A hidden cover opening structure of a gas release rate test bench
By using a concealed opening structure and lever support and drive device, the chamber cover can be concealed and managed, which solves the problems of large space occupation and complicated operation of traditional gas release rate test benches, and improves test accuracy and safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BEIJING VACUUM ELECTRONIC TECH CORP
- Filing Date
- 2025-07-31
- Publication Date
- 2026-07-14
AI Technical Summary
The traditional open-top design of the gas release rate test bench results in the equipment occupying extra space, increasing operational complexity and safety hazards, and is not suitable for laboratory environments with limited space.
It adopts a concealed opening structure, which realizes the concealed management of the cavity cover through lever bracket and drive device. It only occupies space temporarily when the cover is opened, and the external size of the device is minimized when closed. Combined with buffer components, it reduces mechanical collision and noise.
It reduces the external space occupied by the gas release rate test bench, improves the smoothness of the operation process and the test accuracy, reduces the risk of accidental contact with the equipment, and is suitable for use in laboratories with limited space.
Smart Images
Figure CN224500286U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of gas release rate testing devices, and in particular to a hidden opening structure for a gas release rate testing platform. Background Technology
[0002] Against the backdrop of the rapid development of modern integrated circuits and electronic technologies, the semiconductor industry is accelerating its evolution towards larger wafer sizes, more complex packaging, and higher precision requirements. Larger chamber sizes have become a key trend in addressing the challenges of large-size, highly integrated, and high-precision testing. The continuous increase in the size of current release rate testing chambers makes it difficult for traditional manual opening methods to support heavy chamber covers and poses operational risks. While hydraulic lifting solutions can meet load-bearing requirements, they have significant limitations due to high system complexity and the need for hydraulic oil maintenance.
[0003] Existing gas release rate testing stands generally adopt an externally designed, open-top structure, causing handles or support components to protrude from the main body of the equipment. This layout not only occupies extra physical space (typically requiring 10%-20% additional area for opening the cover), directly increasing the overall footprint of the testing stand, a problem particularly pronounced in space-constrained environments such as small laboratories. This not only creates a cramped equipment layout, forcing operators to frequently adjust their positions to avoid collisions, significantly reducing operational comfort and efficiency, but also, when using the gas release rate testing stand for material analysis or vacuum testing, operators must frequently open the cover to place samples or clean the interior within a limited space, increasing operational complexity. If sideways operation or moving other equipment is required, this increases the risk of sample drops, equipment damage, and other human errors. Furthermore, the cramped environment easily leads to tripping, abrasions, and other safety hazards. In addition, space occupancy issues may indirectly affect testing accuracy and equipment lifespan, highlighting the urgent need to optimize the structure of the gas release rate testing stand. Utility Model Content
[0004] The purpose of this utility model is to provide a hidden opening structure for the gas release rate test bench to solve the problems existing in the prior art. It can reduce the external space occupancy of the gas release rate test bench, make the overall size of the gas release rate test bench more compact, ensure the smoothness of the operation process, and improve the test accuracy.
[0005] To achieve the above objectives, this utility model provides the following solution:
[0006] This utility model provides a concealed opening structure for a gas release rate test bench, including an opening assembly and a driving device. The opening assembly includes a lever bracket, a fixed base, and a connecting base. The fixed base is used to be fixedly installed on the top surface of the upper platform, and the connecting base is used to be fixedly installed on the top surface of the cavity cover. One end of the lever bracket is hinged to the fixed base, and the other end of the lever bracket is connected to the connecting base. The fixed end of the driving device is used to be fixedly installed on a support frame at the bottom of the upper platform, and the free end of the driving device is used to pass through the upper platform and be hinged to the middle of the lever bracket.
[0007] Preferably, it also includes a buffer component, which includes a buffer column and a buffer seat. The buffer column is used to be fixedly installed on the top surface of the upper platform, and the buffer seat is installed on the lever bracket. When the lever bracket covers the upper cavity cover downwards, the buffer column can abut against the buffer seat.
[0008] Preferably, the buffer column includes a column, a spring, and a sleeve. The sleeve is used to be fixedly installed on the top surface of the upper platform. The column is inserted into the sleeve. One end of the spring is fixedly connected to the bottom surface of the sleeve, and the other end of the spring is fixedly connected to the end of the column inserted into the sleeve.
[0009] Preferably, the lever support includes two symmetrically arranged connecting rods, which are fixedly connected by a support shaft. The fixed base includes a fixed base and a rotating shaft rotatably connected to the fixed base. The two ends of the rotating shaft are respectively fixedly connected to the two connecting rods.
[0010] Preferably, the driving device includes a cylinder, a cylinder base, and a spherical connector. The cylinder base is used to be fixedly installed on the support frame of the upper platform. The cylinder body is hinged to the cylinder base. The piston rod of the cylinder is fixedly connected to the connecting rod of the spherical connector. The annular end of the spherical connector is fixedly sleeved on the support shaft.
[0011] Preferably, the lever support further includes reinforcing ribs, with each end of the reinforcing ribs being fixedly connected to one of the two connecting rods.
[0012] Preferably, there are two connecting bases. Each connecting base includes a connecting base and a connecting shaft. One end of the connecting shaft is fixedly connected to the connecting rod, and the other end of the connecting shaft is connected to the connecting base via a key.
[0013] Preferably, the connecting base is provided with a first keyway, the connecting shaft is provided with a second keyway, the connecting key is accommodated between the first keyway and the second keyway, the connecting key is fitted and fixed with the second keyway, and the first keyway and the connecting key are clearance fitted.
[0014] The present invention achieves the following technical advantages over the prior art:
[0015] This utility model provides a concealed opening structure for a gas release rate testing platform. When the lid is not open, the drive device is completely hidden under the upper platform, with no permanent protruding parts. This avoids the expansion of the equipment outline caused by traditional external cylinders or motors, reducing the possibility of accidental contact between personnel or materials and the equipment. The drive device only temporarily extends out of the upper platform to expand the space when the lid is open. After closing, the external size of the equipment returns to its minimum, making it suitable for laboratory environments with limited space. This makes the overall size of the gas release rate testing platform more compact, ensuring smooth operation and improving testing accuracy. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the concealed opening and closing structure of the gas release rate test bench when the lid is closed.
[0018] Figure 2 A schematic diagram of the concealed opening structure of the gas release rate test bench when the lid is opened.
[0019] Figure 3 This is a side view of the concealed opening structure of the gas release rate test bench when the lid is opened.
[0020] In the diagram: 1-Cavity top cover; 2-Cavity; 3-Upper platform; 4-Cylinder base; 5-Cylinder; 6-Fixed base; 7-Rotating shaft; 8-Buffer column; 9-Buffer seat; 10-Support shaft; 11-Fisheye connector; 12-Lever bracket; 13-Reinforcing rib; 14-Connecting shaft; 15-Connecting base. Detailed Implementation
[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0022] The purpose of this utility model is to provide a hidden opening structure for the gas release rate test bench to solve the problems existing in the prior art. It can reduce the external space occupancy of the gas release rate test bench, make the overall size of the gas release rate test bench more compact, ensure the smoothness of the operation process, and improve the test accuracy.
[0023] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0024] This utility model provides a concealed opening structure for a gas release rate testing platform, such as... Figures 1-3 As shown, the device includes an opening assembly and a driving device. The opening assembly includes a lever bracket 12, a fixed base, and a connecting base. The fixed base is used to fix the device to the top surface of the upper platform 3, and the connecting base is used to fix the device to the top surface of the cavity cover 1. One end of the lever bracket 12 is hinged to the fixed base, and the other end of the lever bracket 12 is connected to the connecting base. The fixed end of the driving device is used to fix the device to the support frame at the bottom of the upper platform 3, and the free end of the driving device is used to pass through the upper platform 3 and be hinged to the middle of the lever bracket 12. One end of the lever bracket 12 is hinged and fixed to the fixed base on the top surface of the upper platform 3, and the other end is connected to the connecting base of the cavity cover 1. The fixed end of the driving device is hidden on the support frame below the upper platform 3, and the free end passes through the upper platform 3 and is hinged to the middle of the lever bracket 12. When driven, the lever bracket 12 is rotated, which drives the upper cover 1 to open and close. When the cover is not open, the drive unit is completely hidden under the upper platform 3, with no permanent protruding parts. This avoids the expansion of the equipment outline caused by traditional external cylinders 5 or motors, and reduces the possibility of accidental contact between personnel or materials and the equipment. The drive unit only temporarily occupies the space between the upper platform 3 and the upper cover 1 when the cover is open. After closing, the external size of the equipment returns to a minimum, which is suitable for laboratory environments with limited space. The hidden opening structure of the gas release rate test bench achieves compact management of the opening mechanism through mechanical linkage and the hidden layout of the drive unit, ensuring smooth operation and improving test accuracy.
[0025] In a further preferred embodiment of this utility model, the concealed opening structure of the gas release rate test bench also includes a buffer component. The buffer component includes a buffer column 8 and a buffer seat 9. The buffer column 8 is fixedly installed on the top surface of the upper platform 3, and the buffer seat 9 is installed on the lever bracket 12. When the lever bracket 12 closes the upper cover 1 of the cavity, the buffer column 8 can abut against the buffer seat 9. When closing the cover, the lever bracket 12 rotates, causing the upper cover 1 to press down. When it approaches the closed position, the buffer seat 9 contacts the buffer column 8, avoiding rigid collision, reducing mechanical wear and noise, and further improving reliability and durability.
[0026] In a further preferred embodiment of this utility model, the buffer column 8 includes a column body, a spring, and a sleeve. The sleeve is used to fix it to the top surface of the upper platform 3. The column body is inserted into the sleeve. One end of the spring is fixedly connected to the bottom surface of the sleeve, and the other end of the spring is fixedly connected to the end of the column body inserted into the sleeve. When the lever bracket 12 drives the buffer seat 9 to press down on the column body, the spring can effectively absorb the impact energy. The overall structure of the buffer component is simple and easy to maintain. Further preferably, the end of the column body that contacts the buffer seat 9 can be covered with polyurethane to reduce friction and wear.
[0027] In a further preferred embodiment of this utility model, the lever support 12 includes two symmetrically arranged connecting rods, which are fixedly connected by a support shaft 10. The fixed base includes a fixed base 6 and a rotating shaft 7 rotatably connected to the fixed base 6, with both ends of the rotating shaft 7 fixedly connected to the two connecting rods respectively. More preferably, the number of buffer components is two, each cooperating with one of the two connecting rods to ensure the stability of the buffering.
[0028] In a further preferred embodiment of this utility model, the driving device includes a cylinder 5, a cylinder base 4, and a fisheye connector 11. The cylinder base 4 is fixedly mounted on the support frame of the upper platform 3. The cylinder body of the cylinder 5 is hinged to the cylinder base 4, and the piston rod of the cylinder 5 is fixedly connected to the connecting rod of the fisheye connector 11. The annular end of the fisheye connector 11 is fixedly sleeved on the support shaft 10. When opening the cover, the piston rod of the cylinder 5 extends, pushing the fisheye connector 11 and causing the support shaft 10 to rotate. According to the lever principle, the rotating shaft 7 acts as a fulcrum, and the upper cover 1 of the cavity is pried open through the lever bracket 12. When closing the cover, the piston rod of the cylinder 5 retracts, the fisheye connector 11 rotates in the opposite direction, the lever bracket 12 returns to its original position, and the upper cover 1 closes. The ball joint structure of the fisheye connector 11 allows for a certain angular deviation between the piston rod and the support shaft 10, compensating for the non-linear movement of the lever bracket 12.
[0029] In a further preferred embodiment of this utility model, the lever support 12 further includes a reinforcing rib 13, the two ends of which are fixedly connected to two connecting rods respectively. The reinforcing rib 13 can enhance the rigidity of the lever support 12 and improve its service life.
[0030] In a further preferred embodiment of this utility model, two connecting bases are used. Each connecting base includes a connecting base 15 and a connecting shaft 14. One end of the connecting shaft 14 is fixedly connected to a connecting rod, and the other end of the connecting shaft 14 is connected to the connecting base 15 via a key. The keyed connection of the connecting shaft 14 to the connecting base 15 prevents the upper cover 1 of the cavity from shaking when the cover is opened or closed, ensuring a tight seal between the upper cover 1 and the cavity 2 when closed.
[0031] In a further preferred embodiment of this utility model, a first keyway is provided on the connecting base 15, and a second keyway is provided on the connecting shaft 14. The connecting key is accommodated between the first keyway and the second keyway, and the connecting key is fitted and fixed with the second keyway. The first keyway and the connecting key are in clearance fit, and a certain gap is left between the connecting key and the first keyway, allowing the connecting key to make a certain relative movement in the first keyway. This allows the cavity cover 1 to be independently and finely adjusted in position when closed, ensuring that the sealing surfaces of the cavity cover 1 and the cavity 2 are in synchronous contact and fit more tightly, avoiding sealing failure caused by excessive force on one side.
[0032] This utility model uses specific examples to illustrate its principles and implementation methods. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the idea of this utility model. In summary, the content of this specification should not be construed as a limitation of this utility model.
Claims
1. A concealed opening structure for a gas release rate testing platform, characterized in that: The device includes a cover opening assembly and a drive unit. The cover opening assembly includes a lever bracket, a fixed base, and a connecting base. The fixed base is used to be fixedly installed on the top surface of the upper platform. The connecting base is used to be fixedly installed on the top surface of the cavity cover. One end of the lever bracket is hinged to the fixed base, and the other end of the lever bracket is connected to the connecting base. The fixed end of the drive unit is used to be fixedly installed on the support frame at the bottom of the upper platform, and the free end of the drive unit is used to pass through the upper platform and be hinged to the middle of the lever bracket.
2. The concealed opening structure of the gas release rate testing platform according to claim 1, characterized in that: It also includes a buffer component, which includes a buffer column and a buffer seat. The buffer column is fixedly installed on the top surface of the upper platform, and the buffer seat is installed on the lever bracket. When the lever bracket covers the upper cavity, the buffer column can abut against the buffer seat.
3. The concealed opening structure of the gas release rate testing platform according to claim 2, characterized in that: The buffer column includes a column, a spring, and a sleeve. The sleeve is used to be fixedly installed on the top surface of the upper platform. The column is inserted into the sleeve. One end of the spring is fixedly connected to the bottom surface of the sleeve, and the other end of the spring is fixedly connected to the end of the column inserted into the sleeve.
4. The concealed opening structure of the gas release rate testing platform according to claim 1, characterized in that: The lever support includes two symmetrically arranged connecting rods, which are fixedly connected by a support shaft. The fixed base includes a fixed base and a rotating shaft rotatably connected to the fixed base. The two ends of the rotating shaft are respectively fixedly connected to the two connecting rods.
5. The concealed opening structure of the gas release rate testing platform according to claim 4, characterized in that: The drive device includes a cylinder, a cylinder base, and a fisheye connector. The cylinder base is used to be fixedly installed on the support frame of the upper platform. The cylinder body is hinged to the cylinder base. The piston rod of the cylinder is fixedly connected to the connecting rod of the fisheye connector. The annular end of the fisheye connector is fixedly sleeved on the support shaft.
6. The concealed opening structure of the gas release rate testing platform according to claim 4, characterized in that: The lever support also includes reinforcing ribs, with each end of the reinforcing ribs being fixedly connected to one of the two connecting rods.
7. The concealed opening structure of the gas release rate testing platform according to claim 4, characterized in that: The number of connecting bases is two. Each connecting base includes a connecting base and a connecting shaft. One end of the connecting shaft is fixedly connected to the connecting rod, and the other end of the connecting shaft is connected to the connecting base by a key.
8. The concealed opening structure of the gas release rate testing platform according to claim 7, characterized in that: The connecting base is provided with a first keyway, the connecting shaft is provided with a second keyway, the connecting key is accommodated between the first keyway and the second keyway, the connecting key is fitted and fixed with the second keyway, and the first keyway and the connecting key are clearance fit.