A switching circuit for controlling two cathodes with a single power supply

Abstract

The utility model belongs to magnetron sputtering coating technical field, propose a kind of switching circuit of two cathodes of single power supply control. Including power supply A, AC contactor A, AC contactor B, A kind of material target material and B material target material;The power supply A, AC contactor A, A kind of material target material are sequentially connected in series;The power supply A, AC contactor B, B kind of material target are sequentially connected in series;The interlock connection between AC contactor A,AC contactor B. The utility model under the condition of different target material mutual alternation work, utilize switching mechanism to control two target materials with one power supply, so it can greatly save equipment cost, also can satisfy coating use process requirement.

Description

Technical Field

[0001] This invention belongs to the field of magnetron sputtering coating technology, specifically relating to a switching circuit that controls two cathodes with a single power supply. Background Technology

[0002] In magnetron sputtering coating, the power supply is connected to the cathode target to achieve sputtering coating. Typically, one power supply is needed for each pair of targets. However, in actual production, multiple cathode targets need to be installed outside the same coating process chamber, requiring multiple power supplies to be installed simultaneously to supply power to each cathode target.

[0003] In actual coating processes, depending on the different requirements of the coating process, different material targets may be installed simultaneously in the same coating process chamber. Moreover, during the coating process, only one type of target is activated, while the other targets remain stationary. In other words, the targets of different materials do not work simultaneously but alternately. In this case, if each target is equipped with a separate power supply according to the usual configuration, the high cost of power supplies would significantly increase the equipment cost. Summary of the Invention

[0004] To address the aforementioned issues, this invention proposes a switching circuit that controls two cathodes with a single power supply. This circuit enables the switching mechanism to control two cathodes with a single power supply when different target materials are working alternately. This significantly reduces equipment costs while still meeting the requirements of the coating process.

[0005] To achieve its objective, the technical solution adopted by this invention is as follows: a switching circuit for controlling two cathodes with a single power supply is designed, including power supply A, AC contactor A, AC contactor B, a target material of type A, and a target material of type B; power supply A, AC contactor A, and the target material of type A are connected in series in sequence; power supply A, AC contactor B, and the target material of type B are connected in series in sequence; AC contactor A and AC contactor B are interlocked.

[0006] Furthermore, the interlocking connection refers to connecting the normally closed contact of AC contactor A in series with the coil circuit of AC contactor B, and simultaneously connecting the normally closed contact of AC contactor B in series with the coil circuit of AC contactor A.

[0007] This novel design, based on a thorough analysis of the operating conditions when different target materials are used alternately, aims to ensure both stable and reliable power switching and interlocking during the switching process. This prevents two target materials from operating simultaneously. Therefore, two AC contactors are used for power output switching, with auxiliary contacts providing interlocking control. The interlocking connection between AC contactors A and B prevents simultaneous closure of both contactors, which could lead to a short circuit between power phases. This design connects the normally closed contact of one contactor in series with the coil circuit of the other, ensuring that the two contactors do not engage simultaneously. When one contactor's contact is closed, the coil of the other contactor is de-energized, preventing simultaneous engagement. These measures ensure the safe and stable operation of AC contactors A and B under interlocked connection, avoiding circuit failures and equipment damage. In summary, this novel design utilizes a switching mechanism to control two target materials with a single power supply when different target materials are used alternately. This significantly reduces equipment costs while meeting the requirements of the coating process. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the circuit principle in the prior art;

[0009] Figure 2 This is a schematic diagram of the circuit principle of this novel invention. Detailed Implementation

[0010] See Figure 1 , 2 A switching circuit controlling two cathodes with a single power supply includes a power supply A, AC contactor A, AC contactor B, a target material of type A, and a target material of type B. The power supply A, AC contactor A, and the target material of type A are connected in series sequentially. The power supply A, AC contactor B, and the target material of type B are also connected in series sequentially. AC contactors A and B are interlocked. AC contactors A and B constitute both the switching mechanism and the interlocking mechanism. Thus, when the contacts of one contactor are closed, the coil of the other contactor will not be energized, preventing simultaneous engagement. Through these measures, the safe and stable operation of AC contactors A and B under interlocked connection can be ensured, avoiding circuit failures and equipment damage.

[0011] Furthermore, the interlocking connection refers to connecting the normally closed contact of AC contactor A in series with the coil circuit of AC contactor B, and simultaneously connecting the normally closed contact of AC contactor B in series with the coil circuit of AC contactor A. The interlocking connection between AC contactors A and B is to prevent the two contactors from closing simultaneously, which could lead to a short circuit between the power supply phases.

Claims

1. A switching circuit for controlling two cathodes with a single power supply, characterized in that: It includes a power supply A, an AC contactor A, an AC contactor B, a target material of type A, and a target material of type B; the power supply A, AC contactor A, and the target material of type A are connected in series in sequence; the power supply A, AC contactor B, and the target material of type B are connected in series in sequence; the AC contactor A and AC contactor B are interlocked.

2. The switching circuit for controlling two cathodes with a single power supply as described in claim 1, characterized in that: The interlocking connection refers to connecting the normally closed contact of AC contactor A in series with the coil circuit of AC contactor B, and simultaneously connecting the normally closed contact of AC contactor B in series with the coil circuit of AC contactor A.

Images