Triaxial accelerometer and electronic device
By setting inclined beams at both ends of the spring beam and optimizing the design of the anchor point module, the problem of spring beam breakage under strong impact in capacitive triaxial accelerometers was solved, improving the shock resistance and reliability of the equipment, while maintaining sensitivity and reducing the size of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MEMSENSING MICROSYST SUZHOU CHINA
- Filing Date
- 2025-06-24
- Publication Date
- 2026-07-14
AI Technical Summary
Existing capacitive triaxial accelerometers are prone to spring beam breakage when subjected to strong Z-axis impacts, leading to equipment failure.
By setting inclined beams with radial dimensions that gradually increase along the first direction at both ends of the spring beam, the structural strength at both ends of the spring beam is enhanced. Furthermore, the design of the anchor point module, including a combination of insulation and conductive layers, reduces stress concentration and improves the stability of the anchor point.
The impact resistance and reliability of the spring beam are enhanced, preventing breakage, maintaining the sensitivity in the third direction without reduction, and the structure is simplified, reducing the size of the equipment.
Smart Images
Figure CN224500669U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of microelectromechanical sensor technology, and in particular to a triaxial accelerometer and electronic device. Background Technology
[0002] A triaxial accelerometer is a sensor used to measure the acceleration of an object along three orthogonal axes (usually X, Y, and Z axes). Common triaxial accelerometers include capacitive accelerometers, pressure accelerometers, and thermal convection accelerometers.
[0003] Capacitive accelerometers measure acceleration by detecting changes in capacitance. They obtain the change in capacitance based on the relative displacement between a suspended mass and a fixed electrode layer, and then calculate the acceleration based on the change in capacitance.
[0004] In the prior art, when a capacitive accelerometer is subjected to a strong Z-axis impact, the mass block causes a large instantaneous displacement of the spring beam connected to it, which can easily break the spring beam and cause the capacitive accelerometer to fail. Utility Model Content
[0005] This application proposes a triaxial accelerometer and electronic device to solve the technical problem of easy breakage of spring beams in the prior art.
[0006] To achieve the above objectives, according to a first aspect of this application, a triaxial accelerometer is provided, comprising:
[0007] The first detection module is used to detect acceleration in the first direction;
[0008] The second detection module is used to detect acceleration in a second direction, which is perpendicular to the first direction;
[0009] A third detection module is used to detect the upward acceleration of the third direction, wherein the third direction is perpendicular to the first direction and the second direction, and the third detection module includes:
[0010] The first fixed structure and the movable structure;
[0011] An anchor point module stacked with the first fixing structure along the third direction;
[0012] At least one spring beam extends along the first direction, each spring beam being connected between the first fixed structure and the movable structure. Each spring beam includes a central beam and at least one ramp beam, the ramp beam having a first end and a second end opposite to each other. The first end is connected to the central beam, and the second end is connected to the first fixed structure or the movable structure. The first end has a first dimension in the second direction, and the second end has a second dimension in the second direction, the first dimension being smaller than the second dimension.
[0013] In some embodiments, the at least one ramp beam includes a first ramp beam and a second ramp beam;
[0014] The second end of the first ramp beam is connected to the first fixed structure, and the second end of the second ramp beam is connected to the movable structure.
[0015] In some embodiments, the ratio of the second dimension to the first dimension is greater than or equal to a first preset value.
[0016] In some embodiments, the first preset value is 2.
[0017] In some embodiments, the ramp beam has a third dimension in the first direction, and the first end has a fourth dimension in the second direction, wherein the ratio of the third dimension to the fourth dimension is greater than or equal to a second preset value.
[0018] In some embodiments, the second preset value is 5.
[0019] In some embodiments, the anchor point module includes a first anchor point, the first anchor point including a first insulating layer; the first insulating layer and the first fixing structure are stacked along the third direction, and the first insulating layer is connected to the first fixing structure.
[0020] In some embodiments, at least one spring beam includes a first spring beam and a second spring beam, and the first fixing structure is located between the first spring beam and the second spring beam; the central axis of the first spring beam parallel to the first direction is collinear with the central axis of the second spring beam parallel to the first direction.
[0021] In some embodiments, the anchor point module further includes: at least four second anchor points, each second anchor point including a first conductive layer, a second fixing structure, and a second insulating layer stacked along the third direction; wherein the second fixing structure is disposed in the same layer as the movable structure.
[0022] In some embodiments, the third detection module further includes: at least one stress relief beam connected between the second fixing structure and the first fixing structure; the stress relief beam has a third projection on a plane parallel to the first direction and the second direction, the third projection being any one of a curve, an S-shape, or a Z-shape.
[0023] In some embodiments, the third detection module further includes: a detection area surrounded by the movable structure, the detection area including a first area and a second area arranged along the second direction; the first fixed structure and the spring beam are located between the first area and the second area.
[0024] In some embodiments, the first detection module is located in the first area; the second detection module is located in the second area.
[0025] In some embodiments, the anchor point module further includes: a plurality of third anchor points, the plurality of third anchor points being located in the detection area;
[0026] Each of the third anchor points includes a second conductive layer, a third fixing structure, and a third insulating layer stacked along the third direction; wherein the third fixing structure is disposed in the same layer as the movable structure.
[0027] In some embodiments, the second anchor point is reused as a first limiting structure, which is used to limit the range of motion of the movable structure along the first direction and the second direction;
[0028] At least two of the second anchor points are located in the first zone, and at least two of the second anchor points are located in the second zone.
[0029] In some embodiments, the third anchor point is reused as a second limiting structure, which is used to limit the range of motion of the movable structure along the first direction and the second direction;
[0030] The number of the second limiting structures is greater than or equal to four;
[0031] Multiple second limiting structures are evenly distributed along the edge of the detection area, and the second limiting structures are adjacent to the sidewall of the movable structure.
[0032] According to a second aspect of this application, an electronic device is provided, including a triaxial accelerometer as described in any of the above embodiments.
[0033] This application achieves the following beneficial effects: This application provides a triaxial accelerometer. By setting inclined beams with radial dimensions gradually increasing along a first direction at both ends of a spring beam, and connecting the inclined beams to a first fixed or movable structure, the structural strength at both ends of the spring beam can be enhanced, improving the spring beam's impact resistance and reliability. When the first fixed or movable structure causes displacement of the spring beam, the ends of the spring beam are less prone to breakage and damage. Furthermore, the inclined beams form a large torque structure in the third direction without reducing the sensitivity in that direction.
[0034] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description
[0035] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0036] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.
[0037] Figure 1 This is a schematic diagram of the structure of a triaxial accelerometer provided in an embodiment of this application;
[0038] Figure 2 This is a schematic diagram of the structure of a triaxial accelerometer provided in an embodiment of this application;
[0039] Figure 3 A partial structural schematic diagram of a triaxial accelerometer provided in an embodiment of this application;
[0040] Figure 4 A partial structural schematic diagram of a triaxial accelerometer provided in an embodiment of this application;
[0041] Figure 5 Provided for the embodiments of this application Figure 2 An enlarged schematic diagram of part A in the middle;
[0042] Figure 6 Provided for the embodiments of this application Figure 2 Enlarged schematic diagram of part B;
[0043] Figure 7 This is a schematic diagram of the structure of a triaxial accelerometer provided in an embodiment of this application.
[0044] Explanation of reference numerals in the attached figures:
[0045] 100. First detection module; 200. Second detection module;
[0046] 300. Third detection module; 1. First fixed structure; 2. Movable structure; 3. Anchor point module; 31. First anchor point; 311. First insulating layer; 32. Second anchor point; 321. First conductive layer; 322. Second insulating layer; 33. Third anchor point; 331. Second conductive layer; 332. Third insulating layer; 4. Spring beam; 41. Central beam; 42. Inclined beam; 421. First end; 422. Second end; 43. First inclined beam; 44. Second inclined beam; 45. First spring beam; 46. Second spring beam; 5. Second fixed structure; 6. Stress relief beam; 7. Detection area; 71. First area; 72. Second area; 8. Third fixed structure; 9. First limiting structure; 10. Second limiting structure;
[0047] X, first direction; Y, second direction; Z, third direction. Detailed Implementation
[0048] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.
[0049] Capacitive accelerometers measure acceleration by detecting changes in capacitance. They obtain the capacitance change based on the relative displacement between a suspended mass and a fixed electrode layer, and then calculate the acceleration based on this capacitance change. In existing technology, when a capacitive accelerometer is subjected to a strong Z-axis impact, the mass causes a large instantaneous displacement of the connected spring beam, which is prone to breakage, leading to accelerometer failure.
[0050] Furthermore, capacitive accelerometers also include anchor points made of conductive material. The conductive material at the anchor points is prone to stress, which can lead to breakage and affect the stability of the capacitive accelerometer.
[0051] In view of the technical problems of easy breakage of spring beams and anchor points in the prior art, this application proposes a triaxial accelerometer and electronic device to overcome the above problems.
[0052] The following description, in conjunction with the accompanying drawings, introduces a triaxial accelerometer and electronic device provided in this application.
[0053] See Figure 1 as well as Figure 3 As shown, this application proposes a triaxial accelerometer, comprising:
[0054] The first detection module 100 is used to detect acceleration in the first direction X;
[0055] The second detection module 200 is used to detect acceleration in the second direction Y, which is perpendicular to the first direction X.
[0056] The third detection module 300 is used to detect the acceleration in the third direction Z, which is perpendicular to the first direction X and the second direction Y. The third detection module 300 includes:
[0057] First fixed structure 1 and movable structure 2;
[0058] An anchor point module 3 is stacked with the first fixed structure 1 along the third direction Z;
[0059] At least one spring beam 4 extends along a first direction X. Each spring beam 4 is connected between a first fixed structure 1 and a movable structure 2. Each spring beam 4 includes a central beam 41 and at least one ramp beam 42. The ramp beam 42 has a first end 421 and a second end 422 disposed opposite to each other. The first end 421 is connected to the central beam 41, and the second end 422 is connected to the first fixed structure 1 or the movable structure 2. The first end 421 has a first dimension in the second direction Y, and the second end 422 has a second dimension in the second direction Y. The first dimension is smaller than the second dimension.
[0060] For details, please refer to Figure 3 As shown, each spring beam 4 includes a central beam 41 and two ramp beams 42 located at both ends of the central beam 41. The central beam 41 may be cylindrical, and its diameter remains unchanged. The ramp beams 42 may be frustum-shaped, having a first end 421 and a second end 422 that are parallel to each other. From the first end 421 to the second end 422, the diameter (radial dimension) of the ramp beams 42 gradually increases, and the diameter of the first end 421 is equal to the diameter of the central beam 41. The radial dimension is the dimension along the second direction Y.
[0061] At least one ramp beam 42 includes a first ramp beam 43 and a second ramp beam 44; the second end 422 of the first ramp beam 43 is connected to the first fixed structure 1, and the second end 422 of the second ramp beam 44 is connected to the movable structure 2.
[0062] When the triaxial accelerometer is subjected to a third-direction Z-force impact, the movable structure 2 causes the spring beam 4 to twist. The movable structure 2 is the mass block in the third-direction Z-force. A relative displacement is generated between the movable structure 2 and the fixed electrode layer (not shown). The capacitance change in the third-direction Z-force is obtained through the relative displacement, and the acceleration in the third-direction Z-force is obtained based on the capacitance change.
[0063] In some embodiments, the ratio of the second dimension to the first dimension is greater than or equal to a first preset value.
[0064] In some embodiments, the first preset value is 2.
[0065] In some embodiments, the ramp beam 42 has a third dimension in the first direction X, and the first end 421 has a fourth dimension in the second direction Y, wherein the ratio of the third dimension to the fourth dimension is greater than or equal to a second preset value.
[0066] In some embodiments, the second preset value is 5.
[0067] Based on the above embodiments, during the displacement of the spring beam 4, both ends of the spring beam 4 will bear relatively large impact forces. By setting inclined beams 42 with radial dimensions gradually increasing along the first direction X at both ends of the spring beam 4, the structural strength at both ends of the spring beam 4 can be enhanced, and the impact resistance and reliability in the third direction Z can be improved, making the ends of the spring beam 4 less prone to breakage and damage. Furthermore, the inclined beams 42 form a large torque structure in the third direction Z without reducing the sensitivity in the third direction Z.
[0068] In some embodiments, the first fixed structure 1 and the movable structure 2 are arranged on the same layer.
[0069] In some embodiments, see Figure 2 As shown, the anchor point module 3 includes a first anchor point 31, and the first anchor point 31 includes a first insulating layer 311; the first insulating layer 311 is stacked with the first fixing structure 1 along the third direction Z, and the first insulating layer 311 is connected to the first fixing structure 1. The first insulating layer 311 is located above the first fixing structure 1.
[0070] In some embodiments, see Figure 3 and Figure 4 As shown, at least one spring beam 4 includes a first spring beam 45 and a second spring beam 46, with a first fixing structure 1 and a first anchor point 31 located between the first spring beam 45 and the second spring beam 46; the central axis of the first spring beam 45, parallel to the first direction X, is collinear with the central axis of the second spring beam 46, which is also parallel to the first direction X. The first spring beam 45 includes a second ramp beam 44, a central beam 41, and a first ramp beam 43 connected in sequence. The second spring beam 46 includes a second ramp beam 44, a central beam 41, and a first ramp beam 43 connected in sequence.
[0071] In some embodiments, see Figure 4 and Figure 5As shown, the anchor point module 3 further includes at least four second anchor points 32. Each second anchor point 32 includes a first conductive layer 321, a second fixing structure 5, and a second insulating layer 322 stacked along a third direction Z. The second fixing structure 5 is located between the first conductive layer 321 and the second insulating layer 322. The first conductive layer 321 and the second fixing structure 5 are connected, and the second fixing structure 5 and the second insulating layer 322 are connected. The second fixing structure 5 is disposed on the same layer as the movable structure 2.
[0072] In some embodiments, see Figure 4 As shown, the third detection module 300 further includes: at least one stress relief beam 6, which is connected between the second fixed structure 5 and the first fixed structure 1; the stress relief beam 6 has a third projection on a plane parallel to the first direction X and the second direction Y, and the third projection is any one of curved, S-shaped, or Z-shaped. This embodiment uses a curved third projection as an example for explanation.
[0073] The first conductive layer 321 is typically made of metal, and the connection between the metal material and the second fixing structure 5 can easily generate significant stress. The stress relief beam 6 can effectively release the stress generated by the first conductive layer 321. Furthermore, since the stress relief beam 6 is connected to the first fixing structure 1, and the first fixing structure 1 is connected to the spring beam 4, the stress relief beam 6 can suppress stress transmission to the spring beam 4, thereby improving the stability of the spring beam 4, reducing the sensitivity of the first fixing structure 1 to stress, and minimizing the zero-point drift of the third detection module 300.
[0074] In some embodiments, see Figure 2 As shown, the third detection module 300 also includes: a detection area 7 surrounded by a movable structure 2, the detection area 7 including a first area 71 and a second area 72 arranged along the second direction Y; the first fixed structure 1 and the spring beam 4 are located between the first area 71 and the second area 72.
[0075] First detection module 100 ( Figure 2 (Not shown) Located in the first zone 71; the second detection module 200 ( Figure 2 (Not shown) Located in Zone 2, 72.
[0076] Based on the above embodiments, the internal space of the triaxial accelerometer can be effectively utilized, reducing the size of the triaxial accelerometer.
[0077] In some embodiments, see Figure 2 and Figure 6As shown, the anchor point module 3 further includes: multiple third anchor points 33 located in the detection area 7; each third anchor point 33 includes a second conductive layer 331, a third fixing structure 8, and a third insulating layer 332 stacked along the third direction Z; the third fixing structure 8 is located between the second conductive layer 331 and the third insulating layer 332. The second conductive layer 331 and the third fixing structure 8 are connected, and the third fixing structure 8 and the third insulating layer 332 are connected. The third fixing structure 8 is arranged on the same layer as the movable structure 2.
[0078] In some embodiments, the first fixed structure 1, the movable structure 2, the second fixed structure 5, the stress relief beam 6, the third fixed structure 8, and the spring beam 4 are located in the same plane (e.g., in the middle layer) and are all made of conductive materials, such as silicon doped with impurities, including phosphorus and boron.
[0079] In some embodiments, the first insulating layer 311, the second insulating layer 322 and the third insulating layer 332 are located in the same plane (e.g., on the top layer) and are all made of insulating material, such as silicon oxide.
[0080] In some embodiments, the first conductive layer 321 and the second conductive layer 331 are located on the same plane (e.g., on the bottom layer) and are both made of conductive materials, such as metal.
[0081] In some embodiments, the first conductive layer 321 is electrically connected to an external circuit, and the first conductive layer 321 can transmit electrical signals from the external circuit to the movable structure 2, or the first conductive layer 321 can transmit electrical signals from the movable structure 2 to the external circuit. The second conductive layer 331 is also electrically connected to the external circuit and can receive electrical signals from the external circuit, thereby ensuring that the potentials of the second conductive layer 331 and the first conductive layer 321 are consistent.
[0082] Furthermore, the potentials of the first fixed structure 1, the movable structure 2, the second fixed structure 5, the spring beam 4, the first conductive layer 321, and the second conductive layer 331 are kept consistent, so that even if the first conductive layer 321 comes into contact with the first fixed structure 1 and the movable structure 2, a short circuit will not occur.
[0083] Based on the above embodiments, by dividing the second anchor point 32 into a conductive first conductive layer 321 and an insulating second insulating layer 322, and dividing the third anchor point 33 into a conductive second conductive layer 331 and an insulating third insulating layer 332, the problem of excessive stress caused by using all metal materials to manufacture the anchor points can be avoided. The conductive first conductive layer 321 and the conductive second conductive layer 331 are used to receive and transmit electrical signals, and the insulating third insulating layer 332, the second insulating layer 322, and the first insulating layer 311 can effectively reduce stress, making the anchor point module 3 more stable.
[0084] In some embodiments, see Figure 7 As shown, the second anchor point 32 is reused as the first limiting structure 9, which is used to limit the range of motion of the movable structure 2 along the first direction X and the second direction Y; at least two second anchor points 32 are located in the first region 71, and at least two second anchor points 32 are located in the second region 72.
[0085] For example, there are four second anchor points 32, with two second anchor points 32 located in the first zone 71 and two second anchor points 32 located in the second zone 72. The four second anchor points 32 are symmetrically distributed around the spring beam 4.
[0086] The second anchor point 32 is reused as the first limiting structure 9 to limit the range of motion of the movable structure 2, so as to prevent the movable structure 2 from colliding with the first detection module 100 and the second detection module 200 due to excessive displacement, and to prevent the movable structure 2 from interfering with the acceleration measurement in the first direction X and the acceleration measurement in the second direction Y due to excessive displacement.
[0087] In some embodiments, see Figure 7 As shown, the third anchor point 33 is reused as the second limiting structure 10. The second limiting structure 10 is used to limit the range of movement of the movable structure 2 along the first direction X and the second direction Y. The number of the second limiting structures 10 is greater than or equal to four. Multiple second limiting structures 10 are evenly distributed along the edge of the detection area 7, and the second limiting structures 10 are adjacent to the side wall of the movable structure 2.
[0088] Specifically, there are four second limiting structures 10, located at the corners of the edge of the detection area 7, and surrounded by the movable structure 2. The second limiting structures 10 abut against the sidewalls of the movable structure 2, limiting the range of motion of the movable structure 2 and preventing excessive displacement of the movable structure 2 from colliding with the first detection module 100 and the second detection module 200, thus avoiding interference from the movable structure 2. Furthermore, since the displacement range of the movable structure 2 is limited, and the movable structure 2 is connected to the spring beam 4, the second limiting structures 10 can also indirectly limit the range of motion of the spring beam 4, preventing beam breakage caused by excessive torsion of the spring beam 4.
[0089] By reusing the second anchor point 32 as the first limiting structure 9 and the third anchor point 33 as the second limiting structure 10, the first limiting structure 9 and / or the second limiting structure 10 simultaneously have the fixing function of the anchor point, the conductive function, and the limiting function of the limiting structure, thus simplifying the structural complexity of the triaxial accelerometer and reducing its size.
[0090] This application provides an electronic device including a triaxial accelerometer as described in any of the above embodiments.
[0091] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0092] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.
[0093] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.
[0094] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.
Claims
1. A triaxial accelerometer, characterized in that, include: The first detection module (100) is used to detect acceleration in the first direction (X); The second detection module (200) is used to detect acceleration in a second direction (Y), which is perpendicular to the first direction (X); A third detection module (300) is used to detect acceleration in a third direction (Z), wherein the third direction (Z) is perpendicular to the first direction (X) and the second direction (Y), and the third detection module (300) includes: The first fixed structure (1) and the movable structure (2); An anchor point module (3) is stacked with the first fixed structure (1) along the third direction (Z); At least one spring beam (4) extends along the first direction (X), each spring beam (4) is connected between the first fixed structure (1) and the movable structure (2), each spring beam (4) includes a central beam (41) and at least one ramp beam (42), the ramp beam (42) having a first end (421) and a second end (422) opposite to each other, the first end (421) being connected to the central beam (41), the second end (422) being connected to the first fixed structure (1) or the movable structure (2), the first end (421) having a first dimension in the second direction (Y), the second end (422) having a second dimension in the second direction (Y), the first dimension being smaller than the second dimension.
2. The triaxial accelerometer according to claim 1, characterized in that, The at least one inclined beam (42) includes a first inclined beam (43) and a second inclined beam (44); The second end (422) of the first ramp beam (43) is connected to the first fixed structure (1), and the second end (422) of the second ramp beam (44) is connected to the movable structure (2).
3. The triaxial accelerometer according to claim 1, characterized in that, The ratio of the second dimension to the first dimension is greater than or equal to a first preset value.
4. The triaxial accelerometer according to claim 3, characterized in that, The first preset value is 2.
5. The triaxial accelerometer according to claim 1, characterized in that, The ramp beam (42) has a third dimension in the first direction (X), and the first end (421) has a fourth dimension in the second direction (Y). The ratio of the third dimension to the fourth dimension is greater than or equal to a second preset value.
6. The triaxial accelerometer according to claim 5, characterized in that, The second preset value is 5.
7. The triaxial accelerometer according to claim 1, characterized in that, The anchor point module (3) includes a first anchor point (31), and the first anchor point (31) includes a first insulating layer (311); The first insulating layer (311) and the first fixing structure (1) are stacked along the third direction (Z), and the first insulating layer (311) is connected to the first fixing structure (1).
8. The triaxial accelerometer according to claim 1, characterized in that, At least one spring beam (4) includes a first spring beam (45) and a second spring beam (46), and the first fixing structure (1) is located between the first spring beam (45) and the second spring beam (46); the first spring beam (45) is collinear with the central axis of the first direction (X) and the second spring beam (46) is collinear with the central axis of the first direction (X).
9. The triaxial accelerometer according to claim 1, characterized in that, The anchor point module (3) further includes at least four second anchor points (32), each second anchor point (32) including a first conductive layer (321), a second fixing structure (5) and a second insulating layer (322) stacked along the third direction (Z); The second fixed structure (5) is arranged on the same layer as the movable structure (2).
10. The triaxial accelerometer according to claim 9, characterized in that, The third detection module (300) further includes: at least one stress relief beam (6), which is connected between the second fixing structure (5) and the first fixing structure (1); the stress relief beam (6) has a third projection on a plane parallel to the first direction (X) and the second direction (Y), and the third projection is any one of curved, S-shaped and Z-shaped.
11. The triaxial accelerometer according to claim 9, characterized in that, The third detection module (300) further includes: a detection area (7) surrounded by the movable structure (2), the detection area (7) including a first area (71) and a second area (72) arranged along the second direction (Y); the first fixed structure (1) and the spring beam (4) are located between the first area (71) and the second area (72).
12. The triaxial accelerometer according to claim 11, characterized in that, The first detection module (100) is located in the first area (71); the second detection module (200) is located in the second area (72).
13. The triaxial accelerometer according to claim 11, characterized in that, The anchor point module (3) further includes: a plurality of third anchor points (33), the plurality of third anchor points (33) being located in the detection area (7); Each of the third anchor points (33) includes a second conductive layer (331), a third fixing structure (8), and a third insulating layer (332) stacked along the third direction (Z); The third fixed structure (8) is arranged on the same layer as the movable structure (2).
14. The triaxial accelerometer according to claim 11, characterized in that, The second anchor point (32) is reused as the first limiting structure (9), which is used to limit the range of motion of the movable structure (2) along the first direction (X) and the second direction (Y); At least two of the second anchor points (32) are located in the first region (71), and at least two of the second anchor points (32) are located in the second region (72).
15. The triaxial accelerometer according to claim 13, characterized in that, The third anchor point (33) is reused as a second limiting structure (10), which is used to limit the range of motion of the movable structure (2) along the first direction (X) and the second direction (Y); The number of the second limiting structure (10) is greater than or equal to four; Multiple second limiting structures (10) are evenly distributed along the edge of the detection area (7), and the second limiting structures (10) are adjacent to the sidewall of the movable structure (2).
16. An electronic device, characterized in that, Includes a triaxial accelerometer as described in any one of claims 1-15.