Device for preparing micro-nano structures

Abstract

The utility model discloses a preparation device of micro - nano structure, including the shell, and set up in the first object table of shell inside, the glue injection mechanism and the scraping glue mechanism in the first object table top, the second object table, set up the compression imprint assembly and solidification subassembly in the second object table top. The utility model discloses through the glue injection mechanism and inject the excess compression imprint glue in the compression imprint cavity of the template of waiting for compression imprint, through the scraping glue mechanism and remove the extra compression imprint glue, form the compression imprint glue layer of thickness consistency on the template of waiting for compression imprint one side, then the glue layer directly with the substrate and carry out the compression imprint, can obtain the micro - nano structure of residual glue layer thickness consistency after solidification, solved the problem of residual glue thickness uneven, avoided the residual glue layer thickness uneven influence subsequent structure transfer process.

Description

Technical Field

[0001] The utility model belongs to the technical field of nanoimprinting technology, and particularly relates to a preparation device for micro-nano structures. Background Art

[0002] Refer Figure 1 As shown, the process of fabricating nanostructures based on nanoimprinting technology generally includes: spin-coating a thin film of imprinting glue with a uniform thickness on a target substrate 30', placing a template 10' that has been subjected to an anti-sticking treatment on the imprinting glue film, and applying pressure to fill the imprinting glue into the cavities of the template 10'. After curing the imprinting glue and demolding, an imprinting glue nanostructure replicated 1:1 with the template is obtained. After removing the residual glue layer, using a dry etching process or a wet etching process with the imprinting glue structure as a mask to transfer the template pattern to the target substrate 30', a nanostructure of the substrate material is obtained.

[0003] Due to the inherent characteristics of nanoimprinting, when the nanostructures in the template 10' have different duty cycles or heights, the thickness of the residual glue at each place after imprinting is different. For example Figure 1 in, the thickness of the residual glue layer at the first residual glue area 201' and the second residual glue area 202' is inconsistent. The non-uniformity of the residual glue layer thickness will affect the subsequent structure transfer process. If the residual glue is removed based on the thinner part, the area with thicker residual glue cannot be completely removed. If the residual glue is removed based on the thicker part, the target substrate 30' in the area with thinner residual glue will lose height.

[0004] Therefore, in view of the above technical problems, it is necessary to provide a preparation device for micro-nano structures. Content of the Utility Model

[0005] The purpose of the utility model is to provide a preparation device for micro-nano structures, which solves the problem of non-uniform residual glue thickness by injecting an excessive amount of imprinting glue into the template to be imprinted and scraping off the excess glue liquid to retain an imprinting glue layer with a uniform thickness.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] A preparation device for micro-nano structures, comprising:

[0008] A housing with a chamber arranged inside. A partition is provided inside the housing, and the partition is used to divide the chamber into a first cavity and a second cavity arranged in sequence along a first direction;

[0009] The first cavity is provided with a first stage, an injection mechanism and a scraping mechanism located above the first stage. The first stage is used to support the template to be imprinted. The injection mechanism is used to inject imprinting adhesive into the template to be imprinted. The scraping mechanism is located next to the injection mechanism. The scraping mechanism includes a scraper. The scraper extends along a second direction and is used to scrape off at least a portion of the imprinting adhesive from the surface of the template to be imprinted. The second direction is perpendicular to the first direction.

[0010] The second cavity is provided with a second stage, an imprinting assembly and a curing assembly above the second stage. The second stage is used to support a substrate or a template to be imprinted. The imprinting assembly is used to imprint the template and the substrate. The curing assembly is used to cure the imprinting adhesive.

[0011] A conveying mechanism is arranged in the chamber and located between the first stage and the second stage, for conveying the template to be imprinted from the first stage to the second stage.

[0012] In one or more embodiments of the present invention, the preparation device further includes a first clamping mechanism disposed in a first cavity, a first end of the first clamping mechanism being fixedly connected to the housing, and a second end being provided with a first gripper, the first clamping mechanism being used at least to clamp the template to be imprinted.

[0013] In one or more embodiments of this utility model, a driving mechanism is further provided in the first cavity. The driving mechanism is connected to the glue injection mechanism and the glue scraping mechanism, and is at least used to drive the glue injection mechanism and the glue scraping mechanism to move in a direction parallel to the first stage and / or perpendicular to the first stage.

[0014] In one or more embodiments of this utility model, the driving mechanism includes a first telescopic component, a second telescopic component, and a sliding component; wherein,

[0015] The first end of the first telescopic component is fixedly connected to the first side of the sliding component, and the second end is fixedly connected to the glue injection mechanism, which is used to drive the glue injection mechanism to move in a direction perpendicular to the first platform.

[0016] The first end of the second telescopic component is fixedly connected to the first side of the sliding component, and the second end is fixedly connected to the scraper, for driving the scraper to move in a direction perpendicular to the first platform;

[0017] The second side of the sliding component is slidably connected to the housing, and is used to drive the glue injection mechanism and the scraper to move in a direction parallel to the first stage.

[0018] In one or more embodiments of the present invention, the driving mechanism further includes a position sensor, which is fixedly disposed on the first side of the sliding component and located between the first telescopic component and the second telescopic component. The sensor is used to obtain the position information of the glue injection mechanism and / or the scraper.

[0019] In one or more embodiments of this utility model, the conveying mechanism includes a conveyor belt extending along a first direction and connecting a first platform and a second platform. The conveyor belt includes a plurality of drive rollers arranged at intervals along the first direction, and rollers arranged sequentially on the drive rollers along a second direction. The drive rollers extend along the second direction; and / or,

[0020] The conveying mechanism includes a robotic arm located between the first and second platforms. The first end of the robotic arm is fixedly connected to the housing, and the second end is provided with a clamp.

[0021] In one or more embodiments of the present invention, the curing assembly includes one or more combinations of a heating stage and an ultraviolet irradiation element, the second stage includes a support surface, the heating stage is disposed on the side of the second stage away from the support surface, and the ultraviolet irradiation element is disposed on the side facing the support surface and / or away from the support surface.

[0022] In one or more embodiments of the present invention, the imprinting assembly includes a plurality of spaced gas nozzles, the gas nozzles being fixedly connected to the housing, and the preparation device further includes an air compressor and an air pipe, the air compressor being connected to the housing via the air pipe and communicating with the gas nozzles via the air pipe.

[0023] In one or more embodiments of the present invention, the preparation device further includes a second clamping mechanism disposed in a second cavity, a first end of the second clamping mechanism being fixedly connected to the housing, and a second claw being provided at the second end, the second clamping mechanism being used at least to clamp a substrate.

[0024] In one or more embodiments of the present invention, the preparation apparatus further includes a vacuum generating device, which is disposed beside the second cavity and communicates with the cavity.

[0025] Compared with the prior art, the micro-nano structure fabrication device of this invention injects excess imprinting adhesive into the template to be imprinted by an adhesive injection mechanism, scrapes off the excess imprinting adhesive by a scraping mechanism, and forms an imprinting adhesive layer of uniform thickness on one side of the template to be imprinted. Then, the adhesive layer is directly imprinted onto the substrate by an imprinting assembly. This can obtain micro-nano structures with uniform residual adhesive layer thickness, solve the problem of uneven residual adhesive thickness, and avoid the impact of inconsistent residual adhesive layer thickness on subsequent structure transfer processes. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the preparation process of the imprinting nanostructure in the existing technology;

[0028] Figure 2 This is a schematic diagram of the fabrication apparatus for micro / nano structures in Embodiment 1 of this utility model;

[0029] Figure 3 This is a schematic diagram of the structure of the template to be imprinted in Embodiment 1 of this utility model;

[0030] Figure 4 This is a schematic diagram of the glue injection and scraping process based on the preparation device in Embodiment 1 of this utility model;

[0031] Figure 5 This is a schematic diagram of the curing process based on the preparation device in Embodiment 1 of this utility model;

[0032] Figure 6 This is a schematic diagram of another curing process based on the preparation device in Embodiment 1 of this utility model;

[0033] Figure 7 This is a schematic diagram of the micro / nano structure (including the substrate) based on the fabrication device in Embodiment 1 of this utility model;

[0034] Figure 8 This is a schematic diagram of the fabrication device for micro-nano structures in Embodiment 2 of this utility model. Detailed Implementation

[0035] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0036] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.

[0037] In the detailed description of this specification, reference is made to the accompanying drawings, which form a part thereof, wherein like reference numerals always denote like parts, and wherein exemplary embodiments are shown by way of example that may be implemented. It should be understood that other embodiments may be utilized, and structural or logical changes may be made, without departing from the scope of this application. Therefore, the following detailed description should not be considered limiting.

[0038] This utility model discloses a fabrication apparatus for micro / nano structures, comprising:

[0039] The shell has a chamber inside, and a partition is provided inside the shell to divide the chamber into a first cavity and a second cavity arranged sequentially along a first direction;

[0040] The first cavity is provided with a first stage, an injection mechanism and a scraping mechanism located above the first stage. The first stage is used to support the template to be imprinted. The injection mechanism is used to inject imprinting adhesive into the template to be imprinted. The scraping mechanism is located next to the injection mechanism. The scraping mechanism includes a scraper. The scraper extends along a second direction and is used to scrape off at least part of the imprinting adhesive from the surface of the template to be imprinted. The second direction is perpendicular to the first direction.

[0041] The second cavity is provided with a second stage, an imprinting assembly and a curing assembly above the second stage. The second stage is used to support a substrate or a template to be imprinted, the imprinting assembly is used to imprint the template and the substrate, and the curing assembly is used to cure the imprinting adhesive.

[0042] A conveying mechanism is located between the first stage and the second stage, and is used to convey the template to be imprinted from the first stage to the second stage.

[0043] This invention injects excess imprinting adhesive into the imprinting cavity of the template using an adhesive injection mechanism. An adhesive scraping mechanism then removes the excess adhesive, leaving a uniformly thick imprinting adhesive layer on one side of the template. This layer is then directly imprinted onto the substrate to obtain the target micro / nano structure. Because the imprinting adhesive layer has a uniform thickness, the residual adhesive layer thickness is consistent for the target micro / nano structure. This invention is particularly effective when the imprinting cavity has a non-uniform duty cycle or non-uniform height structure, solving the problem of uneven residual adhesive and preventing interference with subsequent structure transfer processes.

[0044] The present invention will be further described below with reference to specific embodiments.

[0045] Example 1:

[0046] like Figure 2 As shown, the fabrication apparatus for micro / nano structures in this embodiment specifically includes:

[0047] The housing 100 has a chamber inside, and a partition 101 is provided inside the housing 100 to divide the chamber into a first cavity 110 and a second cavity 120 arranged sequentially along a first direction.

[0048] The first cavity 110 is provided with a first stage 201, an adhesive injection mechanism 30 and an adhesive scraping mechanism 40 located above the first stage 201. The first stage 201 is used to support the template 91 to be imprinted. The adhesive injection mechanism 30 is used to inject imprinting adhesive into the template 91. The adhesive scraping mechanism 40 is located beside the adhesive injection mechanism 30. The adhesive scraping mechanism 40 includes a scraper 41, which extends along a second direction and is used to scrape off at least a portion of the imprinting adhesive from the surface of the template 91. The second direction is perpendicular to the first direction, i.e., the first direction is perpendicular to the first direction. Figure 2 The X direction is shown.

[0049] The second cavity 120 is provided with a second stage 202, an imprinting assembly 60 and a curing assembly above the second stage 202. The second stage 202 is used to support the substrate 92 or the template 91 to be imprinted. The imprinting assembly 60 is used to imprint the template 91 and the substrate 92. The curing assembly is used to cure the imprinting adhesive.

[0050] The conveying mechanism 80 is arranged inside the chamber and between the first stage 201 and the second stage 202, and is used to convey the template 91 to be imprinted from the first stage 201 to the second stage 202.

[0051] Reference Figure 3 A template 91 to be imprinted is provided, the template 91 including a first surface and a second surface disposed opposite to each other, and the first surface having a recessed imprinting cavity. The imprinting cavity extends from the first surface to the second surface, but does not penetrate through the first surface and the second surface.

[0052] Furthermore, the to-be-imprinted template 91 is a soft template, and the material of the to-be-imprinted template 91 includes but is not limited to PC (polycarbonate), PMMA (polymethyl methacrylate), and PET (polyethylene terephthalate). The thickness of the to-be-imprinted template 91 can be selected according to actual requirements, such as selecting a thickness of 0.5 mm.

[0053] The imprinting cavity is prepared according to the actual required structure. In this embodiment, the depth and duty ratio of the imprinting cavity are inconsistent (that is, the depth of the imprinting cavity extending from the first surface to the second surface can be inconsistent, the cross-sectional size of the imprinting cavity can be inconsistent, and multiple imprinting cavities can be arranged at uneven intervals). It can be understood that in other alternative embodiments, the imprinting cavities of the to-be-imprinted template 91 have the same depth and the same duty ratio, and are arranged at uniform intervals, which will not be elaborated here.

[0054] Combined with Figure 4 As shown, an excessive amount of imprinting glue is injected into the imprinting cavity of the to-be-imprinted template 91 through the glue injection mechanism 30. The imprinting glue fills the imprinting cavity and overflows from the to-be-imprinted template 91. The excess imprinting glue is scraped off by the glue scraping mechanism 40, and a layer of imprinting glue layer with a uniform thickness is reserved on the side of the to-be-imprinted template 91 away from the first stage 201.

[0055] As [[ID=thirteen]] Figure 2 shown, the glue injection mechanism 30 in a specific embodiment includes one or more combinations of a glue injection gun, a glue injection dropper, and a glue injection nozzle 31, and the glue scraping mechanism 40 includes a scraper 41.

[0056] Furthermore, the length of the scraper 41 is greater than or equal to the width of the to-be-imprinted template 91 (that is, the dimension of the to-be-imprinted template 91 in the second direction). Specifically, the scraper 41 is controlled to move from one side of the to-be-imprinted template 91 to the other side along the first direction to scrape off the excess imprinting glue.

[0057] It can be understood that a part of the imprinting glue layer in this embodiment can be regarded as the "residual glue layer" in the prior art. Through the two steps of glue injection and glue scraping, the thickness of the "residual glue layer" is ensured to be consistent.

[0058] Refer to Figure 2 As shown, a driving mechanism 50 is further provided in the first cavity 110 in a specific embodiment. The driving mechanism 50 is connected to the glue injection mechanism 30 and the glue scraping mechanism 40, and is at least used to drive the glue injection mechanism 30 and the glue scraping mechanism 40 to move along a direction parallel to or perpendicular to the first stage 201.

[0059] Furthermore, the driving mechanism 50 includes a first telescopic component 51, a second telescopic component 52, a sliding component 53, and a position sensor 54.

[0060] The first end of the first telescopic component 51 is fixedly connected to the first side of the sliding component 53, and the second end is fixedly connected to the glue injection mechanism 30. The glue injection mechanism 30 is used to drive the glue injection mechanism 30 to move in a direction perpendicular to the first stage 201. The distance between the glue injection mechanism 30 and the first stage 201 (that is, the distance between it and the printing template 91) can be controlled by the telescopic length of the first telescopic component 51, thereby enabling the glue injection mechanism 30 to adapt to printing templates 91 of different thicknesses.

[0061] The first end of the second telescopic component 52 is fixedly connected to the first side of the sliding component 53, and the second end is fixedly connected to the scraper 41, which is used to drive the scraper 41 to move in a direction perpendicular to the first stage 201. The distance between the scraper 41 and the template 91 to be imprinted can be controlled by the telescopic length of the second telescopic component 52, thereby controlling the thickness of the imprinted adhesive layer.

[0062] The second side of the sliding component 53 is slidably connected to the housing 100 and is used to drive the glue injection mechanism 30 and the scraper 41 to move in a direction parallel to the first stage 201. The sliding component 53 controls the horizontal movement of the glue injection mechanism 30 to ensure that the printing glue is filled into each printing cavity of the template 91 to be printed. The sliding component 53 controls the horizontal movement of the scraper 41 to ensure that the scraper 41 scrapes off the excess printing glue at each point on the template 91 to be printed, and retains a layer of printing glue of uniform thickness on the side of the template 91 to be printed away from the first stage 201.

[0063] Position sensor 54 is fixedly disposed on the first side of sliding assembly 53 and located between first telescopic assembly 51 and second telescopic assembly 52. ​​The sensor is used to acquire position information of dispensing mechanism 30 and scraper 41. Further, position sensor 54 is a micron-level displacement sensor, which controls first telescopic assembly 51, second telescopic assembly 52 and sliding assembly 53 based on position information through an external controller.

[0064] It is understood that the first telescopic component 51, the second telescopic component 52 and the sliding component 53 are well known in the prior art, and therefore will not be described in detail here. Any known or unknown sliding component 53 and telescopic component may be used here without restriction.

[0065] Furthermore, the preparation device also includes a first clamping mechanism 1101, which is disposed in the first cavity 110. The first end of the first clamping mechanism 1101 is fixedly connected to the housing 100, and the second end is provided with a first gripper. The first clamping mechanism 1101 is at least used to clamp the template 91 to be imprinted. The template 91 to be imprinted can be flipped or moved by the first clamping mechanism 1101, for example, the flipped template 91 to be imprinted can be placed on the conveying mechanism 80.

[0066] The curing component includes one or more combinations of a heating stage 701 and an ultraviolet irradiation element 702 (such as a UV lamp).

[0067] As shown in Figure 2 In this embodiment, the curing component includes a heating stage 701 and an ultraviolet irradiation element 702. Among them, the second carrier stage 202 includes a bearing surface, the heating stage 701 is arranged on the side of the second carrier stage 202 away from the bearing surface, and the ultraviolet irradiation element 702 is arranged on the side facing the bearing surface.

[0068] In other alternative embodiments, the curing component only includes the heating stage 701, or the curing component only includes the ultraviolet irradiation element 702, where the ultraviolet irradiation element 702 is arranged on the side away from the bearing surface.

[0069] In another alternative embodiment, the ultraviolet irradiation element 702 is arranged on the side facing the bearing surface and the side away from the bearing surface.

[0070] The imprinting component 60 includes a plurality of gas nozzles 601 distributed at intervals. The gas nozzles 601 are arranged above the second carrier stage 202, and the gas nozzles 601 are fixedly connected to the housing 100.

[0071] The preparation device further includes an air compressor 603 and an air pipe 602. The air compressor 603 is connected to the housing 100 through the air pipe 602 and is communicated with the gas nozzles 601 through the air pipe 602. The air compressor 603 generates compressed air to apply a certain force to the substrate 92 or the template 91 to be imprinted, and then imprints the template 91 to be imprinted and the substrate 92.

[0072] Furthermore, the preparation device further includes a vacuum generating device 1202. The vacuum device is arranged beside the second cavity 120 and is communicated with the chamber, and is used to evacuate the chamber to a vacuum state. The vacuum generating device 1202 in a specific embodiment includes a vacuum pump.

[0073] It can be understood that the partition 101 in this embodiment is an openable and closable partition 101. For example, in the first state, the partition 101 is in an open state, the first cavity 110 is communicated with the second cavity 120, and the transfer mechanism 80 can transfer the template 91 to be imprinted from the first carrier stage 201 to the second carrier stage 202. In the second state, the partition 101 is in a closed state, and the first cavity 110 is separated from the second cavity 120. That is, based on the open and closed state of the partition 101, the vacuum generating device 1202 can evacuate both the inside of the first cavity 110 and the second cavity 120 to a vacuum state, or only evacuate the inside of the second cavity 120 to a vacuum state.

[0074] Furthermore, the fabrication apparatus also includes a second clamping mechanism 1201, which is disposed in the second cavity 120. The first end of the second clamping mechanism 1201 is fixedly connected to the housing 100, and the second end is provided with a second gripper. The second clamping mechanism 1201 is used to clamp the substrate 92 at least.

[0075] It should be noted that the preparation apparatus in this embodiment can employ two imprinting methods. Specifically:

[0076] Combination Figure 5 As shown, in one specific embodiment, the template 91 to be imprinted is placed on the second stage 202, the substrate 92 is clamped by the second clamping mechanism 1201, and the substrate 92 is placed on the side of the template 91 to be imprinted away from the second stage 202 so that the substrate 92 is bonded to the imprinting adhesive layer. A pressure of 1 to 40 bar is applied to the substrate 92 by compressed air along the direction of the substrate 92 toward the imprinting adhesive layer so as to imprint the imprinting adhesive layer and the substrate 92.

[0077] Combination Figure 6 As shown, in another specific embodiment, the substrate 92 is placed on the second stage 202, and the template 91 to be imprinted is placed on the substrate 92 by the conveying mechanism 80 so that the substrate 92 is bonded to the imprinting adhesive layer. The substrate 92 is subjected to a pressure of 1 to 40 bar by compressed air along the direction of the template 91 to be imprinted toward the substrate 92 so as to imprint the imprinting adhesive layer and the substrate 92.

[0078] Furthermore, the conveying mechanism 80 includes a robotic arm 81, which is located between the first stage 201 and the second stage 202. The first end of the robotic arm 81 is fixedly connected to the housing 100, and the second end is equipped with a clamp. The clamp holds the template to be imprinted, thereby moving the template 91 from the first stage 201 to the second stage 202. It is understood that any known or unknown robotic arm can be used here without restriction, and will not be described in detail here.

[0079] Reference Figure 7 After removing the template 91 to be imprinted, the micro-nano structure is obtained.

[0080] by Figure 7 For example, the thickness of the imprinted adhesive layer 201 located in the first region a, the second region b, and the third region c is consistent, which solves the problem of uneven residual adhesive and avoids affecting the subsequent structure transfer process.

[0081] The device injects an excessive amount of imprinting glue into the imprinting cavity of the template 91 to be imprinted, then scrapes off the excess glue, and retains a layer of imprinting glue with a uniform thickness on one side of the template 91 to be imprinted. Then, the glue layer is directly imprinted with the substrate 92, and a micro-nano structure with a uniform residual glue layer thickness can be obtained. When the imprinting structure cavity has a non-uniform duty cycle or a non-uniform height structure, the problem of non-uniform residual glue is solved, avoiding affecting the subsequent structure transfer process.

[0082] Embodiment 2:

[0083] Refer Figure 8 As shown, the difference between this embodiment and Embodiment 2 is that: the conveying mechanism 80 includes a conveyor belt, the conveyor belt extends along the first direction and connects the first carrier 201 and the second carrier 202. The conveyor belt includes a plurality of driving rollers 82 arranged at intervals in sequence along the first direction, and rollers arranged on the driving rollers in sequence along the second direction. The driving rollers 82 extend along the second direction.

[0084] From the above technical solutions, it can be seen that the present utility model has the following beneficial effects:

[0085] The present utility model injects an excessive amount of imprinting glue into the template to be imprinted through the glue injection mechanism, scrapes off the excess imprinting glue through the glue scraping mechanism and forms an imprinting glue layer with a uniform thickness on one side of the template to be imprinted, and then directly imprints the glue layer with the substrate through the imprinting component. After curing, a micro-nano structure with a uniform residual glue layer thickness can be obtained, solving the problem of non-uniform residual glue thickness and avoiding the influence of inconsistent residual glue layer thickness on the subsequent structure transfer process.

[0086] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, in any regard, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0087] In addition, it should be understood that although this specification is described according to embodiments, not each embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity sake. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A fabrication apparatus for micro / nano structures, characterized in that, include: A shell with a cavity inside, and a partition inside the shell for dividing the cavity into a first cavity and a second cavity arranged sequentially along a first direction; The first cavity is provided with a first stage, an injection mechanism and a scraping mechanism located above the first stage. The first stage is used to support the template to be imprinted. The injection mechanism is used to inject imprinting adhesive into the template to be imprinted. The scraping mechanism is located next to the injection mechanism. The scraping mechanism includes a scraper. The scraper extends along a second direction and is used to scrape off at least a portion of the imprinting adhesive from the surface of the template to be imprinted. The second direction is perpendicular to the first direction. The second cavity is provided with a second stage, an imprinting assembly and a curing assembly above the second stage. The second stage is used to support a substrate or a template to be imprinted. The imprinting assembly is used to imprint the template and the substrate. The curing assembly is used to cure the imprinting adhesive. A conveying mechanism is arranged in the chamber and located between the first stage and the second stage, for conveying the template to be imprinted from the first stage to the second stage.

2. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The preparation device further includes a first clamping mechanism, which is disposed in a first cavity. The first end of the first clamping mechanism is fixedly connected to the housing, and the second end is provided with a first gripper. The first clamping mechanism is used to clamp the template to be imprinted.

3. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The first cavity is also provided with a driving mechanism, which is connected to the glue injection mechanism and the glue scraping mechanism, and is at least used to drive the glue injection mechanism and the glue scraping mechanism to move in a direction parallel to and / or perpendicular to the first stage.

4. The fabrication apparatus for micro / nano structures according to claim 3, characterized in that, The driving mechanism includes a first telescopic component, a second telescopic component, and a sliding component; wherein... The first end of the first telescopic component is fixedly connected to the first side of the sliding component, and the second end is fixedly connected to the glue injection mechanism, which is used to drive the glue injection mechanism to move in a direction perpendicular to the first platform. The first end of the second telescopic component is fixedly connected to the first side of the sliding component, and the second end is fixedly connected to the scraper, for driving the scraper to move in a direction perpendicular to the first platform; The second side of the sliding component is slidably connected to the housing, and is used to drive the glue injection mechanism and the scraper to move in a direction parallel to the first stage.

5. The fabrication apparatus for micro / nano structures according to claim 4, characterized in that, The driving mechanism further includes a position sensor, which is fixedly disposed on the first side of the sliding component and located between the first telescopic component and the second telescopic component. The sensor is used to obtain the position information of the glue injection mechanism and / or the scraper.

6. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The conveying mechanism includes a conveyor belt extending along the first direction and connecting the first platform and the second platform. The conveyor belt includes a plurality of drive rollers arranged at intervals along the first direction, and rollers arranged sequentially on the drive rollers along the second direction. The drive rollers extend along the second direction; and / or, The conveying mechanism includes a robotic arm located between the first and second platforms. The first end of the robotic arm is fixedly connected to the housing, and the second end is provided with a clamp.

7. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The curing assembly includes one or more combinations of a heating stage and an ultraviolet irradiation element. The second stage includes a support surface. The heating stage is disposed on the side of the second stage away from the support surface. The ultraviolet irradiation element is disposed on the side facing the support surface and / or away from the support surface.

8. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The imprinting assembly includes a plurality of spaced gas nozzles, which are fixedly connected to the housing. The preparation device also includes an air compressor and an air pipe. The air compressor is connected to the housing via the air pipe and communicates with the gas nozzles via the air pipe.

9. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The preparation apparatus further includes a second clamping mechanism disposed in a second cavity. The first end of the second clamping mechanism is fixedly connected to the housing, and the second end is provided with a second claw. The second clamping mechanism is used to clamp the substrate at least.

10. The fabrication apparatus for micro / nano structures according to claim 1, characterized in that, The preparation apparatus further includes a vacuum generating device, which is located beside the second cavity and is connected to the cavity.

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