Adjustable film thickness gauge

Abstract

The utility model relates to a kind of adjustable film thickness gauge, including base assembly, support is provided on base assembly, height adjusting device is provided on support, height adjusting device is provided with lens barrel, the lower end of lens barrel is provided with mounting mechanism, the upper end of lens barrel is provided with optical fiber device. Therefore, the displacement adjustment of lens barrel can be realized, the best light spot size is obtained, and better measurement data is obtained. Only by adjusting plum blossom handle screw, the release and locking switching of convenience can be realized, and the operation is simple, so that the user can quickly and conveniently obtain the best measurement position. The overall structure is small in size, does not occupy too much station space additionally, and is convenient for layout use. There is an independent bearing pad, which can effectively prevent sliding and place, and facilitate the stable placement of the measured object.

Description

Technical Field

[0001] This utility model relates to a film thickness gauge device, and more particularly to an adjustable film thickness gauge. Background Technology

[0002] Existing white-light interferometric thickness gauges utilize the spectral changes following interference between the upper and lower surfaces of the thin film to measure its thickness. During operation, light emitted from the light source is reflected by the film being measured and returns to the probe. The reflected light from the upper and lower interfaces of the film interferes to form a reflection spectrum. Given the film structure and refractive index, the film thickness can be calculated by inversely retrieving the reflection spectrum. Currently, thickness gauges are widely used in thin film thickness measurement in fields such as semiconductors, optics, biomedicine, and materials science.

[0003] Most existing film thickness gauges have a cylindrical tube structure. During use, they often require handheld measurement. This can lead to slight wobbling during measurement, affecting accuracy. Currently, there are also types that are clamped onto standard supports. However, these standard supports are often too large, making adjustments inconvenient and resulting in generally poor stability. Furthermore, improper adjustment can easily lead to discrepancies in the perpendicularity of the tube to the object being measured, affecting the final measurement accuracy.

[0004] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create an adjustable film thickness gauge, which would have greater industrial application value. Utility Model Content

[0005] To solve the above-mentioned technical problems, the purpose of this utility model is to provide an adjustable film thickness gauge.

[0006] The adjustable film thickness gauge of this utility model includes a base assembly, wherein: a bracket is provided on the base assembly, a height adjustment device is provided on the bracket, a lens tube is provided on the height adjustment device, a mounting mechanism is provided at the lower end of the lens tube, and an optical fiber device is provided at the upper end of the lens tube.

[0007] Furthermore, in the aforementioned adjustable film thickness gauge, the base assembly is provided with a limiting groove, the lower end of the bracket is embedded in the limiting groove, the upper end of the bracket is provided with a bearing platform, and the height adjustment device is connected to the bearing platform.

[0008] Furthermore, in the aforementioned adjustable film thickness gauge, the height adjustment device includes a height adjustment block, a guide rail is provided inside the height adjustment block, a guide block is movably arranged inside the guide rail, the guide block is connected to the lens barrel, and a locking component is provided on the height adjustment block. When in the locked state, the locking component is in contact with the guide block.

[0009] Furthermore, in the aforementioned adjustable film thickness gauge, the guide rail is a T-shaped slide rail, the locking component is a Torx handle screw, the height adjustment block is provided with a threaded hole extending to the limiting groove, the Torx handle screw is connected to the threaded hole, and when in the locked state, the front end of the Torx handle screw contacts the guide block.

[0010] Furthermore, in the aforementioned adjustable film thickness gauge, a limit cover is provided at the upper end of the height adjustment block.

[0011] Furthermore, in the aforementioned adjustable film thickness gauge, the mounting mechanism is a lens mounting head, which is threadedly connected to the lens barrel. The lens mounting head is provided with a lens limiting groove, or the lens mounting head has a lens assembly embedded within it.

[0012] Furthermore, in the aforementioned adjustable film thickness gauge, the optical fiber device includes a mounting base connected to the lens barrel. The mounting base is connected to the upper end of the lens barrel by screws. A guide post is provided on the mounting base, and the guide post is in communication with the lens barrel. An optical fiber is inserted into the guide post.

[0013] Furthermore, in the aforementioned adjustable film thickness gauge, the base assembly includes a base body, a support pad is provided at the upper end of the base body, and an anti-slip mechanism is provided on the support pad, the anti-slip mechanism being a plurality of anti-slip grooves.

[0014] Furthermore, in the aforementioned adjustable film thickness gauge, several foot assemblies are provided below the base assembly.

[0015] By means of the above solution, this utility model has at least the following advantages:

[0016] 1. It can realize the displacement adjustment of the lens barrel, obtain the optimal spot size, and obtain better measurement data.

[0017] 2. The release and locking can be easily switched by simply adjusting the Torx handle screw. The operation is simple and allows users to quickly and easily obtain the best measurement position.

[0018] 3. The overall structure is small in size and will not take up too much extra workspace, making it easy to arrange and use.

[0019] 4. It is equipped with an independent support pad, which can effectively prevent slipping and facilitate the stable placement of the object being tested.

[0020] 5. The overall structure is simple, making it easy to manufacture and maintain.

[0021] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of an adjustable film thickness gauge.

[0023] Figure 2 It is a schematic diagram of the cooperation and locking of the guide rail and guide block.

[0024] The meanings of the labels in the figures are as follows.

[0025] 1. Support 2. Lens tube

[0026] 3. Mounting mechanism; 4. Height adjustment block

[0027] 5. Guide rail 6. Guide block

[0028] 7 Torx handle screws 8 Limit caps

[0029] 9 Mounting bracket 10 Screws

[0030] 11 Guide post 12 Optical fiber

[0031] 13 Base body 14 Support pad

[0032] 15 Anti-slip grooves 16 Foot pad assembly Detailed Implementation

[0033] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0034] like Figures 1 to 2 The adjustable film thickness gauge includes a base assembly, which is unique in that: a bracket 1 is provided on the base assembly for preset the working height of the subsequently installed lens barrel 2. Simultaneously, considering the adjustable height clearance to ensure optimal distance from the object being measured, a height adjustment device is provided on the bracket 1, and the lens barrel 2 is mounted on the height adjustment device. Furthermore, to facilitate the installation of related lens components or to accommodate the positioning needs of integrated lenses, a mounting mechanism 3 is provided at the lower end of the lens barrel 2. Moreover, to enable stable image transmission and interface with external instruments, an optical fiber 12 device is provided at the upper end of the lens barrel 2.

[0035] In a preferred embodiment of this invention, a limiting groove is provided on the base assembly, and the lower end of the bracket 1 is embedded in the limiting groove. During implementation, screws can be used to lock the bottom of the bracket 1. Simultaneously, a bearing platform is provided at the upper end of the bracket 1, and the height adjustment device is connected to the bearing platform. Considering the stability of the connection, screws can also be used to lock the height adjustment device and the bearing platform together.

[0036] Further, the height adjustment device includes a height adjustment block 4, within which a guide rail 5 is installed. A guide block 6 is movably mounted within the guide rail 5 and connected to the lens barrel 2. Thus, the relative height of the lens barrel 2 can be adjusted by the position of the guide block 6. Alternatively, a guide strip can be extended from the lens barrel 2 and embedded in the guide rail 5. Furthermore, a locking component is provided on the height adjustment block 4 to ensure effective locking after adjustment. In the locked state, the locking component contacts the guide block 6. Specifically, to achieve effective displacement guidance and provide appropriate lateral limitation for the guide block 6 to prevent wobbling during adjustment, the guide rail 5 is a T-shaped slide rail. For user convenience, the locking component is a Torx handle screw 7. A threaded hole extending through to the limiting groove is provided on the height adjustment block 4, and the Torx handle screw 7 is threaded into the threaded hole. In the locked state, the front end of the Torx handle screw 7 contacts the guide block 6. During implementation, in order to prevent the guide block 6 from accidentally coming off the upper end of the height adjustment block 4 due to improper adjustment, a limit cover 8 can be installed on the upper end of the height adjustment block 4.

[0037] In practical implementation, the mounting mechanism 3 is a lens mounting head, which is threadedly connected to the lens barrel 2. The lens mounting head also features a lens limiting groove. This allows for the insertion of lenses of the appropriate model according to actual usage needs. Alternatively, for ease of implementation, the lens assembly can be directly embedded within the lens mounting head, resulting in an integrated structure. This allows for the selection of a suitable lens mounting head based on actual requirements. The threaded connection enables convenient installation and replacement.

[0038] Looking further, the fiber optic device 12 includes a mounting base 9 connected to the lens barrel 2, which is connected to the upper end of the lens barrel 2 by screws 10. At the same time, a guide post 11 is provided on the mounting base 9, which is in communication with the lens barrel 2, and the fiber optic cable 12 is inserted into the guide post 11.

[0039] During implementation, to ensure stable placement of the object being tested, the base assembly includes a base body 13, with a support pad 14 at the upper end of the base body 13. The support pad 14 is equipped with an anti-slip mechanism. For ease of implementation, the anti-slip mechanism consists of several anti-slip grooves 15. This increases the friction of the object being tested during placement, preventing it from rolling away unnecessarily.

[0040] Meanwhile, this invention includes several foot assemblies 16 located below the base assembly. These foot assemblies can be made of rubber and are connected to the base assembly via screws. This allows for a properly elevated arrangement of the base assembly, facilitating cable routing at the bottom. Furthermore, it prevents clutter on the desktop from contaminating the front of the base assembly.

[0041] The working principle of this utility model is as follows:

[0042] Connect fiber optic cable 12 to the chassis of an external auxiliary instrument, and obtain the corresponding values ​​through the preset software within the external auxiliary instrument. During use, the user can loosen the Torx handle screw 7 to allow the microscope tube 2 to be adjusted longitudinally by the guide rail 5, which in turn drives the lens assembly attached to the mounting mechanism 3 to adjust synchronously. When the spot size on the measured object is at its smallest, tighten the Torx handle screw 7 to fix the microscope tube 2. Thus, film thickness measurement can begin.

[0043] As can be seen from the above textual description and the accompanying drawings, the present invention has the following advantages:

[0044] 1. It can realize the displacement adjustment of the lens barrel to obtain the optimal spot size and obtain better measurement data.

[0045] 2. The release and locking can be easily switched by simply adjusting the Torx handle screw. The operation is simple and allows users to quickly and easily obtain the best measurement position.

[0046] 3. The overall structure is small in size and will not take up too much extra workspace, making it easy to arrange and use.

[0047] 4. It is equipped with an independent support pad, which can effectively prevent slipping and facilitate the stable placement of the object being tested.

[0048] 5. The overall structure is simple, making it easy to manufacture and maintain.

[0049] Furthermore, the directions or positional relationships described in this utility model are based on the directions or positional relationships shown in the accompanying drawings. They are only for the purpose of facilitating the description of this utility model and simplifying the description, and are not intended to indicate or imply that the device or structure referred to must have a specific orientation, or to operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0050] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. An adjustable film thickness gauge, including a base assembly, characterized in that: The base assembly is equipped with a bracket, the bracket is equipped with a height adjustment device, the height adjustment device is equipped with a lens barrel, the lower end of the lens barrel is equipped with a mounting mechanism, and the upper end of the lens barrel is equipped with an optical fiber device. The base assembly is equipped with a limit groove, the lower end of the bracket is embedded in the limit groove, and the upper end of the bracket is equipped with a support platform. The height adjustment device is connected to the support platform. The height adjustment device includes a height adjustment block, a guide rail is provided inside the height adjustment block, a guide block is movably disposed inside the guide rail, the guide block is connected to the lens barrel, and a locking component is provided on the height adjustment block. When locked, the locking component contacts the guide block. The guide rail is a T-shaped slide rail, the locking component is a Torx handle screw, and the height adjustment block is equipped with a threaded hole extending to the limit groove. The Torx handle screw is connected to the threaded hole, and when locked, the front end of the Torx handle screw contacts the guide block.

2. The adjustable film thickness gauge according to claim 1, characterized in that: The upper end of the height adjustment block is provided with a limit cover.

3. The adjustable film thickness gauge according to claim 1, characterized in that: The mounting mechanism is a lens mounting head, which is threadedly connected to the lens barrel. The lens mounting head is provided with a lens limiting groove, or the lens mounting head has a lens assembly embedded inside.

4. The adjustable film thickness gauge according to claim 1, characterized in that: The optical fiber device includes a mounting base connected to the lens barrel. The mounting base is connected to the upper end of the lens barrel by screws. A guide post is provided on the mounting base. The guide post is in communication with the lens barrel. An optical fiber is inserted into the guide post.

5. The adjustable film thickness gauge according to claim 1, characterized in that: The base assembly includes a base body, a support pad is provided at the upper end of the base body, and an anti-slip mechanism is provided on the support pad, which consists of several anti-slip grooves.

6. The adjustable film thickness gauge according to claim 1, characterized in that: Below the base assembly, several foot assemblies are provided.

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