An ultra-pure gas and isotope dispensing device

Abstract

The utility model discloses a kind of ultra-pure gas and isotope subpackaging device, including raw material bottle, product bottle, electronic balance, vacuum pump, diaphragm compressor, total valve, inflation flow regulating valve, inflation valve, suction valve, recovery valve, recovery flow regulating valve and air extraction valve, product bottle is placed on electronic balance, raw material bottle is sequentially connected with product bottle through total valve, inflation flow regulating valve, inflation valve;One end of suction valve is connected between total valve and inflation flow regulating valve, the other end connects the gas inlet of diaphragm compressor;The gas outlet of diaphragm compressor is sequentially connected with raw material bottle through recovery valve, recovery flow regulating valve, and the pipeline connection between vacuum pump and inflation flow regulating valve, inflation valve is connected. The device uses vacuum pump to remove other gas in pipeline, uses compressor to recycle residual gas in pipeline, entire subpackaging process does not need to purge and empty subpackaging pipeline, to avoid the waste of ultra-pure gas, reduce production cost.

Description

Technical Field

[0001] This utility model relates to an ultrapure gas and isotope dispensing device, which can reduce the waste of ultrapure gas and belongs to the field of gas storage or distribution technology. Background Technology

[0002] Ultrapure gases and isotopes are used in fields such as semiconductors, photovoltaics, medicine, and scientific research. Because most ultrapure gases and isotopes are extremely expensive, and end-users typically use small quantities per application, there is a high demand for small-packaged products. However, manufacturers' finished products are usually packaged in large quantities, necessitating repackaging. A common repackaging method involves first purging the dispensing pipeline connecting the raw material bottle and the product bottle with ultrapure gas from the raw material bottle to remove other gases. Then, the ultrapure gas flows through the dispensing pipeline into the smaller product bottle, and finally, any remaining ultrapure gas in the dispensing pipeline is vented. The drawback of this method is that purging and venting the dispensing pipeline wastes ultrapure gas, increasing production costs. Therefore, it is essential to develop an ultrapure gas and isotope repackaging device to reduce gas waste. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by providing an ultrapure gas and isotope dispensing device to reduce the waste of ultrapure gas and lower production costs.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] An ultrapure gas and isotope dispensing device includes a raw material bottle, a product bottle, an electronic balance, a vacuum pump, a diaphragm compressor, a main valve, a gas filling flow regulating valve, a gas filling valve, a suction valve, a recovery valve, a recovery flow regulating valve, and a vacuum valve. The product bottle is placed on the electronic balance. The raw material bottle is connected to the product bottle sequentially via the main valve, the gas filling flow regulating valve, and the gas filling valve. One end of the suction valve is connected between the main valve and the gas filling flow regulating valve, and the other end is connected to the inlet of the diaphragm compressor. The exhaust port of the diaphragm compressor is connected to the raw material bottle sequentially via the recovery valve and the recovery flow regulating valve. The vacuum pump is connected to the gas filling flow regulating valve and the gas filling valve via a pipeline connected to the vacuum valve.

[0006] The aforementioned ultrapure gas and isotope dispensing device also includes an isolation valve and a pressure boosting valve. The isolation valve is connected in series in the pipeline between the main valve and the gas flow regulating valve, and the main valve and the intake valve are located on the same side of the isolation valve. One end of the pressure boosting valve is connected to the exhaust port of the diaphragm compressor, and the other end is connected to the pipeline between the isolation valve and the gas flow regulating valve.

[0007] The aforementioned ultrapure gas and isotope dispensing device further includes a first pressure gauge, a second pressure gauge, a third pressure gauge, a first pressure measuring valve, a second pressure measuring valve, and a third pressure measuring valve. The first pressure gauge is connected to the main valve and the isolation valve via the first pressure measuring valve through a pipeline. The second pressure gauge is connected to the gas flow regulating valve and the gas charging valve via the second pressure measuring valve through a pipeline. The third pressure gauge is connected to the exhaust port of the diaphragm compressor via the third pressure measuring valve.

[0008] In the above-mentioned ultrapure gas and isotope dispensing device, the gas flow regulating valve is a needle valve, and the main valve, isolation valve, gas charging valve, gas suction valve, pressure boosting valve, recovery valve, recovery flow regulating valve, gas extraction valve, venting valve, first pressure measuring valve, second pressure measuring valve, and third pressure measuring valve are all bellows valves.

[0009] The aforementioned ultrapure gas and isotope dispensing device also includes a vent valve, one end of which is connected to the pipeline between the gas flow regulating valve and the gas filling valve, and the other end is connected to the atmosphere.

[0010] This invention utilizes a vacuum pump to remove other gases from the dispensing pipeline and a diaphragm compressor to recover the residual ultrapure gas in the dispensing pipeline back to the raw material bottle. The entire dispensing process does not require purging and emptying of the dispensing pipeline, thus effectively avoiding the waste of ultrapure gas and greatly reducing production costs. Attached Figure Description

[0011] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0012] Figure 1 This is a schematic diagram of the structure of this utility model.

[0013] The labels in the diagram are as follows: V1, main valve; V2, isolation valve; V3, inflation flow regulating valve; V4, inflation valve; V5, suction valve; V6, pressure boosting valve; V7, recovery valve; V8, recovery flow regulating valve; V9, extraction valve; V10, vent valve; V11, first pressure measuring valve; V12, second pressure measuring valve; V13, third pressure measuring valve; P1, raw material bottle; P2, product bottle; VP, vacuum pump; YS, diaphragm compressor; DP, electronic balance; G1~G3, first pressure gauge~third pressure gauge. Detailed Implementation

[0014] This invention addresses the problems existing in the prior art by providing an ultrapure gas and isotope dispensing device. The device is simple to operate and has a short pipeline, which not only saves energy but also eliminates the need to purge the dispensing pipeline with ultrapure gas. Furthermore, the ultrapure gas in the pipeline can be recovered by operating valves, greatly reducing the waste of ultrapure gas and lowering production costs.

[0015] See Figure 1This utility model mainly includes a raw material bottle P1, a first pressure gauge G1, a second pressure gauge G2, a third pressure gauge G3, a product bottle P2, an electronic balance DP, a vacuum pump VP, a diaphragm compressor YS, a main valve V1, an isolation valve V2, a gas flow regulating valve V3, a gas filling valve V4, a suction valve V5, a pressure boosting valve V6, a recovery valve V7, a recovery flow regulating valve V8, a suction valve V9, a vent valve V10, a first pressure measuring valve V11, a second pressure measuring valve V12, and a third pressure measuring valve V13. Among them, the gas filling flow regulating valve V3 is a needle valve, and the main valve V1, the isolation valve V2, the gas filling valve V4, the suction valve V5, the pressure boosting valve V6, the recovery valve V7, the recovery flow regulating valve V8, the suction valve V9, the vent valve V10, the first pressure measuring valve V11, the second pressure measuring valve V12, and the third pressure measuring valve V13 are all bellows valves.

[0016] The diagram shows that raw material bottle P1 is connected to product bottle P2 via main valve V1, isolation valve V2, inflation flow regulating valve V3, and inflation valve V4 to inflate product bottle P2. Product bottle P2 is placed on electronic balance DP, which weighs it to determine the inflation volume. One end of suction valve V5 is connected between main valve V1 and isolation valve V2, and the other end is connected to the inlet of diaphragm compressor YS. The exhaust port of diaphragm compressor YS is connected via pipeline between pressure boosting valve V6, isolation valve V2, and inflation flow regulating valve V3, and then via recovery valve V7 and recovery flow regulating valve V8 to raw material bottle P1. Diaphragm compressor YS is used to compress the gas in raw material bottle P1 and send it to product bottle P2, or to discharge residual gas in the pipeline. The gas is recovered into the raw material bottle P1; the vacuum pump VP is connected to the pipeline between the suction valve V9 and the charging flow regulating valve V3 and the charging valve V4, and is used to evacuate the pipeline; one end of the vent valve V10 is connected to the pipeline between the charging flow regulating valve V3 and the charging valve V4, and the other end is connected to the atmosphere; the first pressure gauge G1 is connected to the pipeline between the first pressure measuring valve V11 and the main valve V1 and the isolation valve V2, and is used to measure the pressure of the raw material bottle P1; the second pressure gauge G2 is connected to the pipeline between the second pressure measuring valve V12 and the charging flow regulating valve V3 and the charging valve V4, and is used to measure the outlet pressure of the diaphragm compressor YS; the third pressure gauge G3 is connected to the exhaust port of the diaphragm compressor YS through the third pressure measuring valve V13, and is used to measure the pressure of the product bottle P2.

[0017] The usage process of this utility model is as follows:

[0018] When repackaging products, open all valves except for the vent valve V10, turn on the vacuum pump VP, evacuate the gas in the pipeline, close all valves after the vacuum level meets the requirements, and finally close the evacuation valve V9 on the vacuum pump VP pipeline to stop the vacuum pump VP from running.

[0019] Open the valves of raw material bottle P1 and product bottle P2, and gradually open the main valve V1, the first pressure measuring valve V11, the isolation valve V2, the second pressure measuring valve V12, and the inflation valve V4. Slowly open the inflation flow regulating valve V3 and slowly inflate product bottle P2. Observe the weight of product bottle P2 on the electronic balance DP.

[0020] When the gas pressure in the raw material bottle P1 and the product bottle P2 are balanced, and the gas weight in the product bottle P2 does not meet the requirements, close the isolation valve V2, open the suction valve V5, the pressure boosting valve V6, and the third pressure measuring valve V13, and start the diaphragm compressor YS to fill the product bottle P2 with gas. After the gas weight in the product bottle P2 meets the requirements, close the bottle valve of the product bottle P2, stop the operation of the diaphragm compressor YS, and the filling is completed.

[0021] Close the main valve V1, pressure boosting valve V6, open the recovery valve V7, confirm the recovery flow regulating valve V8, extraction valve V9, and vent valve V10 are closed. After starting the diaphragm compressor YS, slowly open the recovery flow regulating valve V8 to recover the residual gas in the pipeline to the raw material bottle P1. After recovery is complete, close all valves and stop the diaphragm compressor YS from running.

[0022] The beneficial effects of this utility model are:

[0023] This invention connects raw material bottle P1 and product bottle P2 via a stainless steel gas pipeline. The flow path of the raw material gas is controlled by a bellows valve, and the flow rate of the raw material gas entering product bottle P2 is controlled by an adjustable needle valve. When the pressure in raw material bottle P1 is insufficient, the diaphragm compressor YS is activated to compress the gas in raw material bottle P1 into product bottle P2. Once the required gas level in product bottle P2 is reached, the remaining gas in the pipeline can be compressed and returned to raw material bottle P1 by adjusting the valve, thus avoiding gas waste.

[0024] This invention is simple to operate, has a short pipeline, saves energy, and does not require purging or venting during use, which reduces gas waste and lowers production costs.

[0025] An embodiment of this utility model is as follows:

[0026] The first pressure gauge G1, the second pressure gauge G2, and the third pressure gauge G3 are model ZHT-2000;

[0027] The model of the electronic balance DP is MS32002L;

[0028] The model of the vacuum pump VP is D10T;

[0029] The model number of the diaphragm compressor YS is L-220 / 0.1L;

[0030] The model number of the needle valve is 1335F2Y-RH;

[0031] The model number of the bellows valve is SS-4BG.

Claims

1. An ultrapure gas and isotope dispensing device, characterized in that, The system includes a raw material bottle (P1), a product bottle (P2), an electronic balance (DP), a vacuum pump (VP), a diaphragm compressor (YS), a main valve (V1), a gas filling flow regulating valve (V3), a gas filling valve (V4), a suction valve (V5), a recovery valve (V7), a recovery flow regulating valve (V8), and a vacuum extraction valve (V9). The product bottle (P2) is placed on the electronic balance (DP). The raw material bottle (P1) passes through the main valve (V1), the gas filling flow regulating valve (V3), the gas filling valve (V4), the suction valve (V5), the recovery valve (V7), the recovery flow regulating valve (V8), and the suction valve (V9) in sequence. The gas valve (V4) is connected to the product bottle (P2); one end of the suction valve (V5) is connected between the main valve (V1) and the inflation flow regulating valve (V3), and the other end is connected to the air inlet of the diaphragm compressor (YS); the exhaust port of the diaphragm compressor (YS) is connected to the raw material bottle (P1) in sequence through the recovery valve (V7) and the recovery flow regulating valve (V8); the vacuum pump (VP) is connected to the pipeline between the suction valve (V9) and the inflation flow regulating valve (V3) and the inflation valve (V4).

2. The ultrapure gas and isotope dispensing device according to claim 1, characterized in that, It also includes an isolation valve (V2) and a booster valve (V6). The isolation valve (V2) is connected in series in the pipeline between the main valve (V1) and the air flow regulating valve (V3), and the main valve (V1) and the suction valve (V5) are located on the same side of the isolation valve (V2). One end of the booster valve (V6) is connected to the exhaust port of the diaphragm compressor (YS), and the other end is connected to the pipeline between the isolation valve (V2) and the air flow regulating valve (V3).

3. The ultrapure gas and isotope dispensing device according to claim 2, characterized in that, It also includes a first pressure gauge (G1), a second pressure gauge (G2), a third pressure gauge (G3), a first pressure testing valve (V11), a second pressure testing valve (V12), and a third pressure testing valve (V13). The first pressure gauge (G1) is connected to the main valve (V1) and the isolation valve (V2) through the first pressure testing valve (V11). The second pressure gauge (G2) is connected to the air flow regulating valve (V3) and the air charging valve (V4) through the second pressure testing valve (V12). The third pressure gauge (G3) is connected to the exhaust port of the diaphragm compressor (YS) through the third pressure testing valve (V13).

4. The ultrapure gas and isotope dispensing device according to claim 3, characterized in that, The inflation flow regulating valve (V3) is a needle valve, and the main valve (V1), isolation valve (V2), inflation valve (V4), suction valve (V5), pressure boosting valve (V6), recovery valve (V7), recovery flow regulating valve (V8), suction valve (V9), vent valve (V10), first pressure measuring valve (V11), second pressure measuring valve (V12), and third pressure measuring valve (V13) are all bellows valves.

5. An ultrapure gas and isotope dispensing apparatus according to any one of claims 1-4, characterized in that, It also includes an air vent valve (V10), one end of which is connected to the pipeline between the inflation flow regulating valve (V3) and the inflation valve (V4), and the other end is connected to the atmosphere.

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