A rotary shaft mounting tool for mask box assembly
By designing a mounting fixture for the fixed base, press-fit components, and drive equipment, the problem of time-consuming, labor-intensive, and difficult-to-position shaft insertion during photomask assembly was solved, achieving rapid and accurate positioning and improving production efficiency and safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG SAIJIN SEMICON TECH CO LTD
- Filing Date
- 2025-07-21
- Publication Date
- 2026-07-14
AI Technical Summary
When assembling existing photomask boxes, the insertion of the rotating shaft is time-consuming and laborious, and it is difficult to ensure that it is in place, which poses a risk of breakage.
Design a shaft mounting fixture that includes a fixed base, a press-fit assembly, and a drive device. Through the cooperation of the hinge placement slot, the shaft mounting hole, and the drive device, the shaft can be quickly and accurately positioned and inserted.
It improves the assembly efficiency of the photomask box, ensures the proper insertion of the rotating shaft, and reduces manual operation time and the risk of breakage.
Smart Images
Figure CN224501138U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor carrier assembly technology, and in particular to a rotating shaft mounting fixture for assembling photomask boxes. Background Technology
[0002] A photomask box, also known as a photomask cassette or photolithography cassette, is a specialized container used in semiconductor manufacturing and photolithography processes to store and protect photomasks. The photomask is a core component in photolithography technology, etched with tiny patterns used to manufacture integrated circuits; therefore, the integrity and cleanliness of the photomask are crucial to the success of the entire manufacturing process. Photomask boxes provide a closed, clean environment, preventing dust, particles, and other contaminants from damaging the photomask, ensuring its safety during storage and transportation.
[0003] There is a type of openable mask case, which is used to hold a reticle. The case is opened and closed by means of a hinge, and the semiconductor is stored inside. However, when assembling the mask case, a pivot needs to be inserted into the pivot hole of the hinge. Manual assembly is time-consuming and laborious, and it is impossible to guarantee that the pivot is inserted in place. At the same time, if one end of the pivot is exposed, there is a risk of breakage during use. Summary of the Invention
[0004] In view of this, the present invention provides a rotating shaft mounting fixture for assembling photomask boxes to solve the above-mentioned technical problems.
[0005] A pivot mounting fixture for assembling a photomask box includes a fixture body, two mounting seats disposed on the fixture body, and two pressing assemblies respectively disposed on one side of the two mounting seats. The photomask box includes a carrier body, two hinges disposed on one side of the carrier body, and a pivot inserted into the hinges. The insertion direction of the pivot into the hinge is consistent with the arrangement direction of the two hinges. Each mounting seat includes a base fixed to the fixture body, a hinge placement slot disposed on the base, a pivot mounting hole disposed on one side of the hinge placement slot, and a pivot placement slot communicating with the pivot mounting hole. The spacing between the hinge placement slots on the two mounting seats is consistent with the spacing between the two hinges. The pivot mounting hole is a circular through hole disposed on the side of the hinge placement slot away from the other mounting seat, communicating with the interior of the hinge placement slot, and the extension direction of the pivot mounting hole is consistent with the arrangement direction of the two hinge placement slots. The shaft placement groove is a through groove communicating with the interior of the shaft mounting hole. The groove opening is perpendicular to the opening direction of the shaft mounting hole and vertically upward. The cross-sectional shape of the groove body is consistent with the shape of the shaft, and the cross-sectional dimension of the groove body is larger than the dimension of the shaft. Both pressing assemblies are located on the side of the fixed base away from each other. Each pressing assembly includes a fixed plate fixed to the tooling body, two guide posts fixed to the fixed plate, a movable plate sleeved on the guide posts, a ejector pin on the movable plate, and a driving device located on the side of the movable plate away from the ejector pin. The fixed plate is located on the side of the shaft mounting hole away from the hinge placement groove, and the fixed plate has a through hole communicating with and corresponding to the shaft mounting hole. The guide posts are vertically arranged on the side of the fixed plate away from the base, extending in the same direction as the opening direction of the shaft mounting hole. The movable plate is located on the side of the fixed plate away from the base. The ejector pin is fixed to the movable plate, passes through the through hole on the fixed plate, and is inserted into the shaft mounting hole.
[0006] Furthermore, both of the fixing seats are fixed to the tooling body by fasteners, and the two fixing seats are spaced apart from each other.
[0007] Furthermore, the hinge placement slot is disposed on the base body, and the size, shape and extension direction of the slot body are consistent with the hinge, and a guide slope is provided at the opening of the hinge placement slot.
[0008] Furthermore, the diameter of the pivot mounting hole is consistent with that of the pivot, and the height difference and positional relationship between the pivot mounting hole and the hinge placement slot are consistent.
[0009] Furthermore, a guide slope is provided at the opening of the shaft placement groove.
[0010] Furthermore, the fixing base is also provided with an avoidance groove on the other side of the hinge placement groove, and an observation groove on both sides of the hinge placement groove.
[0011] Furthermore, the clearance groove is located on the other side of the hinge placement groove away from the pivot mounting hole and communicates with the hinge placement groove. The groove body direction is consistent with the opening direction of the pivot mounting hole, and the groove body height and position are consistent with the height and position of the pivot mounting hole.
[0012] Furthermore, the observation slot is a rectangular slot located on both sides of the hinge placement slot and communicating with the hinge placement slot. The extension direction of the observation slot is perpendicular to the insertion direction of the rotating shaft, and the width of the observation slot in the insertion direction of the rotating shaft is less than the length of the hinge placement slot in the insertion direction of the rotating shaft.
[0013] Furthermore, the driving device is a drive motor or a hydraulic device, the main body of the device is fixed to the tooling body, the driving end is connected to the movable plate, and the driving direction is consistent with the opening direction of the rotating shaft mounting hole.
[0014] Furthermore, the driving distance of the driving device is set according to the installation distance of the rotating shaft in the rotating shaft mounting hole.
[0015] Compared with existing technologies, the rotating shaft mounting fixture for photomask assembly provided by this utility model, by setting the fixing base, allows the two hinges to respectively engage in the hinge placement slot when the photomask is placed on it. The alignment of the hinge shaft holes can be checked through the observation slot, avoiding obstruction to the insertion of the rotating shaft into the hinge. By setting the driving device to push the ejector pin, the rotating shaft placed in the rotating shaft placement slot is inserted along the rotating shaft mounting hole into the hinge shaft hole, achieving rapid loading and accurate positioning, greatly reducing the time for installing the rotating shaft on the photomask, effectively improving production efficiency. Furthermore, the driving device controls the insertion distance of the rotating shaft, ensuring that it is inserted correctly. By setting two fixing bases and a pressing assembly, the rotating shaft can be inserted into two hinges on one photomask simultaneously, resulting in even higher production efficiency. Attached Figure Description
[0016] Figure 1 This utility model provides a schematic diagram of the structure of a rotating shaft mounting fixture for assembling photomask boxes during installation.
[0017] Figure 2 for Figure 1A schematic diagram of the structure of the photomask box installed by the rotating shaft mounting fixture used for photomask box assembly.
[0018] Figure 3 for Figure 2 An enlarged schematic diagram of the photomask box mounted at point A using the rotating mounting fixture for assembling the photomask box.
[0019] Figure 4 for Figure 1 A schematic diagram of the structure of the rotating shaft mounting fixture used for assembling photomask boxes. Detailed Implementation
[0020] The specific embodiments of this utility model are described in further detail below. It should be understood that the description of the embodiments of this utility model herein is not intended to limit the scope of protection of this utility model.
[0021] like Figures 1 to 4 The diagram shows a schematic of the rotating shaft mounting fixture for assembling a photomask box provided by this invention. The rotating shaft mounting fixture for assembling a photomask box includes a fixture body 10, two fixing seats 20 disposed on the fixture body 10, and two pressing assemblies 30 respectively disposed on one side of the two fixing seats 20. It is conceivable that the rotating shaft mounting fixture for assembling a photomask box also includes other functional modules such as a drive device providing driving force, a device platform for fixing the fixture, etc., which are technologies known to those skilled in the art and will not be described in detail here.
[0022] It should be noted that, as Figures 2 to 3 The diagram shows a schematic of the structure of a photomask box 40 placed in the rotating mounting fixture for assembling the photomask box. The photomask box 40 includes a carrier body 41 that can be fastened together, two hinges 42 disposed on one side of the carrier body 41, and a rotating shaft 43 inserted into the hinges 42.
[0023] The carrier body 41 includes two interlocking lids that, when locked together, form a box-shaped receiving cavity for placing wafers. The carrier body 41 also includes product limiting blocks, lid latches, and other components, all of which are existing technologies in the semiconductor carrier field and are not the main focus of this application; therefore, they are only briefly described here.
[0024] Both hinges 42 are disposed on one side of the carrier body 41 and are spaced apart from each other, so that the two lids can rotate relative to each other by inserting the pivot 43, facilitating the opening and closing of the box. Accordingly, each lid is provided with a portion of the hinge 42. The technical features of the hinges are well-known technology widely used in production and daily life, and will not be described in detail here. The pivot 43 is inserted into the hinge 42, thereby forming a structure that allows the two lids of the carrier body 41 to rotate relative to each other. The insertion direction of the pivot 43 into the hinge 42 is consistent with the arrangement direction of the two hinges 42.
[0025] The tooling body 10 is a main structure for supporting the aforementioned fixed seat 20 and press-fit assembly 30. It can be fixed on a lathe or equipment plane, or it can be used as part of the assembly line production for the installation of a rotating shaft in the photomask assembly operation.
[0026] Both of the fixing seats 20 can be fixed to the tooling body 10 by fasteners, and the two fixing seats 20 are spaced apart from each other. Each fixing seat 20 includes a seat body 21 fixed to the tooling body 10, a hinge placement groove 22 provided on the seat body 21, a shaft mounting hole 23 provided on one side of the hinge placement groove 22, a shaft placement groove 24 communicating with the shaft mounting hole 23, a clearance groove 25 provided on the other side of the hinge placement groove 22, and an observation groove 26 provided on both sides of the hinge placement groove 22.
[0027] The seat 21 is a protrusion fixed on the tooling body 10, used to place the hinge 42 and insert the pivot 43 therein.
[0028] The hinge placement slot 22 is disposed on the base 21. The size, shape, and extension direction of the slot are consistent with those of the hinge 42. A guide slope is provided at the opening of the hinge placement slot 22 to facilitate the insertion of the hinge 42 into the hinge placement slot 22. In addition, the distance between the hinge placement slots 22 on the two fixing seats 20 is consistent with the distance between the two hinges 42, so that the two hinges 42 can be simultaneously placed into the two hinge placement slots 22 for shaft installation.
[0029] The pivot mounting hole 23 is a circular through hole located on the side of the hinge placement slot 22 away from the other fixing seat 20 and communicating with the interior of the hinge placement slot 22. The extension direction of the pivot mounting hole 23 is consistent with the arrangement direction of the two hinge placement slots 22, so that when the hinge 42 is placed in the hinge placement slot 22, the pivot 43 can be inserted into the hinge 42 through the pivot mounting hole 23. Accordingly, the diameter of the pivot mounting hole 23 is preferably just large enough for the pivot 43 to be inserted and move along the hole, and the height difference and positional relationship between the pivot mounting hole 23 and the hinge placement slot 22 are preferably such that the pivot 43 can be inserted into the hinge 42.
[0030] The shaft placement groove 24 is a through groove communicating with the inside of the shaft mounting hole 23. The groove opening is perpendicular to the opening direction of the shaft mounting hole 23 and points vertically upward. The cross-sectional shape of the groove body is consistent with the shape of the shaft 43, but the cross-sectional dimension of the groove body is larger than that of the shaft 43. This ensures that when the shaft 43 is loaded, it will fall into the shaft mounting hole 23 when placed through the groove opening of the shaft placement groove 24. In addition, a guide ramp is provided at the groove opening of the shaft placement groove 24 to guide the shaft 43 during placement.
[0031] The clearance groove 25 is located on the other side of the hinge placement groove 22 away from the pivot mounting hole 23 and communicates with the hinge placement groove 22. The direction of the groove body is consistent with the opening direction of the pivot mounting hole 23, and the height and position of the groove body are consistent with the height and position of the pivot mounting hole 23. Thus, when the pivot 43 is inserted into the hinge 42, the exposed end of the pivot 43 can extend into the clearance groove 25, and at the same time, it is convenient for air to be discharged after the pivot 43 is inserted into the hinge 42.
[0032] The observation slot 26 is a rectangular slot located on both sides of the hinge placement slot 22 and communicating with it. This allows the operator to check the alignment of the hinge assembly after the hinge 42 is placed into the hinge placement slot 22, preventing interference when the pivot 43 is inserted. The extension direction of the observation slot 26 is perpendicular to the insertion direction of the pivot 42. The width of the observation slot 26 in the insertion direction of the pivot 42 is less than the length of the hinge placement slot 22 in the same direction. This prevents the hinge 42 from detaching from the observation slot 26 after being placed into the hinge placement slot 22, and also avoids obstructing the reinforcing ribs on the side of the hinge 42.
[0033] Both pressing assemblies 30 are disposed on the side of the fixed base 20 away from each other. Each pressing assembly 30 includes a fixed plate 31 fixed on the tooling body 10, two guide posts 32 fixed on the fixed plate 31, a movable plate 33 sleeved on the guide post 32, an ejector pin 34 disposed on the movable plate 33, and a driving device 35 disposed on the side of the movable plate 33 away from the ejector pin 34.
[0034] The fixing plate 31 is positioned close to the base 21 and is located on the side of the pivot mounting hole 23 away from the hinge placement groove 22. The fixing plate 31 is provided with a through hole that communicates with and corresponds to the pivot mounting hole 23, so that the ejector pin 34 can pass through.
[0035] The guide post 32 is vertically disposed on the side of the fixed plate 31 away from the seat 21, and its extension direction is consistent with the opening direction of the rotating shaft mounting hole 23, so as to provide guidance and direction for the movement of the movable plate 33.
[0036] The movable plate 33 is disposed on the side of the fixed plate 31 away from the seat 21 and is sleeved on the guide post 32 so as to move away from and closer to the fixed plate 31 under the driving action of the driving device 35.
[0037] The ejector pin 34 is fixed on the movable plate 33 and passes through the through hole on the fixed plate 31. It is inserted into the rotating shaft mounting hole 23 and inserted into the hinge 42 by pressing against the rotating shaft 43.
[0038] The driving device 35 can be a drive motor or a hydraulic device, etc. The main body of the device is fixed to the tooling body 10, and the driving end is connected to the movable plate 33. The driving direction is consistent with the opening direction of the rotating shaft mounting hole 23, so as to provide driving force for the movement of the movable plate 33 and the ejector pin 34. The driving distance of the driving device 35 can be set according to the installation distance of the rotating shaft 43 in the rotating shaft mounting hole 23. This should be an existing technology widely used in the field of automated production and should be well known to those skilled in the art, so it will not be described in detail here.
[0039] Compared with the prior art, the rotating shaft mounting fixture for assembling photomask boxes provided by this utility model, by setting the fixing base 20, allows the two hinges 42 to respectively engage in the hinge placement slot 22 when the photomask box 40 is placed on it. The alignment of the hinge shaft holes can be checked through the observation slot 26, avoiding obstruction to the insertion of the rotating shaft 43 into the hinge 42. By setting the driving device 35 to push the ejector pin 34, the rotating shaft 43, placed from the rotating shaft placement slot 24, is inserted into the shaft hole of the hinge 42 along the rotating shaft mounting hole 23, achieving rapid loading and accurate positioning. This significantly reduces the time for installing the rotating shaft 43 on the photomask box 40, effectively improving production efficiency. Furthermore, the driving device 35 controls the insertion distance of the rotating shaft 43, ensuring that the rotating shaft is properly inserted. By setting two fixing bases 20 and pressing components 30, the rotating shaft 43 can be inserted into two hinges 42 on one photomask box 40 simultaneously, resulting in even higher production efficiency.
[0040] The above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Any modifications, equivalent substitutions or improvements within the spirit of the present utility model are covered within the scope of the claims of the present utility model.
Claims
1. A rotating shaft mounting fixture for assembling photomask boxes, characterized in that: The rotating shaft mounting fixture for assembling a photomask box includes a fixture body, two fixing seats disposed on the fixture body, and two pressing components respectively disposed on one side of the two fixing seats. The photomask box includes a carrier body, two hinges disposed on one side of the carrier body, and a rotating shaft inserted into the hinges. The insertion direction of the rotating shaft into the hinges is consistent with the arrangement direction of the two hinges. Each fixing seat includes a base fixed to the fixture body, a hinge placement slot disposed on the base, a rotating shaft mounting hole disposed on one side of the hinge placement slot, and a rotating shaft placement slot communicating with the rotating shaft mounting hole. The spacing between the hinge placement slots on the two fixing seats is consistent with the spacing between the two hinges. The rotating shaft mounting hole is a circular through hole disposed on the side of the hinge placement slot away from the other fixing seat and communicating with the interior of the hinge placement slot. The extension direction of the rotating shaft mounting hole is consistent with the arrangement direction of the two hinge placement slots. The rotating shaft placement slot is a... A through groove is connected inside the shaft mounting hole. The groove opening is perpendicular to the opening direction of the shaft mounting hole and vertically upward. The cross-sectional shape of the groove body is consistent with the shape of the shaft, and the cross-sectional dimension of the groove body is larger than the dimension of the shaft. Both pressing components are located on the side of the fixed seat away from each other. Each pressing component includes a fixed plate fixed to the tooling body, two guide posts fixed to the fixed plate, a movable plate sleeved on the guide posts, a ejector pin on the movable plate, and a driving device located on the side of the movable plate away from the ejector pin. The fixed plate is located on the side of the shaft mounting hole away from the hinge placement groove, and the fixed plate is provided with a through hole that communicates with and corresponds to the shaft mounting hole. The guide post is vertically arranged on the side of the fixed plate away from the seat body, and its extension direction is consistent with the opening direction of the shaft mounting hole. The movable plate is located on the side of the fixed plate away from the seat body. The ejector pin is fixed on the movable plate and passes through the through hole on the fixed plate and is inserted into the shaft mounting hole.
2. The rotating shaft mounting fixture for assembling a photomask box as described in claim 1, characterized in that: Both of the fixing seats are fixed to the tooling body by fasteners, and the two fixing seats are spaced apart from each other.
3. The rotating shaft mounting fixture for assembling a photomask box as described in claim 1, characterized in that: The hinge placement slot is provided on the base body. The size, shape and extension direction of the slot body are consistent with the hinge. A guide slope is provided at the opening of the hinge placement slot.
4. The rotating shaft mounting fixture for assembling a photomask box as described in claim 1, characterized in that: The diameter of the mounting hole for the rotating shaft is the same as that of the rotating shaft, and the height difference and positional relationship between the mounting hole for the rotating shaft and the hinge placement slot are consistent.
5. The rotating shaft mounting fixture for assembling a photomask box as described in claim 1, characterized in that: A guide ramp is also provided at the opening of the shaft placement groove.
6. The rotating shaft mounting fixture for assembling a photomask box as described in claim 1, characterized in that: The mounting base is also provided with an clearance groove on the other side of the hinge placement slot, and an observation slot on both sides of the hinge placement slot.
7. The rotating shaft mounting fixture for assembling a photomask box as described in claim 6, characterized in that: The clearance groove is located on the other side of the hinge placement groove away from the pivot mounting hole and communicates with the hinge placement groove. The groove body direction is consistent with the opening direction of the pivot mounting hole, and the groove body height and position are consistent with the height and position of the pivot mounting hole.
8. The rotating shaft mounting fixture for assembling a photomask box as described in claim 6, characterized in that: The observation slot is a rectangular slot located on both sides of the hinge placement slot and communicating with the hinge placement slot. The extension direction of the observation slot is perpendicular to the insertion direction of the rotating shaft. The width of the observation slot in the insertion direction of the rotating shaft is less than the length of the hinge placement slot in the insertion direction of the rotating shaft.
9. The rotating shaft mounting fixture for assembling a photomask box as described in claim 1, characterized in that: The driving device is a drive motor or a hydraulic device. The main body of the device is fixed to the tooling body, the driving end is connected to the movable plate, and the driving direction is consistent with the opening direction of the rotating shaft mounting hole.
10. The rotating shaft mounting fixture for assembling a photomask box as described in claim 9, characterized in that: The driving distance of the drive device is set according to the installation distance of the rotating shaft in the rotating shaft mounting hole.