A furnace tube reinforcement structure that prevents bursting

Abstract

The utility model provides a kind of anti-burst furnace tube reinforcing structure, it is related to the technical field of boron diffusion high temperature heating, it is applied to furnace tube main body, including reinforcing pillar and positioning support ring;The assembly slot is opened in the side surface of the furnace tube main body;The reinforcing pillar is set in furnace tube main body inboard by fusion, and reinforcing pillar side surface is opened in positioning load groove;The positioning support ring is set in reinforcing pillar side surface by positioning load groove, and positioning support ring side surface is opened in conveying slot, and conveying slot side is fixedly provided with assembly groove;Reinforcing pillar cooperates with positioning support ring and reinforcing cylinder to the two ports and middle section three places of furnace tube main body inside increase quartz square support structure, ensure that furnace tube main body has enough supporting force under external pressure extrusion to reduce the condition of pipe burst.

Description

Technical Field

[0001] This utility model belongs to the technical field of boron diffusion high-temperature heating, and more specifically, it relates to a furnace tube reinforcement structure to prevent cracking. Background Technology

[0002] Boron diffusion is a high-temperature heating method. Under low pressure, BCl3 is passed through the silicon wafer. During the high-temperature diffusion process, BBr3 undergoes decomposition reactions, producing boron atoms. These boron atoms react with silicon on the wafer surface, generating intermediate products such as borosilicate compounds. These intermediate products, under further high temperature, allow boron atoms to gradually penetrate the silicon lattice, achieving boron diffusion within the silicon. On materials such as n-type silicon substrates, boron diffusion can form p-type semiconductor layers on their surface or in specific areas, laying the foundation for subsequent pn junction structures. The highest process temperature is 1500 degrees Celsius. The furnace tube is made of quartz material, and for better thermal conductivity, the inner wall thickness is 3mm. Under prolonged high temperature and external pressure, the furnace tube is prone to cracking.

[0003] Based on the above, the current boron expansion process uses circular straight-cylinder furnace tubes. Since boron expansion is a low-pressure process with a furnace tube pressure of 120 Pa and a furnace tube temperature of 1050 degrees Celsius, the furnace tubes are prone to bursting after more than two months of operation due to the high temperature and external pressure. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model provides a crack-resistant furnace tube reinforcement structure. This addresses the issue that the current boron expansion process uses circular straight-cylinder furnace tubes, which are low-pressure processes with an internal pressure of 120 Pa and an internal temperature of 1050 degrees Celsius. Under these conditions of high temperature and external pressure, the furnace tubes are prone to bursting after more than two months of operation.

[0005] This utility model discloses a furnace tube reinforcement structure to prevent cracking, which is achieved by the following specific technical means:

[0006] A furnace tube reinforcement structure to prevent shattering, applied to the furnace tube body, includes: a reinforcement support and a positioning support ring;

[0007] The furnace tube body has an assembly slot on its side; the reinforcing support is fixedly installed inside the furnace tube body by welding, and the reinforcing support has a positioning slot on its side; the positioning support ring is installed on the side of the reinforcing support through the positioning slot, the positioning support ring has a conveying slot on its side, the conveying slot has an assembly slot fixedly installed on its side, the assembly slot has a reinforcing cylinder fixedly installed inside its side, and the positioning support ring and the reinforcing cylinder are fixedly connected to the inner wall of the reinforcing support by welding.

[0008] Furthermore, the reinforcing support pillars are provided in four sets.

[0009] Furthermore, two sets of reinforcing supports are fixedly installed on the side of the reinforced support.

[0010] Furthermore, the reinforced cylindrical joint is provided in four sets.

[0011] Furthermore, the inner side of the furnace tube body is also fixedly filled with reinforcing wires.

[0012] Furthermore, the inner side of the assembly slot is also provided with: a heat-conducting support ring, a heat dissipation outer tube, and a flow-guiding slot; the heat-conducting support ring is fixedly installed inside the assembly slot, the heat dissipation outer tube is fixedly sleeved on the outer side of the heat-conducting support ring, and the flow-guiding slot is opened on the side of the heat dissipation outer tube.

[0013] The furnace tube reinforcement structure for preventing cracking provided by this utility model has the following beneficial effects:

[0014] This utility model achieves the following optimization effects by incorporating a reinforcing support and a positioning ring into the main body of the furnace tube:

[0015] Through high-temperature welding process, the reinforcing support column is first fixedly assembled with the strengthening support column, and then welded with the positioning support ring in conjunction with the positioning slot. The positioning support ring is then welded with the reinforcing cylinder by means of conveying slot and assembly slot. The reinforcing support column is fixed to the inside of the furnace tube body by high-temperature welding, and the positioning support ring is precisely supported to form a three-point distribution at the two ends and the middle section of the furnace tube body. At the same time, the positioning support ring and the reinforcing cylinder are also firmly combined with the furnace tube body by high-temperature welding.

[0016] By reinforcing the structure, a quartz square support structure is formed at the two ends and the middle section of the furnace tube body. This structure consists of reinforcing pillars, positioning support rings and reinforcing cylinders. This structure can effectively improve the extrusion resistance of the furnace tube body, provide sufficient support when subjected to external pressure, significantly reduce the risk of tube bursting due to excessive pressure, and ensure the stability and safety of furnace tube operation.

[0017] By installing reinforcing wires inside the furnace tube body, the reinforcing wires pull and fix the broken pieces of the furnace tube body after the furnace tube body explodes, so that the furnace tube remains fixed as one piece after the explosion, preventing the furnace tube body from flying and causing danger. The heat-conducting support ring, together with the flow-guiding groove, allows the heat dissipation outer pipe to conduct heat to the furnace tube body in an auxiliary way, further preventing the furnace tube body from being exploded due to excessive high temperature. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall assembly of the furnace tube of this utility model;

[0019] Figure 2 This is a schematic diagram of a partial cross-sectional view of the overall assembly of the furnace tube according to this utility model.

[0020] Figure 3 This is a schematic diagram of the assembly and disassembly of the main components of the furnace tube of this utility model;

[0021] Figure 4 This is a structural diagram illustrating the assembly and disassembly of the integral components of the reinforced support structure of this utility model;

[0022] Figure 5 This is a schematic diagram of the overall assembly and disassembly of the positioning support ring structure of this utility model.

[0023] Figure label:

[0024] 1. Furnace tube body;

[0025] 101. Reinforcing wire; 102. Assembly slotting; 103. Thermal conductive support ring; 104. Heat dissipation outer tube; 105. Airflow guiding slotting;

[0026] 2. Reinforce the support pillars;

[0027] 201. Reinforced support column; 202. Positioning slot;

[0028] 3. Positioning support ring;

[0029] 301. Conveying grooves; 302. Assembling support grooves; 303. Reinforcing cylinders. Detailed Implementation

[0030] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples.

[0031] Example 1: As Figures 1 to 5 As shown, the present invention provides a furnace tube anti-explosion reinforcement structure, which is applied to the furnace tube body 1 and includes: a reinforcement support 2 and a positioning support ring 3;

[0032] The furnace tube body 1 has an assembly slot 102 on its side; the reinforcing support column 2 is fixedly installed inside the furnace tube body 1 by welding, and the reinforcing support column 2 has a positioning slot 202 on its side; the positioning support ring 3 is installed on the side of the reinforcing support column 2 through the positioning slot 202, the positioning support ring 3 has a conveying slot 301 on its side, the conveying slot 301 has an assembly slot 302 fixedly installed on its side, the assembly slot 302 has a reinforcing cylinder 303 fixedly installed inside its inner side, and the positioning support ring 3 and the reinforcing cylinder 303 are fixedly connected to the inner wall of the reinforcing support column 2 by welding.

[0033] Example 2: Figures 2 to 5 As shown, there are four sets of reinforcing pillars 2; two sets of reinforcing pillars 201 are also fixedly installed on the side of the reinforcing pillars 2; four sets of reinforcing cylinders 303 are connected; the reinforcing pillars 201 can provide reinforcement support for the reinforcing pillars 2 to bear the load.

[0034] Example 2: Figures 2 to 5 As shown, the inner side of the furnace tube body 1 is also fixedly filled with reinforcing wires 101; the inner side of the assembly slot 102 is also provided with: a heat-conducting support ring 103, a heat dissipation outer tube 104 and a flow-guiding slot 105; the heat-conducting support ring 103 is fixedly installed inside the assembly slot 102, the heat dissipation outer tube 104 is fixedly sleeved on the outside of the heat-conducting support ring 103, and the flow-guiding slot 105 is opened on the side of the heat dissipation outer tube 104; the reinforcing wires 101 can prevent the furnace tube body 1 from cracking and splashing.

[0035] The specific usage and function of this embodiment are as follows: In use, the reinforcing support column 2 is fixedly assembled to the strengthening support column 201 by high-temperature welding. At the same time, the reinforcing support column 2, together with the positioning support groove 202, is assembled to the positioning support ring 3 by high-temperature welding. The positioning support ring 3, together with the conveying groove 301 and the assembly support groove 302, is assembled to the reinforcing cylinder 303 by high-temperature welding. The reinforcing support column 2 is assembled to the inner side of the furnace tube body 1 by high-temperature welding, so that the reinforcing support column 2 supports the positioning support ring 3 and is set at the two ends and the middle section of the furnace tube body 1. The positioning support ring 3 and the reinforcing cylinder 303 are assembled to the furnace tube body 1 by high-temperature welding, so that the reinforcing support column 2, together with the positioning support ring 3 and the reinforcing cylinder 303, reinforces the furnace tube body 1 to prevent cracking. The reinforcing wire 101 is set to the inner side of the furnace tube body 1 so that the furnace tube remains fixed as a whole after cracking.

Claims

1. A crack-resistant furnace tube reinforcement structure, applied to the furnace tube body (1), comprising: Reinforced support column (2) and positioning support ring (3); The furnace tube body (1) has an assembly slot (102) on its side; the reinforcing support column (2) is fixedly installed on the inner side of the furnace tube body (1) by welding, and the reinforcing support column (2) has a positioning slot (202) on its side; the positioning support ring (3) is installed on the side of the reinforcing support column (2) through the positioning slot (202), the positioning support ring (3) has a conveying slot (301) on its side, the conveying slot (301) has an assembly slot (302) fixedly installed on its side, the assembly slot (302) has a reinforcing cylinder (303) fixedly installed inside the assembly slot (302), and the positioning support ring (3) and the reinforcing cylinder (303) are fixedly connected to the inner wall of the reinforcing support column (2) by welding.

2. The explosion-proof furnace tube reinforcement structure according to claim 1, characterized in that, The reinforced support column (2) is provided in four sets.

3. The explosion-proof furnace tube reinforcement structure according to claim 1, characterized in that, The side of the reinforced support column (2) is also fixedly provided with a strengthening support column (201), and there are two sets of strengthening support columns (201).

4. The explosion-proof furnace tube reinforcement structure according to claim 1, characterized in that, The reinforced cylinder (303) has four sets of docking connections.

5. The explosion-proof furnace tube reinforcement structure according to claim 1, characterized in that, The inner side of the furnace tube body (1) is also fixedly filled with reinforcing wires (101).

6. The explosion-proof furnace tube reinforcement structure according to claim 1, characterized in that, The inner side of the assembly slot (102) is also provided with: a heat-conducting support ring (103), a heat dissipation outer tube (104) and a flow-guiding slot (105); the heat-conducting support ring (103) is fixedly disposed inside the assembly slot (102), the heat dissipation outer tube (104) is fixedly sleeved on the outside of the heat-conducting support ring (103), and the flow-guiding slot (105) is opened on the side of the heat dissipation outer tube (104).

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