Two-dimensional direction free-adjusting structure of white light interferometer

Abstract

The utility model relates to a kind of white light interferometer two-dimensional direction free adjustment structure, it includes substrate, first rotating plate, first drive component, second rotating plate and second drive component;First rotating plate is rotationally connected around first horizontal straight line with substrate;First drive component includes first pusher and first extension spring, first pusher is installed on first rotating plate and its output is connected with substrate, and first extension spring is connected substrate and first rotating plate setting;Second rotating plate is rotationally connected around second horizontal straight line with first rotating plate, and first horizontal straight line and second horizontal straight line are perpendicularly set;Second drive component includes second pusher and second extension spring, second pusher is installed on second rotating plate and its output is connected with first rotating plate, and second extension spring is connected first rotating plate and second rotating plate setting;The perpendicularity of white light interferometer and measured surface can be freely adjusted according to the surface angle of measured product.

Description

Technical Field

[0001] This utility model relates to the field of measuring instrument technology, and in particular to a two-dimensional direction freely adjustable structure for a white light interferometer. Background Technology

[0002] In the inspection of products such as PCB boards and wafers, white light interferometers are typically used to inspect a series of micro-dimensions of the products.

[0003] The structure of the white light interferometer testing equipment includes a white light interferometer, a stage, and an XYZ axis motion platform. The white light interferometer is directly mounted on the Z-axis. The white light interferometer is designed with a fixed angle adjustment mechanism. This fixed angle adjustment mechanism can only adjust the perpendicularity between the optical axis of the white light interferometer and the surface of the stage. After adjustment, the white light probe needs to be locked and cannot be adjusted again. This method requires that the surface of the product being measured placed on the stage is parallel to the stage surface in order to ensure that the interference fringes of the image measured by the white light interferometer are few and thick. As is well known, the perpendicularity between the optical axis of the white light interferometer and the surface of the product being measured directly affects the number and thickness of the interference fringes in the image of the white light interferometer. The better the perpendicularity, the fewer and thicker the interference fringes, that is, the better the scanning image effect of the white light interferometer.

[0004] Existing white light interferometers are suitable for situations where the measured surface of the product placed on the stage is parallel to the stage. However, if the measured surface of the product placed on the stage is not parallel to the stage, the optical axis adjustment of existing white light interferometers is inconvenient. Utility Model Content

[0005] In view of this, it is necessary to provide a two-dimensional freely adjustable structure for a white light interferometer to solve the problem that existing white light interferometers are suitable for situations where the measured surface of the product placed on the stage is parallel to the stage. However, if the measured surface of the product placed on the stage is not parallel to the stage, the optical axis adjustment of the existing white light interferometer is inconvenient.

[0006] This invention provides a two-dimensional directional freely adjustable structure for a white light interferometer, comprising a substrate, a first rotating plate, a first driving assembly, a second rotating plate, and a second driving assembly. The first rotating plate is rotatably connected to the substrate about a first horizontal line. The first driving assembly includes a first pushing member and a first tension spring. The first pushing member is mounted on the first rotating plate and its output is connected to the substrate, driving the first rotating plate to rotate away from the substrate. The first tension spring connects the substrate and the first rotating plate, driving the first rotating plate to rotate closer to the substrate. The second rotating plate is rotatably connected to the first rotating plate about a second horizontal line, the first horizontal line and the second horizontal line being perpendicular to each other. The second driving assembly includes a second pushing member and a second tension spring. The second pushing member is mounted on the second rotating plate and its output is connected to the first rotating plate, driving the second rotating plate to rotate away from the first rotating plate. The second tension spring connects the first rotating plate and the second rotating plate, driving the second rotating plate to rotate closer to the first rotating plate.

[0007] Furthermore, the first pushing member includes a first nut seat and a first threaded push rod. The first nut seat is fixedly disposed on the base plate, and the free end of the first threaded push rod passes through a threaded hole opened on the first nut seat and slides against the first rotating plate.

[0008] Furthermore, the first pushing member also includes a sliding plate and a ball head. The sliding plate is fixedly connected to the first rotating plate, and the ball head is fixedly disposed at the end of the first threaded push rod near the first rotating plate. The ball head slides against the sliding plate.

[0009] Furthermore, the first pusher also includes a first handwheel and a first limiting ring. The first handwheel is fixedly disposed at the end of the first threaded push rod away from the first rotating plate. The first limiting ring is disposed on the first threaded push rod, and a first step is formed on the first threaded push rod. The first nut seat is disposed at the position between the first limiting ring and the first step.

[0010] Furthermore, the second rotating plate includes a probe mounting plate, two rotating support plates, and two connecting plates. The probe mounting plate is disposed on the side of the first rotating plate away from the substrate. The side of the probe mounting plate away from the first rotating plate is used to connect with a white light interferometer. The two rotating support plates are fixedly disposed on both sides of the probe mounting plate. The two connecting plates are fixedly connected to the first rotating plate. The two rotating support plates are rotatably connected to the two connecting plates along the same axial direction.

[0011] Furthermore, the second pusher includes a second nut seat, a rotating push block, and a second threaded push rod. The second nut seat is fixedly mounted on the first rotating plate, and the rotating push block is fixedly mounted on the second rotating plate. The free end of the second threaded push rod passes through the threaded holes opened on the rotating push block and the second nut seat in sequence. A second step is formed on the second threaded push rod. The second step is located between the second nut seat and the rotating push block, and the second step abuts against the rotating push block.

[0012] Furthermore, the top of the rotating top block has a downwardly recessed groove, through which the second threaded top rod is disposed.

[0013] Furthermore, the second pusher also includes a second handwheel and a second limiting ring. The second handwheel is fixedly disposed at the end of the second threaded push rod away from the second rotating plate, and the second limiting ring is disposed at the position of the second threaded push rod near its free end.

[0014] Furthermore, it also includes a first bearing, a first rotating shaft, and a shaft cover. The first bearing is mounted on the base plate, one end of the first rotating shaft is fixedly connected to the first rotating plate, and the other end of the first rotating shaft passes through the first bearing and is fixedly connected to the shaft cover.

[0015] Furthermore, it also includes two second bearings and two second rotating shafts. The two second rotating shafts are respectively mounted on the two connecting plates, and the opposite ends of the two second rotating shafts pass through the two second bearings and are respectively fixedly connected to the two rotating support plates.

[0016] Compared with existing technologies, by mounting the white light interferometer onto the second rotating plate, the first pushing member can drive the first rotating plate to rotate away from the substrate, while the first tension spring drives the first rotating plate to rotate closer to the substrate, thereby causing the white light interferometer to rotate along a first horizontal straight line; the second pushing member can drive the second rotating plate to rotate away from the first rotating plate, while the second tension spring drives the second rotating plate to rotate closer to the first rotating plate, thereby causing the white light interferometer to rotate along a second horizontal straight line. In summary, the perpendicularity of the white light interferometer to the surface being measured can be freely adjusted according to the surface angle of the product being measured. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the two-dimensional directional freely adjustable structure of the white light interferometer provided in the embodiment of this utility model;

[0018] Figure 2 for Figure 1 A schematic diagram showing the connection between the middle substrate and the first rotating plate;

[0019] Figure 3 for Figure 1 Schematic diagram of the structure of the first jacking component;

[0020] Figure 4 for Figure 1 A schematic diagram of the arrangement of the first tension spring;

[0021] Figure 5 for Figure 1 A schematic diagram of the structure of the second rotating plate;

[0022] Figure 6 for Figure 1 Installation diagram of the second bearing and the second shaft;

[0023] Figure 7 for Figure 1 Schematic diagram of the structure of the second jacking component;

[0024] Figure 8 for Figure 1 A schematic diagram of the arrangement of the second tension spring. Detailed Implementation

[0025] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0026] like Figure 1 As shown, the present invention provides a two-dimensional directional freely adjustable structure for a white light interferometer, including a substrate 100, a first rotating plate 200, a first driving assembly 300, a second rotating plate 400, and a second driving assembly 500. The first rotating plate 200 is rotatably connected to the substrate 100 around a first horizontal line. The first driving assembly 300 includes a first pushing member 310 and a first tension spring 320. The first pushing member 310 is mounted on the first rotating plate 200 and its output is connected to the substrate 100, used to drive the first rotating plate 200 to rotate in a direction away from the substrate 100. The first tension spring 320 is connected to the substrate 100 and the first rotating plate 200, used to drive the first rotating plate 400 to rotate in a direction away from the substrate 100. The rotating plate 200 rotates toward the substrate 100; the second rotating plate 400 is rotatably connected to the first rotating plate 200 around a second horizontal line, and the first horizontal line and the second horizontal line are perpendicular to each other; the second driving assembly 500 includes a second pushing member 510 and a second tension spring 520, the second pushing member 510 is mounted on the second rotating plate 400 and its output is connected to the first rotating plate 200, for driving the second rotating plate 400 to rotate away from the first rotating plate 200, and the second tension spring 520 is connected to the first rotating plate 200 and the second rotating plate 400, for driving the second rotating plate 400 to rotate toward the first rotating plate 200.

[0027] In practice, the white light interferometer is mounted on the second rotating plate 400. The first pushing member 310 can drive the first rotating plate 200 to rotate away from the substrate 100. At the same time, the first tension spring 320 drives the first rotating plate 200 to rotate closer to the substrate 100, thereby causing the white light interferometer to rotate along the first horizontal straight line. The second pushing member 510 can drive the second rotating plate 400 to rotate away from the first rotating plate 200. At the same time, the second tension spring 520 drives the second rotating plate 400 to rotate closer to the first rotating plate 200, thereby causing the white light interferometer to rotate along the second horizontal straight line. In summary, the perpendicularity between the white light interferometer and the surface being measured can be freely adjusted according to the surface angle of the product being measured.

[0028] In this embodiment, the substrate 100 is a vertical plate structure, which is mounted on an XYZ axis motion platform. The XYZ axis motion platform can control the relative movement of the substrate 100 relative to the product on the platform.

[0029] In this embodiment, the first rotating plate 200 is a vertical plate structure, and its first horizontal line is rotatably connected to the substrate 100.

[0030] like Figure 2 As shown, in one embodiment, the system further includes a first bearing 210, a first rotating shaft 220, and a shaft cover 230. The first bearing 210 is mounted on the base plate 100. One end of the first rotating shaft 220 is fixedly connected to the first rotating plate 200, and the other end of the first rotating shaft 220 passes through the first bearing 210 and is fixedly connected to the shaft cover 230. The shaft cover 230 effectively prevents the first rotating shaft 220 from detaching from the first bearing 210.

[0031] In this embodiment, the first driving component 300 is used to drive the first rotating plate 200 to rotate relative to the substrate 100, that is, the first rotating plate 200 rotates around the first rotating shaft 220. The first driving component 300 includes a first pushing member 310 and a first tension spring 320. The first pushing member 310 is mounted on the first rotating plate 200 and its output is connected to the substrate 100, and is used to drive the first rotating plate 200 to rotate in a direction away from the substrate 100. The first tension spring 320 is connected to the substrate 100 and the first rotating plate 200, and is used to drive the first rotating plate 200 to rotate in a direction closer to the substrate 100.

[0032] like Figure 3 As shown, in one embodiment, the first pusher 310 includes a first nut seat 311 and a first threaded pusher 312. The first nut seat 311 is fixedly disposed on the base plate 100, and the free end of the first threaded pusher 312 passes through the threaded hole opened on the first nut seat 311 and slides against the first rotating plate 200.

[0033] In one embodiment, the first pusher 310 further includes a slide plate 240 and a ball head 313. The slide plate 240 is fixedly connected to the first rotating plate 200, and the ball head 313 is fixedly disposed at the end position of the first threaded pusher 312 near the first rotating plate 200. The ball head 313 slides against the slide plate 240.

[0034] To limit the movement distance of the first threaded push rod 312 relative to the first nut seat 311, i.e. to control the rotation angle range of the first rotating plate 200, in one embodiment, the first push member 310 further includes a first handwheel 314 and a first limiting ring 315. The first handwheel 314 is fixedly disposed at the end of the first threaded push rod 312 away from the first rotating plate 200. The first limiting ring 315 is disposed on the first threaded push rod 312, and a first step 316 is formed on the first threaded push rod 312. The first nut seat 311 is disposed at the position between the first limiting ring 315 and the first step 316.

[0035] like Figure 4 As shown, in one embodiment, it further includes two first mounting posts 321, one of which is fixedly disposed on the top of the substrate 100, and the other is fixedly disposed on the top of the first rotating plate 200. The two first mounting posts 321 are provided with circular holes so that the two ends of the first tension spring 320 pass through the circular holes and are respectively connected to the two first mounting posts 321.

[0036] In this embodiment, the second rotating plate 400 is a vertically arranged plate structure that is rotatably connected to the first rotating plate 200 around a second horizontal line. The first horizontal line and the second horizontal line are arranged perpendicular to each other.

[0037] like Figure 5 As shown, in one embodiment, the second rotating plate 400 includes a probe mounting plate 410, two rotating support plates 420, and two connecting plates 250. The probe mounting plate 410 is disposed on the side of the first rotating plate 200 away from the substrate 100. The side of the probe mounting plate 410 away from the first rotating plate 200 is used to connect to a white light interferometer. The two rotating support plates 420 are fixedly disposed on both sides of the probe mounting plate 410. The two connecting plates 250 are fixedly connected to the first rotating plate 200. The two rotating support plates 420 are rotatably connected to the two connecting plates 250 respectively along the same axial direction.

[0038] The second rotating plate 400 also includes a first reinforcing plate 430 and a second reinforcing plate 440. The first reinforcing plate 430 is disposed on the side of the two rotating support plates 420 away from the probe mounting plate 410, and both sides of the first reinforcing plate 430 are fixedly connected to the two rotating support plates 420 respectively. Meanwhile, the second reinforcing plate 440 is disposed on the top of the two rotating support plates 420, and both sides of the second reinforcing plate 440 are fixedly connected to the two rotating support plates 420 respectively, in order to improve the overall connection strength of the second rotating plate 400.

[0039] like Figure 6 As shown, in one embodiment, it also includes two second bearings 421 and two second rotating shafts 422. The two second rotating shafts 422 are respectively mounted on two connecting plates 250. The opposite ends of the two second rotating shafts 422 pass through the two second bearings 421 and are respectively fixedly connected to the two rotating support plates 420.

[0040] In this embodiment, the second drive assembly 500 is used to drive the second rotating plate 400 to rotate relative to the first rotating plate 200, that is, the second rotating plate 400 rotates around the second rotating shaft 422. The second drive assembly 500 includes a second pusher 510 and a second tension spring 520. The second pusher 510 is mounted on the second rotating plate 400 and its output is connected to the first rotating plate 200, and is used to drive the second rotating plate 400 to rotate in a direction away from the first rotating plate 200. The second tension spring 520 is connected to the first rotating plate 200 and the second rotating plate 400, and is used to drive the second rotating plate 400 to rotate in a direction closer to the first rotating plate 200.

[0041] like Figure 7 As shown, in one embodiment, the second pusher 510 includes a second nut seat 511, a rotating push block 512, and a second threaded push rod 513. The second nut seat 511 is fixedly disposed on the first rotating plate 200, and the rotating push block 512 is fixedly disposed on the second rotating plate 400. The free end of the second threaded push rod 513 passes through the threaded holes opened on the rotating push block 512 and the second nut seat 511 in sequence. A second step 514 is formed on the second threaded push rod 513. The second step 514 is disposed at the position between the second nut seat 511 and the rotating push block 512, and the second step 514 abuts against the rotating push block 512.

[0042] In one embodiment, the top of the rotating top block 512 has a downwardly recessed groove, through which the second threaded top rod 513 is disposed.

[0043] In one embodiment, the second pusher 510 further includes a second handwheel 515 and a second limiting ring 516. The second handwheel 515 is fixedly disposed at the end of the second threaded pusher 513 away from the second rotating plate 400, and the second limiting ring 516 is disposed at the position of the second threaded pusher 513 near its free end.

[0044] like Figure 8 As shown, in one embodiment, it further includes two second mounting posts 521, one of which is fixedly disposed on the top of the first rotating plate 200, and the other is fixedly disposed on the top of the rotating support plate 420. The two second mounting posts 521 are provided with round holes so that the two ends of the second tension spring 520 can pass through the round holes and be connected to the two second mounting posts 521 respectively.

[0045] When adjusting the angle of the first rotating plate 200, rotating the first handwheel 314 clockwise drives the first threaded push rod 312 forward. The forward movement of the first threaded push rod 312 pushes the first rotating plate 200 to rotate counterclockwise around the first rotating shaft 220 as the rotation center. Rotating the first handwheel 314 counterclockwise causes the first threaded push rod 312 to retract. Under the tension of the first tension spring 320, the first rotating plate 200 can rotate clockwise around the first rotating shaft 220. The forward stroke of the first threaded push rod 312 stops at the first step 316, and the backward stroke of the first threaded push rod 312 stops at the limit ring. The first rotating plate 200 is designed to rotate at an angle of ±5 degrees under the action of this linkage structure.

[0046] When adjusting the angle of the second rotating plate 400, rotating the second handwheel 515 counterclockwise causes the second threaded push rod 513 to retract. Under the action of the second protrusion and the rotating block 512, the second rotating plate 400 can be driven to rotate around the second rotating shaft 422. Rotating the second handwheel 515 clockwise causes the second threaded push rod 513 to move forward. Under the action of the tension of the second tension spring 520, the second rotating plate 400 can be driven to rotate around the second rotating shaft 422. The forward stroke of the second threaded push rod 513 stops at the second step 514, and the backward stroke of the second threaded push rod 513 stops at the limit ring. The second rotating plate 400 is designed to rotate at ±5 degrees under the action of this linkage structure.

[0047] Compared with the prior art: When the white light interferometer is mounted on the second rotating plate 400, the first pushing member 310 can drive the first rotating plate 200 to rotate away from the substrate 100. At the same time, the first tension spring 320 drives the first rotating plate 200 to rotate closer to the substrate 100, thereby causing the white light interferometer to rotate along the first horizontal straight line. The second pushing member 510 can drive the second rotating plate 400 to rotate away from the first rotating plate 200. At the same time, the second tension spring 520 drives the second rotating plate 400 to rotate closer to the first rotating plate 200, thereby causing the white light interferometer to rotate along the second horizontal straight line. In summary, the perpendicularity between the white light interferometer and the surface being measured can be freely adjusted according to the surface angle of the product being measured.

[0048] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A two-dimensional freely adjustable structure for a white light interferometer, characterized in that, include: substrate; A first rotating plate is rotatably connected to the substrate about a first horizontal straight line; A first driving assembly includes a first pushing member and a first tension spring. The first pushing member is mounted on the first rotating plate and its output is connected to the substrate for driving the first rotating plate to rotate away from the substrate. The first tension spring is connected to the substrate and the first rotating plate for driving the first rotating plate to rotate closer to the substrate. The second rotating plate is rotatably connected to the first rotating plate around a second horizontal line, and the first horizontal line and the second horizontal line are set perpendicular to each other. The second drive assembly includes a second pusher and a second tension spring. The second pusher is mounted on the second rotating plate and its output is connected to the first rotating plate for driving the second rotating plate to rotate away from the first rotating plate. The second tension spring is connected to the first rotating plate and the second rotating plate for driving the second rotating plate to rotate closer to the first rotating plate.

2. The two-dimensional freely adjustable structure of the white light interferometer according to claim 1, characterized in that, The first pushing member includes a first nut seat and a first threaded push rod. The first nut seat is fixedly disposed on the base plate, and the free end of the first threaded push rod passes through a threaded hole opened on the first nut seat and slides against the first rotating plate.

3. The two-dimensional freely adjustable structure of the white light interferometer according to claim 2, characterized in that, The first pusher also includes a sliding plate and a ball head. The sliding plate is fixedly connected to the first rotating plate, and the ball head is fixedly disposed at the end of the first threaded push rod near the first rotating plate. The ball head slides against the sliding plate.

4. The two-dimensional freely adjustable structure of the white light interferometer according to claim 2, characterized in that, The first pusher also includes a first handwheel and a first limiting ring. The first handwheel is fixedly disposed at the end of the first threaded push rod away from the first rotating plate. The first limiting ring is disposed on the first threaded push rod, and a first step is formed on the first threaded push rod. The first nut seat is disposed between the first limiting ring and the first step.

5. The two-dimensional freely adjustable structure of the white light interferometer according to claim 1, characterized in that, The second rotating plate includes a probe mounting plate, two rotating support plates, and two connecting plates. The probe mounting plate is disposed on the side of the first rotating plate away from the substrate. The side of the probe mounting plate away from the first rotating plate is used to connect to a white light interferometer. The two rotating support plates are fixedly disposed on both sides of the probe mounting plate. The two connecting plates are fixedly connected to the first rotating plate. The two rotating support plates are rotatably connected to the two connecting plates along the same axial direction.

6. The two-dimensional freely adjustable structure of the white light interferometer according to claim 1, characterized in that, The second pushing member includes a second nut seat, a rotating block, and a second threaded push rod. The second nut seat is fixedly mounted on the first rotating plate, and the rotating block is fixedly mounted on the second rotating plate. The free end of the second threaded push rod passes through the threaded holes opened on the rotating block and the second nut seat in sequence. A second step is formed on the second threaded push rod. The second step is located between the second nut seat and the rotating block, and the second step abuts against the rotating block.

7. The two-dimensional freely adjustable structure of the white light interferometer according to claim 6, characterized in that, The top of the rotating block has a downward recessed groove, through which the second threaded rod passes.

8. The two-dimensional freely adjustable structure of the white light interferometer according to claim 6, characterized in that, The second pusher also includes a second handwheel and a second limiting ring. The second handwheel is fixedly disposed at the end of the second threaded push rod away from the second rotating plate, and the second limiting ring is disposed at the position of the second threaded push rod near its free end.

9. The two-dimensional freely adjustable structure of the white light interferometer according to claim 1, characterized in that, It also includes a first bearing, a first rotating shaft, and a shaft cover. The first bearing is mounted on the base plate, one end of the first rotating shaft is fixedly connected to the first rotating plate, and the other end of the first rotating shaft passes through the first bearing and is fixedly connected to the shaft cover.

10. The two-dimensional freely adjustable structure of the white light interferometer according to claim 5, characterized in that, It also includes two second bearings and two second rotating shafts. The two second rotating shafts are respectively mounted on the two connecting plates. The opposite ends of the two second rotating shafts pass through the two second bearings and are respectively fixedly connected to the two rotating support plates.

Images