An anti-vibration clamp for atomic force microscope testing of a sample

Abstract

The utility model discloses a kind of anti-microvibration clamps for atomic force microscope test sample, it is related to atomic force microscope detection technical field, including bearing bottom plate, bearing bottom plate is specifically magnetic material, so that bearing bottom plate can be adsorbed with object table, the two side edges of the upper end surface of bearing bottom plate are equipped with a pair of guide rails, each guide rail is equipped with stop plate and push plate respectively in two sides along its length direction, stop plate is fixedly connected with one end of each guide rail, push plate can slide between guide rail, stop plate and push plate are equipped with sample to be measured between, drive assembly is equipped on the side of push plate away from stop plate, drive assembly is used to resist push plate, so that push plate and stop plate clamp fixed sample to be measured, the present application solves the technical problem that the existing atomic force microscope sample table clamp does not consider that sample bottom roughness is larger and inhomogeneous, sample size is smaller and the like, when sample is placed on detection object table, there can be slight vibration, affect detection result.

Description

Technical Field

[0001] This utility model relates to the field of atomic force microscopy testing technology, and in particular to a micro-vibration resistant clamp for testing samples using atomic force microscopy. Background Technology

[0002] Atomic force microscopy (AFM) is commonly used to detect the surface morphology, mechanical, electrical, and magnetic properties of various materials at the nanoscale. Due to factors such as large or uneven bottom roughness of the sample and small sample size, there will be slight vibrations when the sample is placed on the AFM stage. Although these vibrations are not visible to the naked eye, AFM is extremely sensitive to surface testing, which can lead to significant noise in the AFM test results. In addition, poor surface levelness of the sample, non-tight fit between the test fixture and the stage, and uneven force on both sides of the sample can all increase the noise in the test results.

[0003] In summary, developing an auxiliary fixture that can eliminate vibrations generated by the test sample and avoid noise in the test results is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide an atomic force microscope (AFM) testing device that solves the technical problem that existing AFM sample stage fixtures do not take into account factors such as large or uneven bottom roughness of the sample, or small sample size, which cause slight vibrations when the sample is placed on the stage, affecting the testing results.

[0005] To achieve the above objectives, this utility model provides a micro-vibration resistant clamp for testing samples using an atomic force microscope, comprising:

[0006] The support base plate is made of magnetic material, which allows it to adhere to the stage. A pair of guide rails are provided on both sides of the upper surface of the support base plate. Each guide rail has a stop plate and a push plate on both sides along its length. The stop plate is fixedly connected to one end of each guide rail. The push plate can slide between the guide rails. The sample to be tested is placed between the stop plate and the push plate. A drive component is provided on the side of the push plate away from the stop plate. The drive component is used to hold the push plate, so that the push plate and the stop plate clamp and fix the sample to be tested.

[0007] Optionally, the drive assembly includes a drive boss fixedly connected to the base plate, a drive screw running through the drive boss, the drive screw being parallel to each guide rail, and the drive screw being threadedly connected to the drive boss. By turning the drive screw, the push plate is driven to move along the guide rail.

[0008] Optionally, a locking groove is provided on the end face of the drive screw away from the push plate, the locking groove being used to connect a rotary wrench.

[0009] Optionally, a rotary bearing is fitted at one end of the drive screw near the push plate. The inner ring of the rotary bearing is fixedly located on the side of the push plate away from the stop plate. The drive screw is inserted into the inner ring of the rotary bearing and engages with the outer ring of the rotary bearing.

[0010] Optionally, the drive boss has a locking hole along its height direction, the locking hole extends to the side wall of the drive screw, a locking member is installed through the locking hole, the end of the locking member abuts against the side wall of the drive screw, and the locking member restricts and locks the rotation of the drive screw.

[0011] Optionally, each guide rail has a sliding groove on its opposite sidewall. Each sliding groove extends from the side end face of the guide rail near the drive boss to the stop plate, and both ends of the push plate are engaged with each sliding groove.

[0012] Optionally, the ends of both sides of the push plate along the height direction of the supporting base plate are provided with sliding wheels, and each sliding wheel abuts against the inner side wall of each sliding groove.

[0013] Optionally, the stop plate and each guide rail are an integral structure.

[0014] Optionally, the thickness of the guide rail and the stop plate is less than the thickness of the sample to be tested, and the spacing between each guide rail is greater than or equal to 20 mm.

[0015] Optionally, the supporting base plate is specifically rectangular.

[0016] Compared to the aforementioned background technology, the anti-vibration fixture for atomic force microscope test samples provided by this utility model includes: a support base plate, specifically made of magnetic material, allowing the support base plate to be tightly adsorbed onto the stage; two parallel guide rails are provided on the support base plate, each guide rail being arranged along the length direction of the support base plate; a stop plate and a push plate are respectively provided on both sides of each guide rail along the length direction, wherein the stop plate is fixedly connected to the end of each guide rail, and the push plate is slidably disposed between the two guide rails, with the push plate facing away from the stop plate. A drive assembly is provided on one side of the plate, and the drive assembly abuts against the side wall of the push plate. When using this invention to test the sample, the supporting base plate is placed on the stage, and the stage can be attracted to the magnetic supporting base plate, making the setting of this invention stable. Then, the sample to be tested is placed between each guide rail, and then the drive assembly is turned. The end of the drive assembly abuts against the push plate, driving the push plate to move towards the side closer to the limiting plate. As the drive assembly moves, the sample to be tested is clamped between the stop plate and the push plate, locking the position of the sample to be tested.

[0017] This application uses a magnetic material to set the base plate, which eliminates vibration through magnetic adsorption. The stop plate and push plate clamp the sample to be tested, avoiding vibration caused by the rough bottom surface and small size of the sample, thus improving the detection accuracy of atomic force microscopy. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 Structural diagrams provided for embodiments of this utility model;

[0020] Figure 2 This is a partial cross-sectional view provided for an embodiment of the present utility model.

[0021] Among them, 1-bearing base plate; 21-guide rail; 22-sliding groove; 3-stop plate; 41-push plate; 42-sliding wheel; 51-drive boss; 52-drive screw; 53-locking hole; 54-rotating bearing; 55-clamping groove; 6-sample to be tested. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] This invention provides a micro-vibration resistant clamp for testing samples using an atomic force microscope. Please refer to the appendix of the instruction manual. Figure 1This application includes a support base plate 1, which is specifically made of magnetic material. When the support base plate 1 is placed on the stage, the support base plate 1 and the stage are magnetically attracted. A pair of parallel guide rails 21 are provided on the end face of the support base plate 1. Optionally, a stop plate 3 and a push plate 41 are respectively provided at both ends of each guide rail 21 along its own length direction. The stop plate 3 is fixedly connected to one end of each guide rail 21 and is perpendicular to each guide rail 21. In addition, the push plate 41 is perpendicular to each guide rail 21 and can slide between each guide rail 21. The sliding direction of the push plate 41 is parallel to the guide rail 21. A sample to be tested is placed between the stop plate 3 and the push plate 41. A driving component is provided on the side of the push plate 41 away from the stop plate 3. The driving component is used to hold the push plate 41, so that the push plate 41 and the stop plate 3 clamp and fix the sample to be tested.

[0025] In one embodiment of this application, the operator places the support base plate 1 in a designated area of ​​the stage. The support base plate 1 is made of magnetic material, so the support base plate 1 and the stage are stably attracted by magnetic force. Then, the sample to be tested 6 is placed between the stop plate 3 and the push plate 41. The drive assembly is turned so that the end of the drive assembly pushes the push plate 41 to move closer to the stop plate 3. The push plate 41 pushes the sample to be tested 6 to move until the other side of the sample to be tested 6 abuts against the stop plate 3. At this time, the push plate 41 and the stop plate 3 clamp and fix the sample to be tested 6 to prevent the sample to be tested 6 from vibrating and affecting the test results.

[0026] Optionally, the drive assembly includes a drive boss 51 fixed to the supporting base plate 1, with a drive screw 52 passing through the drive boss 51. The center of the drive screw 52 corresponds to the midpoint of the push plate 41. The drive screw 52 is threadedly connected to the drive boss 51 and is parallel to each guide rail 21. By turning the drive screw 52, ​​the push plate 41 is driven to move along the guide rail 21. That is, when the operator rotates the drive screw 52, ​​the drive screw 52 slides within the drive boss 51, and the drive screw 52 pushes the push plate 41 to move. The push plate 41 and the stop plate 3 clamp and fix the sample 6 to be tested.

[0027] Optionally, a locking groove 55 is provided on the side end face of the drive screw 52 away from the push plate 41. The locking groove 55 is used to connect a rotating wrench. The locking groove 55 can be a hexagonal screw hole. The operator can connect the rotating wrench with the locking groove 55 and rotate the wrench to fix the sample 6 to be tested.

[0028] Furthermore, a rotary bearing 54 is fitted at the end of the drive screw 52 that abuts against the push plate 41. The inner ring of the rotary bearing 54 is fixedly set on the side of the push plate 41 away from the stop plate 3. The drive screw 52 is inserted into the inner ring of the rotary bearing 54 and cooperates with the outer ring of the rotary bearing 54. When the drive screw 52 rotates, the inner ring of the rotary bearing 54, which is fixedly connected to the drive screw 52, ​​rotates, while the outer ring of the rotary bearing 54 and the push plate 41 do not rotate. The push plate 41 only receives the axial thrust transmitted by the drive screw 52, ​​making the pushing process of the drive screw 52 on the push plate 41 more stable and avoiding the drive screw 52 applying torque to the push plate 41, which would cause the sample 6 to be tested to rotate by a certain angle and affect the test results.

[0029] Optionally, a locking hole 53 is provided on the upper end face of the drive boss 51. The locking hole 53 extends along the height direction of the drive boss 51 and extends to the side wall of the drive screw 52. A locking component is threaded into the locking hole 53. The operator screws the locking component so that the end of the locking component abuts against the side wall of the drive screw 52. The locking component restricts the rotation of the drive screw 52 through friction, preventing the drive screw 52 from loosening during the test, which would cause the push plate 41 to retract. If the push plate 41 and the stop plate 3 cannot stably clamp the sample 6 to be tested, it would affect the test results.

[0030] In one embodiment of this application, the end of the drive screw 52 away from the push plate 41 is connected to the output shaft of the servo motor. The servo motor is equipped with a control device adapted to stop the servo motor when the received pressure signal reaches a preset threshold. In addition, a pressure sensor is provided on the end face of the push plate 41 that abuts against the sample 6. The pressure sensor is connected to the servo motor. When the operator starts the servo motor, the output shaft of the servo motor drives the drive screw 52 to rotate. The drive screw 52 drives the push plate 41, which in turn moves the sample 6 to the side closer to the stop plate 3. Then, the stop plate 3 and the push plate 41 clamp the sample 6. The pressure sensor installed on the push plate 41 detects the pressure signal and feeds the pressure signal back to the servo motor. The control device identifies the pressure signal fed back by the servo motor. When the pressure signal reaches the threshold, the servo motor stops running. At this time, the push plate 41 and the stop plate 3 firmly clamp the sample 6.

[0031] Optionally, each guide rail 21 is provided with a sliding groove 22 on its opposite sidewall. The sliding groove 22 extends from the sidewall of the guide rail 21 near the drive boss 51 to the stop plate 3. Both ends of the push plate 41 extend into the sliding groove 22 and engage with each sliding groove 22.

[0032] Furthermore, the upper and lower end faces of the push plate 41 are provided with sliding wheels 42. Each sliding wheel 42 abuts against the side walls of each sliding groove 22. The sliding wheel 42 can assist the push plate 41 in sliding while also restricting the vertical degree of freedom of the push plate 41, preventing the push plate 41 from swinging in the sliding groove 22, and further improving the stability of the clamping process of the sample 6 to be tested.

[0033] Please refer to the instruction manual appendix. Figure 2 The guide rail 21 and the stop plate 3 are an integral structure, which gives the guide rail 21 and the stop plate 3 sufficient load strength to prevent the stop plate 3 from deforming due to long-term contact with the sample 6 and affecting the positioning effect of the sample 6.

[0034] Optionally, the supporting base plate 1 is rectangular to facilitate the support of the sample 6 to be tested. The thickness of both the guide rail 21 and the stop plate 3 is less than the thickness of the sample 6 to be tested. Correspondingly, the thickness of the push plate 41 placed between the guide rails 21 is also less than the thickness of the sample 6 to be tested. This ensures that the upper surface of the sample 6 to be tested for atomic force microscopy is higher than the guide rails 21, the stop plate 3, and the push plate 41, preventing the atomic force microscope from colliding with the guide rails 21, the stop plate 3, or the push plate 41. In addition, the spacing between the guide rails 21 is greater than or equal to 20 mm, allowing this application to test samples of any size with a width between 5 mm and 20 mm.

[0035] In one embodiment of this application, the operator places the support base plate 1 on the stage, and the support base plate 1 is stably attracted to the stage by magnetic force. Then, the sample to be tested 6 is placed between the two guide rails 21. The rotating wrench is connected to the locking groove 55 of the drive screw 52. The rotating wrench is rotated, and the drive screw 52 pushes the push plate 41, so that the push plate 41 moves the sample to be tested 6 closer to the stop plate 3. The stop plate 3 and the push plate 41 clamp and fix the sample to be tested 6. Finally, the locking member is screwed into the locking hole 53 of the drive boss 51 to prevent the push plate 41 from loosening. The operator tests the sample to be tested 6 using an atomic force microscope.

[0036] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0037] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of this utility model.

Claims

1. A micro-vibration resistant clamp for testing samples using an atomic force microscope, characterized in that, include: A support base plate (1) is specifically made of magnetic material, which enables the support base plate (1) to be attracted to the stage. A pair of guide rails (21) are provided on both sides of the upper surface of the support base plate (1). Each guide rail (21) is provided with a stop plate (3) and a push plate (41) on both sides along its own length direction. The stop plate (3) is fixedly connected to one end of each guide rail (21). The push plate (41) can slide between the guide rails (21). The sample to be tested (6) is provided between the stop plate (3) and the push plate (41). A driving component is provided on the side of the push plate (41) away from the stop plate (3). The driving component is used to hold the push plate (41) so that the push plate (41) and the stop plate (3) clamp and fix the sample to be tested (6).

2. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 1, characterized in that, The drive assembly includes a drive boss (51) fixedly connected to the bearing base plate (1). A drive screw (52) is inserted inside the drive boss (51). The drive screw (52) is parallel to each of the guide rails (21). The drive screw (52) is threadedly connected to the drive boss (51). By screwing the drive screw (52), the push plate (41) is driven to move along the guide rail (21).

3. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 2, characterized in that, The drive screw (52) has a snap-fit ​​groove (55) on its end face away from the push plate (41), and the snap-fit ​​groove (55) is used to connect a rotary wrench.

4. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 2, characterized in that, A rotating bearing (54) is fitted on one end of the drive screw (52) near the push plate (41). The inner ring of the rotating bearing (54) is fixedly set on the side of the push plate (41) away from the stop plate (3). The drive screw (52) is inserted into the inner ring of the rotating bearing (54) and cooperates with the outer ring of the rotating bearing (54).

5. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 2, characterized in that, The drive boss (51) has a locking hole (53) along its height direction. The locking hole (53) extends to the side wall of the drive screw (52). A locking member is provided through the locking hole (53). The end of the locking member abuts against the side wall of the drive screw (52). The locking member restricts and locks the rotation of the drive screw (52).

6. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 2, characterized in that, Each of the guide rails (21) has a sliding groove (22) on its opposite sidewall. Each sliding groove (22) extends from the side end face of the guide rail (21) near the drive boss (51) to the stop plate (3). Both ends of the push plate (41) are engaged with each sliding groove (22).

7. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 6, characterized in that, The push plate (41) is provided with sliding wheels (42) at the ends of both sides along the height direction of the bearing base plate (1), and each sliding wheel (42) abuts against the inner side wall of each sliding groove (22).

8. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 1, characterized in that, The stop plate (3) and each of the guide rails (21) are an integral structure.

9. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 1, characterized in that, The thickness of the guide rail (21) and the stop plate (3) is less than the thickness of the sample to be tested (6), and the distance between each guide rail (21) is greater than or equal to 20 mm.

10. The anti-vibration fixture for testing samples using an atomic force microscope according to claim 1, characterized in that, The supporting base plate (1) is specifically rectangular.

Images