Objective lens automatic switching module and photolithography machine

Abstract

The utility model provides an objective lens automatic switching module and photoetching machine relates to photoetching machine structure field. Multiple objective lenses are correspondingly assembled on the mounting plate, after objective lens assembly, can drive every objective lens independent reciprocating movement along second direction through fine adjustment mechanism, to make multiple objective lenses along first direction in turn arrange, that is through fine adjustment component can guarantee the accuracy of objective lens assembly position, further, the moving seat in mounting plate and support component corresponding connection, so that moving seat can drive mounting plate and multiple objective lenses reciprocating movement along first direction. Thus, when needing switching objective lens, through moving seat drives the objective lens needed to move to the corresponding position, compared with prior art manual switching mode, the utility model discloses the switching mode of mechanical component is higher in efficiency, can guarantee the position accuracy of objective lens, and the pollution risk is lower.

Description

Technical Field

[0001] This application relates to the field of lithography machine structure, and in particular to an automatic objective lens switching module and a lithography machine. Background Technology

[0002] In the field of precision lithography, especially in maskless direct-write lithography based on DMD (Digital Micromirror Device), the feature size of the processed patterns is typically on the micrometer scale. To achieve both high resolution and a large field of view, it is necessary to frequently and precisely change objectives with different magnifications during the processing.

[0003] Currently, lithography equipment still uses the traditional manual rotating turret-type objective changer, which requires manual rotation to change the objective lens. This method is inefficient, the positional accuracy of the objective lens cannot be guaranteed, and it is easy to introduce contaminants such as dust, particles, and fingerprints during manual operation, which can cause lithography defects. Utility Model Content

[0004] In view of this, the purpose of this application is to provide an automatic objective lens switching module and a lithography machine to solve the problems of low efficiency, inability to guarantee the positional accuracy of the objective lens, and high risk of contamination in the existing manual objective lens switching method of lithography machines.

[0005] In accordance with the above objectives, a first aspect of this utility model provides an automatic objective lens switching module, wherein the automatic objective lens switching module comprises:

[0006] The support assembly includes a base and a movable seat correspondingly connected to the base, the movable seat being capable of reciprocating relative to the base along a first direction;

[0007] The adjustment assembly includes a mounting plate corresponding to the movable base, the mounting plate having a plurality of mounting portions for mounting objectives; the mounting plate is also provided with a fine-tuning mechanism corresponding to each objective, the fine-tuning mechanism being able to drive the corresponding objective to reciprocate along a second direction so that the plurality of objectives are arranged sequentially along a first direction.

[0008] Preferably, both the base and the movable seat are formed as plate-shaped structures, and the movable seat is correspondingly connected to the bottom of the base via a guide rail; the length direction of the base and the movable seat is formed as the first direction, and the width direction of the base and the movable seat is formed as the second direction.

[0009] Preferably, the base is provided with a fixed seat, and the shaft linear motor is assembled with the base through the fixed seat; the drive end of the shaft linear motor is connected to the movable seat to drive the movable seat to reciprocate along the first direction.

[0010] Preferably, a limiting block is further provided at the bottom of the base, and the limiting block is located at the first end of the movable seat along the second direction; when there are multiple limiting blocks, the multiple limiting blocks are distributed at intervals along the first direction.

[0011] Along the second direction, the end face of the first end of the movable seat is provided with a boss corresponding to the limiting block, the two bosses are distributed along the first direction, and the limiting block is located between the two bosses.

[0012] Preferably, along the second direction, a grating ruler is bonded to the end face of the first end of the movable base; the base is provided with a reading head corresponding to the grating ruler.

[0013] Preferably, along the first direction, both ends of the mounting plate are screwed to the bottom of the movable seat; a plurality of adjustment plates are provided in the middle section of the bottom of the mounting plate, and the plurality of adjustment plates are arranged sequentially along the first direction.

[0014] Preferably, the bottom of the adjusting plate is formed with an adjusting groove, and an adjusting block is correspondingly assembled inside the adjusting groove; the bottom of the adjusting block is formed with the mounting part.

[0015] Along the first direction, the width of the adjusting groove is the same as the width of the adjusting block; along the second direction, the length of the adjusting groove is greater than the length of the adjusting block.

[0016] Preferably, the fine-tuning mechanism includes a plurality of elastic elements; along the second direction, a receiving hole is formed at the end of the first end of the adjusting groove, the first end of the elastic element is fixedly connected to the inner wall of the receiving hole, and the second end of the elastic element abuts against the first end of the adjusting block.

[0017] Preferably, along the second direction, the end face of the second end of the adjusting plate is formed with a threaded hole communicating with the adjusting groove, and the fine-tuning mechanism includes an adjusting post that is screwed to the threaded hole. The first end of the adjusting post extends into the adjusting groove and abuts against the second end of the adjusting block, and the second end of the adjusting post is located outside the adjusting plate.

[0018] According to a second aspect of the present invention, a lithography machine is provided, wherein the lithography machine includes an automatic objective lens switching module as described above; the lithography machine also includes an optical path assembly and a workpiece stage; the automatic objective lens switching module is fixed directly below the optical path assembly via the base, and the workpiece stage is capable of lifting, lowering, and rotating.

[0019] According to the automatic objective lens switching module and lithography machine of this invention, multiple objectives are correspondingly mounted on a mounting plate. After the objectives are assembled, each objective can be independently moved back and forth along a second direction by a fine-tuning mechanism, so that the multiple objectives are arranged sequentially along a first direction. That is, the fine-tuning component can ensure the accuracy of the objective lens assembly position. Furthermore, the mounting plate is correspondingly connected to the movable seat in the support assembly, so that the movable seat can drive the mounting plate and the multiple objectives to move back and forth along the first direction. In this way, when it is necessary to switch objectives, the movable seat can move the required objective to the corresponding position. Compared with the existing manual switching method, the switching method of mechanical components in this invention is more efficient, can ensure the positional accuracy of the objectives, and has a lower risk of contamination.

[0020] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the first perspective of the automatic objective lens switching module according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the second perspective of the automatic objective lens switching module according to an embodiment of the present invention;

[0024] Figure 3 This is a partial schematic diagram of the adjustment component according to an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of a lithography machine according to an embodiment of the present invention.

[0026] Icons: 11-Base; 12-Limiting block; 13-Fixed seat; 14-Shaft linear motor; 15-Guide rail; 21-Moving seat; 22-Boss; 23-Second assembly position; 24-Grating ruler; 31-Mounting plate; 32-Adjusting plate; 321-Adjusting groove; 322-Receiving hole; 33-Adjusting block; 331-Mounting part; 41-Adjusting column; 42-Elastic element; 5-Objective lens; 6-Optical path assembly; 7-Workpiece stage. Detailed Implementation

[0027] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0028] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0029] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0030] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0031] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0032] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0033] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0034] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0035] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0036] According to a first aspect of this utility model, an automatic objective lens switching module is provided, such as... Figures 1 to 4 As shown, the automatic objective lens switching module in this embodiment includes a support component and an adjustment component. Multiple objectives 5 are correspondingly assembled with the adjustment component, and the fine-tuning mechanism in the adjustment component ensures the accuracy of the assembly position of each objective lens 5. Then, the support component switches the required objective lens 5 to the working position. The specific structure and positional relationship of each component of the automatic objective lens switching module in this embodiment will be described in detail below.

[0037] In this embodiment, as Figure 1As shown, the support assembly includes a base 11 and a movable seat 21 correspondingly connected to the base 11. The base 11 allows this switching module to be assembled with other modules in the lithography machine, while the movable seat 21 drives the adjustment assembly to reciprocate relative to the base 11 along a first direction to achieve the switching of different objectives 5. Specifically, both the base 11 and the movable seat 21 are formed as plate structures. The movable seat 21 is correspondingly connected to the bottom of the base 11 via a guide rail 15. The guide rail 15 provides guiding support for the movement of the movable seat 21. Therefore, its specific structure, quantity, and setting position are not fixed. For example, in this embodiment, two high-precision cross roller guide rails 15 are provided to ensure the stability and straightness of the movable seat 21 during movement. In addition, the cross roller guide rails 15 can also withstand a certain torque load.

[0038] To improve the clarity of the description of each component of this switching module, the length direction of the base 11 and the movable seat 21 is defined as the first direction (i.e., Figure 1 The width direction of the base 11 and the movable base 21 is formed as a second direction (i.e., the X direction). Figure 1 (Y direction). The two guide rails 15 are spaced apart along the second direction, and each guide rail 15 extends along the first direction so that the movable seat 21 can reciprocate relative to the base 11 along the first direction.

[0039] The power for the reciprocating movement of the movable seat 21 is provided by a power component, which in this embodiment is a linear motor 14 with a shaft. Figure 1 As shown, a fixing seat 13 is provided at the bottom of the base 11. The fixing seat 13 is formed into an L-shaped structure, and its vertical section is connected to the base 11. Its horizontal section forms a first assembly position corresponding to the shaft linear motor 14, so that the shaft linear motor 14 can be stably assembled with the base 11 through the fixing seat 13. Further, as Figures 1 to 2 As shown, the bottom of the movable base 21 is provided with a second mounting position 23 corresponding to the drive end of the linear motor 14. Both ends of the linear motor 14 are respectively connected to the second mounting position 23, so that the linear motor 14 can drive the movable base 21 to reciprocate along the first direction. It should be noted that the linear motor 14 is an existing component, so its specific operating principle and its connection method with the movable base 21 and the fixed base 13 will not be described in detail.

[0040] Furthermore, although not shown in the figure, the linear motor 14 of the shaft is controlled by a controller (an existing component), and the linear motor 14 of the shaft is communicatively connected to the controller. In order to improve the accuracy of the position of the objective lens 5 after switching, in this embodiment, along the second direction, a grating ruler 24 is attached to the end face of the first end of the moving base 21, and the base 11 (actually the end face of the vertical section of the fixed base 13 facing the grating) is provided with a reading head corresponding to the grating ruler 24. This reading head is also communicatively connected to the controller. Then, by setting the corresponding program, the technical effect of moving the required objective lens 5 stably and accurately to the target position can be achieved, that is, the objective lens 5 can be switched stably and accurately.

[0041] To prevent excessive displacement of the movable seat 21, this switching module is also equipped with a limit component. For example... Figures 1 to 2 As shown, the limiting component includes a limiting block 12 disposed at the bottom of the base 11, and the limiting block 12 is located at the first end of the movable seat 21 along the second direction. Further, in this embodiment, there are two limiting blocks 12, which are spaced apart along the first direction. Correspondingly, along the second direction, the end face of the first end of the movable seat 21 is provided with a protrusion 22 corresponding to the limiting block 12. The two protrusions 22 are distributed along the first direction, and the limiting block 12 is located between the two protrusions 22. Thus, when the movable seat 21 reciprocates to its limit position along the first direction, the protrusion 22 will contact the limiting block 12. Furthermore, the limiting block 12 can be configured as a photoelectric limit switch and communicated with the controller. In this case, the protrusion 22 is formed as a limiting piece protruding from the movable seat 21. When the limiting piece contacts the photoelectric limit switch, it can trigger the photoelectric limit switch, thereby enabling the controller to control the movable seat 21 to stop moving.

[0042] In this embodiment, as Figures 2 to 3 As shown, the adjustment assembly includes a mounting plate 31 corresponding to the movable base 21. Along the first direction, both ends of the mounting plate 31 are screwed to the bottom of the movable base 21. In addition, a plurality of adjustment plates 32 are provided in the middle section of the bottom of the mounting plate 31, and the plurality of adjustment plates 32 are arranged sequentially along the first direction. An adjustment groove 321 is formed at the bottom of the adjustment plate 32, and an adjustment block 33 is correspondingly assembled inside the adjustment groove 321. The bottom of the adjustment block 33 is formed with a mounting part 331 for mounting the objective lens 5. The specific structure of the mounting part 331 can be adapted to the objective lens 5 and is not fixed.

[0043] like Figure 3 As shown, along the first direction, the width of the adjusting groove 321 is the same as the width of the adjusting block 33, so that the adjusting block 33 can be stably assembled in the adjusting groove 321; along the second direction, the length of the adjusting groove 321 is greater than the length of the adjusting block 33, so that the adjusting block 33 can reciprocate along the second direction under the action of the fine-tuning mechanism described below.

[0044] Specifically, such as Figure 3 As shown, the fine-tuning mechanism includes multiple elastic elements 42 (two spring pins in this embodiment). Along the second direction, a receiving hole 322 is formed at the end of the first end of the adjusting groove 321. The first end of the elastic element 42 is fixedly connected to the inner wall of the corresponding receiving hole 322, and the second end of the elastic element 42 abuts against the first end of the adjusting block 33. It should be noted that the abutment between the elastic element 42 and the adjusting block 33 essentially means that the second end of the elastic element 42 is fixedly connected to the adjusting block 33, but the elastic element 42 is always subjected to pressure applied by the adjusting block 33 (i.e., the elastic element 42 is always in a compressed state), so that the elastic element 42 can provide corresponding support force to the adjusting block 33.

[0045] More specifically, along the second direction, the end face of the second end of the adjusting plate 32 has a threaded hole communicating with the adjusting groove 321. The fine-tuning mechanism also includes an adjusting post 41 screwed into the threaded hole. The first end of the adjusting post 41 extends into the adjusting groove 321 and abuts against the second end of the adjusting block 33. The second end of the adjusting post 41 is located outside the adjusting plate 32. Thus, when the adjusting post 41 is turned, the adjusting block 33 and the corresponding objective lens 5 can be moved along the second direction to achieve position correction of the objective lens 5, thereby accurately compensating for installation errors and ensuring that the optical axes of all objective lenses 5 are highly concentric with the main optical path of the system.

[0046] When the adjusting column 41 is turned clockwise, the adjusting column 41 drives the adjusting block 33 to move closer to the elastic member 42. If over-adjustment occurs, the adjusting column is turned counterclockwise. Under the elastic force of the elastic member 42, the adjusting block 33 can move closer to the adjusting column 41. In this way, the adjusting block 33 can be moved back and forth in the second direction. Furthermore, the adjusting column 41 and the elastic member 42 can stably "clamp" the adjusting block 33, effectively improving the stability of the adjusting block 33 after assembly.

[0047] According to the automatic objective lens switching module described above, multiple objectives 5 are respectively assembled in the mounting portion 331 of the corresponding adjustment block 33. After the objectives 5 are assembled, each objective 5 can be moved independently along the second direction by a fine-tuning mechanism to achieve position correction of the objective 5, thereby arranging multiple objectives 5 sequentially along the first direction. That is, the fine-tuning component can ensure the accuracy of the objective lens assembly position. Furthermore, the mounting plate 31 is correspondingly connected to the movable seat 21 in the support component, so that the movable seat 21 can drive the mounting plate 31 and multiple objectives 5 to reciprocate along the first direction. Thus, when it is necessary to switch objectives 5, the movable seat 21 can move the required objective 5 to the corresponding position. Compared with the existing manual switching method, the switching method of mechanical components in this invention is more efficient, can ensure the positional accuracy of the objectives 5, and has a lower risk of contamination.

[0048] According to a second aspect of this utility model, a lithography machine is provided, such as... Figure 4 As shown, the lithography machine includes the automatic objective lens switching module as described above; in addition, the lithography machine also includes an optical path assembly 6 and a workpiece stage. The automatic objective lens switching module is fixed directly below the optical path assembly 6 via a base 11 (which can also be configured with components such as a gantry according to actual needs). The workpiece stage 7 can be raised, lowered, and rotated to facilitate placing the workpiece in a suitable position.

[0049] Specifically, the workpiece stage 7 can be connected to the controller via communication or electrical connection. During the switching of the objective lens 5, the controller can synchronously adjust the workpiece stage 7 to the corresponding height, thereby efficiently realizing the automatic switching, focusing and lithography steps of the objective lens 5, reducing human intervention and improving lithography efficiency.

[0050] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be defined by the scope of the claims.

Claims

1. An automatic objective lens switching module, characterized in that, The automatic objective lens switching module includes: The support assembly includes a base and a movable seat correspondingly connected to the base, the movable seat being capable of reciprocating relative to the base along a first direction; The adjustment assembly includes a mounting plate corresponding to the movable base, the mounting plate having a plurality of mounting portions for mounting objectives; the mounting plate is also provided with a fine-tuning mechanism corresponding to each objective, the fine-tuning mechanism being able to drive the corresponding objective to reciprocate along a second direction so that the plurality of objectives are arranged sequentially along a first direction.

2. The automatic objective lens switching module according to claim 1, characterized in that, Both the base and the movable seat are formed as plate-shaped structures, and the movable seat is connected to the bottom of the base via a guide rail; the length direction of the base and the movable seat is formed as the first direction, and the width direction of the base and the movable seat is formed as the second direction.

3. The automatic objective lens switching module according to claim 2, characterized in that, The base is provided with a fixed seat, and the shaft linear motor is assembled with the base through the fixed seat; the drive end of the shaft linear motor is connected to the movable seat to drive the movable seat to reciprocate along the first direction.

4. The automatic objective lens switching module according to claim 3, characterized in that, The base is also provided with a limiting block at its bottom, and the limiting block is located at the first end of the movable seat along the second direction; when there are multiple limiting blocks, the multiple limiting blocks are distributed at intervals along the first direction. Along the second direction, the end face of the first end of the movable seat is provided with a boss corresponding to the limiting block, the two bosses are distributed along the first direction, and the limiting block is located between the two bosses.

5. The automatic objective lens switching module according to claim 2, characterized in that, Along the second direction, a grating ruler is bonded to the end face of the first end of the movable base; the base is provided with a reading head corresponding to the grating ruler.

6. The automatic objective lens switching module according to claim 1, characterized in that, Along the first direction, both ends of the mounting plate are screwed to the bottom of the movable seat; a plurality of adjustment plates are provided in the middle section of the bottom of the mounting plate, and the plurality of adjustment plates are arranged sequentially along the first direction.

7. The automatic objective lens switching module according to claim 6, characterized in that, The bottom of the adjusting plate has an adjusting groove, and an adjusting block is correspondingly fitted inside the adjusting groove; the bottom of the adjusting block has the mounting part. Along the first direction, the width of the adjusting groove is the same as the width of the adjusting block; along the second direction, the length of the adjusting groove is greater than the length of the adjusting block.

8. The automatic objective lens switching module according to claim 7, characterized in that, The fine-tuning mechanism includes multiple elastic elements; along the second direction, a receiving hole is formed at the end of the first end of the adjusting groove, the first end of the elastic element is fixedly connected to the inner wall of the receiving hole, and the second end of the elastic element abuts against the first end of the adjusting block.

9. The automatic objective lens switching module according to claim 8, characterized in that, Along the second direction, the end face of the second end of the adjusting plate is formed with a threaded hole communicating with the adjusting groove. The fine-tuning mechanism includes an adjusting post that is screwed to the threaded hole. The first end of the adjusting post extends into the adjusting groove and abuts against the second end of the adjusting block. The second end of the adjusting post is located outside the adjusting plate.

10. A lithography machine, characterized in that, The lithography machine includes an automatic objective lens switching module as described in any one of claims 1 to 9; the lithography machine also includes an optical path assembly and a workpiece stage; the automatic objective lens switching module is fixed directly below the optical path assembly via the base, and the workpiece stage is capable of lifting, lowering, and rotating.

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