Precision angle adjustment device for optical modules
By designing yaw and pitch adjustment mechanisms, the problem of insufficient angle accuracy during optical module installation was solved, achieving micron-level angle adjustment and efficient testing and debugging, thus reducing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUHAN LUOBO SEMICON TECH CO LTD
- Filing Date
- 2025-07-19
- Publication Date
- 2026-07-14
AI Technical Summary
During the installation of existing optical modules, due to component precision deviations and assembly errors, it is difficult to guarantee that the angle will reach the micrometer level of accuracy, resulting in poor debugging results and long debugging time.
A precision angle adjustment device for an optical module was designed, including a yaw adjustment mechanism and a pitch adjustment mechanism. The three-dimensional angle adjustment of the optical module is achieved through screw connection and rotation shaft, ensuring that the image is orthogonal in the camera's field of view.
It achieves micron-level precision adjustment of the optical module angle, improves testing and debugging efficiency, reduces structural component production costs, and ensures that the three-dimensional angle adjustments do not interfere with each other.
Smart Images
Figure CN224501008U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and in particular to a precision angle adjustment device for an optical module. Background Technology
[0002] In wafer AOI inspection, micron and submicron defects often place higher demands on inspection hardware. During the setup and debugging of the inspection environment, these high-precision hardware components also need to be installed and debugged. Among them, the three-dimensional angles of the camera, such as pitch angle, yaw angle, and rotation angle, have a significant impact on the final image quality. Usually, the consistency of angles is ensured by the installation structure precision of the optical module during the installation and debugging process. However, installing the optical module requires at least 3-4 parts to be installed and fixed. Due to the dimensional accuracy deviations of the parts themselves and the optical components, as well as assembly errors during installation, it is difficult to ensure that the angle of the optical module reaches the micron level of error. This results in poor optical module debugging results and a long debugging time.
[0003] The above content is only used to help understand the technical solution of this utility model and does not represent an admission that the above content is prior art. Summary of the Invention
[0004] The main purpose of this invention is to provide a precision angle adjustment device for an optical module, which aims to solve the technical problem that it is difficult to ensure that the angle of the optical module reaches the micrometer level due to the dimensional accuracy deviation of existing optical components and the assembly error during installation.
[0005] To achieve the above objectives, this utility model provides a precision angle adjustment device for an optical module, the precision angle adjustment device for the optical module comprising: an optical module (100), a mounting backplate (200), a yaw adjustment mechanism (300), and a pitch adjustment mechanism (400).
[0006] The yaw adjustment mechanism (300) is locked to the fixed mounting back plate (200), the pitch adjustment mechanism (400) is locked to the yaw adjustment mechanism (300), and the optical module (100) is locked to the pitch adjustment mechanism (400).
[0007] The pitch adjustment mechanism (400) is used to drive the optical module (100) to rotate together, so as to adjust the pitch angle;
[0008] The yaw adjustment mechanism (300) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve the adjustment of the yaw angle;
[0009] The optical module (100) is used to acquire images;
[0010] Adjust the optical module (100) until the image is orthogonal in the camera's field of view to achieve the adjustment of the rotation angle.
[0011] Preferably, the optical module (100) includes: an industrial camera (101), a camera mounting plate (102), a lens barrel mounting plate (103), a lens barrel (104), and an objective lens (105).
[0012] The industrial camera (101) is mounted on the camera mounting plate (102). The camera mounting plate (102) is connected to the lens barrel mounting plate (103). The camera mounting plate (102) and the lens barrel mounting plate (103) are positioned by a shaft hole and can rotate relative to each other. The lens barrel mounting plate (103) is connected to the lens barrel (104). The lens barrel (104) is connected to the objective lens (105).
[0013] When the camera mounting plate (102) rotates, it drives the industrial camera (101) to move relative to the lens barrel (104) and the objective lens (105), adjusting the relative rotation of the industrial camera (101) relative to the wafer under test until the image is orthogonal in the field of view of the industrial camera (101), thus completing the adjustment of the rotation angle.
[0014] Preferably, the yaw adjustment mechanism (300) includes an adjustment knob (301), a yaw adjustment plate (303), and a rotating shaft 1 (304).
[0015] The optical module (100) and the pitch adjustment mechanism (400) are mounted on the yaw adjustment plate (303);
[0016] The fixing plate 1 (304) is connected to the mounting back plate (200) via the rotating shaft 1 (304), and the adjusting knob (301) is locked onto the mounting back plate (200);
[0017] The yaw adjustment plate (303) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to move;
[0018] When the adjustment knob (301) is turned, the knob pushes the yaw adjustment block (303) to rotate along the rotation axis 1 (304), which drives the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve the adjustment of the yaw angle.
[0019] Preferably, the yaw adjustment mechanism (300) further includes: a stop screw (302);
[0020] The stop screw (302) is used to tighten and fix the adjustment knob (301) when the adjustment is completed.
[0021] Preferably, the pitch adjustment mechanism (400) includes a connector (401), a pitch adjustment plate (402), an adjustment screw (403), and a rotating shaft 2 (404).
[0022] The optical module (100) is mounted on the pitch adjustment plate (402), and the adjustment screw (403) is pressed against the yaw adjustment plate (303);
[0023] The pitch adjustment plate (402) and the connector (401) are connected by a rotating shaft 2 (404), and the connector (401) is connected to the yaw adjustment plate (303);
[0024] The pitch adjustment plate (402) is used to drive the optical module (100) to rotate;
[0025] The adjusting screw (403) is used to drive the pitch adjustment plate (402) to rotate along the rotation axis 2 (404), so that the optical module (100) and the pitch adjustment plate (402) rotate together to achieve pitch angle adjustment.
[0026] Preferably, the pitch adjustment plate (402) is provided with a preset number of adjustment screws (403), and the pitch adjustment plate (402) can be adjusted in both positive and negative directions by adjusting the adjustment screws (403).
[0027] Preferably, the preset number of groups is 4.
[0028] The precision angle adjustment device for the optical module of this utility model includes: an optical module (100), a mounting back plate (200), a yaw adjustment mechanism (300), and a pitch adjustment mechanism (400); the yaw adjustment mechanism (300) is locked onto the fixed mounting back plate (200), the pitch adjustment mechanism (400) is locked onto the yaw adjustment mechanism (300), and the optical module (100) is locked onto the pitch adjustment mechanism (400); the pitch adjustment mechanism (400) is used to drive the optical module (100) to rotate together to achieve pitch angle adjustment; the yaw adjustment mechanism (300) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve yaw angle adjustment; the optical module (100) is used to acquire images; the optical module (100) is adjusted until the image is orthogonal in the camera's field of view to achieve rotation angle adjustment. This device does not require high precision in its installation structure, thus saving on the production cost of structural components; the three-dimensional angles can be adjusted independently without affecting each other; it improves testing and debugging efficiency and offers high adjustment precision. It can ensure that the angle of the optical module achieves micron-level error. Attached Figure Description
[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.
[0030] Figure 1 This is a schematic diagram of the structure of a precision angle adjustment device for an optical module in an embodiment of the present invention.
[0031] Figure 2 This is a schematic diagram of the structure of the optical module in an embodiment of the precision angle adjustment device for an optical module according to the present invention;
[0032] Figure 3 This is a schematic diagram of the three-dimensional angular coordinate relationship of an industrial camera in an embodiment of a precision angle adjustment device for an optical module according to this utility model.
[0033] Figure 4 This is a schematic diagram of the yaw adjustment mechanism in an embodiment of a precision angle adjustment device for an optical module according to the present invention.
[0034] Figure 5 This is a schematic diagram of the pitch adjustment mechanism in an embodiment of a precision angle adjustment device for an optical module according to the present invention.
[0035] Explanation of icon numbers:
[0036] label name label name 100 Optical module 200 Install back panel 300 Oscillating adjustment mechanism 400 Pitch adjustment mechanism 101 Industrial cameras 102 Camera mounting plate 103 Lens tube mounting plate 104 lens tube 105 objective lens 301 Adjustment knob 302 Stop screw 303 Yaw adjustment block 304 Rotation axis 1 401 connector 402 Pitch adjustment plate 403 Adjusting screw 404 Rotation axis 2
[0037] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation
[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0039] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.
[0040] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.
[0041] Reference Figure 1 , Figure 1 This is a schematic diagram of the precision angle adjustment device for the optical module.
[0042] like Figure 1 As shown, the precision angle adjustment device of the optical module includes: an optical module (100), a mounting backplate (200), a yaw adjustment mechanism (300), and a pitch adjustment mechanism (400).
[0043] The yaw adjustment mechanism (300) is locked to the fixed mounting back plate (200), the pitch adjustment mechanism (400) is locked to the yaw adjustment mechanism (300), and the optical module (100) is locked to the pitch adjustment mechanism (400).
[0044] The pitch adjustment mechanism (400) is used to drive the optical module (100) to rotate together, so as to adjust the pitch angle;
[0045] The yaw adjustment mechanism (300) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve the adjustment of the yaw angle;
[0046] The optical module (100) is used to acquire images;
[0047] Adjust the optical module (100) until the image is orthogonal in the camera's field of view to achieve the adjustment of the rotation angle.
[0048] It should be noted that in the wafer AOI (Automated Optical Inspection) defect detection process, high-resolution cameras, optical barrels, and precision lenses are often used to photograph and inspect micron- and submicron-level defects on the wafer surface. This requires precise angle adjustment of each component during installation to achieve optimal performance. This embodiment proposes a device for precisely adjusting the angle of the optical module. When photographing and inspecting the wafer, it is necessary to ensure that the optical module (100) is perpendicular to the wafer surface, according to... Figure 1 After the structural components shown are installed, the camera angle can be determined by the clarity and uniformity of the image captured by the camera in the optical module (100) and the image imaging angle.
[0049] It should be understood that the yaw adjustment mechanism (300) is usually screwed onto the fixed mounting back plate (200), the pitch adjustment mechanism (400) is screwed onto the yaw mechanism (300), and the optical module (100) is screwed onto the pitch adjustment mechanism (400). In addition to screwing, other connection methods can be used between the structural components, and this embodiment does not limit this.
[0050] Furthermore, in this embodiment, as Figure 2 As shown, Figure 2 The diagram shows the structure of the optical module (100), which includes: an industrial camera (101), a camera mounting plate (102), a lens barrel mounting plate (103), a lens barrel (104), and an objective lens (105).
[0051] The industrial camera (101) is mounted on the camera mounting plate (102). The camera mounting plate (102) is connected to the lens barrel mounting plate (103). The camera mounting plate (102) and the lens barrel mounting plate (103) are positioned by a shaft hole and can rotate relative to each other. The lens barrel mounting plate (103) is connected to the lens barrel (104). The lens barrel (104) is connected to the objective lens (105).
[0052] When the camera mounting plate (102) rotates, it drives the industrial camera (101) to move relative to the lens barrel (104) and the objective lens (105), adjusting the relative rotation of the industrial camera (101) relative to the wafer under test until the image is orthogonal in the field of view of the industrial camera (101), thus completing the adjustment of the rotation angle.
[0053] In the specific implementation, refer to Figure 3 , Figure 3This is a schematic diagram of the three-dimensional angular coordinate relationship of an industrial camera. Besides screw fastening, set screw connection, and shaft hole positioning, other connection or positioning methods can be used between the structural components; this embodiment does not impose any limitations on these methods. Taking screw fastening as an example, first adjust the θz rotation angle. The industrial camera (101) is screwed onto the camera mounting plate (102) by threads. The camera mounting plate (102) and the lens barrel mounting plate (103) are fastened by screws. The camera mounting plate (102) and the lens barrel mounting plate (103) are positioned by shaft holes and can rotate relative to each other. The lens barrel mounting plate (103) and the lens barrel (104) are connected by set screws. The lens barrel (104) and the objective lens (105) are fixedly connected by threads. When the camera mounting plate (102) is rotated, the industrial camera (101) can be driven to move relative to the lens barrel (104) and the objective lens (105). Similarly, adjust the relative rotation of the industrial camera (101) relative to the wafer under inspection. The fine adjustment angle accuracy can reach 0.001° until the image is orthogonal in the camera's field of view. Then fix the screw between the camera mounting plate (102) and the lens barrel mounting plate (103). The rotation angle adjustment is then completed.
[0054] Furthermore, in this embodiment, as Figure 4 , Figure 5 As shown, Figure 4 This is a schematic diagram of the yaw adjustment mechanism. Figure 5 This is a schematic diagram of the pitch adjustment mechanism.
[0055] The yaw adjustment mechanism (300) includes an adjustment knob (301), a yaw adjustment plate (303), and a rotating shaft 1 (304).
[0056] The optical module (100) and the pitch adjustment mechanism (400) are mounted on the yaw adjustment plate (303);
[0057] The fixing plate 1 (304) is connected to the mounting back plate (200) via the rotating shaft 1 (304), and the adjusting knob (301) is locked onto the mounting back plate (200);
[0058] The yaw adjustment plate (303) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to move;
[0059] When the adjustment knob (301) is turned, the knob pushes the yaw adjustment block (303) to rotate along the rotation axis 1 (304), which drives the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve the adjustment of the yaw angle.
[0060] Furthermore, the yaw adjustment mechanism (300) also includes: a stop screw (302).
[0061] The stop screw (302) is used to tighten and fix the adjustment knob (301) when the adjustment is completed.
[0062] It should be noted that, in addition to screw fastening, set screw connection, and shaft hole positioning, other connection or positioning methods can be used between the structural components, and this embodiment does not limit this. Taking screw fastening as an example, the optical module (100) and the pitch adjustment mechanism (400) are usually mounted on the yaw adjustment block (303) by screws. When the yaw adjustment block (303) is adjusted, the entire optical module (100) and the pitch adjustment mechanism (400) can move together. The yaw adjustment block (303) is connected to the mounting back plate (200) through the rotating shaft 1 (304). The adjustment knob (301) is fastened to the mounting back plate (200) by screws. When the adjustment knob (301) is turned, the knob pushes the yaw adjustment block (303) to rotate along the rotating shaft 1 (304), which in turn drives the optical module (100) and the pitch adjustment mechanism (400) to rotate together. After the adjustment is completed, the stop screw (302) is tightened and the fixing screw is fastened to achieve the purpose of adjusting the θy yaw angle. The adjustment accuracy can reach 0.001°. The above three angle dimensions can be adjusted independently without affecting each other, and there is no order of priority.
[0063] Furthermore, in this embodiment, the pitch adjustment mechanism (400) includes a connector (401), a pitch adjustment plate (402), an adjustment screw (403), and a rotating shaft 2 (404).
[0064] The optical module (100) is mounted on the pitch adjustment plate (402), and the adjustment screw (403) is pressed against the yaw adjustment plate (303);
[0065] The pitch adjustment plate (402) and the connector (401) are connected by a rotating shaft 2 (404), and the connector (401) is connected to the yaw adjustment plate (303);
[0066] The pitch adjustment plate (402) is used to drive the optical module (100) to rotate;
[0067] The adjusting screw (403) is used to drive the pitch adjustment plate (402) to rotate along the rotation axis 2 (404), so that the optical module (100) and the pitch adjustment plate (402) rotate together to achieve pitch angle adjustment.
[0068] Understandably, the entire optical module is usually mounted on the pitch adjustment plate (402) and can be secured with screws. When the pitch adjustment plate (402) is adjusted, the entire optical module (100) can be moved along with it. The pitch adjustment plate (402) and the connector (401) are connected by the rotating shaft 2 (404). The connector (401) and the yaw adjustment block (303) are secured with screws. When the adjusting screw (403) is turned, the adjusting screw (403) presses against the yaw adjustment block (303), causing the pitch adjustment plate (402) to rotate along the rotating shaft 2 (404), causing the optical module (100) and the pitch adjustment plate (402) to rotate together. After the adjustment is completed, the locking screw is fixed to achieve the purpose of adjusting the θx pitch angle. There are 4 sets of adjusting screws on the pitch adjustment plate, which can adjust the pitch adjustment plate in both positive and negative directions. The adjustment accuracy can reach 0.001°.
[0069] Furthermore, in this embodiment, the pitch adjustment plate (402) is provided with a preset number of adjustment screws (403), and the pitch adjustment plate (402) can be adjusted in both positive and negative directions by adjusting the adjustment screws (403).
[0070] Furthermore, the preset number of groups is 4.
[0071] In this embodiment, the precision angle adjustment device of the optical module includes: an optical module (100), a mounting backplate (200), a yaw adjustment mechanism (300), and a pitch adjustment mechanism (400); the yaw adjustment mechanism (300) is locked onto the fixed mounting backplate (200), the pitch adjustment mechanism (400) is locked onto the yaw adjustment mechanism (300), and the optical module (100) is locked onto the pitch adjustment mechanism (400); the pitch adjustment mechanism (400) is used to drive the optical module (100) to rotate together to achieve pitch angle adjustment; the yaw adjustment mechanism (300) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve yaw angle adjustment; the optical module (100) is used to acquire images; the optical module (100) is adjusted until the image is orthogonal in the camera's field of view to achieve rotation angle adjustment. This device does not require high precision in the installation structure, thus saving on the production cost of structural components; the three-dimensional angles can be adjusted independently without affecting each other; it improves the efficiency of testing and debugging and has high adjustment precision.
[0072] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.
Claims
1. A precision angle adjustment device for an optical module, characterized in that, The precision angle adjustment device of the optical module includes: an optical module (100), a mounting backplate (200), a yaw adjustment mechanism (300), and a pitch adjustment mechanism (400). The yaw adjustment mechanism (300) is locked to the fixed mounting back plate (200), the pitch adjustment mechanism (400) is locked to the yaw adjustment mechanism (300), and the optical module (100) is locked to the pitch adjustment mechanism (400). The pitch adjustment mechanism (400) is used to drive the optical module (100) to rotate together, so as to adjust the pitch angle; The yaw adjustment mechanism (300) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve the adjustment of the yaw angle; The optical module (100) is used to acquire images; Adjust the optical module (100) until the image is orthogonal in the camera's field of view to achieve the adjustment of the rotation angle.
2. The precision angle adjustment device for the optical module as described in claim 1, characterized in that, The optical module (100) includes: an industrial camera (101), a camera mounting plate (102), a lens barrel mounting plate (103), a lens barrel (104), and an objective lens (105). The industrial camera (101) is mounted on the camera mounting plate (102). The camera mounting plate (102) is connected to the lens barrel mounting plate (103). The camera mounting plate (102) and the lens barrel mounting plate (103) are positioned by a shaft hole and can rotate relative to each other. The lens barrel mounting plate (103) is connected to the lens barrel (104). The lens barrel (104) is connected to the objective lens (105). When the camera mounting plate (102) rotates, it drives the industrial camera (101) to move relative to the lens barrel (104) and the objective lens (105), adjusting the relative rotation of the industrial camera (101) relative to the wafer under test until the image is orthogonal in the field of view of the industrial camera (101), thus completing the adjustment of the rotation angle.
3. The precision angle adjustment device for the optical module as described in claim 1, characterized in that, The yaw adjustment mechanism (300) includes an adjustment knob (301), a yaw adjustment plate (303), and a rotating shaft 1 (304). The optical module (100) and the pitch adjustment mechanism (400) are mounted on the yaw adjustment plate (303); The fixing plate 1 (304) is connected to the mounting back plate (200) via the rotating shaft 1 (304), and the adjusting knob (301) is locked onto the mounting back plate (200); The yaw adjustment plate (303) is used to drive the optical module (100) and the pitch adjustment mechanism (400) to move; When the adjustment knob (301) is turned, the knob pushes the yaw adjustment block (303) to rotate along the rotation axis 1 (304), which drives the optical module (100) and the pitch adjustment mechanism (400) to rotate together to achieve the adjustment of the yaw angle.
4. The precision angle adjustment device for the optical module as described in claim 3, characterized in that, The yaw adjustment mechanism (300) further includes: a stop screw (302); The stop screw (302) is used to tighten and fix the adjustment knob (301) when the adjustment is completed.
5. The precision angle adjustment device for the optical module as described in claim 3, characterized in that, The pitch adjustment mechanism (400) includes a connector (401), a pitch adjustment plate (402), an adjustment screw (403), and a rotating shaft 2 (404). The optical module (100) is mounted on the pitch adjustment plate (402), and the adjustment screw (403) is pressed against the yaw adjustment plate (303); The pitch adjustment plate (402) and the connector (401) are connected by a rotating shaft 2 (404), and the connector (401) is connected to the yaw adjustment plate (303); The pitch adjustment plate (402) is used to drive the optical module (100) to rotate; The adjusting screw (403) is used to drive the pitch adjustment plate (402) to rotate along the rotation axis 2 (404), so that the optical module (100) and the pitch adjustment plate (402) rotate together to achieve pitch angle adjustment.
6. The precision angle adjustment device for the optical module as described in claim 5, characterized in that, The pitch adjustment plate (402) is provided with a preset number of adjustment screws (403). By adjusting the adjustment screws (403), the pitch adjustment plate (402) can be adjusted in both positive and negative directions.
7. The precision angle adjustment device for the optical module as described in claim 6, characterized in that, The preset number of groups is 4.