Boat loading structure and vertical furnace

Abstract

The utility model provides a kind of boat carrying pedestal structure and vertical furnace, wherein boat carrying pedestal structure includes support frame body and multiple bearing seat bodies, every two adjacent bearing seat bodies jointly bear a boat, every bearing seat body includes mounting seat and the first support component and the second support component being arranged at the both ends of mounting seat, mounting seat is arranged on support frame body, the first support component is used to support the boat support side pole in two adjacent boats, and the second support component is used to support the boat support bottom plate in two adjacent boats;The utility model enhances the stability of boat carrying pedestal structure when bearing multiple boats.

Description

Technical Field

[0001] This utility model belongs to the field of solar cell manufacturing technology, and more specifically, it relates to a boat-based base structure and a vertical furnace. Background Technology

[0002] With the continuous development of the photovoltaic industry, vertical furnace equipment is now widely used in processes such as diffusion, oxidation, annealing, doping, PECVD (plasma-enhanced chemical vapor deposition), and LPCVD (low-pressure chemical vapor deposition) in the photovoltaic industry. The structure of this type of furnace typically requires loading the solar cells (silicon wafers) into a specific boat (carrier) and then transferring them to the reaction chamber of the furnace for processing. By heating the reaction chamber and introducing specific reactive gases, processes such as coating, diffusion, oxidation, and thin film deposition on the silicon wafers are achieved. As the photovoltaic industry continues to advance, the requirements for equipment performance are increasing, and the corresponding process routes are also constantly being updated.

[0003] In existing technologies, boats are typically placed on a boat-carrying base inside the furnace for processing. However, when multiple boats are placed on the boat-carrying base simultaneously for processing, the base's support stability for multiple boats is insufficient, which can easily lead to damage to the boats. Utility Model Content

[0004] The present invention aims to provide a boat-carrying base structure and a vertical furnace to improve the support stability of the boat-carrying base for multiple boats.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] This utility model first provides a boat-carrying base structure, including:

[0007] Support frame;

[0008] Multiple support bodies are provided, with each pair of adjacent support bodies jointly supporting one boat. Each support body includes a mounting base and a first support component and a second support component disposed at both ends of the mounting base. The mounting base is disposed on the support frame. The first support component is used to support the boat support side rods in the two adjacent boats, and the second support component is used to support the boat support bottom plate in the two adjacent boats.

[0009] Furthermore, the first support component is a boat support seat installed at one end of the mounting base. The boat support seat is provided with two support protrusions, which abut against the corresponding boat support side rods.

[0010] Furthermore, the second support component is a boat support arc plate set at one end of the mounting base. Two support pads are provided on the boat support arc plate, and the support pads abut against the corresponding boat bottom plate.

[0011] Furthermore, the boat support arc plates in every two adjacent load-bearing bodies are connected.

[0012] Furthermore, it also includes multiple anti-tipping components, each of which includes a support rod and an anti-tipping seat. One end of the support rod is connected to the corresponding support body, and the anti-tipping seat is located at the other end of the support rod and is used to abut against the boat support members in two adjacent boats.

[0013] Furthermore, the support frame includes a chassis and multiple support arm assemblies arranged around the chassis. Each support arm assembly includes a first support arm and a second support arm. The first support arm is connected to the chassis, and the second support arm is connected between the first support arm and the corresponding load-bearing base.

[0014] Furthermore, the first support arm and the second support arm are provided with weight-reducing through holes or weight-reducing grooves.

[0015] Furthermore, the chassis and the first support arm are equipped with heat insulation components and / or baffle components.

[0016] Furthermore, the chassis is connected to the rotary drive assembly.

[0017] This utility model also provides a vertical furnace, including a furnace body with a reaction chamber, multiple boats located in the reaction chamber, and a boat-carrying base for supporting the multiple boats, wherein the boat-carrying base adopts the boat-carrying base structure as described above.

[0018] Compared with existing technologies, the beneficial effects of the boat-carrying base structure and vertical furnace provided by this utility model are as follows: This utility model uses two adjacent support bodies to jointly support a boat, and each support body supports different parts of the boat (i.e., the boat support side rod and the boat support bottom plate) through two support components (i.e., the first support component and the second support component). This design effectively distributes the weight of each boat through multi-point support, reduces the pressure on a single support point, and thus distributes the weight of a single boat more evenly on the two adjacent support bodies. Therefore, this utility model enhances the stability of the boat-carrying base structure when supporting multiple boats, effectively avoiding the instability problem that may occur when a single boat is supported alone. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional schematic diagram of the boat-carrying base structure in Embodiment 1;

[0021] Figure 2 This is a side view of the boat-carrying base structure in Embodiment 1;

[0022] Figure 3 This is a top view of the boat-carrying base structure in Embodiment 1;

[0023] Figure 4 This is a side view of the boat-carrying base structure supporting the boat in Embodiment 1;

[0024] Figure 5 This is a three-dimensional schematic diagram of the boat-carrying base structure supporting the boat in Embodiment 1;

[0025] Figure 6 for Figure 5 Enlarged view of point A in the middle;

[0026] Figure 7 This is a cross-sectional schematic diagram of the vertical furnace in Embodiment 1 of this utility model;

[0027] Figure 8 This is a top view of the boat-carrying base structure in Embodiment 2 of this utility model;

[0028] The main markings in the attached figures are as follows:

[0029] 100. Boat-shaped base structure; 200. Boat; 300. Vertical furnace;

[0030] 11. Support frame; 12. Bearing base; 13. Anti-tipping component; 14. Heat insulation component; 15. Baffle assembly; 16. Rotation drive assembly;

[0031] 111. Chassis; 112. First support arm; 113. Second support arm; 114. Weight reduction groove; 115. Weight reduction through hole; 121. Mounting base; 122. Boat support base; 123. Boat support arc plate; 124. Support protrusion; 125. Support pad; 131. Support rod; 132. Anti-tipping seat;

[0032] 21. Boat support side bar; 22. Boat support bottom plate; 23. Boat support support component;

[0033] 31. Inner furnace tube; 32. Outer furnace tube; 33. Furnace door. Detailed Implementation

[0034] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0035] Example 1

[0036] Please refer to the following: Figure 1 , Figure 2 , Figure 5 and Figure 6 The boat-carrying base structure 100 provided in this embodiment includes:

[0037] Support frame 11;

[0038] Multiple support seats 12, each pair of adjacent support seats 12 jointly support one boat 200. Each support seat 12 includes a mounting seat 121 and a first support component and a second support component disposed at both ends of the mounting seat 121. The mounting seat 121 is disposed on the support frame 11. The first support component is used to support the boat support side rod 21 in the two adjacent boats 200, and the second support component is used to support the boat support bottom plate 22 in the two adjacent boats 200.

[0039] In the boat-carrying base structure 100, the support frame 11 serves as the foundation of the overall structure, fixing and supporting the bearing seat 12. The bearing seat 12 directly supports the boat 200; two adjacent bearing seats 12 jointly support one boat 200. Each bearing seat 12 supports different parts of the boat 200 (i.e., the boat support side rod 21 and the boat support bottom plate 22) through two support components (i.e., the first support component and the second support component). This design effectively distributes the weight of each boat 200 through multi-point support, reducing the pressure on individual support points and thus distributing the weight of a single boat 200 more evenly across the two adjacent bearing seats 12. Therefore, this invention enhances the stability of the boat-carrying base structure 100 when supporting multiple boats 200, effectively avoiding the instability problem that may occur when a single boat 200 is supported alone.

[0040] It should be noted that the number of support seats 12 can be flexibly adjusted according to actual needs, such as... Figure 3 As shown, the number of support seats 12 is preferably 6. Furthermore, in this embodiment, adjacent support seats 12 are not directly connected. This design helps reduce the weight of the boat base structure 100, facilitates its installation and disassembly, and effectively controls costs.

[0041] like Figure 1 , Figure 2 and Figure 6 As shown, in each support body 12, the first support component is a boat support seat 122 installed at one end of the mounting base 121. The boat support seat 122 is provided with two support protrusions 124, which abut against the corresponding boat support side rod 21. The second support component is a boat support arc plate 123 provided at the other end of the mounting base 121. The boat support arc plate 123 is provided with two support pads 125, which abut against the corresponding boat support bottom plate 22.

[0042] It should be noted that in this embodiment, the boat support base 122 is detachably connected to the mounting base 121, while the boat support arc plate 123 is integrally formed with the mounting base 121. Simultaneously, the support protrusion 124 is integrally formed with the boat support base 122, while the support pad 125 is detachably connected with the boat support arc plate 123. Of course, in other optional embodiments, the boat support base 122 and the mounting base 121, as well as the boat support arc plate 123 and the mounting base 121, are all integrally formed or detachably connected. Similarly, the support protrusion 124 and the boat support base 122, as well as the support pad 125 and the boat support arc plate 123, are all integrally formed or detachably connected. Furthermore, the shapes of the support protrusion 124 and the support pad 125 can be flexibly adjusted according to actual needs. Figure 1 As shown, the two support protrusions 124 are symmetrically arranged and are both triangular; the two support pads 125 are spaced apart at both ends of the boat support arc plate 123 and are both rectangular.

[0043] This design achieves stable support without covering the entire bottom of the boat 200 by having the support protrusion 124 in the first support component contact the boat support side rod 21, and the support pad 125 in the second support component contact the boat support bottom plate 22. Simultaneously, while ensuring stable support, the boat 200 does not require the entire area of ​​both support components to support it, thus reducing the support area, lightening the weight of the boat base structure 100, and effectively controlling costs.

[0044] like Figure 1 , Figure 6 As shown, the boat base structure 100 also includes multiple anti-tipping components 13. Each anti-tipping component 13 includes a support rod 131 and an anti-tipping seat 132. One end of the support rod 131 is connected to the corresponding support body 12, and the anti-tipping seat 132 is disposed at the other end of the support rod 131 and is used to abut against the boat support members 23 in the two adjacent boats 200.

[0045] It should be noted that the number of anti-tipping components 13 can be flexibly adjusted according to actual needs, such as... Figure 1 As shown, the number of anti-tipping components 13 is preferably 6. In each anti-tipping component 13, the two ends of the support rod 131 are movably connected to the anti-tipping seat 132 and the boat support seat 122 through adjustable components, and the anti-tipping seat 132 is composed of a base plate and a surrounding plate, which can more effectively achieve a snap-fit ​​connection with the boat support member 23.

[0046] This design effectively prevents the boat 200 from tipping over on the boat-carrying base structure 100 through the anti-tipping component 13, further enhancing the support stability of the boat 200 by the boat-carrying base structure 100. The anti-tipping seat 132 in the anti-tipping component 13 is fixed to the boat support seat 122 via the support rod 131, stabilizing the non-bottom parts of the boat 200 and preventing it from collapsing during movement. Furthermore, the anti-tipping seat 132 can simultaneously abut against the boat support members 23 of two adjacent boats 200, allowing the boat-carrying base structure 100 to connect multiple boats 200 into a single unit, providing more stable support. When one boat 200 on the boat-carrying base structure 100 wobbles due to instability, the force can be distributed to another stable boat 200, thereby improving overall stability and avoiding the instability problem caused by a single boat 200 bearing the force alone. In this way, the structural stability of the boat-carrying base structure 100 when supporting multiple boats 200 is significantly improved.

[0047] like Figure 1 , Figure 2 As shown, in the boat base structure 100, the support frame 11 includes a chassis 111 and a plurality of support arm assemblies arranged around the chassis 111. Each support arm assembly includes a first support arm 112 and a second support arm 113. The first support arm 112 is connected to the chassis 111, and the second support arm 113 is connected between the first support arm 112 and the corresponding carrier body 12.

[0048] This design allows each support arm assembly to support each carrier seat 12 on the chassis 111, so that the entire boat 200 can be as close as the inner furnace tube 31, thereby improving the heating uniformity of all the solar cells in the boat 200 and improving the processing quality of the solar cells.

[0049] It should be noted that the first support arm 112 and the second support arm 113 can be detachably connected, which makes the installation and disassembly of the support frame 11 more convenient. Of course, the first support arm 112 and the second support arm 113 can also be an integral structure, thereby enhancing the overall rigidity of both.

[0050] Furthermore, the first support arm 112 and the second support arm 113 are provided with weight-reducing through holes 115 or weight-reducing grooves 114. Preferably, as shown below... Figure 1 , Figure 2 As shown, the first support arm 112 is provided with multiple weight-reducing grooves 114, and the second support arm 113 is provided with multiple weight-reducing through holes 115. These designs achieve weight reduction of the support arm assembly, which not only effectively reduces the weight and production cost of the support arm assembly, but also facilitates the installation and disassembly of the support frame 11.

[0051] like Figure 1 , Figure 2 and Figure 4 As shown, in the support frame 11, the chassis 111 and the first support arm 112 are provided with a heat insulation component 14 and / or a baffle assembly 15. The heat insulation component 14 is composed of multiple heat insulation blocks, each made of heat insulation cotton. The bottom of each heat insulation block is provided with a snap-fit ​​groove for engaging with the first support arm 112, and the sides of every two adjacent heat insulation blocks are provided with interlocking concave-convex structures to achieve snap-fit ​​connection. In addition, the heat insulation component 14 is also provided with a baffle assembly 15, which is composed of multiple baffles. The multiple baffles are interconnected by multiple support columns, and the upper baffle is detachably connected to the second support arm 113. Of course, in other optional embodiments, the chassis 111 and the first support arm 112 may only be provided with a heat insulation component 14 or a baffle assembly 15, which can also reduce heat loss to a certain extent.

[0052] This design effectively prevents heat loss from the furnace body through the furnace door 33 by installing a heat insulation component 14 inside the support frame 11, thereby reducing heat consumption. It also avoids the problem of low bottom temperature of the boat 200 affecting cell processing. Furthermore, a baffle assembly 15 is installed above the heat insulation component 14 to separate and fix it, ensuring its stability and safety.

[0053] like Figure 1 , Figure 7 As shown, in the support frame 11, the chassis 111 is connected to the rotary drive assembly 16. The rotary drive assembly 16 can be driven by a motor to achieve the rotation function.

[0054] This design uses a rotary drive assembly 16 to drive the boat base structure 100 to rotate multiple boats 200, allowing the multiple boats 200 to be rotated and heated in the furnace body. This avoids uneven heating in certain areas, improves the uniformity of heating of the solar cells in the boats 200, and thus improves the processing quality of the solar cells.

[0055] like Figure 7 As shown, the vertical furnace 300 provided in this embodiment includes a furnace body with a reaction chamber, multiple boats 200 located in the reaction chamber, and a boat-carrying base for supporting the multiple boats 200. The boat-carrying base adopts the boat-carrying base structure 100 described above, which will not be repeated here. The furnace body includes a furnace door 33, a furnace cover, an inner furnace tube 31, and an outer furnace tube 32 that together enclose the reaction chamber. The boat-carrying base structure 100 is located in the reaction chamber and connected to the furnace door 33.

[0056] Example 2

[0057] Please refer to the following: Figure 3 and Figure 8The difference between this embodiment and Embodiment 1 is that the boat support arc plates 123 in every two adjacent bearing seats 12 are connected.

[0058] This design enhances the rigidity of the boat base structure 100 by connecting multiple support bodies 12 into a single integrated structure, enabling it to withstand greater weight.

[0059] The boat-carrying base structure and vertical furnace provided by this utility model significantly improve the stability of the boat-carrying base structure when supporting multiple boats. In addition, while ensuring stable support, the weight of the boat-carrying base structure is reasonably reduced, and the heating uniformity of the battery cells inside the boat is further improved.

[0060] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A boat-carrying base structure, characterized in that, include: Support frame; Multiple support bodies are provided, with each pair of adjacent support bodies jointly supporting one boat. Each support body includes a mounting base and a first support component and a second support component disposed at both ends of the mounting base. The mounting base is disposed on the support frame. The first support component is used to support the boat support side rods in two adjacent boats, and the second support component is used to support the boat support bottom plates in two adjacent boats.

2. The boat-carrying base structure as described in claim 1, characterized in that, The first support component is a boat support seat installed at one end of the mounting base. The boat support seat is provided with two support protrusions, and the support protrusions abut against the corresponding boat support side rods.

3. The boat-carrying base structure as described in claim 1, characterized in that, The second support component is a boat support arc plate disposed at one end of the mounting base. The boat support arc plate is provided with two support pads, and the support pads abut against the corresponding boat support base plate.

4. The boat-carrying base structure as described in claim 3, characterized in that, The boat support arc plates in each pair of adjacent support bodies are connected.

5. The boat-carrying base structure as described in any one of claims 1-4, characterized in that, It also includes multiple anti-tipping components, each of which includes a support rod and an anti-tipping seat. One end of the support rod is connected to the corresponding bearing seat, and the anti-tipping seat is disposed at the other end of the support rod and is used to abut against the boat support members in two adjacent boats.

6. The boat-carrying base structure as described in any one of claims 1-4, characterized in that, The support frame includes a chassis and a plurality of support arm assemblies arranged around the chassis. Each support arm assembly includes a first support arm and a second support arm. The first support arm is connected to the chassis, and the second support arm is connected between the first support arm and the corresponding bearing seat.

7. The boat-carrying base structure as described in claim 6, characterized in that, The first support arm and the second support arm are provided with weight-reducing through holes or weight-reducing grooves.

8. The boat-carrying base structure as described in claim 6, characterized in that, The chassis and the first support arm are provided with heat insulation components and / or baffle components.

9. The boat-carrying base structure as described in claim 6, characterized in that, The chassis is connected to the rotary drive assembly.

10. A vertical furnace, comprising a furnace body having a reaction chamber, a plurality of boats located within the reaction chamber, and a boat-carrying base for supporting the plurality of boats, characterized in that, The boat base adopts the boat base structure as described in any one of claims 1-9.

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