A vertical graphite crucible bottom gas charging device

Abstract

A vertical graphite crucible bottom gas filling device, including vertical graphite air inlet pipe and air inlet dispersion disc, air inlet dispersion disc is arranged in the bottom of vertical graphite crucabble inner chamber, and air inlet passage is arranged on the top surface of air inlet dispersion disc near the outer side, air inlet passage is through from the top surface of air inlet dispersion disc to the bottom surface of air inlet dispersion disc, and the inlet of air inlet passage is dispersion disc threaded air inlet, the lower end of vertical graphite air inlet pipe is air inlet threaded pipe, air inlet threaded pipe is screwed in the dispersion disc threaded air inlet of air inlet dispersion disc, and external gas enters air inlet dispersion disc through vertical graphite air inlet pipe, and then is evenly diffused to the inner chamber of vertical graphite crucible from the bottom of vertical graphite crucabble inner chamber through air inlet dispersion disc. The utility model discloses through from air inlet dispersion disc, injects gas from the top surface to the bottom surface of air inlet dispersion disc, and then returns to the top surface of air inlet dispersion disc again from the multiple gas diffusion holes of the multiple diffusion air passages of bottom surface and blows out, so that the airflow can be evenly dispersed and diffused into the graphite crucible cavity.

Description

Technical Field

[0001] This utility model relates to a component of a vertical high-temperature graphitization furnace, and more particularly to an air inlet dispersion plate of a vertical high-temperature graphitization furnace with an air inlet system, belonging to the technical field of vertical high-temperature graphitization furnace manufacturing. Background Technology

[0002] High-temperature graphitization furnaces are primarily used for high-temperature material processing, operating at temperatures ranging from 2800℃ to 3200℃. They utilize induction heating technology to achieve functions such as carbon fiber graphitization and impurity removal. Thanks to their superior high-temperature performance and precise temperature control system, high-temperature graphitization furnaces play a crucial role in numerous high-tech and industrial fields. They are widely used in the new energy industry for lithium-ion battery anode materials and carbon fiber composite materials; in the aerospace field for carbon fiber composite materials and rocket nozzle materials; and in the semiconductor and electronics industry for single-crystal silicon growth and semiconductor material purification.

[0003] High-temperature graphitization furnaces are divided into two main structural types: vertical and horizontal. Vertical high-temperature graphitization furnaces adopt a vertical furnace chamber structure, and the heating elements are usually located outside the furnace body and heat the materials through thermal radiation or conduction. They occupy less space and are easy to automate. Moreover, vertical high-temperature graphitization furnaces are suitable for intermittent processing (such as laboratory experiments) because the heat is distributed more evenly vertically. They also have a fast heating and cooling rate, so they are widely used in scientific research, small-batch experiments and high-temperature processing.

[0004] However, vertical high-temperature graphitization furnaces typically place the material to be purified in a semi-open vertical graphite crucible with the opening facing upwards. The vertical graphite crucible is then covered with a lid, and the material to be purified is heated by electromagnetic induction heating through electromagnetic induction coils around the crucible. In the refining process of materials to be purified, impurities in the materials will turn into volatile gases in the hot vertical graphite crucible. These volatile gases not only contain many impurities that need to be treated, but also contain many harmful waste gases. This is not only related to environmental pollution, but also directly related to the cleanliness of the material. Therefore, these volatile gases must be treated. Currently, the treatment of these volatile gases is generally done by setting an exhaust pipe on the lid of the vertical graphite crucible. After the volatile gases generated during refining evaporate, they are affected by gas expansion and will be discharged into the shell of the vertical high-temperature graphitization furnace through the exhaust pipe or gap on the lid of the vertical graphite crucible. Then, through the vacuum system, the gas discharged into the shell is drawn to the treatment device outside the furnace through the exhaust pipe. Then, the harmful substances in the volatile gases are removed by mechanical filtration or wet dust removal, and the gas is discharged into the atmosphere after meeting the standards. However, the current method for volatile gas emissions involves installing an exhaust pipe on the vertical graphite crucible lid inside the furnace. This allows the volatile gases inside the vertical graphite crucible to be discharged into the outer shell of the furnace through the exhaust port. Then, a vacuum system is used to extract the volatile gases accumulated inside the outer shell of the furnace through the pipe. The overflowing volatile gases are then drawn by the vacuum system to a treatment device outside the furnace for processing. The purified gases are then discharged normally.

[0005] However, while this method can effectively solve the problem of volatile gases overflowing from the vertical graphite crucible into the furnace shell through the vent on the lid, it cannot eliminate the volatile gases already present inside the vertical graphite crucible.

[0006] Research revealed that while the amount of volatile gases is not large and will not have a significant impact on the external environment, during furnace operation, these gases consistently create a high-concentration purification environment within the vertical graphite crucible. This negatively affects the purification cleanliness of the furnace. Actual testing showed that the impact of these volatile gases on the purification level is approximately 0.01%-1%. For conventional material purification requirements, this impact is acceptable. However, with modern industry demanding increasingly higher cleanliness levels, even requiring purification to reach 99.9999%, this becomes a significant problem. Solving this problem is also very difficult, mainly due to the structural characteristics of vertical high-temperature graphitization furnaces. Vertical high-temperature graphitization furnaces typically employ electromagnetic induction heating. Electromagnetic induction coils are arranged around the vertical graphite crucible. However, passing through these coils can lead to insufficient insulation, making it impractical to supply gas from the side. Furthermore, the bottom of the crucible has multiple supporting and insulating layers, making it unsuitable to supply gas through bottom openings. Supplying gas from the top is also problematic due to the frequent opening and closing of the crucible's inner lid. Therefore, improving the cleanliness of vertical high-temperature graphitization furnaces has become a critical technical challenge, especially for the high-temperature processing of materials like high-purity silicon and silicon carbide (SiC). Enhancing cleanliness is a pressing issue in emerging industries such as semiconductors, and further research in this area is essential.

[0007] The search revealed no identical technical reports, only technical literature in related fields. The most similar articles are as follows:

[0008] 1. Patent document CN219484201U discloses a reactor for preparing nanoparticles using a solution combustion method. The reactor includes a furnace body with an internal heating space containing a reaction vessel. The reaction vessel holds reactants for preparing nanoparticles. An inlet pipe connected to the heating space is mounted on the furnace body. An inlet dispersion device is located at the outlet of the inlet pipe, which separates the gas output from the inlet pipe into multiple streams before it flows out. This invention uses an inlet dispersion device to separate the gas output from the inlet pipe into multiple streams, dispersing the gas flow in different directions and slowing down the gas flow rate. This effectively prevents the gas output from the inlet pipe from blowing away and splashing the nanoparticles prepared in the reaction vessel. However, although this document mentions an inlet dispersion device, it is not suitable for high-temperature graphitization furnace applications, so the aforementioned problems still exist.

[0009] 2. Patent document CN218786659U discloses a gas distribution system for a vapor deposition furnace, including a heat insulation shell and a preheating gas box. The preheating gas box is installed and fixed inside the heat insulation shell. The outer end of the preheating gas box passes through the heat insulation shell and is provided with a vapor deposition furnace inlet pipe. A pipe clamp is provided around the periphery of the vapor deposition furnace inlet pipe. The inner end of the preheating gas box passes through the heat insulation shell and is provided with a preheating gas delivery pipe. A sealing furnace sleeve is provided around the periphery of the preheating gas delivery pipe. The vapor deposition furnace body is provided outside the sealing furnace sleeve. An inlet dispersion plate is provided inside the vapor deposition furnace body at the inner end of the preheating gas delivery pipe. A perforated delivery cover is provided at the inner end of the inlet dispersion plate. The preheating gas box is electrically connected to an external controller. Although this patent document also mentions an inlet dispersion plate, the inlet dispersion plate proposed in this patent is a side structure, which is not suitable for vertical high-temperature graphitization furnace applications. Therefore, the aforementioned problem still exists.

[0010] 3. Patent document CN218089087U discloses a gasification furnace ventilation system, which includes an electronic platform scale, a liquid chlorine storage tank mounted on the electronic platform scale, a vaporization tank, a pressure stabilizing tank, a graphitization furnace, a tail gas absorption device, and a chimney, all connected in sequence to the liquid chlorine storage tank via a gas supply pipe. The graphitization furnace is equipped with a gas distribution device connected to the pressure stabilizing tank. An induced draft fan is installed between the exhaust port of the graphitization furnace and the tail gas absorption device. A solenoid valve and a controller are installed between the liquid chlorine storage tank and the vaporization tank, and the controller is connected to the electronic platform scale and the solenoid valve. Although this patent mentions a gas distribution device, the specific structure of the disclosed gas distribution device is not suitable for high-temperature graphitization furnace applications, so the aforementioned problems remain unresolved.

[0011] Analysis of existing patented technologies reveals that current methods for treating volatile gases in vertical high-temperature graphitization furnaces primarily focus on processing those emanating from the vertical graphite crucible. Furthermore, other proposed gas inlet and dispersion devices are unsuitable for handling volatile gases within the vertical graphite crucible. Therefore, addressing the issue of volatile gases generated during the internal operation of the vertical graphite crucible is a pressing problem requiring further research and improvement. Utility Model Content

[0012] The technical problem this invention aims to solve is: how to effectively and uniformly diffuse gas within a vertical graphite crucible, and proposes a bottom gas filling device for a vertical graphite crucible. This device can effectively inject gas into the vertical graphite crucible and diffuse it uniformly from the bottom, effectively removing volatile gaseous substances from the crucible and eliminating the impact of these substances on the desired cleanliness.

[0013] To address the above problems, the technical solution proposed by this utility model is as follows:

[0014] A bottom gas filling device for a vertical graphite crucible includes a vertical graphite inlet pipe and an inlet dispersion plate. The inlet dispersion plate is located at the bottom of the inner cavity of the vertical graphite crucible. An inlet channel is provided on the outer side of the top surface of the inlet dispersion plate, extending from the top surface to the bottom surface of the inlet dispersion plate. The inlet of the inlet channel is a threaded inlet port of the dispersion plate. The lower end of the vertical graphite inlet pipe is connected to an inlet threaded pipe, which is screwed into the threaded inlet port of the dispersion plate. External gas enters the inlet dispersion plate through the vertical graphite inlet pipe and then diffuses evenly from the bottom of the inner cavity of the vertical graphite crucible into the inner cavity of the vertical graphite crucible through the inlet dispersion plate.

[0015] Furthermore, a diffusion chamber and a central air channel are provided at the center of the bottom surface of the gas inlet dispersion plate. The central air channel connects the gas inlet channel and the diffusion chamber. At the same time, multiple diffusion air channels are radially arranged around the center of the diffusion chamber on the bottom surface of the gas inlet dispersion plate. Multiple gas diffusion holes are distributed upward on each diffusion air channel. The gas entering the bottom surface of the gas inlet dispersion plate is evenly injected into the bottom of the inner cavity of the vertical graphite crucible through multiple gas diffusion holes.

[0016] Furthermore, a threaded air inlet for the air inlet is provided at the position of the air inlet channel on the top surface of the air inlet dispersion plate. The internal threaded hole of the threaded air inlet for the air inlet is connected to the air inlet threaded pipe of the vertical graphite air inlet pipe, and after the connection, a channel for gas to enter the air inlet dispersion plate is formed.

[0017] Furthermore, the air inlet dispersion plate has a flat structure, and the side shape of the air inlet dispersion plate matches the shape of the inner cavity of the vertical graphite crucible of the high-temperature graphitization furnace. The air inlet dispersion plate is installed at the bottom of the inner cavity of the vertical graphite crucible.

[0018] Furthermore, the side profile of the air inlet dispersion disk is the same as the inner cavity shape of the vertical graphite crucible, including circular, quadrilateral, and polygonal shapes.

[0019] Furthermore, on the upper surface of the multiple gas diffusion holes on each diffusion channel, there is a permeable groove that connects the multiple gas diffusion holes. The permeable groove connects the multiple gas diffusion holes on the same diffusion channel to form a permeable zone. The special gas enters the permeable groove through the gas diffusion holes and then diffuses upward from the boat-shaped vessel inside the vertical graphite crucible through the permeable groove.

[0020] Furthermore, the ventilated groove is an elongated groove with an open top, and the cross-sectional shape of the ventilated groove includes a "U" shape and a "ㄩ" shape.

[0021] Furthermore, the venting grooves are arranged radially according to the diffusion channels on the bottom surface of the air inlet dispersion plate, and an upper gas diffusion cavity is arranged in the center of the top surface of the air inlet dispersion plate. The upper gas diffusion cavity is connected to the center end of multiple venting grooves, so that multiple venting grooves are interconnected to form a radially arranged gas diffusion surface.

[0022] Furthermore, the vertical graphite inlet pipe is a hollow pipe with a blind hole on its inner surface. The blind hole is located at the center of the vertical graphite inlet pipe, and the opening of the blind hole is located at the lower end outlet of the vertical graphite inlet pipe. A tapered pipe section is provided at the upper outer end of the vertical graphite inlet pipe, and a threaded inlet pipe is provided at the lower end. The tapered pipe section is connected to the quick-change device for inlet gas in the graphitization furnace, and the threaded inlet pipe is connected to the threaded inlet of the dispersion plate of the gas dispersion plate located at the bottom of the vertical graphite crucible.

[0023] Furthermore, the top of the blind hole on the inner surface of the center of the vertical graphite inlet pipe extends to the upper end of the outer part of the vertical graphite inlet pipe, and a lateral outlet is provided at the end position. The lateral outlet is located in the conical pipe section outside the vertical graphite inlet pipe so as to connect with the quick-change device for the inlet gas in the graphitization furnace.

[0024] The beneficial effects of this utility model are:

[0025] This invention introduces injected gas from the top surface of the gas inlet dispersion plate, guides it to the bottom surface of the plate, and then evenly returns the injected gas to the top surface of the plate through multiple gas diffusion holes in multiple diffusion channels. This allows the injected gas flow into the graphite crucible cavity to diffuse more evenly and dispersedly, which is beneficial for purification in high-temperature graphitization furnaces. It has the following advantages:

[0026] 1. This utility model uses a bottom gas filling device for a vertical graphite crucible to effectively dilute volatile gaseous substances in the vertical graphite crucible and carry them out of the graphite crucible, thereby reducing the volatile substances in the graphite crucible.

[0027] 2. This utility model ingeniously utilizes a vertical graphite air inlet pipe to directly access the bottom of the vertical graphite crucible, and then blows air evenly from the bottom of the vertical graphite crucible upwards through an air inlet dispersion plate, which can effectively remove volatile gaseous substances in the vertical graphite crucible during the gas rising and being discharged.

[0028] 3. This utility model introduces a mixture of argon and hydrogen into a vertical graphite crucible via an inlet dispersion plate. This not only effectively isolates the substance to be purified from contact with oxygen or air, further optimizing the purification environment within the vertical graphite crucible and improving the purity of the purification, but also facilitates the utilization of volatile substances through hydrogen replacement. Attached Figure Description

[0029] Figure 1 This is a three-dimensional structural diagram of the bottom gas filling device of the vertical graphite crucible of this utility model;

[0030] Figure 2 This is a three-dimensional structural diagram of the bottom gas filling device of the vertical graphite crucible of this utility model from another angle.

[0031] Figure 3 This is a schematic cross-sectional view of the gas filling device at the bottom of the vertical graphite crucible of this utility model.

[0032] Figure 4 This is a three-dimensional structural diagram of the front of the air intake dispersion disc;

[0033] Figure 5 This is a schematic diagram of the three-dimensional structure of the bottom surface of the air intake dispersion plate;

[0034] Figure 6 This is a schematic diagram of the planar structure of the bottom surface of the air intake dispersion plate;

[0035] Figure 7 This is a schematic cross-sectional view of the vertical graphite air inlet pipe.

[0036] Figure 8 This is a schematic diagram showing the position of the present invention within a vertical graphitization furnace.

[0037] In the diagram: 1. Vertical graphite inlet pipe; 2. Inlet dispersion plate; 3. Inner cavity of vertical graphite crucible; 4. Inlet channel; 5. Inlet threaded pipe; 6. Threaded inlet of dispersion plate; 7. Diffusion chamber; 8. Central air passage; 9. Diffusion air passage; 10. Gas diffusion hole; 11. Ventilation groove; 12. Conical pipe section; 13. Upper gas diffusion chamber; 14. Inlet quick-change device; 15. Vertical graphite crucible; 16. Graphitization furnace body; 17. Side outlet; 18. Blind hole; 19. Inner cavity of shell; 20. External air intake system device; 21. Outer cover of graphitization furnace; 23. Inner cover of vertical graphite crucible; 24. Locking screw. Detailed Implementation

[0038] The present invention will be further described below with reference to the accompanying drawings: Example 1

[0039] like Figure 1 , 2As shown in Figure 3, a bottom gas filling device for a vertical graphite crucible includes a vertical graphite inlet pipe 1 and an inlet dispersion plate 2. The inlet dispersion plate 2 is located at the bottom of the inner cavity 3 of the vertical graphite crucible. An inlet channel 4 is provided on the outer side of the top surface of the inlet dispersion plate 2. The inlet channel 4 extends from the top surface of the inlet dispersion plate 2 to the bottom surface of the inlet dispersion plate 2. The inlet of the inlet channel 4 is a dispersion plate threaded inlet port 6. The lower end of the vertical graphite inlet pipe 1 is connected to an inlet threaded pipe 5. The inlet threaded pipe 5 is screwed into the dispersion plate threaded inlet port 6 of the inlet dispersion plate 2. External gas enters the inlet dispersion plate 2 through the vertical graphite inlet pipe 1 and then diffuses evenly from the bottom of the inner cavity 3 of the vertical graphite crucible into the inner cavity of the vertical graphite crucible through the inlet dispersion plate 2.

[0040] Furthermore, as shown in the appendix Figure 4 , 5 As shown in Figure 6, a diffusion chamber 7 and a central air channel 8 are provided at the center of the bottom surface of the gas inlet dispersion plate 2. The central air channel 8 connects the gas inlet channel 4 and the diffusion chamber 7. At the same time, multiple diffusion channels 9 are radially arranged around the center of the diffusion chamber on the bottom surface of the gas inlet dispersion plate 2. Multiple gas diffusion holes 10 are distributed upward on each diffusion channel 9. The gas entering the bottom surface of the gas inlet dispersion plate 2 is evenly injected into the bottom of the vertical graphite crucible cavity 3 through the multiple gas diffusion holes 10.

[0041] A dispersion disk threaded air inlet 6 is provided on the top surface of the air inlet channel 4, which is located on the air inlet dispersion disk 2. The dispersion disk threaded air inlet 6 is an internal threaded hole that is connected to the air inlet threaded pipe 5 of the vertical graphite air inlet pipe 1, and forms a channel for gas to enter the air inlet dispersion disk 2 after the connection.

[0042] The air inlet dispersion plate 2 has a flat structure. The side shape of the air inlet dispersion plate 2 matches the shape of the inner cavity 3 of the vertical graphite crucible of the high-temperature graphitization furnace. The air inlet dispersion plate 2 is installed at the bottom of the inner cavity 3 of the vertical graphite crucible.

[0043] The side profile of the air inlet dispersion plate 2 is the same as the shape of the inner cavity 3 of the vertical graphite crucible, including circular, quadrilateral and polygonal shapes.

[0044] Furthermore, on the upper surface of the multiple gas diffusion holes 10 on each diffusion channel 9, there is a permeable groove 11 that connects the multiple gas diffusion holes. The permeable groove 11 connects the multiple gas diffusion holes 10 on the same diffusion channel 9 to form a permeable zone. The special gas enters the permeable groove 11 through the gas diffusion hole 10, and then diffuses upward from the boat (not shown in the figure, it is a conventional boat) inside the vertical graphite crucible 15 through the permeable groove 11.

[0045] The breathable groove 11 is an elongated groove with an open top, and the cross-sectional shape of the breathable groove 11 includes "U" shape and "ㄩ" shape.

[0046] The venting grooves 11 are arranged radially according to the diffusion channels 9 on the bottom surface of the air inlet dispersion plate 2, and an upper gas diffusion cavity 13 is arranged in the center of the top surface of the air inlet dispersion plate 2. The upper gas diffusion cavity 13 is connected to the center end of multiple venting grooves 11, so that multiple venting grooves 11 are interconnected to form a radially arranged gas diffusion surface.

[0047] Furthermore, as shown in the appendix Figure 7 As shown, the vertical graphite inlet pipe 1 is a hollow pipe with a blind hole 18 on its inner surface. The blind hole 18 is located at the center of the vertical graphite inlet pipe 1, and the opening of the blind hole 18 is located at the lower end outlet of the vertical graphite inlet pipe 1. A tapered pipe section 12 is provided at the upper end of the vertical graphite inlet pipe 1, and an inlet threaded pipe 5 is provided at the lower end. The tapered pipe section 12 is connected to the inlet quick-change device 14 in the graphitization furnace body 16, and the inlet threaded pipe 5 is connected to the dispersion disk threaded inlet of the inlet dispersion disk 2 located at the bottom of the vertical graphite crucible 15.

[0048] Furthermore, the top of the blind hole 18 on the inner surface of the center of the vertical graphite inlet pipe 1 extends to the upper end of the outer part of the vertical graphite inlet pipe 1, and a lateral outlet 17 is provided at the end. The lateral outlet 17 is located in the tapered pipe section 12 outside the vertical graphite inlet pipe 1 so as to connect with the quick-change device for air intake in the graphitization furnace. A locking screw 24 is provided at the top of the vertical graphite inlet pipe 1, and a locking nut (not shown in the figure, but a conventional locking nut) is fitted on the locking screw 24. When the vertical graphite inlet pipe 1 is inserted into the quick-change device for air intake 14, the vertical graphite inlet pipe 1 will be locked and positioned by the locking nut 25 and connected to the air passage.

[0049] This utility model is mainly used in vertical graphitization furnaces, as shown in the attached figure. Figure 8As shown, the bottom gas injection system of the vertical graphite crucible is located in the middle of the vertical graphite crucible 15. The lower end of the vertical graphite gas inlet pipe 1 passes through the inner cover 22 of the vertical graphite crucible and is inserted into the bottom of the inner cavity 3 of the vertical graphite crucible, and is connected to the gas inlet dispersion plate 2 located at the bottom of the inner cavity 3 of the vertical graphite crucible. The upper end of the vertical graphite gas inlet pipe 1 is located in the inner cavity 19 of the graphitization furnace shell outside the inner cover 22 of the vertical graphite crucible, and is quickly connected and disconnected with the gas inlet quick-change device 14. The gas inlet quick-change device 14 is also connected to the external gas inlet system device 20. During operation, first place the air inlet dispersion plate 2 at the bottom of the inner cavity 3 of the vertical graphite crucible, then place the boat containing the material to be processed into the air inlet dispersion plate 2. Next, screw the air inlet threaded pipe 5 at the lower end of the vertical graphite air inlet pipe 1 into the dispersion plate threaded air inlet 6 on the top surface of the air inlet dispersion plate 2. Note that the connection should not be too tight; the vertical graphite air inlet pipe 1 needs to have a certain amount of swing room to allow for quick disassembly and reassembly of the air inlet quick-change device. Then, cover the vertical graphite crucible with the inner cover 22, and make sure that the vertical graphite air inlet pipe 1 is properly positioned within the inner cover 22. The air inlet passes through the vertical graphite crucible, and then an outer insulation layer 19 is placed on the inner cover 22 of the vertical graphite crucible. The quick-change air inlet device 14 is then directly connected to the tapered pipe section 12 at the upper end of the vertical graphite air inlet pipe 1. At the same time, the other end of the quick-change air inlet device 14 is connected to the external air inlet system device 20. Then, the outer cover 21 of the graphitization furnace is placed on top, and gas can be injected into the vertical graphite crucible 15 through the external air inlet system device 20. When the gas is discharged, the volatile substances in the vertical graphite crucible 21 are carried out, effectively purifying the environment inside the vertical graphite crucible.

[0050] The beneficial effects of this utility model are:

[0051] This invention utilizes a bottom-injection system for a vertical graphite crucible. During operation in a vertical high-temperature graphitization furnace, a special gas is introduced into the vertical graphite crucible within the furnace chamber. This effectively removes volatile gases from the inner cavity 3 of the crucible, improving the purification cleanliness of the process. The purpose is to allow the injected gas to react with impurities in the heated material within the crucible, forming another gaseous substance. This gas then flows out of the inner cavity 3 of the crucible through a graphite exhaust pipe. This invention offers the following advantages:

[0052] 1. This utility model uses a bottom-injected gas dispersion plate to effectively dilute volatile gaseous substances in a vertical graphite crucible and carry them out of the graphite crucible, thereby reducing the amount of volatile substances in the graphite crucible.

[0053] 2. This utility model ingeniously utilizes a vertical air inlet pipe to directly access the bottom of the vertical graphite crucible, and then blows air evenly from the bottom of the vertical graphite crucible upwards through an air inlet dispersion plate, which can effectively remove volatile gaseous substances inside the vertical graphite crucible during the gas rising and being discharged.

[0054] 3. This utility model introduces a mixture of argon and hydrogen into a vertical graphite crucible via an inlet dispersion plate. This not only effectively isolates the substance to be purified from contact with oxygen or air, further optimizing the purification environment within the vertical graphite crucible and improving the purity of the purification, but also facilitates the utilization of volatile substances through hydrogen replacement.

[0055] It should be noted that the above embodiments are only used to describe the present utility model more clearly, and should not be regarded as limiting the scope of protection covered by the present utility model. Any equivalent modifications should be regarded as falling within the scope of protection covered by the present utility model.

Claims

1. A vertical graphite crucible bottom gas charging device, characterized by: It includes a vertical graphite inlet pipe and an inlet dispersion plate. The inlet dispersion plate is located at the bottom of the inner cavity of the vertical graphite crucible. An inlet channel is provided on the outer side of the top surface of the inlet dispersion plate, which extends from the top surface to the bottom surface of the inlet dispersion plate. The inlet of the inlet channel is a threaded inlet port of the dispersion plate. The lower end of the vertical graphite inlet pipe is a threaded inlet pipe, which is screwed into the threaded inlet port of the dispersion plate. External gas enters the inlet dispersion plate through the vertical graphite inlet pipe and then diffuses evenly from the bottom of the inner cavity of the vertical graphite crucible into the inner cavity of the vertical graphite crucible through the inlet dispersion plate.

2. The bottom gas filling device for a vertical graphite crucible according to claim 1, characterized in that: The bottom surface of the gas inlet dispersion plate is provided with a diffusion chamber and a central gas channel at the center. The central gas channel connects the gas inlet channel and the diffusion chamber. At the same time, multiple diffusion channels are arranged radially around the center of the diffusion chamber on the bottom surface of the gas inlet dispersion plate. Multiple gas diffusion holes are distributed upward on each diffusion channel. The gas entering the bottom surface of the gas inlet dispersion plate is evenly injected into the bottom of the inner cavity of the vertical graphite crucible through multiple gas diffusion holes.

3. The bottom gas filling device for a vertical graphite crucible according to claim 1, characterized in that: The internal threaded hole of the dispersion disc's threaded air inlet connects to the vertical graphite air inlet pipe's threaded air inlet, forming a channel for gas to enter the dispersion disc after connection.

4. The bottom gas filling device for a vertical graphite crucible according to claim 1, characterized in that: The air inlet dispersion plate has a flat structure, and the side shape of the air inlet dispersion plate matches the shape of the inner cavity of the vertical graphite crucible of the high-temperature graphitization furnace. The air inlet dispersion plate is installed at the bottom of the inner cavity of the vertical graphite crucible.

5. The bottom gas filling device for a vertical graphite crucible according to claim 2, characterized in that: The side profile of the air inlet dispersion plate is the same as the inner cavity shape of the vertical graphite crucible, including circular, quadrilateral, and polygonal shapes.

6. The bottom gas filling device for a vertical graphite crucible according to claim 5, characterized in that: On the upper surface of the multiple gas diffusion holes on each diffusion channel, there is a permeable groove that connects the multiple gas diffusion holes. The permeable groove connects the multiple gas diffusion holes on the same diffusion channel to form a permeable zone. The special gas enters the permeable groove through the gas diffusion holes, and then diffuses upward from the boat-shaped vessel inside the vertical graphite crucible through the permeable groove.

7. The bottom gas filling device for a vertical graphite crucible according to claim 6, characterized in that: The breathable groove is an elongated groove with an open top, and the cross-sectional shape of the breathable groove includes "U" shape and "ㄩ" shape.

8. The bottom gas filling device for a vertical graphite crucible according to claim 7, characterized in that: The venting grooves are arranged radially according to the diffusion channels on the bottom surface of the air inlet dispersion plate, and an upper gas diffusion cavity is arranged in the center of the top surface of the air inlet dispersion plate. The upper gas diffusion cavity is connected to the center end of multiple venting grooves, so that multiple venting grooves are interconnected to form a radially arranged gas diffusion surface.

9. The bottom gas filling device for a vertical graphite crucible according to claim 1, characterized in that: The vertical graphite inlet pipe is a hollow pipe with a blind hole on its inner surface. The blind hole is located at the center of the vertical graphite inlet pipe, and its opening is located at the lower end outlet of the vertical graphite inlet pipe. A tapered pipe section is provided at the upper outer end of the vertical graphite inlet pipe, and a threaded inlet pipe is provided at the lower end. The tapered pipe section is connected to the quick-change device for inlet gas in the graphitization furnace, and the threaded inlet pipe is connected to the threaded inlet of the dispersion plate of the inlet dispersion plate located at the bottom of the vertical graphite crucible.

10. The bottom gas filling device for a vertical graphite crucible according to claim 9, characterized in that: The blind hole on the inner surface of the center of the vertical graphite inlet pipe extends from the top of the hole to the upper outer end of the vertical graphite inlet pipe, and a lateral outlet is provided at the end. The lateral outlet is located in the conical pipe section outside the vertical graphite inlet pipe so as to connect with the quick-change device for the inlet gas in the graphitization furnace.

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