the total area of ​​the plurality of air outlets accounts for 3%-40% of the total circumferential area of ​​the airway inner diameter.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] Existing gas distribution rings require a separate flange for fixation, meaning a separate flange structure is needed between the upper body and the gas distribution ring for compression and fixation. This solution places the gas distribution ring between the upper body and the aluminum ring, with a connecting ring formed on the lower outer circumference of the upper body. The gas distribution ring is compressed by fixing the connecting ring and the aluminum ring. Compared to existing technologies, this eliminates the need for a separate flange structure for fixing the gas distribution ring, shortens the overall size of the resonant waveguide cavity, saves space, and improves the uniformity of gas injection into the gas distribution ring. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of an integral sealing structure of flange-gas distribution ring according to the present invention;

[0019] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0020] Figure 3 This is a cross-sectional structural diagram showing the connection position of the upper seat, the air distribution ring, and the aluminum ring in this utility model.

[0021] Figure 4 This is a three-dimensional structural diagram of the gas distribution ring in this utility model;

[0022] Figure 5 This is a cross-sectional view of the gas distribution ring in this utility model.

[0023] The markings in the diagram are as follows: 1. Upper body; 11. Microwave inlet; 12. Chamber; 13. Connector; 14. First annular notch; 15. Annular groove; 2. Gas distribution ring; 21. Ring body; 211. Air passage; 212. Air outlet; 213. Air inlet; 214. Air outlet; 215. Second annular sealing groove; 3. Aluminum ring; 31. Second annular notch; 32. First annular sealing groove; 4. Quartz isolation plate. Detailed Implementation

[0024] To make the above-mentioned features and advantages of this utility model more apparent and understandable, specific embodiments are described below in conjunction with the accompanying drawings for detailed explanation.

[0025] like Figures 1-5 As shown, this embodiment provides a fixing structure for the air distribution ring 2, including an upper seat 1, an air distribution ring 2, and an aluminum ring 3.

[0026] The upper body 1, the gas distribution ring 2, and the aluminum ring 3 are arranged sequentially from top to bottom. A cavity is formed inside the upper body 1, which extends to the lower surface of the upper body 1. A microwave inlet 11 is formed at the upper end of the cavity. The upper surface of the cavity is a cone shape with a smaller upper surface and a gradually increasing inner arc shape or a spherical shape. The area enclosed by the cavity 12, the inner cavity of the gas distribution ring 2, and the inner cavity of the aluminum ring 3 is a resonant waveguide cavity.

[0027] A connecting ring extending outward is formed at the lower end of the outer circumference of the upper body 1, which presses against the upper and lower end faces of the air distribution ring during connection. An annular groove 15 for installing the quartz plate isolation plate is formed at the inner edge of the lower surface of the connecting ring. The outer diameter of the annular groove 15 is adapted to the diameter of the quartz isolation plate 4. A first annular notch 14 is formed at the opening of the annular groove 15. The diameter of the first annular notch 14 is adapted to the outer diameter of the air distribution ring 2. The upper outer edge of the air distribution ring 2 is engaged in the first annular notch 14. Specifically, a second annular sealing groove 215 is formed on the upper surface of the aluminum ring 3. An O-ring is provided in the second annular sealing groove 215. The upper end of the O-ring abuts against the quartz isolation plate 4 to achieve a seal.

[0028] The diameter of aluminum ring 3 is larger than that of gas distribution ring 2. A second annular notch 31 is formed at the inner edge of the upper surface of aluminum ring 3. The lower end of gas distribution ring 2 is stuck in the second annular notch 31. A first annular sealing groove 32 is formed on the upper surface of the second annular notch 31. An O-ring is provided in the first annular sealing groove 32. The upper end of the O-ring abuts against the gas distribution ring 2 to achieve a seal.

[0029] The connecting ring and the aluminum ring 3 are detachably connected. Specifically, the upper seat 1 and the aluminum ring 3 are connected by a connector 13. The connector 13 passes through the upper seat 1 and is screwed into the aluminum ring 3 to achieve fixation. In this embodiment, the connector 13 is a screw. It is worth noting that other existing connecting parts can also be used to connect the connecting ring and the aluminum ring 3.

[0030] This solution places the gas distribution ring 2 between the upper seat 1 and the aluminum ring 3. A connecting ring is formed on the lower outer circumference of the upper seat 1. The gas distribution ring 2 is pressed by fixing the connecting ring and the aluminum ring 3. Compared with the existing technology, there is no need to set up a separate flange structure to fix the gas distribution ring 2, which shortens the size of the entire resonant waveguide cavity, saves space and improves the gas injection uniformity of the gas distribution ring 2.

[0031] The air distribution ring 2 includes a ring body 21. In this embodiment, the ring body 21 is made of aluminum alloy. An air passage 211 is formed inside the ring body 21. The width of the air passage 211 is 2mm-20mm, and a more preferred range is 4mm-12mm. In this embodiment, the width of the air passage 211 is 4mm.

[0032] The air passage 211 has multiple spaced air outlets 212 formed on its inner circumferential surface facing the ring body 21. The total area of ​​the multiple air outlets 212 accounts for 3%-40% of the total area of ​​the inner circumferential surface of the air passage 211, and is adaptively adjusted according to the number and diameter of the outlets. Specifically, the number of air outlets ranges from 10 to 200, and in this embodiment, the number of air outlets 212 is 10. The diameter of the air outlets 212 is 0.2mm-5mm, with a more preferred range of 0.5mm-3mm. The diameter of adjacent air outlets 212 increases by 0.1mm-1mm.

[0033] An air inlet 213 and an air outlet 214 are formed on the outer circumferential surface of the ring body 21. In this embodiment, there are 10 air outlets 212, one of which is directly opposite the air inlet 213. The diameter of the air outlet 212 is 0.5 mm, the diameter of the farthest air outlet 212 is 3 mm, and the diameter of adjacent air outlets 212 differs by 0.5 mm.

[0034] Another implementation: There are two air intake ports 213, which are arranged opposite each other. Taking the number of air outlets 212 as an example, the two opposite air outlets 212 are respectively facing the two air intake ports 213. The diameter of the two air outlets 212 facing the air intake ports 213 is 0.5mm, and the diameter of the farthest air outlet 212 (the one farthest from the air intake port 213) is 1.5mm. The diameter of adjacent air outlets 212 differs by 0.5mm.

[0035] It is worth mentioning that the number of air passages 211 in this solution can also be set according to the actual situation. When there are multiple air passages 211, each air passage 211 can be independently injected with air through an independent air inlet 213, or multiple air passages 211 can be jointly injected with air through the same air inlet 213.

[0036] The foregoing has shown and described the basic principles and main features of this invention, as well as its advantages. Those skilled in the art should understand that this invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this invention. Various changes and modifications can be made to this invention without departing from its spirit and scope. All such changes and modifications fall within the scope of this invention as defined by the appended claims and their equivalents.

Claims

1. A flange-gas distribution ring integral sealing structure, characterized in that: It includes an upper seat, a gas distribution ring, and an aluminum ring. The lower end of the outer peripheral surface of the upper seat has an outwardly extending connecting ring. The gas distribution ring is located between the upper seat and the aluminum ring and is sealed. The connecting ring and the aluminum ring are detachably connected and, when connected, press the upper and lower end faces of the gas distribution ring together.

2. The flange-gas distribution ring integral sealing structure according to claim 1, characterized in that: An annular groove for installing a quartz plate separator is formed at the inner edge of the lower surface of the connecting ring, and the outer diameter of the annular groove is adapted to the diameter of the quartz plate separator.

3. The flange-gas distribution ring integral sealing structure according to claim 2, characterized in that: A first annular notch is formed at the opening of the annular groove. The diameter of the first annular notch is adapted to the outer diameter of the air distribution ring. The upper outer edge of the air distribution ring is engaged in the first annular notch.

4. The flange-gas distribution ring integral sealing structure according to claim 1, characterized in that: A cavity is formed inside the upper body, the cavity extends to the lower surface of the upper body, a microwave inlet is formed at the upper end of the cavity, and the upper surface of the cavity is a cone shape with a smaller upper part and a gradually increasing inner arc shape or a spherical shape from top to bottom; The area enclosed by the chamber, the gas distribution ring inner cavity, and the aluminum ring inner cavity is a resonant waveguide cavity.

5. The flange-gas distribution ring integral sealing structure according to claim 1, characterized in that: The upper seat and the aluminum ring are connected by a connector, which passes through the upper seat and is screwed into the aluminum ring for fixation.

6. The flange-gas distribution ring integral sealing structure according to claim 1, characterized in that: A second annular notch is formed at the inner edge of the upper surface of the aluminum ring, and the gas distribution ring is fitted into the second annular notch.

7. The flange-gas distribution ring integral sealing structure according to claim 6, characterized in that: A first annular sealing groove is formed on the upper surface of the second annular notch.

8. The flange-gas distribution ring integral sealing structure according to claim 1, characterized in that: A second annular sealing groove is formed on the upper surface of the gas distribution ring.

9. The flange-gas distribution ring integral sealing structure according to claim 1, characterized in that: The air distribution ring includes a ring body, an air passage is formed inside the ring body, and multiple air outlets are formed on the inner peripheral surface of the air passage facing the inner peripheral surface of the ring body. An air inlet is formed on the outer peripheral surface of the ring body, and the air inlet and the air passage are interconnected. The larger the diameter of the air outlet is as far away from the air inlet.

10. The flange-gas distribution ring integral sealing structure according to claim 9, characterized in that: The total area of ​​the multiple air outlets accounts for 3%-40% of the total circumferential area of ​​the airway inner diameter.

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