Self-locking structure for reticle pod
By designing a self-locking structure on the photomask box, and using locking ramps and limiting protrusions to achieve self-locking, the problem of loosening or tight fitting of the sliding buckle is solved, ensuring the airtightness and ease of operation of the photomask box.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG SAIJIN SEMICON TECH CO LTD
- Filing Date
- 2025-07-21
- Publication Date
- 2026-07-14
AI Technical Summary
The existing photomask box's sliding latches are prone to loosening or becoming too tight during use, causing inconvenience and affecting the safety and cleanliness of the photomask.
A self-locking structure was designed, including a locking part and a locking slide. By setting a locking ramp and a limiting protrusion on the locking part, a self-locking effect is achieved, preventing the locking slide from sliding without external force. The limiting protrusion also locks the upper and lower covers tightly together.
It achieves a self-locking effect for the photomask box, preventing dust from entering, improving the safety and cleanliness of the photomask, and increasing operational efficiency.
Smart Images
Figure CN224501137U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor carrier assembly technology, and in particular to a self-locking structure for photomask boxes. Background Technology
[0002] A photomask box, also known as a photomask cassette or photolithography cassette, is a specialized container used in semiconductor manufacturing and photolithography processes to store and protect photomasks. The photomask is a core component in photolithography technology, etched with tiny patterns used to manufacture integrated circuits; therefore, the integrity and cleanliness of the photomask are crucial to the success of the entire manufacturing process. Photomask boxes provide a closed, clean environment, preventing dust, particles, and other contaminants from damaging the photomask, ensuring its safety during storage and transportation.
[0003] There is a type of openable mask case for storing photomasks (reticles). The case is opened and closed by hinges and locked by sliding latches. However, if the latches are not tight enough, they may loosen during use, such as when shaken or moved, which could allow dust to enter or even cause the products inside to fall out and be damaged. If the latches are too tight, they are not easy to slide when locking and unlocking, especially when the operator is wearing gloves, making it difficult to manually open the photomask case and resulting in low work efficiency. Summary of the Invention
[0004] In view of this, the present invention provides a self-locking structure for a photomask box to solve the above-mentioned technical problems.
[0005] A self-locking structure for a photomask box includes a carrier body, two locking portions disposed on the carrier body, and two locking latches respectively disposed on the two locking portions. The carrier body includes a box-shaped upper cover and a lower cover that fastens to the upper cover. Each locking portion includes a fixing protrusion disposed on the lower cover and a limiting protrusion disposed on the upper cover. The fixing protrusion includes a first protrusion fixed to the lower cover, a second protrusion disposed on the side of the first protrusion near the upper cover, a first limiting protrusion disposed on the side of the first protrusion away from the second protrusion, and a locking ramp disposed on the first and second protrusions. The first protrusion is fixed to the lower cover and is located on the edge of the fastening point when the lower cover and the upper cover are fastened, and the length direction of the first protrusion is along this edge. One end of the second protrusion is fixed to the first protrusion in the width direction, and the other end extends to the upper cover and is spaced apart from the upper cover. The length of the second protrusion is less than the length of the first protrusion. The first limiting protrusion is a protrusion located at the opening of the groove of the first protrusion, with the protrusion direction being away from the second protrusion. The locking ramp is located on the surfaces of the first and second protrusions away from the lower cover. Along the length of the first and second protrusions, the slope of the locking ramp gradually decreases from the middle towards the limiting protrusion. The cross-section of the locking ramp is a right-angled trapezoid. The locking latch is an interference fit with the locking ramp. The limiting protrusion is fixed to the upper cover and, when the upper and lower covers are fastened together, abuts against the first protrusion and contacts the second protrusion. A second limiting protrusion is also provided on the limiting protrusion. The second limiting protrusion and the first limiting protrusion are axially symmetrical about the fastening edge of the upper and lower covers. The locking latch includes a latch body, a latch groove on the latch body, a push-pull protrusion on the latch body, and multiple anti-slip textures on the latch body.
[0006] Furthermore, the vehicle body also includes two hinges connecting the upper cover and the lower cover.
[0007] Furthermore, the hinge is located on one side of the upper and lower covers and connects the upper and lower covers via a pivot.
[0008] Furthermore, both locking parts are located on the side of the vehicle body away from the hinge, and the two locking parts are spaced apart from each other.
[0009] Furthermore, a closed-end groove is provided on the side of the first protrusion away from the upper cover. The groove opening is parallel to the plane of the lower cover where the locking part is located and is oriented away from the upper cover. The groove body extends along the edge of the fastening point when the lower cover and the upper cover are fastened together.
[0010] Furthermore, a groove with one end closed is provided on the side of the second protrusion away from the first protrusion. The groove is closed at the end where the first protrusion and the second protrusion are aligned, and open at the other end. The aligned end is located at the end where the two locking parts are far apart from each other, and the open end is located at the end where the two locking parts are close to each other.
[0011] Furthermore, a groove with one end closed is provided on the side of the limiting protrusion away from the first protrusion. The groove is closed at the end away from the second protrusion, and the other end is connected to the groove of the second protrusion, and together they form a groove with both ends closed.
[0012] Furthermore, the sliding buckle body is a rectangular block structure formed by injection molding, and the surface away from the buckle groove is set as a concave surface that conforms to the curve of the finger.
[0013] Furthermore, the buckle groove is a through groove provided on the sliding buckle body. The cross-section of the groove is convex, and the extension direction of the groove is the length direction of the sliding buckle body.
[0014] Furthermore, the anti-slip texture is provided on the surface of the sliding buckle body, and consists of multiple parallel and spaced strip-shaped protrusions, with the extension direction of each anti-slip texture being perpendicular to the sliding direction of the locking buckle.
[0015] Compared with the prior art, the self-locking structure for a photomask box provided by this utility model achieves a self-locking effect by setting the locking part and providing the locking ramp on the first and second protrusions. This ensures that after the locking latch slides to the locking part and locks, it is positioned at the bottom of the locking ramp, preventing it from sliding upwards without external force. Simultaneously, by setting the first and second limiting protrusions, the locking latch, after sliding to the locking position, is locked by the abutting action of the first and second limiting protrusions, preventing gaps between the locking latch and the locking part after locking. This ensures a tight fit between the upper and lower covers and prevents dust from entering the photomask box. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of a self-locking structure for a photomask box provided by this utility model.
[0017] Figure 2 for Figure 1 An enlarged schematic diagram of the self-locking structure for the photomask box at point A.
[0018] Figure 3 for Figure 1 A bottom view of the self-locking structure used for the photomask box.
[0019] Figure 4 for Figure 3 An enlarged schematic diagram of the self-locking structure used for the photomask box at point B.
[0020] Figure 5 for Figure 1 A schematic diagram of the carrier body and locking part of the self-locking structure used for photomask boxes.
[0021] Figure 6 for Figure 5 An enlarged schematic diagram at point C of the carrier body and locking part of the self-locking structure for the photomask box.
[0022] Figure 7 for Figure 1 A schematic diagram of the locking latch structure of the self-locking structure used for photomask boxes. Detailed Implementation
[0023] The specific embodiments of this utility model are described in further detail below. It should be understood that the description of the embodiments of this utility model herein is not intended to limit the scope of protection of this utility model.
[0024] like Figures 1 to 7 The diagram shows a structural schematic of the self-locking structure for a photomask box provided by this utility model. The self-locking structure for the photomask box includes a carrier body 10, two locking parts 20 disposed on the carrier body 10, and two locking latches 30 respectively disposed on the two locking parts 20. It is conceivable that the self-locking structure for the photomask box also includes other functional modules such as a nameplate on the surface of the carrier, a stop block inside the carrier, etc., which are technologies known to those skilled in the art and will not be described in detail here.
[0025] The main body 10 of the vehicle can be a box-shaped structure made of plastic injection molding, which includes a box-shaped upper cover 11, a lower cover 12 fastened to the upper cover 11, and two hinges 13 connecting the upper cover 11 and the lower cover 12.
[0026] The upper cover 11 and the lower cover 12 have basically the same structure. When the upper cover 11 and the lower cover 12 are fastened together, they form a space that can accommodate and store semiconductors.
[0027] The hinge 13 is located on one side of the upper cover 11 and the lower cover 12, and connects the upper cover 11 and the lower cover 12 through a pivot, so that the upper cover 11 and the lower cover 12 can be rotated to open and close. This should be a widely used and well-known technology, so only a brief description is given here.
[0028] Both locking parts 20 are located on the side of the carrier body 10 away from the hinge 13, and the two locking parts 20 are spaced apart from each other. Each locking part 20 includes a fixing protrusion 21 on the lower cover 12 and a limiting protrusion 22 on the upper cover 11.
[0029] The fixing protrusion 21 includes a first protrusion 211 fixed on the lower cover 12, a second protrusion 212 disposed on the side of the first protrusion 211 near the upper cover 11, a first limiting protrusion 213 disposed on the side of the first protrusion 211 away from the second protrusion 212, and a locking ramp 214 disposed on the first protrusion 211 and the second protrusion 212.
[0030] The first protrusion 211 is fixed to the lower cover 12 and located on the edge of the engagement point when the lower cover 12 and the upper cover 11 are fastened together, with the length direction of the first protrusion 211 along this edge. A closed-end groove is provided on the side of the first protrusion 211 away from the upper cover 11. The groove opening is parallel to the plane of the lower cover 12 where the locking part 20 is located and faces away from the upper cover 11. The groove body extends along the edge of the engagement point when the lower cover 12 and the upper cover 11 are fastened together, so that when the locking latch 30 is mounted on the fixed protrusion 21, it can slide along the length direction of the first protrusion 211.
[0031] The second protrusion 212 is fixed at one end to the first protrusion 211 in the width direction, and the other end extends to the upper cover 11 and is spaced apart from the upper cover 11, so that when the upper cover 11 and the lower cover 12 are fastened together, the second protrusion 212 is located on the upper cover 11. The length of the second protrusion 212 in the length direction is less than the length of the first protrusion 211, and a sliding groove with one end closed is provided on the side of the second protrusion 212 away from the first protrusion 211. The sliding groove is closed at the end where the first protrusion 211 and the second protrusion 212 are aligned, and open at the other end. Specifically, the aligned end of the sliding groove is located at the end where the two locking parts 20 are far apart, and the open end is located at the end where the two locking parts 20 are close together, so that the locking latch 30 can be set and slid.
[0032] The first limiting protrusion 213 is a protrusion located at the opening of the groove of the first protrusion 211. It can be a circular protrusion, and the protrusion direction is the direction of the first protrusion 211 away from the second protrusion 212. When the locking latch 30 slides to the locking position, it is in a tight fit state by the action of the first limiting protrusion 213, and will not unlock without the action of external force.
[0033] The locking ramp 214 is disposed on the surface of the first protrusion 211 and the second protrusion 212 away from the lower cover 12. Along the length of the first protrusion 211 and the second protrusion 212, the slope of the locking ramp 214 gradually decreases from the middle section towards the limiting protrusion 22. Specifically, the cross-section of the locking ramp 214 is a right-angled trapezoid. Therefore, when the limiting protrusion 22 slides to the locked state or is in the unlocked state, it will not slide without external force due to the resisting action of the locking ramp 214. Correspondingly, the locking latch 30 is a tight-fitting interference fit with the locking ramp 214.
[0034] The limiting protrusion 22 is fixed on the upper cover 11, and when the upper cover 11 and the lower cover 12 are fastened together, it abuts against the first protrusion 211 and connects with the second protrusion 212. Correspondingly, a sliding groove with one end closed is provided on the side of the limiting protrusion 22 away from the first protrusion 211. The sliding groove is closed at one end away from the second protrusion 212, and the other end communicates with the sliding groove of the second protrusion 212, and together they form a sliding groove with both ends closed, so that the locking buckle 30 can slide.
[0035] The limiting protrusion 22 is also provided with a second limiting protrusion 221. The second limiting protrusion 221 and the first limiting protrusion 213 are arranged symmetrically with the fastening edge of the upper cover 11 and the lower cover 12 as the axis of symmetry, so as to play a locking role when the locking slide buckle 30 is locked.
[0036] The locking latch 30 includes a latch body 31, a latch groove 32 disposed on the latch body 31, a push-pull protrusion 33 disposed on the latch body 31, and multiple anti-slip textures 34 disposed on the latch body 31.
[0037] The sliding buckle body 31 can be a rectangular block structure formed by injection molding, and the surface away from the buckle groove 32 is set as a concave surface that conforms to the curve of the finger, so that the operator can press and move the locking sliding buckle 30 on the locking part 20 by pressing with his finger.
[0038] The snap groove 32 is a through groove provided on the snap body 31. The cross-section of the groove body is in a "convex" shape, and the extending direction of the groove body is the length direction of the snap body 31, so that the locking snap 30 straddles on the locking portion 20 and can be snapped into the sliding grooves of the first bump 211, the second bump 212 and the limiting bump 22, preventing the locking snap 30 from disengaging and falling off the locking portion 20. A plurality of tightly-fitting protrusions 321 are provided in the snap groove 32. The extending direction of the tightly-fitting protrusions 321 is the same as the sliding direction of the locking snap 30, which is used to compensate for the gap when the locking snap 30 is snapped on the locking portion 20. At the same time, the friction force during the sliding of the locking snap 30 is small, so that when the locking snap 30 is pushed to slide on the locking portion 20, the upper cover 11 and the lower cover 12 will not be likely to open and close due to the gap, thus ensuring the sealing effect.
[0039] The push-pull bump 33 is provided on the surface of the snap body 31 on the side away from the snap groove 32 and is located at one end of the snap body 31 close to the other locking portion 20 in the length direction. It can be a strip-shaped protrusion, and the extending direction of the protrusion is perpendicular to the sliding direction of the locking snap 30, so as to facilitate the finger to abut when拨动 the locking snap 30 to slide.
[0040] The anti-slip patterns 34 are provided on the surface of the snap body 31 and are a plurality of parallel and spaced strip-shaped protrusions. The extending direction of each anti-slip pattern 34 is perpendicular to the sliding direction of the locking snap 30, so as to play an anti-slip role when拨动 the locking snap 30 to slide.
[0041] In the extending direction of the snap groove 32, the length of the snap body 31 is greater than the length of the second bump 212. Therefore, during use, when the locking snap 30 slides to the second bump 212, the snap groove 32 is simultaneously snapped on the first bump 211 and the second bump 212, thereby locking the photomask box.
[0042] Compared with the prior art, the self-locking structure for a photomask box provided by this utility model, by setting the locking part 20 and the locking ramp 214 on the first protrusion 211 and the second protrusion 212, ensures that after the locking latch 30 slides on the locking part 20 to the locked position, it is located at the bottom of the ramp 214, thus preventing it from sliding uphill without external force, thereby achieving a self-locking effect. Simultaneously, by setting the first limiting protrusion 213 and the second limiting protrusion 221, after the locking latch 30 slides on the locking part 20 to the locked position, it is locked by the abutting action of the first limiting protrusion 213 and the second limiting protrusion 221, avoiding any gap between the locking latch 30 and the locking part 20 after locking, ensuring a tight fit between the upper cover 11 and the lower cover 12, and preventing dust from entering the inside of the photomask box.
[0043] The above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Any modifications, equivalent substitutions or improvements within the spirit of the present utility model are covered within the scope of the claims of the present utility model.
Claims
1. A self-locking structure for a photomask box, characterized in that: The self-locking structure for the photomask box includes a carrier body, two locking parts disposed on the tooling body, and two locking slides respectively disposed on the two locking parts. The carrier body includes a box-shaped upper cover and a lower cover that fastens to the upper cover. Each locking part includes a fixing protrusion disposed on the lower cover and a limiting protrusion disposed on the upper cover. The fixing protrusion includes a first protrusion fixed to the lower cover, a second protrusion disposed on the side of the first protrusion closer to the upper cover, a first limiting protrusion disposed on the side of the first protrusion away from the second protrusion, and a locking slide disposed on the first protrusion and the second protrusion. The first protrusion is fixed to the lower cover and is located on the edge of the fastening point when the lower cover and the upper cover are fastened, and the length direction of the first protrusion is along this edge. One end of the second protrusion is fixed to the first protrusion in the width direction, and the other end extends to the upper cover and is spaced apart from the upper cover. The length of the second protrusion in the length direction is less than the first protrusion. The length of the first protrusion is described. The first limiting protrusion is a protrusion located at the opening of the groove of the first protrusion, and the protrusion direction is the direction away from the second protrusion. The locking ramp is located on the surface of the first and second protrusions away from the lower cover. The slope of the locking ramp gradually decreases from the middle section of the locking ramp towards the limiting protrusion along the length direction of the first and second protrusions. The cross-section of the locking ramp is a right trapezoidal shape. The locking latch is an interference fit with the locking ramp. The limiting protrusion is fixed on the upper cover and, when the upper cover and the lower cover are fastened together, it abuts against the first protrusion and connects with the second protrusion. The limiting protrusion is also provided with a second limiting protrusion. The second limiting protrusion and the first limiting protrusion are symmetrically arranged about the fastening edge of the upper cover and the lower cover. The locking slide includes a slide body, a buckle groove provided on the slide body, a push-pull protrusion provided on the slide body, and multiple anti-slip textures provided on the slide body.
2. The self-locking structure for a photomask box as described in claim 1, characterized in that: The vehicle body also includes two hinges that connect the upper cover and the lower cover.
3. The self-locking structure for a photomask box as described in claim 2, characterized in that: The hinge is located on one side of the upper and lower covers and connects the upper and lower covers via a pivot.
4. The self-locking structure for a photomask box as described in claim 2, characterized in that: Both locking parts are located on the side of the vehicle body away from the hinge, and the two locking parts are spaced apart from each other.
5. The self-locking structure for a photomask box as described in claim 1, characterized in that: The first protrusion has a closed groove on the side away from the upper cover. The groove opening is parallel to the plane of the lower cover where the locking part is located and is oriented away from the upper cover. The groove body extends along the edge of the fastening point when the lower cover and the upper cover are fastened together.
6. The self-locking structure for a photomask box as described in claim 1, characterized in that: The second protrusion has a closed groove on the side away from the first protrusion. The groove is closed at the end where the first protrusion and the second protrusion are aligned, and open at the other end. The aligned end is located at the end where the two locking parts are far apart from each other, and the open end is located at the end where the two locking parts are close to each other.
7. The self-locking structure for a photomask box as described in claim 1, characterized in that: The limiting protrusion has a groove that is closed at one end on the side away from the first protrusion. The groove is closed at the end away from the second protrusion, and the other end is connected to the groove of the second protrusion, forming a groove that is closed at both ends.
8. The self-locking structure for a photomask box as described in claim 1, characterized in that: The main body of the sliding buckle is a rectangular block structure formed by injection molding, and the surface away from the buckle groove is set as a concave surface that conforms to the curve of the finger.
9. The self-locking structure for a photomask box as described in claim 1, characterized in that: The buckle groove is a through groove provided on the sliding buckle body. The cross-section of the groove is convex, and the extension direction of the groove is the length direction of the sliding buckle body.
10. The self-locking structure for a photomask box as described in claim 1, characterized in that: The anti-slip texture is provided on the surface of the sliding buckle body, and consists of multiple parallel and spaced strip-shaped protrusions. The extension direction of each anti-slip texture is perpendicular to the sliding direction of the locking buckle.