Opening and closing mechanism and production apparatus

Abstract

The application discloses an opening and closing mechanism and production equipment, and relates to the technical field of semiconductor processing. The opening and closing mechanism comprises a movement assembly and a driving assembly. The movement assembly comprises a movement piece and a guide piece. The movement piece comprises a first end portion and a second end portion. The first end portion is rotationally connected to a processing furnace. The first end portion is used for driving a locking piece to rotate relative to the processing furnace. The guide piece is provided with a limiting cavity. The second end portion is arranged in the limiting cavity. The size of the limiting cavity along at least two different preset directions is greater than the size of the second end portion along the corresponding preset direction. The preset direction is parallel to the rotation plane of the movement piece relative to the processing furnace. The driving assembly is used for driving the movement piece to rotate relative to the processing furnace. The opening and closing mechanism has the advantages of convenient disassembly and maintenance.

Description

Technical Field

[0001] This application relates to, but is not limited to, the field of semiconductor processing technology, and in particular to an opening and closing mechanism and production equipment. Background Technology

[0002] The production equipment includes a processing furnace. The furnace door is locked or unlocked by a locking device. To facilitate the movement of the locking device, an opening and closing mechanism is usually provided. The components of the opening and closing mechanism are engaged by rotation or other means. Because the engagement is tight, it is difficult to disassemble and assemble, and it is not convenient for later maintenance. Utility Model Content

[0003] The opening and closing mechanism and production equipment provided in this application embodiment are easy to disassemble and maintain, and can also reduce wear and extend service life. Specifically, this is achieved through the following solutions:

[0004] In a first aspect, embodiments of this application provide an opening and closing mechanism disposed between a processing furnace and a locking member in a production equipment. The opening and closing mechanism includes a motion component and a drive component. The motion component includes a moving part and a guide part. The moving part includes a first end and a second end. The first end is rotatably connected to the processing furnace and is used to drive the locking member to rotate relative to the processing furnace. The guide part is provided with a limiting cavity, and the second end is disposed in the limiting cavity. The dimension of the limiting cavity along at least two different preset directions is greater than the dimension of the second end along the corresponding preset direction. The preset directions are parallel to the rotation plane of the moving part relative to the processing furnace. The drive component drives the moving part to rotate relative to the processing furnace through the guide part.

[0005] The opening and closing mechanism provided in this embodiment is disposed between the processing furnace and the locking member of the production equipment. The moving component of the opening and closing mechanism includes a moving member and a guide member. The first end of the moving member is rotatably connected to the processing furnace. The driving component of the opening and closing mechanism drives the moving member to move through the guide member. The first end of the moving member is used to drive the locking member to rotate relative to the processing furnace, so as to realize the locking member locking and unlocking of the processing furnace. Based on this, the guide member includes a limiting cavity. The second end of the moving member is disposed in the limiting cavity. The dimension of the limiting cavity along at least two different preset directions is larger than the dimension of the second end along the corresponding preset direction. The preset directions are parallel to the rotation plane of the moving member relative to the processing furnace. Since the dimension of the limiting cavity along multiple preset directions is larger than the dimension of the second end along the corresponding preset direction, on the one hand, the restriction of the limiting cavity on the second end can be reduced, which facilitates the disassembly and assembly of the second end relative to the guide member; on the other hand, the contact between the second end and the limiting cavity can be reduced, so as to reduce the mutual wear between the second end and the guide member. Compared with the related technologies where the components of the opening and closing mechanism are tightly fitted, the opening and closing mechanism of the present application embodiment, by setting a larger limiting cavity, can not only facilitate disassembly and maintenance, but also reduce wear and extend service life.

[0006] In some implementations of this application, at least two preset directions include a first direction, which is the rotation direction of the second end relative to the processing furnace. The movement of the second end relative to the processing furnace has a first state and a second state. In the first state, the second end abuts against the inner wall of the limiting cavity along the first direction. In the second state, the second end separates from the inner wall of the limiting cavity along the first direction.

[0007] Here, the dimension of the limiting cavity along the first direction is larger than the dimension of the second end along the first direction, so that the movement of the second end relative to the processing furnace has a first state and a second state. In the second state, the second end separates from the inner wall of the limiting cavity along the first direction, thereby reducing the contact between the second end and the inner wall of the limiting cavity, so as to reduce the mutual wear between the second end and the guide.

[0008] In some implementations of this application, the limiting cavity has a limiting surface, which can abut against the second end in a preset direction. The limiting surface is a curved surface and has a corresponding axis. The axis of the limiting surface is parallel to the rotation axis of the moving part relative to the processing furnace.

[0009] Here, the limiting surface is set as a curved surface, and the axis of the limiting surface is parallel to the rotation axis of the moving part relative to the processing furnace, so that the limiting surface can limit the second end from multiple directions, reducing the possibility of the second end coming out of the limiting surface. In addition, the limiting surface is set as a curved surface, which helps to improve the smoothness of the limiting surface and reduce wear.

[0010] In some implementations of this application, the second end includes a body part and a rotating part, the rotating part is rotatably connected to the body part, the rotating part extends into the limiting cavity, and the rotating part is able to rotate relative to the limiting cavity.

[0011] Here, the rotating part and the main body at the second end are rotatably connected so that the rotating part can rotate relative to the main body. The rotating part extends into the limiting cavity and can rotate relative to the limiting cavity. Compared with the sliding part, the rotating part in the rotating setting experiences less friction, which helps to reduce wear and improve the service life of the opening and closing mechanism.

[0012] In some implementations of this application, the drive assembly is fixedly arranged relative to the processing furnace. The drive assembly includes an output shaft, which is connected to a guide. The output shaft is telescopically arranged, and the telescopic direction of the output shaft is parallel to the rotation plane.

[0013] Here, the drive assembly is fixed relative to the processing furnace, and the output shaft of the drive assembly is extended and retracted along the direction parallel to the plane of rotation so that the drive guide can drive the moving parts. The motion trajectory of each component is relatively simple and is not prone to interference. Moreover, the overall swing amplitude of the mechanism is small and is not likely to cause vibration of the processing furnace.

[0014] In some implementations of this application, the opening and closing mechanism further includes a positioning component, which includes two limiting members. The limiting members are fixedly arranged relative to the processing furnace, and the moving part is restricted to move relative to the processing furnace between the two limiting members.

[0015] Here, by setting a positioning component, the limiting component of the positioning component is fixed relative to the processing furnace. The limiting component can restrict the movement of the moving part. The moving part is restricted to move between two limiting components so that the moving part can move within a preset stroke, which facilitates accurate positioning of the moving part.

[0016] In some implementations of this application, the positioning component further includes a controller and a sensor. The sensor is connected to the limiting member and electrically connected to the controller. The sensor can be triggered by the moving part, and the controller determines the position of the moving part relative to the processing furnace based on the triggering state of the sensor.

[0017] Here, a sensor is set at the position of the limit component. The sensor is electrically connected to the controller. When the moving part moves into position and abuts the limit component, the moving part can trigger the sensor. The controller can determine the position of the moving part relative to the processing furnace based on the triggering state of the sensor, so as to determine whether the processing furnace is unlocked or locked, thereby improving the intelligence of the opening and closing mechanism.

[0018] In some implementations of this application, the driving component includes a driving element respectively provided for each moving component; the driving component also includes a diverter, which is provided with a diverter end for each driving component, and a commutator is provided between the diverter end and the corresponding driving component. The commutator includes two commutator ends, and the driving component includes two driving ends. The two commutator ends of the commutator are respectively connected to the two driving ends of the corresponding driving component. The commutator can change the output state of the commutator ends to switch the output direction of the driving component.

[0019] Here, by setting up a shunt and a commutator, with the commutator positioned between the shunt and the corresponding drive, the shunt can enable the synchronous start and stop of multiple drive components, and each drive component can have its output direction adjusted individually by the corresponding commutator, making the driving method more flexible.

[0020] In some implementations of this application, the driving component includes a driving element respectively provided for each moving component; the driving component also includes a commutator, which includes two commutator ends, and the two commutator ends are respectively connected to a shunt element. Each driving component is provided with a shunt end, and the driving component includes two driving ends. The two driving ends of the driving component are respectively connected to the shunt ends of different shunt elements. The commutator can change the output state of the commutator ends to switch the output direction of the driving component.

[0021] Here, by setting up a commutator and a shunt, with the shunt positioned between the commutator and multiple drive components, the commutator can synchronize the output direction of multiple drive components, thereby improving the coordination and drive consistency of multiple drive components.

[0022] Secondly, embodiments of this application provide a production device, including a processing furnace, a door lock, and an opening and closing mechanism as described in the first aspect. The processing furnace includes a furnace body and a furnace door that are movably connected. The door lock is disposed between the furnace body and the furnace door and includes a locking member for locking or unlocking the processing furnace relative to the furnace body. The opening and closing mechanism is connected to the processing furnace and the locking member respectively.

[0023] The production equipment provided in this application includes an opening and closing mechanism. The opening and closing mechanism is provided with a large-sized limiting cavity. The second end of the moving part is disposed in the limiting cavity, which can facilitate the disassembly and maintenance of the moving part and the guide part, reduce the wear of both, and improve their service life. Attached Figure Description

[0024] Figure 1 A schematic diagram of the structure of the production equipment provided in the embodiments of this application;

[0025] Figure 2 This is a schematic diagram of the opening and closing mechanism provided in an embodiment of this application;

[0026] Figure 3 One of the displacement diagrams of the moving parts and guide parts in the opening and closing mechanism provided in the embodiments of this application;

[0027] Figure 4 The second schematic diagram of the displacement of the moving parts and guide parts in the opening and closing mechanism provided in the embodiments of this application;

[0028] Figure 5 The third schematic diagram of the displacement of the moving parts and guide parts in the opening and closing mechanism provided in the embodiments of this application;

[0029] Figure 6 Fourth of four schematic diagrams illustrating the displacement of the moving parts and guide parts in the opening and closing mechanism provided in the embodiments of this application;

[0030] Figure 7 Fifth of five schematic diagrams illustrating the displacement of the moving parts and guide parts in the opening and closing mechanism provided in the embodiments of this application;

[0031] Figure 8 A schematic diagram of the geometric relationship of the opening and closing mechanism provided in the embodiments of this application;

[0032] Figure 9 One of the structural schematic diagrams of the diverter and reversing component in the opening and closing mechanism provided in the embodiments of this application;

[0033] Figure 10This is the second schematic diagram of the structure of the diverter and reversing component in the opening and closing mechanism provided in the embodiments of this application.

[0034] Figure label:

[0035] 100-Motion assembly; 110-Motion component; 111-First end; 112-Second end; 1121-Body part; 1122-Rotating part; 120-Guide; 121-Limiting cavity; 1211-Limiting surface; 200-Drive assembly; 210-Driver; 220-Diverter; 221-Diverter end; 230-Reversing component; 231-Reversing end; 300-Positioning assembly; 310-Limiting component; 320-Sensor; 400-Processing furnace; 410-Furnace body; 420-Furnace door; 500-Door lock; 510-Locking component; 520-Matching structure; F R - First direction. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the specific technical solutions of this application will be further described in detail below with reference to the accompanying drawings of the embodiments of this application. The following embodiments are used to illustrate this application, but are not intended to limit the scope of this application.

[0037] In the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0038] Furthermore, in the embodiments of this application, directional terms such as "upper," "lower," "left," and "right" are defined relative to the positions in which the components are schematically placed in the accompanying drawings. It should be understood that these directional terms are relative concepts, used for relative description and clarification, and can change accordingly depending on the position of the components in the accompanying drawings.

[0039] In the embodiments of this application, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0040] In embodiments of this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0041] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0042] This application provides a production equipment, which may be a lithography equipment, etching equipment, deposition equipment, implantation equipment, polishing equipment, cleaning equipment, testing equipment, or packaging equipment on a semiconductor production line. In some examples, the production equipment includes a vertical furnace tube machine.

[0043] In some technical solutions, the production equipment includes a processing furnace. The furnace door is locked or unlocked by a locking component. To facilitate the movement of the locking component, an opening and closing mechanism is usually provided. The components of the opening and closing mechanism cooperate by rotation or other means. Because the cooperation is relatively tight, it is difficult to disassemble and install, and it is not convenient for later maintenance.

[0044] For example, an integrated linkage drives the locking component to move, but because the linkage swings a large range, it can easily cause an increase in the vibration frequency of the equipment, generating debris. Furthermore, due to the large wear, the maintenance cost is high. In addition, the integrated linkage is prone to interference under severe wear conditions, and the debris generated by the wear can also contaminate semiconductors, such as contaminating the wafer, affecting the circuit performance of the product and posing a high safety hazard, thus leading to the scrapping of the wafer.

[0045] Therefore, embodiments of this application also provide an opening and closing mechanism, referring to... Figure 1 , Figure 2 and Figure 3An opening and closing mechanism is disposed between the processing furnace 400 and the locking member 510 of the production equipment. The opening and closing mechanism includes a motion component 100 and a drive component 200. The motion component 100 includes a moving member 110 and a guide member 120. The moving member 110 includes a first end 111 and a second end 112. The first end 111 is rotatably connected to the processing furnace 400 and is used to drive the locking member 510 to rotate relative to the processing furnace 400. The guide member 120 is provided with a limiting cavity 121. The second end 112 is disposed in the limiting cavity 121. The dimension of the limiting cavity 121 along at least two different preset directions is greater than the dimension of the second end 112 along the corresponding preset directions. The preset directions are parallel to the rotation plane of the moving member 110 relative to the processing furnace 400. The drive component 200 drives the moving member 110 to rotate relative to the processing furnace 400 through the guide member 120.

[0046] In some examples, the processing furnace 400 includes a furnace body 410 and a furnace door 420 that are movably connected. The furnace body 410 is used to house and process semiconductors, and the furnace door 420 can be opened or closed relative to the furnace body 410. A locking member 510 is used to lock or unlock the furnace door 420 relative to the furnace body 410. It should be noted that the opening / closing mechanism and the locking member 510 can be connected to the furnace door 420 or the furnace body 410. For example, both the opening / closing mechanism and the locking member 510 are located on the furnace door 420.

[0047] In some examples, the moving part 110 and the locking part 510 are fixed together by means of bonding, welding, snap-fitting or fastener connection. The moving part 110 has an unlocked position and a locked position relative to the furnace door 420. When the moving part 110 is in the unlocked position, the locking part 510 unlocks the furnace door 420 and the furnace body 410 relative to each other, and the furnace door 420 can be opened or closed relative to the furnace body 410. When the moving part 110 is in the locked position, the locking part 510 locks the furnace door 420 and the furnace body 410 relative to each other, and the furnace door 420 is closed relative to the furnace body 410 and its opening is restricted.

[0048] In this embodiment, the moving member 110 can be a block structure, a plate structure, or a rod structure, etc.; in some examples, the moving member 110 is a rod structure with a rectangular cross section, and the first end 111 and the second end 112 are located at the two ends of the moving member 110 along the length direction, respectively.

[0049] In some examples, the preset direction is a linear direction; in other examples, the preset direction is a rotational direction. The preset direction is the direction of rotation of any parallel moving part 110 relative to the processing furnace 400, and this application embodiment does not limit this. For example, the preset direction includes the extending direction of the moving part 110, and the preset direction includes the movement direction of the moving part 110 relative to the processing furnace 400.

[0050] In this embodiment, the drive assembly 200 includes a drive member 210, which drives the guide member 120 to move the moving member 110 relative to the processing furnace 400. In some examples, the drive member 210 is a device that rotates the output shaft, such as a motor or a rotary cylinder; the motor can be a servo motor, a stepper motor, etc. In other examples, the drive member 210 is a device that linearly moves the output shaft, such as a hydraulic cylinder, a pneumatic cylinder, or an electric telescopic rod.

[0051] In some examples, the output shaft of the drive member 210 is directly connected to the guide member 120; in other examples, the output shaft of the drive member 210 is indirectly connected to the guide member 120 through a transmission mechanism, which may be one or more combinations of gear mechanism, rack and pinion mechanism, cam mechanism, ratchet mechanism, Geneva mechanism, worm gear mechanism, ball screw mechanism, belt drive mechanism, chain drive mechanism and linkage mechanism.

[0052] For example, the drive component 210 is a cylinder, and the output shaft of the drive component 210 is fixedly connected to the guide component 120. The guide component 120 moves relative to the processing furnace 400 along the extension and retraction direction of the drive component 210.

[0053] The technical solution provided in this application embodiment has an opening and closing mechanism disposed between the processing furnace 400 and the locking member 510 of the production equipment. The motion component 100 of the opening and closing mechanism includes a moving member 110 and a guide member 120. The first end 111 of the moving member 110 is rotatably connected to the processing furnace 400. The drive component 200 of the opening and closing mechanism drives the moving member 110 to move through the guide member 120. The first end 111 of the moving member 110 is used to drive the locking member 510 to rotate relative to the processing furnace 400, so as to realize the locking member 510 locking and unlocking the processing furnace 400.

[0054] Based on this, the guide 120 includes a limiting cavity 121, and the second end 112 of the moving member 110 is disposed in the limiting cavity 121. The dimension of the limiting cavity 121 along at least two different preset directions is greater than the dimension of the second end 112 along the corresponding preset direction. The preset directions are parallel to the rotation plane of the moving member 110 relative to the processing furnace 400. Since the dimension of the limiting cavity 121 along multiple preset directions is greater than the dimension of the second end 112 along the corresponding preset direction, on the one hand, the restriction of the limiting cavity 121 on the second end 112 can be reduced, which facilitates the assembly and disassembly of the second end 112 relative to the guide 120; on the other hand, the contact between the second end 112 and the limiting cavity 121 can be reduced, so as to reduce the mutual wear between the second end 112 and the guide 120.

[0055] Compared with the related technologies where the components of the opening and closing mechanism are tightly fitted, the opening and closing mechanism of this application embodiment, by setting a larger limiting cavity 121, can not only facilitate disassembly and maintenance, but also reduce wear and extend service life.

[0056] Reference Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some embodiments of this application, at least two preset directions include a first direction F. R First direction F R The rotation direction of the second end 112 relative to the processing furnace 400 has a first state and a second state. In the first state, the second end 112 and the inner wall of the limiting cavity 121 move along the first direction F. R In the second state, the second end 112 and the inner wall of the limiting cavity 121 are in contact along the first direction F. R Separation.

[0057] In some examples, the limiting cavity 121 has a first inner wall and a second inner wall, which are the opposite inner walls of the limiting cavity 121. When the guide 120 drives the moving member 110 to move relative to the processing furnace 400, the second end 112 abuts against the first inner wall, or the second inner wall abuts against the second inner wall.

[0058] Reference Figure 3 , Figure 4 and Figure 5 When the furnace door 420 is unlocked, the drive member 210 drives the guide member 120 to move until the first inner wall abuts against the second end 112. The drive member 210 continues to drive the guide member 120 to move. Under the abutment action of the first inner wall, the moving member 110 rotates from the locked position to the unlocked position along the first rotation direction until the moving member 110 moves to the unlocked position; refer to Figure 4 , Figure 6 and Figure 7 When the furnace door 420 is locked, the drive member 210 drives the guide member 120 to move until it abuts against the second end 112 on the second inner wall. The drive member 210 continues to drive the guide member 120 to move. Under the abutment action of the second inner wall, the moving member 110 rotates in the second rotation direction from the unlocked position to the locked position until the moving member 110 moves to the locked position. The first rotation direction and the second rotation direction are opposite directions.

[0059] The technical solution provided in this application embodiment has a limiting cavity 121 along the first direction F. R The size is larger than the second end 112 along the first direction F R The dimensions are such that the movement of the second end 112 relative to the processing furnace 400 has a first state and a second state. In the second state, the second end 112 is in contact with the inner wall of the limiting cavity 121 along the first direction F. RSeparation reduces the contact between the second end 112 and the inner wall of the limiting cavity 121, thereby reducing mutual wear between the second end 112 and the guide 120.

[0060] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some embodiments of this application, the limiting cavity 121 has a limiting surface 1211, which can abut against the second end 112 in a preset direction. The limiting surface 1211 is a curved surface and has a corresponding axis. The axis of the limiting surface 1211 is parallel to the rotation axis of the moving member 110 relative to the processing furnace 400.

[0061] In some examples, the axis corresponding to the limiting surface 1211 is its axis of rotation or axis of symmetry. For example, the limiting surface 1211 is an elliptical ring structure, and its axis of symmetry is its axis of symmetry; or, for another example, the limiting surface 1211 is a circular ring structure, and its axis of rotation is its axis of rotation. Furthermore, the limiting surface 1211 can also be a racetrack-shaped ring structure, and it can be a closed or open surface.

[0062] In some examples, the size of the limiting cavity 121 in the guide 120 is much larger than the size of the rotating part 1122. For example, the ratio of the radius of the limiting cavity 121 to the radius of the rotating part 1122 is greater than or equal to 1.5 and less than or equal to 15. Of course, the ratio can also be any other value greater than 1. This application embodiment does not limit this.

[0063] In some examples, the extension direction of the limiting surface 1211 is at an angle to the rotation axis of the moving member 110, such as an acute angle or an obtuse angle, that is, the limiting cavity 121 is a variable diameter structure; in other examples, the extension direction of the limiting surface 1211 is parallel to the rotation axis of the moving member 110, that is, the limiting cavity 121 is a constant diameter structure.

[0064] In some examples, the limiting cavity 121 is a groove structure, and the limiting cavity 121 has an opening on the side of the guide 120 near the moving member 110; in other examples, the limiting cavity 121 is a hole structure, and the limiting cavity 121 penetrates the guide 120 along the rotation axis of the moving member 110 and the processing furnace 400.

[0065] The technical solution provided in this application embodiment is that the limiting surface 1211 is set as a curved surface, and the axis of the limiting surface 1211 is parallel to the rotation axis of the moving member 110 relative to the processing furnace 400, so that the limiting surface 1211 can limit the second end 112 from multiple directions, reducing the possibility of the second end 112 coming out of the limiting surface 1211. In addition, the limiting surface 1211 is set as a curved surface, which facilitates the improvement of the smoothness of the limiting surface 1211 and reduces wear.

[0066] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some embodiments of this application, the second end portion 112 includes a body portion 1121 and a rotating portion 1122. The rotating portion 1122 is rotatably connected to the body portion 1121, extends into the limiting cavity 121, and is capable of rotating relative to the limiting cavity 121.

[0067] In this embodiment, the rotating part 1122 can be one of a roller, a ball, a ball bearing, and a needle roller; for example, the rotating part 1122 is a roller rotatably connected to the body part 1121.

[0068] In some examples, the rotating part 1122 remains in contact with the inner wall of the limiting cavity 121, while in other examples, the rotating part 1122 has a rolling state in contact with the inner wall of the limiting cavity 121 and a separated state that is separated from the inner wall of the limiting cavity 121.

[0069] In some examples, the body portion 1121 is located on the side of the guide 120 facing the furnace door 420; in other examples, the body portion 1121 is located on the side of the guide 120 away from the furnace door 420.

[0070] In the technical solution provided in this application embodiment, the rotating part 1122 and the main body part 1121 of the second end 112 are rotatably connected so that the rotating part 1122 can rotate relative to the main body part 1121. The rotating part 1122 extends into the limiting cavity 121 and can rotate relative to the limiting cavity 121. Compared with the sliding setting, the rotating part 1122 is subjected to less friction, which helps to reduce wear and improve the service life of the opening and closing mechanism.

[0071] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some embodiments of this application, the drive assembly 200 includes an output shaft connected to the guide 120. The output shaft of the drive assembly 200 is telescopically configured, and the telescopic direction of the output shaft is parallel to the rotation plane.

[0072] In some examples, the drive component 210 of the drive assembly 200 is fixed to the furnace door 420. The drive component 210 is an electric telescopic rod or a cylinder. The output shaft of the drive component 210 is telescopically extended along the normal direction of the trajectory circle of the second end 112. The output shaft of the drive component 210 is fixedly connected to the guide component 120. The guide component 120 moves along the normal direction of the trajectory circle of the second end 112. The moving component 110 swings relative to the furnace door 420 and drives the locking component 510 to rotate relative to the furnace door 420.

[0073] Reference Figure 2 and Figure 8 In some examples, the dimensions of the drive member 210, the moving member 110, and the guide member 120 satisfy the following relationship:

[0074]

[0075] The following formula is obtained by reorganizing:

[0076]

[0077] In the formula:

[0078] L is the length dimension of the moving part 110, that is, the dimension from the first end 111 to the second end 112 of the moving part 110, in millimeters (mm);

[0079] θ is the rotation angle of the moving part 110, that is, the maximum rotation angle of the moving part 110 between the locked position and the unlocked position, and the unit is radians (rad).

[0080] r is the radius of the rotating part 1122, in mm;

[0081] R is the inner diameter of the guide 120, which is the radius of the limiting cavity 121, in mm;

[0082] K R The width of guide 120 is the difference between the outer diameter and the inner diameter of guide 120, in mm;

[0083] h is the distance from the rotation center of the first end 111 and the processing furnace 400 to the center of the receiving cavity, in mm;

[0084] S represents the maximum extension and retraction distance of the driving component 210 during the driving process, in mm.

[0085] Δd is the distance from the center of the rotating part 1122 to the center of the receiving cavity, in mm.

[0086] For example, let L = 20 mm, θ = π / 2, r = 7 mm, K R =10mm, and the calculation yields: 9.93mm≤R≤10+(Rr)mm. Based on this, an optimized selection can be made. Position of the center trajectory of the location planning guide 120.

[0087] The technical solution provided in this application embodiment is that the drive component 200 is fixedly arranged relative to the processing furnace 400, and the output shaft of the drive component 200 is extended and retracted along the direction parallel to the rotation plane so that the drive guide 120 drives the moving component 110 to move. The movement trajectory of each component is relatively simple and is not prone to interference. Moreover, the overall swing amplitude of the mechanism is small and is not prone to causing vibration of the processing furnace 400.

[0088] The following is a comparison table of the effects of different schemes on the moving part 110 and the guide part 120:

[0089] plan Option 1 Option 2 Option 3 Number of links (pieces) 1 2 2 Assembly method sliding groove long slot Annular groove Friction type sliding friction Rolling friction Rolling friction Accuracy requirements high middle Low Material requirements Nickel / Iron Alloy Chrome-plated / nickel-carbon steel Chrome-plated / nickel-carbon steel, copper inner ring wear resistance Difference middle excellent compatibility Difference middle excellent Maintenance difficulty Difficult generally relatively easy Service life short middle long

[0090] In Scheme 1, the moving part 110 is slidably connected to the sliding groove of the guide 120; in Scheme 2, the moving part 110 is rollably connected to the limiting groove of the guide 120, with both sides of the moving part 110 contacting the inner wall of the limiting groove; Scheme 3 is the technical solution of this application embodiment, in which the rotating part 1122 of the moving part 110 rolls within the limiting cavity 121 of the guide 120, both the rotating part 1122 and the guide 120 have circular cross-sections, and the ratio of the radius of the limiting cavity 121 to the radius of the rotating part 1122 is greater than or equal to 1.5. By comparison, it can be seen that Scheme 3 has lower requirements for assembly precision, is easier to disassemble and maintain, and has excellent wear resistance and compatibility, and is easier to maintain and has a longer service life.

[0091] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some embodiments of this application, the opening and closing mechanism further includes a positioning component 300, which includes two limiting members 310. The limiting members 310 are fixedly disposed relative to the processing furnace 400, and the moving member 110 is restricted to move relative to the processing furnace between the two limiting members 310.

[0092] In this embodiment, the position of the limiting member 310 corresponds to the moving member 110 being in the unlocked or locked position. The limiting member 310 can be a limiting block, a limiting post, or a limiting plate, etc.

[0093] In some examples, the limiting member 310 corresponds to the moving member 110 being in the locked position. When the moving member 110 drives the locking member 510 to move from the unlocked position to the locked position, the moving member 110 abuts against the limiting member 310.

[0094] In other examples, the limiting member 310 corresponds to the moving member 110 being in the unlocked position. When the moving member 110 drives the locking member 510 to move from the locked position to the unlocked position, the moving member 110 abuts against the limiting member 310.

[0095] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some other examples, the moving part 110 is provided with limiters 310 on both sides. The limiters 310 on both sides correspond to the moving part 110 being in the locked position and the unlocked position, respectively. When the moving part 110 drives the locking part 510 to move from the unlocked position to the locked position, the moving part 110 abuts against the limiter 310 on one side; when the moving part 110 drives the locking part 510 to move from the locked position to the unlocked position, the moving part 110 abuts against the limiter 310 on the other side.

[0096] The technical solution provided in this application embodiment is to set a positioning component 300, and the limiting member 310 of the positioning component 300 is fixed relative to the processing furnace 400. The limiting member 310 can restrict the movement of the moving member 110. The moving member 110 is restricted to move between the two limiting members 310 so that the moving member 110 can move within a preset stroke, which facilitates the accurate positioning of the moving member 110.

[0097] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In some embodiments of this application, the positioning component 300 further includes a controller and a sensor 320. The sensor 320 is connected to the limiting member 310 and electrically connected to the controller. The sensor 320 can be triggered by the moving member 110. The controller determines the position of the moving member 110 relative to the processing furnace 400 based on the triggering state of the sensor 320.

[0098] In some examples, sensor 320 is a contact sensor, such as a mechanical limit switch; in other examples, sensor 320 is a non-contact sensor, such as a proximity switch or a photoelectric sensor. This application does not limit the type of sensor 320.

[0099] In some examples, the controller is a stand-alone processor; in other examples, the controller is a processor integrated into the production equipment, and the controller is also used to control the displacement and processing of the production equipment.

[0100] In some examples, sensors 320 are provided on both sides of the moving part 110, one corresponding to the locking part 510 being in the unlocked position and the other corresponding to the locking part 510 being in the locked position.

[0101] In some examples, the movement stroke of the moving part 110 is limited by the sensor 320, and the limiting member 310 is used to limit the movement of the moving part 110 in the event that the limiting member 320 fails to stop; in other examples, the sensor 320 and the limiting member 310 work together to limit the movement stroke of the moving part 110.

[0102] When the moving part 110 drives the locking part 510 to move from the locked position to the unlocked position, the moving part 110 triggers the sensor 320 corresponding to the unlocked position, and the controller determines that the moving part 110 drives the locking part 510 to the unlocked position; the controller can control the furnace door 420 to open relative to the furnace body 410, and control the related mechanism to move the semiconductor.

[0103] When the moving part 110 drives the locking part 510 to move from the unlocked position to the locked position, the moving part 110 triggers the sensor 320 corresponding to the locked position, and the controller determines that the moving part 110 has driven the locking part 510 to the locked position. The controller can then control the processing furnace 400 to start or stop processing.

[0104] The technical solution provided in this application embodiment is to set a sensor 320 at the position of the limiting member 310. The sensor 320 is electrically connected to the controller. When the moving member 110 moves into position and abuts against the limiting member 310, the moving member 110 can trigger the sensor 320. The controller can determine the position of the moving member 110 relative to the processing furnace 400 based on the triggering state of the sensor 320, so as to determine whether the processing furnace 400 is unlocked or locked, thereby improving the intelligence of the opening and closing mechanism.

[0105] Reference Figure 9 In some embodiments of this application, the drive assembly 200 includes a drive member 210 respectively provided for each motion component 100; the drive assembly 200 also includes a diverter 220, the diverter 220 is provided with a diverter end 221 for each drive member 210, a commutator 230 is provided between the diverter end 221 and the corresponding drive member 210, the commutator 230 includes two commutator ends 231, the drive member 210 includes two drive ends, the two commutator ends 231 of the commutator 230 are respectively connected to the two drive ends of the corresponding drive member 210, and the commutator 230 can change the output state of the commutator ends 231 to switch the output direction of the drive member 210.

[0106] In some examples, the number of drive elements 210 corresponds to the number of motion components 100. Each drive element 210 has a corresponding guide element 120 and motion element 110. Different drive elements 210 are used to drive different locking elements 210. In some examples, the drive element 210 is a motor or an electric telescopic rod, and the shunt element 220 and commutator 230 correspond to circuit devices. The shunt element 220 can be a multiplexer or multiplexer, and the commutator 230 can be a switching switch or a relay.

[0107] In some examples, the output states of the two commutator terminals 231 of the commutator 230 can be changed. For example, the first commutator terminal 231 is switched to the output state and the second commutator terminal 231 is switched to the input state, and the output direction of the corresponding drive unit 210 is switched to drive the motion unit 110 to move toward the unlock position; the first commutator terminal 231 is switched to the input state and the second commutator terminal 231 is switched to the output state, and the output direction of the corresponding drive unit 210 is switched to drive the motion unit 110 to move toward the lock position.

[0108] In other examples, the drive component 210 is a pneumatic or hydraulic cylinder; the flow divider 220 and the reversing component 230 are corresponding pipeline devices, the flow divider 220 can be a multi-way component or a flow distributor; the reversing component 230 can be a reversing valve or a multi-way valve, such as a two-position three-way solenoid reversing valve or a three-position three-way solenoid reversing valve.

[0109] For example, the drive component 210 is a cylinder, and the reversing component 230 is disposed between the flow divider 220 and the corresponding drive component 210. The reversing component 230 is a two-position three-way solenoid directional valve, and the flow divider 220 is a three-way valve. (Refer to...) Figure 9 In some examples, the input end of the diverter 220 is connected to the drive air input mechanism. For example, the input end of the diverter 220 is connected to the compressed air pipe (CDA). The output end (diverter end 221) of the diverter 220 is connected to the input ends of two commutators 230 respectively. The two output ends (commutator ends 231) of the commutator 230 are connected to the two drive ends of the corresponding drive element 210 respectively. The flow direction of the drive air in the cylinder is changed by the commutator 230 so that the output shaft of the cylinder can be extended or shortened.

[0110] The technical solution provided in this application embodiment, by setting a shunt 220 and a commutator 230, with the commutator 230 positioned between the shunt 220 and the corresponding drive 210, allows the shunt 220 to achieve synchronous start and stop of multiple drive 210s, and each drive 210 can have its output direction adjusted individually by the corresponding commutator 230, making the driving method more flexible.

[0111] Reference Figure 10In some embodiments of this application, the drive assembly 200 includes a drive member 210 respectively provided for each motion component 100; the drive assembly 200 also includes a commutator 230, the commutator 230 includes two commutator ends 231, the two commutator ends 231 are respectively connected to a shunt member 220, the shunt is provided for each drive member 210, the drive member 210 includes two drive ends, the two drive ends of the drive member 210 are respectively connected to the shunt ends 221 of different shunt members 220, the commutator 230 can change the output state of the commutator ends 231 to switch the output direction of the drive member 210.

[0112] In some examples, the number of drive members 210 corresponds to the number of motion components 100. Each drive member 210 is associated with a guide member 120 and a motion member 110. Different drive members 210 are used to drive different locking members 210 to move.

[0113] In some examples, the output states of the two commutator terminals 231 of the commutator 230 can be changed. For example, the first commutator terminal 231 is switched to the output state and the second commutator terminal 231 is switched to the input state, and the output direction of the corresponding drive unit 210 is switched to drive the motion unit 110 to move toward the unlock position; the first commutator terminal 231 is switched to the input state and the second commutator terminal 231 is switched to the output state, and the output direction of the corresponding drive unit 210 is switched to drive the motion unit 110 to move toward the lock position.

[0114] For example, the drive component 210 is a cylinder, and the flow divider 220 is disposed between the reversing component 230 and multiple drive components 210. The reversing component 230 is a two-position three-way solenoid reversing valve, and the flow divider 220 is a three-way component.

[0115] Reference Figure 10 In some examples, the input end of the commutator 230 is connected to the driving air input mechanism. For example, the input end of the commutator 230 is connected to the CDA. The two output ends (commutator ends 231) of the commutator 230 are respectively connected to the input ends of two diverters 220. The number of output ends (diverter ends 221) of the diverters 220 corresponds one-to-one with the number of driving elements 210. The output ends (diverter ends 221) of the diverters 220 are connected one-to-one with the driving ends of different driving elements 210. The different driving ends of the driving elements 210 are connected to the diverter ends 221 of different diverters 220. The direction of the driving air in the cylinder is changed by the commutator 230 so that the output shaft of the cylinder can be extended or shortened.

[0116] The technical solution provided in this application embodiment, by setting a commutator 230 and a shunt 220, with the shunt 220 disposed between the commutator 230 and multiple drive units 210, allows the commutator 230 to synchronously adjust the output direction of multiple drive units 210, thereby improving the coordination and drive consistency of multiple drive units 210.

[0117] It should be noted that the output directions of the multiple drive units 210 may be the same or different. In some examples, the multiple drive units 210 drive the moving part 110 from the locked position to the unlocked position by extending the output shaft; in other examples, the multiple drive units 210 drive the moving part 110 from the locked position to the unlocked position by shortening the output shaft; in still other examples, some drive units 210 drive the moving part 110 from the locked position to the unlocked position by extending the output shaft, while the remaining drive units 210 drive the moving part 110 from the locked position to the unlocked position by shortening the output shaft.

[0118] Reference Figure 1 In some embodiments of this application, the production equipment includes a processing furnace 400, a door lock 500, and an opening and closing mechanism according to embodiments of this application. The processing furnace 400 includes a furnace body 410 and a furnace door 420 that are movably connected. The door lock 500 is disposed between the furnace body 410 and the furnace door 420. The door lock 500 includes a locking member 510, which is used to lock or unlock the processing furnace 400 relative to the furnace body 410. The opening and closing mechanism is connected to the processing furnace 400 and the locking member 510 respectively.

[0119] In this embodiment, the movable connection between the furnace door 420 and the furnace body 410 can be a rotating connection, a sliding connection, or a flexible connection. The door lock 500 includes a locking member 510 and a mating structure 520, one of which is disposed in the furnace body 410, and the other of which is disposed in the furnace door 420.

[0120] In some examples, the mating structure 520 is a mating hole or a mating groove, etc. The locking member 510 abuts against the mating structure 520 to lock the furnace door 420 and the furnace body 410 relative to each other so that the furnace door 420 is closed; the locking member 510 separates from the mating structure 520 to unlock the furnace door 420 and the furnace body 410 relative to each other so that the furnace door 420 is opened.

[0121] In some examples, the locking member 510 is rotatably connected to the furnace door 420, the mating structure 520 is disposed on the furnace body 410, the driving member 210 is fixedly connected to the furnace door 420, the guide member 120 is connected between the driving member 210 and the moving member 110, the moving member 110 is rotatably connected to the furnace door 420, and the moving member 110 is fixedly connected to the locking member 510.

[0122] The technical solution provided in this application embodiment includes an opening and closing mechanism for the production equipment. The opening and closing mechanism is provided with a large-sized limiting cavity 121. The second end 112 of the moving part 110 is disposed in the limiting cavity 121, which can facilitate the disassembly and maintenance of the moving part 110 and the guide 120, reduce the wear of both, and improve their service life.

[0123] Reference Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 9 In one embodiment of this application, there are two locking members 510. The two locking members 510 are respectively connected to the moving member 110, the guide member 120 and the driving member 210. The two driving members 210 are disposed on different sides of the corresponding locking members 510. The reversing member 230 corresponding to the driving member 210 is connected to the diverting member 220. The guide member 120 has a ring structure. The rotating part 1122 of the moving member 110 rolls along the inner wall of the guide member 120 and rolls in the limiting cavity 121 of the guide member 120.

[0124] When the furnace door 420 needs to be opened, the driving gas introduced by the diverter 220 flows into the two reversing components 230 respectively. The reversing component 230 switches to reversing end A 231 to input driving gas towards the corresponding driving component 210. The output shaft of driving component Q1 210 shortens, the output shaft of driving component Q2 210 shortens, and the driving component 210 drives the corresponding guide 120 to move. The first inner wall of the guide 120 contacts the rotating part 1122 of the moving component 110 and drives the moving component 110 to rotate clockwise. The moving component 110 moves from the locked position to the unlocked position. The moving component 110 passes through the following positions in sequence. Figure 3 , Figure 4 and Figure 5 As shown, when the moving part 110 moves to the limit part 310 corresponding to the unlock position, the sensor 320 corresponding to the unlock position is triggered, the controller determines that the moving part 110 has moved to the unlock position, and controls the furnace door 420 to open relative to the furnace body 410.

[0125] When the furnace door 420 needs to be closed, the driving air supplied by the diverter 220 flows into the two reversing components 230 respectively. The reversing component 230 switches to reversing end B 231 to input driving air towards the corresponding driving component 210. The output shaft of driving component Q1 210 extends, and the output shaft of driving component Q2 210 shortens. The driving component 210 drives the corresponding guide 120 to move. The second inner wall of the guide 120 contacts the rotating part 1122 of the moving component 110 and drives the moving component 110 to rotate counterclockwise. The moving component 110 moves from the unlocked position to the locked position. The moving component 110 passes through the following positions in sequence. Figure 6 , Figure 4 and Figure 7As shown, when the moving part 110 moves to the limit member 310 corresponding to the locking position, the sensor 320 corresponding to the locking position is triggered, and the controller determines that the moving part 110 has moved to the locking position.

[0126] In this embodiment, the moving part 110 drives the locking part 510 to rotate 90 degrees to lock or unlock. The two locking parts 510 move synchronously, and the entire unlocking or locking process can be completed within 1 to 3 seconds, ensuring that the furnace door 420 can open or close smoothly relative to the furnace body 410. This design facilitates the assembly of the moving part 110 and the guide part 120, reduces abnormal wear on the moving part 110 and the guide part 120, and improves the stability of the production equipment.

[0127] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments. The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made based on the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. An opening and closing mechanism, characterized in that, The opening and closing mechanism, located between the processing furnace and the locking element in the production equipment, includes: A motion assembly includes a motion component and a guide component. The motion component includes a first end and a second end. The first end is rotatably connected to the processing furnace and is used to drive the locking component to rotate relative to the processing furnace. The guide component is provided with a limiting cavity. The second end is disposed in the limiting cavity. The dimension of the limiting cavity along at least two different preset directions is greater than the dimension of the second end along the corresponding preset direction. The preset directions are parallel to the rotation plane of the motion component relative to the processing furnace. The drive assembly drives the moving part to rotate relative to the processing furnace via the guide.

2. The opening and closing mechanism according to claim 1, characterized in that, The at least two preset directions include a first direction, which is the rotation direction of the second end relative to the processing furnace. The movement of the second end relative to the processing furnace has a first state and a second state. In the first state, the second end abuts against the inner wall of the limiting cavity along the first direction. In the second state, the second end separates from the inner wall of the limiting cavity along the first direction.

3. The opening and closing mechanism according to claim 1, characterized in that, The limiting cavity has a limiting surface that can abut against the second end along the preset direction. The limiting surface is a curved surface and has a corresponding axis. The axis of the limiting surface is parallel to the rotation axis of the moving part relative to the processing furnace.

4. The opening and closing mechanism according to claim 1, characterized in that, The second end portion includes a body portion and a rotating portion. The rotating portion is rotatably connected to the body portion, extends into the limiting cavity, and is capable of rotating relative to the limiting cavity.

5. The opening and closing mechanism according to claim 1, characterized in that, The drive assembly is fixedly disposed relative to the processing furnace. The drive assembly includes an output shaft, which is connected to the guide. The output shaft is telescopically disposed, and the telescopic direction of the output shaft is parallel to the rotation plane.

6. The opening and closing mechanism according to any one of claims 1 to 5, characterized in that, It also includes a positioning component, which includes two limiting members that are fixedly disposed relative to the processing furnace; the moving member is restricted to move relative to the processing furnace between the two limiting members.

7. The opening and closing mechanism according to claim 6, characterized in that, The positioning component further includes a controller and a sensor. The sensor is connected to the limiting member and electrically connected to the controller. The sensor can be triggered by the moving part. The controller determines the position of the moving part relative to the processing furnace based on the triggering state of the sensor.

8. The opening and closing mechanism according to any one of claims 1 to 5, characterized in that, The driving component includes a driving element respectively provided for each of the motion components; The driving component further includes a shunt component, which is provided with a shunt end for each driving component. A commutator is provided between the shunt end and the corresponding driving component. The commutator includes two commutator ends, and the driving component includes two driving ends. The two commutator ends of the commutator are respectively connected to the two driving ends of the corresponding driving component. The commutator can change the output state of the commutator ends to switch the output direction of the driving component.

9. The opening and closing mechanism according to any one of claims 1 to 5, characterized in that, The driving component includes a driving element respectively provided for each of the motion components; The drive assembly further includes a commutator, which has two commutator ends. The two commutator ends are respectively connected to a shunt component. Each shunt component is provided with a shunt end for each drive component. The drive component has two drive ends, which are respectively connected to the shunt ends of different shunt components. The commutator can change the output state of the commutator ends to switch the output direction of the drive component.

10. A production equipment, characterized in that, include: Processing furnace, including a furnace body and furnace door that are movably connected; A door lock is provided between the furnace body and the furnace door, the door lock including a locking member for locking or unlocking the processing furnace relative to the furnace body; The opening and closing mechanism according to any one of claims 1 to 9 is respectively connected to the processing furnace and the locking member.

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