Thermal vacuum apparatus temperature control system
By combining the refrigeration unit, heating unit, and control terminal, the problems of high cost, poor accuracy, and low safety in temperature control of thermal vacuum equipment are solved, achieving fast and accurate temperature control, reducing operating costs, and improving safety and equipment integration.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LANZHOU YUXING TECHNOLOGY CO LTD
- Filing Date
- 2025-09-26
- Publication Date
- 2026-07-14
AI Technical Summary
Existing thermal vacuum equipment temperature control systems are costly, inaccurate, complex, unsafe, and space-consuming, posing safety hazards and causing waste when using liquid nitrogen.
The temperature control system consists of a refrigeration unit, a heating unit, a heat exchange unit, and a control terminal. It utilizes a compressor, a water-cooled plate heat exchanger, a heat exchanger, and a medium heater, combined with a two-stage water-cooled plate heat exchanger and a medium circulation pipeline, to achieve rapid and accurate temperature regulation through circulating liquid temperature monitoring and control terminal.
It enables rapid and accurate temperature control of thermal vacuum equipment, reduces operating costs, improves safety and equipment integration, avoids waste and safety hazards of liquid nitrogen, and occupies little space.
Smart Images

Figure CN224501213U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of temperature control, and in particular to a temperature control system for thermal vacuum equipment. Background Technology
[0002] In existing technologies, liquid nitrogen and heating cages are generally used to lower and raise the internal temperature of thermal vacuum equipment. Using liquid nitrogen for cooling results in significant temperature control deviations, leading to substantial liquid nitrogen consumption and increased user costs. Furthermore, storing liquid nitrogen in tanks or Dewar flasks presents a series of safety issues. Using heating cages to raise the temperature of thermal vacuum equipment is problematic. Firstly, installing the heating cage inside the thermal vacuum tank reduces the usable internal space. Secondly, controlling the temperature of the heating cage increases the complexity of the control system. Summary of the Invention
[0003] This invention addresses the technical problems of existing thermal vacuum equipment temperature control systems, such as high operating costs, poor temperature control accuracy, low temperature control efficiency, complex control systems, poor safety, and large space occupation. It provides a thermal vacuum equipment temperature control system that is low in operating costs, high in safety, small in space occupation, simple to operate, and capable of quickly and accurately controlling the space temperature.
[0004] Therefore, the technical solution of this utility model is a temperature control system for a thermal vacuum equipment, including a refrigeration unit, a heating unit, a heat exchange unit, a medium circulation pipeline, and a control terminal. The refrigeration unit adopts a compressor and a water-cooled plate heat exchanger, the heating unit adopts a medium heater, and the heat exchange unit adopts a heat exchanger. The medium circulation pipeline connected to the compressor, the water-cooled plate heat exchanger, the heat exchanger, and the medium heater is equipped with a circulating liquid temperature monitoring device, and the circulating liquid temperature monitoring device is electrically connected to the control terminal.
[0005] The compressor includes a primary refrigeration compressor and a secondary refrigeration compressor; the water-cooled plate heat exchanger includes a primary water-cooled plate heat exchanger and a secondary water-cooled plate heat exchanger; the heat exchanger includes a primary heat exchanger and a secondary heat exchanger. The primary refrigeration compressor, the secondary refrigeration compressor, the primary water-cooled plate heat exchanger, the secondary water-cooled plate heat exchanger, the primary heat exchanger, and the secondary heat exchanger are connected through a medium circulation pipeline. The primary refrigeration compressor and the primary water-cooled plate heat exchanger are paired together, and the secondary refrigeration compressor and the secondary water-cooled plate heat exchanger are paired together to achieve rapid cooling of the circulating medium. The primary heat exchanger and the secondary heat exchanger are used in series for precise temperature control of the circulating medium.
[0006] The medium circulation pipeline is equipped with a vacuum pump, which is used to evacuate the medium circulation pipeline. The primary and secondary water-cooled heat exchangers are respectively connected to a cooling water inlet pipeline and a cooling water outlet pipeline. The cooling water inlet pipeline is equipped with a flow control valve, which is electrically connected to the control terminal.
[0007] Preferably, the medium circulation pipeline is provided with a circulating liquid supply pipeline, and the circulating liquid supply pipeline is connected to a storage tank.
[0008] Preferably, the output end of the primary refrigeration compressor is connected to the input end of the primary water-cooled plate heat exchanger; the output end of the primary water-cooled plate heat exchanger is connected to the first input end of the primary heat exchanger; the first output end of the primary heat exchanger is connected to the first input end of the secondary heat exchanger; the first output end of the secondary heat exchanger is connected to the input end of the medium heater; the output end of the medium heater is connected to the input end of the internal circulation pipeline of the thermal vacuum equipment; the output end of the internal circulation pipeline is connected to the input end of the medium circulation pump; the output end of the medium circulation pump is connected to the second input end of the secondary heat exchanger; the second output end of the secondary heat exchanger is connected to the input end of the secondary refrigeration compressor; the output end of the secondary refrigeration compressor is connected to the input end of the secondary water-cooled plate heat exchanger; the output end of the secondary water-cooled plate heat exchanger is connected to the second input end of the primary heat exchanger; and the second output end of the primary heat exchanger is connected to the input end of the primary refrigeration compressor. All of the above connections are made through the medium circulation pipeline.
[0009] Preferably, the refrigerant inlet pipeline, heat medium inlet pipeline, refrigerant outlet pipeline, and heat medium outlet pipeline of the primary heat exchanger and the secondary heat exchanger are all media circulation pipelines.
[0010] Preferably, the cooling water inlet pipeline is equipped with a cooling water flow monitoring device and a cooling water temperature monitoring device, both of which are electrically connected to the control terminal.
[0011] Preferably, the primary refrigeration compressor and the secondary refrigeration compressor are connected to bypass valves via pipelines. The bypass valves include a hot bypass valve and a cold bypass valve, both of which are electrically connected to the control terminal. A medium circulation pump is provided on the medium circulation pipeline, which is located on the medium circulation pipeline connected to the outlet of the thermal vacuum equipment. The medium circulation pump is electrically connected to the control terminal.
[0012] Preferably, the outer side of the medium circulation pipeline is provided with an insulation layer made of insulation material.
[0013] Preferably, the medium circulation pipe is composed of welded 304 stainless steel pipe.
[0014] The beneficial effects of this utility model are:
[0015] (1) In this application, a vacuum pump is first used to evacuate the circulation pipeline, so that the circulation medium is added to the medium circulation pipeline by vacuuming. This can ensure that the circulation medium has no air resistance in the circulation pipeline, and also ensure that the circulation medium can fill all the internal pipelines of the vacuum equipment, so that the temperature control of the thermal vacuum equipment is faster and more uniform.
[0016] (2) This application is equipped with a heat exchanger that relies on the internal circulating medium to exchange heat on its own, making full use of the temperature difference between the medium in the inlet and outlet pipes of the thermal vacuum equipment to adjust the temperature in the circulating pipe, which is energy-saving and efficient; in addition, it is also equipped with a water-cooled plate heat exchanger with external cooling water, which uses external cooling water to quickly adjust the temperature of the circulating pipe, thereby improving the temperature control efficiency of the medium in the circulating pipe.
[0017] (3) By wrapping the circulating pipeline with insulation material, there is no frost or heat leakage during the circulation process, which reduces the influence of the external ambient temperature on the temperature of the circulating medium and improves the heat exchange efficiency and the accuracy of temperature adjustment.
[0018] (4) The system of this application is equipped with two-stage water-cooled plate heat exchangers and two-stage medium heat exchangers. The two medium heat exchangers are connected in series. One water-cooled plate heat exchanger is used in conjunction with a refrigeration compressor, which effectively ensures the temperature control efficiency of the thermal vacuum equipment. Combined with the use of the medium heater, the temperature of the circulating medium entering the thermal vacuum equipment can be adjusted more accurately, further ensuring the rapid and accurate adjustment of the temperature in the thermal vacuum equipment.
[0019] (5) The refrigeration temperature of the refrigeration compressor is adjusted by setting a cold bypass valve and a hot bypass valve. This application has a control terminal. The control terminal can monitor the temperature and flow of each pipeline through remote control, and remotely adjust the cold bypass valve, hot bypass valve, flow control valve, etc., to realize remote control of the refrigeration temperature of dimethyl silicone oil in the circulation pipeline.
[0020] (6) The temperature control system for thermal vacuum equipment provided in this application enables thermal vacuum equipment to alternate between high and low temperature environments, avoiding safety issues caused by using liquid nitrogen for high and low temperature tests and economic issues caused by excessive consumption of liquid nitrogen. At the same time, the temperature control unit integrates heating function and realizes that cold and hot cycles share a common circulation pipeline. Using this unit, cooling and heating functions can be completed simultaneously. Users do not need other auxiliary equipment when using it. It has the advantages of good economy, high equipment integration and small footprint. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the connection relationship in an embodiment of the present utility model.
[0022] Explanation of symbols in the diagram:
[0023] 1. Primary refrigeration compressor; 2. Primary water-cooled plate heat exchanger; 3. Primary cooling water inlet pipeline; 4. Primary cooling water outlet pipeline; 5. Primary heat bypass valve; 6. Primary cold bypass valve; 7. Primary refrigeration valve; 8. Primary heat exchanger; 9. Secondary refrigeration compressor; 10. Secondary water-cooled plate heat exchanger; 11. Secondary cooling water inlet pipeline; 12. Secondary cooling water outlet pipeline; 13. Secondary heat bypass valve; 14. Secondary cold bypass valve; 15. Secondary refrigeration valve; 16. Secondary heat exchanger; 17. Medium circulation pump; 18. Thermal vacuum equipment; 19. Medium heater. Detailed Implementation
[0024] The present invention will be further described below with reference to the embodiments.
[0025] like Figure 1 As shown, a temperature control system for a thermal vacuum device includes a refrigeration unit, a heating unit, a heat exchange unit, a medium circulation pipeline, and a control terminal. The refrigeration unit includes a primary refrigeration compressor 1, a secondary refrigeration compressor 9, a primary water-cooled plate heat exchanger 2, and a secondary water-cooled plate heat exchanger 10. The heat exchange unit includes a primary heat exchanger 8 and a secondary heat exchanger 16. The refrigerant inlet pipeline, heat medium inlet pipeline, refrigerant outlet pipeline, and heat medium outlet pipeline of the primary heat exchanger 8 and the secondary heat exchanger 16 are all medium circulation pipelines. That is, the heat exchangers exchange heat between the circulating medium before entering the thermal vacuum device 18 and the circulating medium after heat exchange in the thermal vacuum device 18, thereby regulating the temperature of the circulating medium in the corresponding pipelines. This regulation method has the advantages of energy saving and environmental protection.
[0026] The primary refrigeration compressor 1, secondary refrigeration compressor 9, primary water-cooled plate heat exchanger 2, secondary water-cooled plate heat exchanger 10, primary heat exchanger 8, and secondary heat exchanger 16 are connected via a medium circulation pipeline. Each of the medium circulation pipelines containing the output ends of the primary refrigeration compressor 1, secondary refrigeration compressor 9, primary water-cooled plate heat exchanger 2, secondary water-cooled plate heat exchanger 10, primary heat exchanger 8, and secondary heat exchanger 16 is equipped with a circulating liquid temperature monitoring device, which is electrically connected to the control terminal. The primary refrigeration compressor 1 and secondary refrigeration compressor 9 are connected to bypass valves via pipelines. These bypass valves include a primary hot bypass valve 5, a primary cold bypass valve 6, a secondary hot bypass valve 13, and a secondary cold bypass valve 14, each of which is electrically connected to the control terminal. The primary water-cooled plate heat exchanger 2 and the secondary water-cooled plate heat exchanger 10 are respectively connected to the cooling water inlet pipeline 3 and the cooling water outlet pipeline 4. The cooling water inlet pipeline is equipped with a flow control valve, a cooling water flow monitoring device, and a cooling water temperature monitoring device, all of which are electrically connected to the control terminal. The control terminal adjusts the refrigeration temperature of the primary refrigeration compressor 1 and the secondary refrigeration compressor 9 through a bypass valve, and adjusts the cooling water flow rate by adjusting the opening of the flow control valve on the cooling water inlet pipeline, thereby adjusting the temperature of the dimethyl silicone oil passing through the primary water-cooled plate heat exchanger 2 and the secondary water-cooled plate heat exchanger 10. Appropriate valves can also be installed on the medium circulation pipeline to control the operating status of each pipeline as needed. For example, the primary refrigeration valve 7 in the figure can be used to control the flow of the circulating medium between the primary water-cooled plate heat exchanger 2 and the primary heat exchanger 8; the secondary refrigeration valve 15 can be used to control the flow of the circulating medium between the primary heat exchanger 8 and the secondary heat exchanger 16.
[0027] The heating unit uses a medium heater 19 to heat the medium in the medium circulation pipeline. The medium heater 19 is electrically connected to the control terminal, which can remotely control the medium heater 19 to switch on and off and set the heating temperature.
[0028] The medium circulation pipeline is connected to a vacuum pump pipeline and a circulating fluid supply pipeline. The vacuum pump pipeline is connected to a vacuum pump, and the circulating fluid supply pipeline is connected to a storage tank. The storage tank stores the circulating medium, which in this embodiment is dimethyl silicone oil. The storage tank is equipped with an oil level monitoring device, and the circulating fluid supply pipeline is equipped with a valve. The valve can be opened and closed as needed. Both the oil level monitoring device and the valve can be connected to a control terminal. The control terminal remotely controls the opening and closing angle of the valve based on the information fed back by the oil level monitoring device, facilitating timely replenishment of the circulating medium in the circulation pipeline. A medium circulation pump 17 is also installed on the medium circulation pipeline, and the medium circulation pump 17 is electrically connected to the control terminal.
[0029] The specific connection method of this system is as follows: the output end of the first-stage refrigeration compressor 1 is connected to the input end of the first-stage water-cooled plate heat exchanger 2; the output end of the first-stage water-cooled plate heat exchanger 2 is connected to the first input end of the first-stage heat exchanger 8; the first output end of the first-stage heat exchanger 8 is connected to the first input end of the second-stage heat exchanger 16; the first output end of the second-stage heat exchanger 16 is connected to the input end of the medium heater 19; the output end of the medium heater 19 is connected to the input end of the internal circulation pipeline of the thermal vacuum equipment 18; the output end of the internal circulation pipeline is connected to the input end of the medium circulation pump 17; the output end of the medium circulation pump 17 is connected to the second input end of the second-stage heat exchanger 16; the second output end of the second-stage heat exchanger 16 is connected to the input end of the second-stage refrigeration compressor 9; the output end of the second-stage refrigeration compressor 9 is connected to the input end of the second-stage water-cooled plate heat exchanger 10; the output end of the second-stage water-cooled plate heat exchanger 10 is connected to the second input end of the first-stage heat exchanger 8; and the second output end of the first-stage heat exchanger 8 is connected to the input end of the first-stage refrigeration compressor 1. All of the above connections are made through the medium circulation pipeline.
[0030] The medium circulation pipeline is constructed from welded 304 stainless steel pipes, completely sealed and leak-free, and externally wrapped with insulation material to ensure that the dimethyl silicone oil circulation process does not frost or leak heat. This reduces the influence of ambient temperature on the circulating medium temperature, improving heat exchange efficiency and temperature control accuracy. The dimethyl silicone oil is added to the circulation pipeline using a vacuum method, eliminating air resistance during circulation and ensuring that the dimethyl silicone oil fills all internal pipes of the thermal vacuum equipment 18, improving the temperature control accuracy and temperature uniformity of the terminal thermal vacuum equipment.
[0031] This system is equipped with two-stage water-cooled plate heat exchangers and two-stage medium heat exchangers. The two medium heat exchangers are connected in series. One water-cooled plate heat exchanger is used in conjunction with a refrigeration compressor, which effectively ensures the temperature control efficiency of the thermal vacuum equipment. Combined with the use of a medium heater, the temperature of the circulating medium entering the thermal vacuum equipment 18 can be adjusted more precisely, further ensuring the rapid and accurate temperature adjustment in the thermal vacuum equipment 18.
[0032] The method of using the temperature control system for the thermal vacuum equipment in this application is as follows:
[0033] S1: First, use a vacuum pump to evacuate the medium circulation pipeline, so that the dimethyl silicone oil in the storage tank can be added to the medium circulation pipeline through the circulation liquid supply pipeline by vacuuming. This way, the dimethyl silicone oil can be free of air resistance in the circulation pipeline, and the dimethyl silicone oil can fill all the pipelines of the thermal vacuum equipment 18, so that the temperature control of the thermal vacuum equipment 18 is more uniform.
[0034] S2: Dimethyl silicone oil is cooled by passing through a first-stage refrigeration compressor 1 and a first-stage water-cooled plate heat exchanger 2, then through a first-stage heat exchanger 8 and a second-stage heat exchanger 16 for temperature regulation, and then through a medium heater 19 before entering a thermal vacuum device 18.
[0035] S3: Dimethyl silicone oil fills the internal pipeline of the thermal vacuum equipment 18, and after cooling or heating the internal environment of the thermal vacuum equipment 18, it is output to the secondary heat exchanger 16 with the assistance of the medium circulation pump 17, and then passes through the secondary refrigeration compressor 9, the secondary water-cooled plate heat exchanger 10, and the primary heat exchanger 8 in sequence, and finally reaches the primary refrigeration compressor 1.
[0036] S4: Return to step S2 and start the next cycle to achieve continuous and precise temperature control of the thermal vacuum equipment 18.
[0037] The circulating fluid temperature monitoring device collects the dimethyl silicone oil temperature at the output terminals of the first-stage refrigeration compressor 1, the first-stage water-cooled plate heat exchanger 2, the second-stage refrigeration compressor 9, the second-stage water-cooled plate heat exchanger 10, the first-stage heat exchanger 8, and the second-stage heat exchanger 16, and transmits this data to the control terminal. The thermal vacuum equipment 18 also has a temperature monitoring device electrically connected to the control terminal. The control terminal compares the received real-time temperatures of the circulating fluid and the thermal vacuum equipment 18 with the required temperature of the thermal vacuum equipment, and adjusts the refrigeration unit, heating unit, and heat exchange unit accordingly. The required temperature of the thermal vacuum equipment 18 is preset in the control terminal and can be adjusted as needed.
[0038] Throughout the entire process of steps S1 to S4, the control terminal monitors the temperature of the dimethyl silicone oil in the circulation pipeline and the ambient temperature in the thermal vacuum equipment 18, and adjusts the heat exchange in a timely manner by adjusting the corresponding valves, so as to achieve continuous, stable and precise temperature control of the thermal vacuum equipment 18.
[0039] Dimethyl silicone oil is used as the internal circulating medium in the circulation pipeline. Due to its excellent high-temperature and low-temperature resistance, dimethyl silicone oil is suitable for use in high- and low-temperature circulation pipelines, ensuring that it will not solidify or decompose within the pipeline. It also exhibits good fluidity. By adjusting the temperature of the dimethyl silicone oil in the circulation pipeline, the temperature of the thermal vacuum equipment 18 can be controlled. This method is simple and the temperature control is reliable, enabling precise temperature control of the thermal vacuum equipment. In addition to the heat exchanger that relies on the internal circulating medium for self-heating, this application also includes a water-cooled plate heat exchanger that introduces external cooling water for heat exchange. The use of external cooling water allows for rapid temperature adjustment of the circulation pipeline, improving the efficiency of temperature control of the medium in the circulation pipeline. The control terminal in this application can remotely monitor the temperature and flow rate of each pipeline and remotely adjust the cold bypass valve, hot bypass valve, and flow control valve to achieve remote control of the cooling temperature of the dimethyl silicone oil in the circulation pipeline.
[0040] The temperature control method and system for thermal vacuum equipment provided in this application enable thermal vacuum equipment to alternate between high and low temperature environments, avoiding the safety issues and economic problems caused by excessive liquid nitrogen consumption in high and low temperature tests. At the same time, the temperature control unit integrates heating function, realizing the sharing of a single circulation pipeline for cold and hot cycles. Using this unit, cooling and heating functions can be completed simultaneously. Users do not need other auxiliary equipment, which has the advantages of good economy, high equipment integration, and small footprint.
[0041] However, the above description is only a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.
Claims
1. A temperature control system for a thermal vacuum device, characterized in that, It includes a refrigeration unit, a heating unit, a heat exchange unit, a medium circulation pipeline, and a control terminal. The refrigeration unit uses a compressor and a water-cooled plate heat exchanger, the heating unit uses a medium heater, and the heat exchange unit uses a heat exchanger. The medium circulation pipeline connected to the compressor, water-cooled plate heat exchanger, heat exchanger, and medium heater is equipped with a circulating liquid temperature monitoring device, and the circulating liquid temperature monitoring device is electrically connected to the control terminal. The compressor includes a primary refrigeration compressor and a secondary refrigeration compressor; the water-cooled plate heat exchanger includes a primary water-cooled plate heat exchanger and a secondary water-cooled plate heat exchanger; the heat exchanger includes a primary heat exchanger and a secondary heat exchanger. The primary refrigeration compressor, the secondary refrigeration compressor, the primary water-cooled plate heat exchanger, the secondary water-cooled plate heat exchanger, the primary heat exchanger, and the secondary heat exchanger are connected through a medium circulation pipeline. The primary refrigeration compressor and the primary water-cooled plate heat exchanger are paired together, and the secondary refrigeration compressor and the secondary water-cooled plate heat exchanger are paired together to achieve rapid cooling of the circulating medium. The primary heat exchanger and the secondary heat exchanger are used in series for precise temperature control of the circulating medium. The medium circulation pipeline is equipped with a vacuum pump and a medium circulation pump. The vacuum pump is connected to the vacuum pump and is used to evacuate the medium circulation pipeline. The primary water-cooled plate heat exchanger and the secondary water-cooled plate heat exchanger are respectively connected to the cooling water inlet pipeline and the cooling water outlet pipeline. The cooling water inlet pipeline is equipped with a flow control valve, which is electrically connected to the control terminal.
2. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The medium circulation pipeline is equipped with a circulating liquid supply pipeline, and the circulating liquid supply pipeline is connected to a storage tank.
3. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The output end of the primary refrigeration compressor is connected to the input end of the primary water-cooled plate heat exchanger. The output end of the primary water-cooled plate heat exchanger is connected to the first input end of the primary heat exchanger. The first output end of the primary heat exchanger is connected to the first input end of the secondary heat exchanger. The first output end of the secondary heat exchanger is connected to the input end of the medium heater. The output end of the medium heater is connected to the input end of the internal circulation pipeline of the thermal vacuum equipment. The output end of the internal circulation pipeline is connected to the input end of the medium circulation pump. The output end of the medium circulation pump is connected to the second input end of the secondary heat exchanger. The second output end of the secondary heat exchanger is connected to the input end of the secondary refrigeration compressor. The output end of the secondary refrigeration compressor is connected to the input end of the secondary water-cooled plate heat exchanger. The output end of the secondary water-cooled plate heat exchanger is connected to the second input end of the primary heat exchanger. The second output end of the primary heat exchanger is connected to the input end of the primary refrigeration compressor. All of the above connections are made through the medium circulation pipeline.
4. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The refrigerant inlet pipeline, heat medium inlet pipeline, refrigerant outlet pipeline, and heat medium outlet pipeline of the primary heat exchanger and the secondary heat exchanger are all media circulation pipelines.
5. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The cooling water inlet pipeline is equipped with a cooling water flow monitoring device and a cooling water temperature monitoring device, both of which are electrically connected to the control terminal.
6. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The primary and secondary refrigeration compressors are connected to bypass valves via pipelines. The bypass valves include a hot bypass valve and a cold bypass valve, both of which are electrically connected to the control terminal. A medium circulation pump is installed on the medium circulation pipeline, which is located on the medium circulation pipeline connected to the outlet of the thermal vacuum equipment. The medium circulation pump is electrically connected to the control terminal.
7. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The outer side of the medium circulation pipeline is provided with an insulation layer made of insulation material.
8. The temperature control system for thermal vacuum equipment according to claim 1, characterized in that, The medium circulation pipe is composed of welded 304 stainless steel pipes.