Heat preservation pipeline for mocvd carrier gas delivery

Abstract

The utility model relates to a heat preservation pipeline for MOCVD carrier gas delivery belongs to superconducting tape manufacturing technical field, the heat preservation pipeline for MOCVD carrier gas delivery includes: gas pipe has several straight pipe sections, and is connected through elbow section between two adjacent straight pipe sections, heat conduction pipe has winding section, and winding section is spirally wound and is arranged on the outer surface of gas pipe, heat preservation pipe is set on the outer surface of heat conduction pipe's winding section, the utility model can provide stable heat preservation effect in straight pipe section and elbow section, is favorable to the delivery of metal organic compound, avoids producing process drop point and finished product current defect and other quality problems.

Description

Technical Field

[0001] This utility model relates to an insulated pipe for transporting carrier gas in MOCVD, belonging to the field of superconducting tape manufacturing technology. Background Technology

[0002] In the production of superconducting tapes, MOCVD technology, as one of the core processes, directly impacts product performance. This technology uses metal-organic compounds as precursors, which are introduced into the reaction chamber via a carrier gas (such as argon) at nearly 300°C. A chemical reaction then occurs at this high temperature, ultimately depositing the desired superconducting material layer onto the substrate. Ensuring the stability of the temperature in the transport pipeline is crucial for the transport of the metal-organic compounds. If the temperature is below the required level, the metal-organic compounds are prone to droplet formation or crystallization; if the temperature is above the required level, the metal-organic compounds are prone to decomposition, both of which will ultimately lead to defects in the superconducting material layer.

[0003] Currently, there are two main methods for pipe insulation:

[0004] 1. Heating tape winding: The quality and winding process of the heating tape are highly demanding. Otherwise, the heating tape is prone to damage (the damage rate reaches 1% within half a month), and there may be problems with localized low or high temperatures, especially at pipe bends, where it is difficult to ensure temperature stability.

[0005] 2. Set up a heat-conducting jacket, and circulate heat-conducting oil through the jacket; this method has a good insulation effect, but the pipe shape is complex, double-layer irregular pipes are difficult to process, cost is high, and are not easy to maintain. Utility Model Content

[0006] This invention addresses the aforementioned shortcomings of existing technologies by proposing an insulated pipe for MOCVD carrier gas transportation, which provides stable insulation in both straight and curved sections, thus facilitating the stable transportation of organometallic compounds.

[0007] This utility model relates to an insulated pipe for transporting carrier gas in MOCVD, comprising:

[0008] The gas pipeline consists of several straight pipe sections, with adjacent straight pipe sections connected by bends.

[0009] The heat-conducting pipe has a spiral section, which is spirally wound and disposed on the outer surface of the gas transmission pipe;

[0010] The insulation pipe is fitted onto the outer surface of the wound section of the heat-conducting pipe.

[0011] In some specific implementation schemes, the gas transmission pipe is equipped with flanges at both the beginning and end. The beginning end is fixedly connected to the evaporator pipeline via the flange, and the end end is fixedly connected to the sprayer pipeline via the flange. Preferably, the gas transmission pipe is made of 304 stainless steel, which has good corrosion resistance.

[0012] In some specific implementation schemes, the heat pipe has a heat transfer oil inlet section at one end and a heat transfer oil outlet section at the other end; the heat transfer oil inlet section is located near the beginning of the gas transmission pipe and the heat transfer oil outlet section is located near the end of the gas transmission pipe; or, the heat transfer oil inlet section is located near the end of the gas transmission pipe and the heat transfer oil outlet section is located near the beginning of the gas transmission pipe; preferably, both the heat transfer oil inlet section and the heat transfer oil outlet section are straight pipe sections.

[0013] In some specific implementation schemes, the heat pipe is made of copper; preferably, for copper heat pipes, at least a highly thermally conductive anti-oxidation layer, such as a metallic nickel layer, is provided on its outer surface to prevent the copper pipe from oxidizing and turning black, resulting in poor thermal conductivity; more preferably, an anti-oxidation layer is also provided on its inner surface.

[0014] For some specific implementation schemes, the insulation pipe is made of an insulation material with a low thermal conductivity that can withstand temperatures of at least 300°C; preferably, the thermal conductivity of the insulation pipe does not exceed 0.2 W / m·K and the wall thickness is 30 to 80 mm; more preferably, the material of the insulation pipe is selected from ceramic, glass fiber, and aerogel.

[0015] Compared with the prior art, the present invention has the following technical effects:

[0016] 1) A constant temperature environment is formed by heating with high-temperature heat transfer oil through a spiral heat pipe and heat preservation with an insulation pipe, which ensures the stability of the temperature of the carrier gas and metal-organic compounds in the gas transmission pipe; and it can provide stable heat preservation effect in both straight and curved pipe sections, which is conducive to the stable transportation of metal-organic compounds and avoids quality problems such as process failures and finished product current defects.

[0017] 2) The heat transfer oil flows continuously in the copper pipe to ensure the heating effect, and the heat transfer oil can be recycled;

[0018] 3) The gas pipeline, heat conduction pipe and insulation pipe have stable structures, require no frequent maintenance, and can ensure production efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of Example 1;

[0020] Figure 2 This is a cross-sectional structural diagram of Example 1;

[0021] Figure 3This is a schematic diagram of the structure in Example 1 where the heat pipe is wound around the gas pipeline;

[0022] In the diagram: 100, gas transmission pipe; 101, straight pipe section; 102, bend pipe section; 103, flange; 200, heat transfer pipe; 201, heat transfer oil inlet section; 202, winding section; 203, heat transfer oil outlet section; 300, insulation pipe. Detailed Implementation

[0023] The present invention will now be described in detail with reference to specific embodiments.

[0024] Example 1

[0025] like Figure 1 , Figure 2 and Figure 3 As shown, this embodiment relates to an insulated pipe for MOCVD carrier gas delivery, which includes, from the inside out, a gas delivery pipe 100, a heat conduction pipe 200, and an insulation pipe 300 arranged sequentially.

[0026] The gas transmission pipe 100 has several straight pipe sections 101, and adjacent straight pipe sections 101 are connected by bends 102. In this embodiment, there are three straight pipe sections 101, which are connected sequentially by two bends 102. Two straight pipe sections 101 are arranged in parallel, one as the starting end and the other as the ending end. Both the starting and ending ends are provided with flanges 103. The flange 103 at the starting end is fixedly connected to the evaporator pipeline, and the flange 103 at the ending end is fixedly connected to the sprayer pipeline. The gas transmission pipe is made of 304 stainless steel, which has corrosion resistance.

[0027] The heat pipe 200 is preferably made of copper, and at least a highly thermally conductive nickel plating layer is provided on its outer surface. Preferably, a zinc plating layer is provided on both its inner and outer surfaces to prevent the thermal conductivity from decreasing after the copper pipe oxidizes. Figure 2 As shown, the heat pipe 200 is provided with a heat transfer oil inlet section 201, a winding section 202, and a heat transfer oil outlet section 203 connected in sequence. The winding section 202 is spirally wound on the outer surface of the gas transmission pipe 100. The heat transfer oil inlet section 201 is located near the beginning of the gas transmission pipe 100, and the heat transfer oil outlet section 203 is located near the end of the gas transmission pipe 100. Alternatively, the opposite arrangement can be adopted, that is, the heat transfer oil inlet section 201 is located near the end of the gas transmission pipe 100, and the heat transfer oil outlet section 203 is located near the beginning of the gas transmission pipe 100. In this case, the end of the gas transmission pipe can be heated to the predetermined temperature faster than the beginning. This has advantages in some cases, such as saving the time of heating the gas transmission pipe. When the end and middle sections of the gas transmission pipe have been heated to the predetermined temperature, but the beginning has not yet reached the predetermined temperature, the gas delivery operation can be carried out, because the carrier gas can be fully heated and kept warm in the middle and end sections.

[0028] Preferably, the heat transfer oil inlet section 201 and the heat transfer oil outlet section 203 are both straight pipe sections, which are connected to the outlet end and inlet end of the constant temperature oil temperature controller, respectively, so that the heat transfer oil can circulate in the heat transfer pipe 200 through the constant temperature oil temperature controller.

[0029] The heat insulation pipe 300 is coaxially arranged with the gas transmission pipe 100 and is sleeved on the outer surface of the winding section 202 of the heat conduction pipe 200. It also has three straight pipe sections and two bent pipe sections. Preferably, the heat insulation pipe fills the spiral gap of the heat conduction pipe, that is, the surface of the heat insulation pipe also abuts against the outer surface of the gas transmission pipe, thereby improving the heat insulation effect.

[0030] Preferably, the heat insulation tube 300 is made of aerogel that can withstand high temperatures of 300℃, and the thickness of the aerogel is 30mm to 80mm. This thickness is the material thickness excluding the aerogel filling the spiral gap of the heat-conducting tube. The thermal conductivity of the aerogel only needs to meet the requirements of Class B products in GB / T 34336-2017 "Nanoporous Aerogel Composite Thermal Insulation Products".

[0031] In this embodiment, high-temperature heat transfer oil at a predetermined temperature is first introduced into the heat pipe 200 to preheat the gas delivery pipe 100. Only after preheating to a certain temperature can the gaseous metal-organic compound be introduced into the deposition chamber. The carrier gas carrying the gaseous metal-organic compound flows from the evaporator into the gas delivery pipe 100, and then flows into the deposition chamber through the tail end of the gas delivery pipe. During this process, thanks to the constant temperature environment formed by the heating of the spiral heat pipe 200 with high-temperature heat transfer oil and the insulation of the insulation pipe 300, the temperature stability of the carrier gas and metal-organic compound in the gas delivery pipe 100 is ensured. Furthermore, stable insulation effect can be provided in both the straight pipe section 101 and the bent pipe section 102, which is conducive to the stable delivery of metal-organic compounds and avoids process drops and finished product current defects.

[0032] It should be emphasized that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. An insulated pipe for transporting carrier gas in MOCVD, characterized in that, include: The gas pipeline consists of several straight pipe sections, with adjacent straight pipe sections connected by bends. The heat-conducting pipe has a spiral section, which is spirally wound and disposed on the outer surface of the gas transmission pipe; The insulation pipe is fitted onto the outer surface of the wound section of the heat-conducting pipe.

2. The insulated pipe for MOCVD carrier gas transportation according to claim 1, characterized in that, The gas pipeline is equipped with flanges at both the beginning and end. The beginning end is fixedly connected to the evaporator pipeline via the flange, and the end end is fixedly connected to the sprayer pipeline via the flange.

3. The insulated pipeline for MOCVD carrier gas transportation according to claim 2, characterized in that, The gas pipeline is made of 304 stainless steel.

4. The insulated pipe for MOCVD carrier gas transportation according to claim 3, characterized in that, The heat pipe is provided with a highly thermally conductive anti-oxidation layer on its outer surface.

5. The insulated pipeline for MOCVD carrier gas transportation according to claim 4, characterized in that, The highly thermally conductive antioxidant layer is a metallic nickel layer.

6. The insulated pipe for MOCVD carrier gas transportation according to claim 1, characterized in that, The heat pipe is provided with a heat transfer oil inlet section at one end and a heat transfer oil outlet section at the other end. The heat transfer oil inlet section is located near the beginning of the gas transmission pipe, and the heat transfer oil outlet section is located near the end of the gas transmission pipe. Alternatively, the heat transfer oil inlet section can be located near the end of the gas pipeline, and the heat transfer oil outlet section can be located near the beginning of the gas pipeline.

7. The insulated pipeline for MOCVD carrier gas transportation according to claim 6, characterized in that, The heat transfer oil inlet section and heat transfer oil outlet section are respectively connected to the outlet end and inlet end of the constant temperature oil temperature controller.

8. The insulated pipeline for MOCVD carrier gas transportation according to claim 6, characterized in that, The heat pipe is a copper pipe.

9. The insulated pipe for MOCVD carrier gas transportation according to claim 1, characterized in that, The thermal conductivity of the insulation pipe does not exceed 0.2 W / m·K and the wall thickness is 30 to 80 mm.

10. The insulated pipeline for MOCVD carrier gas transportation according to claim 9, characterized in that, The insulation pipe is made of one of the following materials: ceramic, glass fiber, or aerogel.

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