A graphite tray baking oven for MOCVD

Abstract

The utility model belongs to metal organic chemical vapor deposition technical field especially is a kind of graphite disc baking tray furnace for MOCVD, including outer box, the inner chamber of outer box is fixedly connected with connecting plate symmetry, several mounting plates are fixedly connected between two connecting plates, and the inside of mounting plate is embedded with several first conveying pipes, and several first conveying pipes are fixedly connected with communicating pipe, the second conveying pipe is penetrated in the inside of connecting plate, and the second conveying pipe is connected with several first conveying pipes by communicating pipe, and the top of mounting plate is equipped with placing plate;The passage opening and closing of communicating pipe can be adjusted, so that during use, the internal high-temperature gas can only circulate in the inside of mounting plate where the graphite disc is placed, and the internal high-temperature environment can be avoided to cause the aging of mounting plate and placing plate when mounting plate and placing plate are not needed.

Description

Technical Field

[0001] This utility model belongs to the field of metal-organic chemical vapor deposition technology, specifically relating to a graphite pan baking oven for MOCVD. Background Technology

[0002] MOCVD graphite disk baking furnaces are devices used to clean the graphite disks that support the substrate during MOCVD epitaxial growth. In the MOCVD process, epitaxial growth materials such as GaN and AlN inevitably adhere to the surface of the graphite disks. Since graphite disks are valuable and need to be recycled, a baking furnace is necessary to clean them and remove residual deposits, preventing abnormal epitaxial growth or even failure. Currently, most baking furnaces are single-layer or multi-layer models. A single-layer baking furnace can only hold one graphite disk at a time. While multi-layer baking furnaces can hold multiple graphite disks for simultaneous processing, when processing multiple disks, the large number of placement plates in a multi-layer furnace leads to a situation where, due to the integrated heating system, the placement plates without graphite disks at the top remain heated. This accelerates the aging of the placement plates, which is detrimental to the long-term use of the baking furnace. Furthermore, the integrated heating system also wastes heat resources in multi-layer baking furnaces. Utility Model Content

[0003] This invention provides a graphite disc baking oven for MOCVD, which allows for adjustment of the opening and closing of the connecting pipe, so that during the use of the entire device, the high-temperature gas inside can only circulate inside the mounting plate on which the graphite disc is placed. This avoids the aging of the mounting plate and the placement plate caused by the high-temperature environment inside when they are not in use.

[0004] This utility model provides the following technical solution: a graphite disc baking oven for MOCVD, comprising an outer casing, with connecting plates symmetrically fixedly connected in the inner cavity of the outer casing, and a plurality of mounting plates fixedly connected between two of the connecting plates, wherein a plurality of first conveying pipes are embedded inside the mounting plates, and a connecting pipe is fixedly connected between the plurality of first conveying pipes, and a second conveying pipe passes through the interior of the connecting plates, and the second conveying pipe is connected to the plurality of first conveying pipes through the connecting pipe, a placement plate is provided on the top of the mounting plate, and sealing rods are symmetrically fixedly connected to both sides of the placement plate, the bottom of the sealing rods passes through the first conveying pipes and extends into the interior of the mounting plate, and a connecting groove is provided at the upper end of the sealing rods, and a plurality of support rods are fixedly connected to the bottom of the placement plate, and the lower ends of the support rods are slidably connected to the mounting plate.

[0005] The mounting plate has several first mounting slots inside, and the support rod is located inside the first mounting slot.

[0006] A heat-conducting plate is provided between several of the first conveying pipes, and the heat-conducting plate is embedded inside the mounting plate.

[0007] The connecting pipe has a second mounting groove at both ends, and the sealing rod is slidably connected to the inside of the second mounting groove.

[0008] The sealing rod and the lower end of the support rod are both fitted with connecting springs, and the tops of several connecting springs are respectively fixedly connected to the bottom outer wall of the second mounting groove and the first mounting groove.

[0009] The bottom of both the support rod and the sealing rod is fixedly connected to a limiting plate, and the bottom of the connecting spring is fixedly connected to the top of the limiting plate.

[0010] The lower end of the second conveying pipe extends to the outside of the outer casing, and the outer end of the second conveying pipe is fixed with an external connector.

[0011] The beneficial effects of this utility model are: with the cooperation of the sealing rod and the connecting groove, the placement plate can adjust the opening and closing of the connecting pipe channel, so that during the use of the entire device, the high-temperature gas inside can only circulate inside the mounting plate containing the graphite disk. On the one hand, this can avoid the aging of the mounting plate and placement plate caused by the high-temperature environment inside when they are not in use. On the other hand, it can accurately heat the placement plate and mounting plate containing the graphite disk, which helps to improve the utilization rate of high-temperature gas.

[0012] The parts of the device not covered herein are the same as or can be implemented using existing technologies. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the front cross-sectional structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the main cross-sectional structure of the placement plate after a graphite disk is placed on top of it in this utility model.

[0015] Figure 3 This is a top sectional view of the mounting plate in this utility model.

[0016] Figure 4 This utility model Figure 2 Enlarged diagram showing details of section A.

[0017] In the diagram: 1. Outer casing; 11. Connecting plate; 2. Mounting plate; 21. Heat-conducting plate; 22. First mounting groove; 23. Second mounting groove; 3. First conveying pipe; 31. Second conveying pipe; 311. External connector; 32. Connecting pipe; 4. Placement plate; 41. Support rod; 42. Sealing rod; 421. Connecting groove; 43. Connecting spring; 44. Limiting plate. Detailed Implementation

[0018] Please see Figures 1-4 The present invention provides the following technical solution: a graphite disc baking oven for MOCVD, comprising an outer casing 1, a connecting plate 11 symmetrically fixedly connected in the inner cavity of the outer casing 1, a plurality of mounting plates 2 fixedly connected between the two connecting plates 11, and a plurality of first conveying pipes 3 embedded in the interior of the mounting plates 2, and a connecting pipe 32 fixedly connected between the plurality of first conveying pipes 3, a second conveying pipe 31 penetrating through the interior of the connecting plate 11, and the second conveying pipe 31 being connected to the plurality of first conveying pipes 3 through the connecting pipe 32, a placement plate 4 provided on the top of the mounting plate 2, and a sealing rod 42 symmetrically fixedly connected on both sides of the placement plate 4, the bottom of the sealing rod 42 penetrating through the first conveying pipe 3 and extending into the interior of the mounting plate 2, a connecting groove 421 opened at the upper end of the sealing rod 42, and a plurality of support rods 41 fixedly connected to the bottom of the placement plate 4, and the lower end of the support rods 41 being slidably connected to the mounting plate 2.

[0019] In this implementation scheme: the outer casing 1 is the outer casing of the entire baking pan oven. The connecting plate 11 located in the outer casing 1 provides a carrier for connecting the mounting plate 2. The mounting plate 2 is a supporting component of the entire baking pan oven and also provides installation space for several first conveying pipes 3. The connecting pipe 32 provides a carrier for connecting the several first conveying pipes 3, allowing them to be interconnected. The second conveying pipe 31 installed in the connecting plate 11 provides a carrier for connecting the several connecting pipes 32 and also supplies high-temperature gas into the connecting pipes 32, allowing steam to enter the first conveying pipes 3 through the connecting pipes 32. The high-temperature gas supplied to the first conveying pipes 3 heats the entire mounting plate 2. Furthermore, since several first conveying pipes 31 are installed inside the mounting plate 2... The conveying pipe 3 enables the high-temperature gas in the second conveying pipe 31 to be conveyed more evenly and to heat the mounting plate 2 more evenly. The placement plate 4 located on top of the mounting plate 2 provides a place for the graphite disc in the heating chamber. At this time, the outer casing 1 forms the basic frame of the entire baking pan oven with the cooperation of the connecting plate 11, the mounting plate 2, the first conveying pipe 3, the second conveying pipe 31, the connecting pipe 32, and the placement plate 4. When the graphite disc needs to be cleaned at high temperature, the graphite disc to be cleaned can be placed on top of the placement plate 4, and the second conveying pipe 31 is connected to the external high-temperature gas, so that the external high-temperature gas can enter the connecting pipe 32 through the second conveying pipe 31 and then enter several first conveying pipes 3 through the connecting pipe 32, providing a high-temperature environment for the mounting plate 2 and the placement plate 4.

[0020] The sealing rod 42 installed at the bottom of the placement plate 4 provides a carrier for the connection between the placement plate 4 and the mounting plate 2. The bottom of the sealing rod 42 connects to the pipe 32. By adjusting the position of the sealing rod 42 within the connecting pipe 32, the opening and closing of the steam conveying channel between the connecting pipe 32 and the second conveying pipe 31 can be adjusted. The connecting groove 421 on the sealing rod 42 provides a channel for high-temperature gas to communicate with the connecting pipe 32. When a graphite disk is placed on top of the placement plate 4, the placement plate 4, under the downward pressure of the graphite disk, can... This movement causes the placement plate 4 to move downwards, bringing its bottom into contact with the top of the mounting plate 2. Simultaneously, as the placement plate 4 moves downwards, it also causes the sealing rod 42 to move downwards within the mounting plate 2. When the bottom of the placement plate 4 reaches the top of the mounting plate 2, the connecting groove 421 on the sealing rod 42 moves within the mounting plate 2 to the connecting pipe 32. At this point, the connecting pipe 32 forms a connecting channel with the first conveying pipe 3 and the second conveying pipe 31, allowing external high-temperature gas to enter the connecting pipe 32 through the second conveying pipe 31 and pass through the connecting pipe... Steam is transferred to the first conveying pipe 32. When the graphite disk is not placed on top of the placement plate 4, the placement plate 4 is in its initial state. In this initial state, the lower end of the blocking rod 42 is located inside the first conveying pipe 3, while the connecting groove 421 is located outside the placement plate 4. At this time, the lower end of the blocking rod 42 can block the internal channel of the connecting pipe 32. In this state, the high-temperature gas in the second conveying pipe 31 cannot enter the first conveying pipe 3. At this time, with the cooperation of the blocking rod 42 and the connecting groove 421, the placement plate 4 can block the internal channel of the connecting pipe 32. The opening and closing of the channel is adjusted so that during the use of the entire device, the high-temperature gas inside can only circulate inside the mounting plate 2 where the graphite disk is placed. On the one hand, this can prevent the high-temperature environment inside the mounting plate 2 and the placement plate 4 from aging when they are not in use. On the other hand, it can accurately heat the placement plate 4 and the mounting plate 2 where the graphite disk is placed, which helps to improve the utilization rate of the high-temperature gas. The support rod 41 located in the mounting plate 2 plays a connecting role and provides a carrier for connecting the placement plate 4 and the mounting plate 2.

[0021] The mounting plate 2 has several first mounting slots 22 inside, and the support rod 41 is located inside the first mounting slot 22; wherein the first mounting slot 22 is used to provide space for the support rod 41 to be installed.

[0022] A heat-conducting plate 21 is provided between several first conveying pipes 3, and the heat-conducting plate 21 is embedded inside the mounting plate 2; wherein the heat-conducting plate 21 plays the role of heat conduction.

[0023] The connecting pipe 32 has a second mounting groove 23 at both ends, and the sealing rod 42 is slidably connected inside the second mounting groove 23; wherein the second mounting groove 23 is used to provide a through channel for the sealing rod 42.

[0024] Both the lower ends of the sealing rod 42 and the support rod 41 are fitted with connecting springs 43. The tops of several connecting springs 43 are respectively fixedly connected to the bottom outer walls of the second mounting groove 23 and the first mounting groove 22; wherein the connecting springs 43 assist the support rod 41 and the sealing rod 42 in resetting.

[0025] The bottom of both the support rod 41 and the sealing rod 42 are fixedly connected to the limiting plate 44, and the bottom of the connecting spring 43 is fixedly connected to the top of the limiting plate 44; the limiting plate 44 plays the role of limiting.

[0026] The lower end of the second conveying pipe 31 extends to the outside of the outer casing 1, and the outer end of the second conveying pipe 31 is fixed with an external connector 311; wherein the external connector 311 is used for installation and connection with external pipes.

[0027] The working principle and usage process of this utility model are as follows: When high-temperature cleaning of the graphite disc is required, the graphite disc is first placed on top of the placement plate 4. At this time, when the placement plate 4 is subjected to the downward pressure of the graphite disc at the top, it can drive the placement plate 4 to move downward, so that the bottom of the placement plate 4 fits against the top of the mounting plate 2. At the same time, when the placement plate 4 moves downward, it can synchronously drive the sealing rod 42 to move downward inside the mounting plate 2. When the bottom of the placement plate 4 moves to the top of the mounting plate 2, the connecting groove 421 on the sealing rod 42 moves to the connecting pipe 32 in the mounting plate 2. At this time, the connecting pipe 32 forms a connecting channel with the first conveying pipe 3 and the second conveying pipe 31, so that the external high-temperature gas can pass through the second... The conveying pipe 31 enters the connecting pipe 32 and transmits steam to the first conveying pipe 3 through the connecting pipe 32. At this time, the internal high-temperature gas conveying channel of the mounting plate 2 with the graphite disk on top is opened, and a high-temperature environment for cleaning the graphite disk is gradually formed under the action of the high-temperature gas, which assists the graphite disk in completing the cleaning work. When the graphite disk is not placed on the top of the placement plate 4, the placement plate 4 is in the initial state. In the initial state, the lower end of the sealing rod 42 is located inside the first conveying pipe 3, while the connecting groove 421 is located outside the placement plate 4. At this time, the lower end of the sealing rod 42 can block the internal channel of the connecting pipe 32, and in this state, the high-temperature gas in the second conveying pipe 31 cannot enter the first conveying pipe 3.

Claims

1. A graphite disc baking oven for MOCVD, comprising an outer casing (1), wherein connecting plates (11) are symmetrically fixedly connected in the inner cavity of the outer casing (1), and a plurality of mounting plates (2) are fixedly connected between two of the connecting plates (11), and a plurality of first conveying pipes (3) are embedded inside the mounting plates (2), and a connecting pipe (32) is fixedly connected between the plurality of first conveying pipes (3), and a second conveying pipe (31) passes through the interior of the connecting plates (11), and the second conveying pipe (31) is connected to the plurality of first conveying pipes (3) through the connecting pipe (32), characterized in that: The top of the mounting plate (2) is provided with a placement plate (4), and the two sides of the placement plate (4) are symmetrically fixedly connected with sealing rods (42). The bottom of the sealing rod (42) passes through the first delivery pipe (3) and extends into the interior of the mounting plate (2). The upper end of the sealing rod (42) is provided with a connecting groove (421). The bottom of the placement plate (4) is fixedly connected with several support rods (41), and the lower end of the support rods (41) is slidably connected to the mounting plate (2).

2. The graphite disc baking oven for MOCVD according to claim 1, characterized in that: The mounting plate (2) has several first mounting slots (22) inside, and the support rod (41) is located inside the first mounting slot (22).

3. The graphite disc baking oven for MOCVD according to claim 1, characterized in that: A heat-conducting plate (21) is provided between several of the first delivery pipes (3), and the heat-conducting plate (21) is embedded inside the mounting plate (2).

4. The graphite disc baking oven for MOCVD according to claim 2, characterized in that: The connecting pipe (32) has a second mounting groove (23) at both ends, and the sealing rod (42) is slidably connected to the inside of the second mounting groove (23).

5. A graphite disc baking oven for MOCVD according to claim 4, characterized in that: The lower ends of the sealing rod (42) and the support rod (41) are both fitted with connecting springs (43), and the tops of several connecting springs (43) are respectively fixedly connected to the bottom outer walls of the second mounting groove (23) and the first mounting groove (22).

6. A graphite disc baking oven for MOCVD according to claim 5, characterized in that: The bottom of the support rod (41) and the sealing rod (42) are both fixedly connected to the limiting plate (44), and the bottom of the connecting spring (43) is fixedly connected to the top of the limiting plate (44).

7. The graphite disc baking oven for MOCVD according to claim 1, characterized in that: The lower end of the second conveying pipe (31) extends to the outside of the outer casing (1), and the outer end of the second conveying pipe (31) is fixed with an external connector (311).

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