A dual-axis electric leveling mechanism

Abstract

The utility model relates to a kind of double-shaft electric leveling mechanism, it includes bottom plate, middle plate, top plate, two groups of arc guide rail and two drive components;Two groups of arc guide rail are respectively installed in the top of bottom plate and middle plate, the bottom of middle plate is slidably contacted with the arc surface of one group of arc guide rail around first linear direction, the bottom of top plate is slidably contacted with the arc surface of another group of arc guide rail around second linear direction, first linear and second linear are perpendicular and intersected arrangement;One drive component is installed on bottom plate and is connected with middle plate, another drive component is installed on middle plate and is connected with top plate;Top plate can be controlled to rotate along any direction with the intersection point of first linear and second linear as center point, two groups of arc guide rail and drive component are closed down in the application by being set, and two groups of arc guide rail and drive component are all extended along horizontal direction, thus, equipment volume can be effectively reduced.

Description

Technical Field

[0001] This utility model relates to the field of measurement technology, and in particular to a dual-axis electric leveling mechanism. Background Technology

[0002] In the field of ultra-high precision measurement, white light interferometers are commonly used to inspect a range of microscopic dimensions (nanometer-level or even sub-nanometer-level) of products. This requires the optical axis of the white light interferometer to have excellent perpendicularity to the surface of the product being measured to achieve good imaging results (a sway on the order of tens of arcseconds cannot produce a good imaging effect, meaning the required number and thickness of interference fringes cannot be achieved). Under such high requirements, even for products with very smooth surfaces like wafers, different wafers need to be leveled each time they are placed. An electric leveling mechanism can significantly reduce the time and improve the leveling effect of manual leveling.

[0003] For example, the invention patent with application number CN201911337228.9 proposes an additive manufacturing equipment and leveling method with a high-response parallel leveling mechanism. In this method, the telescopic device includes three telescopic components with the same structure. The printing platform is supported and mounted on the support platform in an adjustable position through the telescopic device and the virtual fixed rod. The support platform is adjusted to a flat position by moving the three telescopic components in the vertical direction.

[0004] However, the aforementioned telescopic devices occupy a significant amount of vertical space, resulting in a relatively large equipment size. Utility Model Content

[0005] In view of this, it is necessary to provide a dual-axis electric leveling mechanism to solve the problem that the existing leveling mechanism has a structure that extends and retracts in the vertical direction, which occupies a lot of vertical space and results in an excessively large equipment size.

[0006] This utility model provides a dual-axis electric leveling mechanism, including a base plate, a middle plate, a top plate, two sets of arc-shaped guide rails, and two drive components. The middle plate is disposed above the base plate, and the top plate is disposed above the middle plate. The two sets of arc-shaped guide rails are respectively installed above the base plate and the middle plate, and the top of each arc-shaped guide rail is concave downward to form an arc-shaped surface. The bottom of the middle plate slides against the arc-shaped surface of one set of arc-shaped guide rails around a first straight line, and the bottom of the top plate slides against the arc-shaped surface of the other set of arc-shaped guide rails around a second straight line. The first straight line and the second straight line are perpendicular to each other and intersect. One drive component is installed on the base plate and connected to the middle plate to drive the middle plate to rotate around the first straight line, and the other drive component is installed on the middle plate and connected to the top plate to drive the top plate to rotate around the second straight line.

[0007] Furthermore, each set of arc-shaped guide rails includes two arc-shaped guide rails arranged opposite each other, and the bottom of the middle plate and the bottom plate both bulge downward and slide against the arc-shaped surfaces of the corresponding two arc-shaped guide rails respectively.

[0008] Furthermore, the arc-shaped guide rail includes a fixed plate and an arc-shaped strip. The fixed plate is provided with an arc-shaped protrusion, and the arc-shaped strip is provided with an arc-shaped groove. The arc-shaped protrusion is slidably connected to the arc-shaped groove. The intermediate plate and the top plate are both fixedly connected to the corresponding arc-shaped strip.

[0009] Furthermore, one of the drive components is mounted on the base plate and has a first connecting end that moves along a direction parallel to the second straight line. The first connecting end is rotatably connected to the intermediate plate and slidably connected in a vertical direction. The other drive component is mounted on the intermediate plate and has a second connecting end that moves along a direction parallel to the first straight line. The second connecting end is rotatably connected to the top plate and slidably connected in a vertical direction.

[0010] Furthermore, each of the two drive components includes a motor, a lead screw, and a nut. The two motors are respectively mounted on the base plate and the intermediate plate, and the output ends of the two motors are respectively connected to the two lead screws. The two lead screws are rotatably connected to the base plate and the intermediate plate, respectively. The two nuts are respectively sleeved on the two lead screws, and the bottoms of the two nuts are slidably connected to the base plate and the intermediate plate, respectively. The top of one nut is rotatably connected to the intermediate plate and slidably connected in the vertical direction, and the top of the other nut is rotatably connected to the top plate and slidably connected in the vertical direction.

[0011] Furthermore, both drive components also include a spindle, which is vertically arranged and its bottom end is fixedly connected to the nut. The top of one spindle is rotatably connected to the intermediate plate and slidably connected in the vertical direction, while the top of the other spindle is rotatably connected to the top plate and slidably connected in the vertical direction.

[0012] Furthermore, it also includes two spherical bearings, which are respectively installed at the bottom of the intermediate plate and the bottom of the top plate, and the two mandrels are respectively connected to the two spherical bearings.

[0013] Furthermore, each spherical bearing includes a spherical bearing outer ring and a spherical bearing inner ball. The two spherical bearing outer rings are respectively fixedly disposed at the bottom of the intermediate plate and the top plate. The spherical bearing inner ball is connected to the spherical cavity of the spherical bearing outer ring. Each spherical bearing inner ring is provided with a through hole. The two mandrels are slidably connected to the two through holes in the vertical direction.

[0014] Furthermore, the distance from the intersection point of the first straight line and the second straight line to the top plate is equal to the thickness of the platform.

[0015] Furthermore, the intersection point of the first straight line and the second straight line is located at the top of the top plate.

[0016] Compared with the prior art, by setting one drive component, the middle plate can be driven to rotate around the first straight line, and by setting another drive component, the middle plate can be driven to rotate around the second straight line. Since the first straight line and the second straight line are perpendicular to each other and intersecting, the top plate can be controlled to rotate in any direction with the intersection of the first straight line and the second straight line as the center point. In this application, the two sets of arc-shaped guide rails and drive components replace the traditional telescopic structure arranged in the vertical direction. Both sets of arc-shaped guide rails and drive components extend in the horizontal direction, thus effectively reducing the size of the equipment. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the dual-axis electric leveling mechanism provided in this embodiment of the utility model;

[0018] Figure 2 for Figure 1 A schematic diagram of the structure in which one of the drive components is arranged on the base plate;

[0019] Figure 3 for Figure 2 A schematic cross-sectional view;

[0020] Figure 4 for Figure 3 Enlarged diagram of section A in the middle;

[0021] Figure 5 for Figure 1 A schematic diagram of another driving component arranged on the intermediate plate;

[0022] Figure 6 for Figure 5 A schematic cross-sectional view;

[0023] Figure 7 for Figure 1 A schematic diagram of the structure when the middle plate is rotated to an inclined state;

[0024] Figure 8 for Figure 1 A schematic diagram of the structure when the top plate is rotated to an inclined state;

[0025] Figure 9 for Figure 1 A schematic diagram showing the positions of the first and second straight lines. Detailed Implementation

[0026] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0027] like Figure 1 , Figure 2 , Figure 5 as well as Figure 9 As shown, the present invention provides a dual-axis electric leveling mechanism, comprising a base plate 100, a middle plate 200, a top plate 300, two sets of arc-shaped guide rails 400, and two drive assemblies 500; the middle plate 200 is disposed above the base plate 100; the top plate 300 is disposed above the middle plate 200; the two sets of arc-shaped guide rails 400 are respectively installed above the base plate 100 and the middle plate 200, and the top of each arc-shaped guide rail 400 is concave downward to form an arc-shaped surface, and the bottom of the middle plate 200 is aligned with one of the arc-shaped guide rails along the first straight line L1. The curved surface of the guide rail 400 slides against the top plate 300, and the bottom of the top plate 300 slides against the curved surface of another set of curved guide rails 400 around the direction of the second straight line L2. The first straight line L1 and the second straight line L2 are perpendicular to each other and intersect. One drive component 500 is mounted on the bottom plate 100 and connected to the middle plate 200 to drive the middle plate 200 to rotate around the direction of the first straight line L1. Another drive component 500 is mounted on the middle plate 200 and connected to the top plate 300 to drive the top plate 300 to rotate around the direction of the second straight line L2.

[0028] In implementation, by setting one of the drive components 500, the intermediate plate 200 can be driven to rotate around the first straight line L1, and at the same time, by setting another drive component 500, the intermediate plate 200 can be driven to rotate around the second straight line L2. Since the first straight line L1 and the second straight line L2 are perpendicular to each other and intersecting, the top plate 300 can be controlled to rotate in any direction with the intersection point M of the first straight line L1 and the second straight line L2 as the center point. In this application, the two sets of arc-shaped guide rails 400 and drive components 500 replace the traditional telescopic structure arranged in the vertical direction. Both sets of arc-shaped guide rails 400 and drive components 500 extend in the horizontal direction, thus effectively reducing the size of the equipment.

[0029] In this embodiment, the base plate 100, the middle plate 200, and the top plate 300 are arranged sequentially in a vertically upward direction. The top of the top plate 300 is used to place the product to be inspected. The middle plate 200 can rotate relative to the base plate 100 around a first straight line L1, and the top plate 300 can rotate relative to the middle plate 200 around a second straight line L2. By rotating the middle plate 200 and the top plate 300, the item to be inspected placed on the top plate 300 can be rotated around any angle until it is leveled.

[0030] In this embodiment, the two sets of arc-shaped guide rails 400 extend horizontally. It can be understood that the aforementioned horizontal direction refers to the direction parallel to the base plate 100 or the intermediate plate 200. The sliding direction of the intermediate plate 200 and the top plate 300 is defined by the arc-shaped surface at the top of the arc-shaped guide rails 400.

[0031] In one embodiment, each set of arc-shaped guide rails 400 includes two arc-shaped guide rails 400 arranged opposite each other, and the bottom of the middle plate 200 and the bottom plate 100 both protrude downward and slide against the arc-shaped surfaces of the corresponding two arc-shaped guide rails 400 respectively.

[0032] Of course, in other embodiments, the number of each set of arc-shaped guide rails 400 can be set to three, four, etc., depending on the size of the middle plate 200 and the top plate 300. This utility model embodiment does not limit this.

[0033] Understandably, the rotation angle of the middle plate 200 and the top plate 300 depends on the rotation range angle provided by the arc-shaped guide rail 400, such as the rotation range of the arc-shaped guide rail 400 being ±10°.

[0034] In one embodiment, the arc-shaped guide rail 400 includes a fixed plate 410 and an arc-shaped strip. The fixed plate 410 is provided with an arc-shaped protrusion, and the arc-shaped strip is provided with an arc-shaped groove. The arc-shaped protrusion and the arc-shaped groove are slidably connected. The intermediate plate 200 and the top plate 300 are both fixedly connected to the corresponding arc-shaped strip.

[0035] To ensure that the bottoms of the intermediate plate 200 and the top plate 300 are tightly attached to the corresponding arc-shaped guide rails 400 and can rotate stably around the first straight line L1 and the second straight line L2, in one embodiment, one drive assembly 500 is mounted on the bottom plate 100 and has a first connecting end that moves in a direction parallel to the second straight line L2. The first connecting end is rotatably connected to the intermediate plate 200 and slidably connected in a vertical direction. Another drive assembly 500 is mounted on the intermediate plate 200 and has a second connecting end that moves in a direction parallel to the first straight line L1. The second connecting end is rotatably connected to the top plate 300 and slidably connected in a vertical direction.

[0036] like Figure 2 and Figure 5As shown, in this embodiment, each of the two drive components 500 includes a motor 510, a lead screw 520, and a nut 530. The two motors 510 are respectively mounted on the base plate 100 and the intermediate plate 200, and the output ends of the two motors 510 are respectively connected to the two lead screws 520. The two lead screws 520 are respectively rotatably connected to the base plate 100 and the intermediate plate 200. The two nuts 530 are respectively sleeved on the two lead screws 520. The bottoms of the two nuts 530 are respectively slidably connected to the base plate 100 and the intermediate plate 200. The top of one nut 530 is rotatably connected to the intermediate plate 200 and slidably connected in the vertical direction, and the top of the other nut 530 is rotatably connected to the top plate 300 and slidably connected in the vertical direction.

[0037] Each of the two drive components 500 also includes a spindle 540, which is vertically arranged. The bottom end of the spindle 540 is fixedly connected to a nut 530. The top of one spindle 540 is rotatably connected to the intermediate plate 200 and slidably connected in the vertical direction. The top of the other spindle 540 is rotatably connected to the top plate 300 and slidably connected in the vertical direction.

[0038] It also includes two spherical bearings, which are respectively installed at the bottom of the intermediate plate 200 and the bottom of the top plate 300, and two spindles 540 are respectively connected to the two spherical bearings.

[0039] like Figure 3 , Figure 4 and Figure 6 As shown, each spherical bearing includes a spherical bearing outer ring 210 and a spherical bearing inner ball 220. The two spherical bearing outer rings are fixedly installed at the bottom of the intermediate plate 200 and the top plate 300, respectively. The spherical bearing inner ball 220 is connected to the spherical cavity of the spherical bearing outer ring 210. Each spherical bearing inner ring is provided with a through hole. The two spindles 540 are slidably connected to the two through holes in the vertical direction, respectively.

[0040] Understandably, the two lead screws 520 can be mounted on bearing seats 550 and rotatably connected to the base plate 100 and the intermediate plate 200.

[0041] like Figure 7-8 As shown, when the motor 510 is turned on, it drives the lead screw 520 to rotate, thereby causing the nut 530 to slide along the length direction of the lead screw 520. At this time, the spindle 540 slides in the vertical direction relative to the inner ball 220 of the spherical bearing, while the outer ring 210 of the spherical bearing rotates relative to the inner ball 220 of the spherical bearing.

[0042] like Figure 9As shown, the intersection point M of the first straight line L1 and the second straight line L2 is the rotation center point of the object to be measured. No matter how the intermediate plate 200 and the top plate 300 rotate, the position of the intersection point M remains unchanged. Therefore, the object to be measured can be placed on the top plate 300 through the stage, or the objects to be measured can be placed on the top plate 300.

[0043] In one embodiment, the distance from the intersection of the first straight line L1 and the second straight line L2 to the top plate 300 is equal to the thickness of the stage.

[0044] In another embodiment, the intersection of the direction of the first straight line L1 and the second straight line L2 is located at the top of the top plate 300.

[0045] Compared with the prior art: By setting one drive component 500, the intermediate plate 200 can be driven to rotate around the first straight line L1, and at the same time, the intermediate plate 200 can be driven to rotate around the second straight line L2 by the other drive component 500. Since the first straight line L1 and the second straight line L2 are perpendicular to each other and intersecting, the top plate 300 can be controlled to rotate in any direction with the intersection point M of the first straight line L1 and the second straight line L2 as the center point. In this application, the two sets of arc-shaped guide rails 400 and drive components 500 replace the traditional telescopic structure arranged in the vertical direction. Both sets of arc-shaped guide rails 400 and drive components 500 extend in the horizontal direction, thus effectively reducing the size of the equipment.

[0046] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A dual-axis electric leveling mechanism, characterized in that, include: Base plate; An intermediate plate is disposed above the base plate; A top plate, which is disposed above the intermediate plate; Two sets of arc-shaped guide rails are respectively installed above the base plate and the middle plate, and the top of each arc-shaped guide rail is recessed downward to form an arc-shaped surface. The bottom of the middle plate slides and abuts against the arc-shaped surface of one set of arc-shaped guide rails around a first straight line direction, and the bottom of the top plate slides and abuts against the arc-shaped surface of the other set of arc-shaped guide rails around a second straight line direction. The first straight line and the second straight line are perpendicular to each other and intersect. Two drive components are provided, one of which is mounted on the base plate and connected to the intermediate plate for driving the intermediate plate to rotate about the first linear direction, and the other drive component is mounted on the intermediate plate and connected to the top plate for driving the top plate to rotate about the second linear direction.

2. The dual-axis electric leveling mechanism according to claim 1, characterized in that, Each set of arc-shaped guide rails includes two arc-shaped guide rails arranged opposite each other. The bottom of the middle plate and the bottom plate both bulge downwards and slide against the arc-shaped surfaces of the corresponding two arc-shaped guide rails.

3. The dual-axis electric leveling mechanism according to claim 2, characterized in that, The arc-shaped guide rail includes a fixed plate and an arc-shaped strip. The fixed plate is provided with an arc-shaped protrusion, and the arc-shaped strip is provided with an arc-shaped groove. The arc-shaped protrusion is slidably connected to the arc-shaped groove. The intermediate plate and the top plate are both fixedly connected to the corresponding arc-shaped strip.

4. The dual-axis electric leveling mechanism according to claim 1, characterized in that, One of the drive components is mounted on the base plate and has a first connecting end that moves along a direction parallel to the second straight line. The first connecting end is rotatably connected to the intermediate plate and slidably connected along the vertical direction. The other drive component is mounted on the intermediate plate and has a second connecting end that moves along a direction parallel to the first straight line. The second connecting end is rotatably connected to the top plate and slidably connected along the vertical direction.

5. The dual-axis electric leveling mechanism according to claim 1, characterized in that, Both drive components include a motor, a lead screw, and a nut. The two motors are respectively mounted on the base plate and the intermediate plate, and the output ends of the two motors are respectively connected to the two lead screws. The two lead screws are rotatably connected to the base plate and the intermediate plate, respectively. The two nuts are respectively sleeved on the two lead screws, and the bottoms of the two nuts are slidably connected to the base plate and the intermediate plate, respectively. The top of one nut is rotatably connected to the intermediate plate and slidably connected in the vertical direction, and the top of the other nut is rotatably connected to the top plate and slidably connected in the vertical direction.

6. The dual-axis electric leveling mechanism according to claim 5, characterized in that, Both drive components also include a spindle, which is vertically arranged and its bottom end is fixedly connected to the nut. The top of one spindle is rotatably connected to the intermediate plate and slidably connected in the vertical direction, while the top of the other spindle is rotatably connected to the top plate and slidably connected in the vertical direction.

7. The dual-axis electric leveling mechanism according to claim 6, characterized in that, It also includes two spherical bearings, which are respectively installed at the bottom of the intermediate plate and the bottom of the top plate, and the two mandrels are respectively connected to the two spherical bearings.

8. The dual-axis electric leveling mechanism according to claim 7, characterized in that, Each spherical bearing includes an outer ring and an inner ball. The two outer rings are fixedly mounted on the bottom of the intermediate plate and the top plate, respectively. The inner ball is connected to the spherical cavity of the outer ring. Each inner ring has a through hole. The two spindles are slidably connected to the two through holes in the vertical direction.

9. The dual-axis electric leveling mechanism according to claim 1, characterized in that, The distance from the intersection point of the first straight line and the second straight line to the top plate is equal to the thickness of the platform.

10. The dual-axis electric leveling mechanism according to claim 1, characterized in that, The intersection point of the first straight line and the second straight line is located at the top of the top plate.

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