X-ray tube

Abstract

The utility model discloses a kind of X-ray tubes, belong to electron emission technical field.X-ray tube includes tube shell component, including anode flange piece, cathode flange piece and the ceramic shell extending along linear direction;Anode component includes the substrate with at least two target materials, substrate is set on anode flange piece and closes the central hole of anode flange, target material is towards tube shell component inside;Cathode component is set on cathode flange piece and closes the central hole of cathode flange, the emission end of cathode component is towards tube shell component inside, and cathode component is used to emit electron and bombard target material;Deflection component is set on tube shell component, and deflection component is used to change the deflection trajectory of electron in tube shell component.The utility model can change the deflection trajectory of electron in tube shell component, make electron bombard corresponding target material, produce X-ray satisfying requirement, expand the application scenario of X-ray tube.

Description

Technical Field

[0001] This utility model relates to the field of electron emission technology, and in particular to an X-ray tube. Background Technology

[0002] An X-ray tube, as a core device capable of generating X-rays, is basically composed of three key parts: the cathode, the anode, and the vacuum chamber. These parts work together to generate X-rays. During the operation of the X-ray tube, the cathode plays a crucial role as the electron emission source. When an electric current is applied to the cathode, the cathode material is heated. As the temperature rises, electrons inside the cathode gain sufficient energy, breaking free from the atomic nuclei and being emitted from the cathode surface. Simultaneously, a high voltage is applied across the cathode and anode, creating a powerful accelerating electric field between them. Under the influence of this accelerating electric field, the emitted electrons gain extremely high kinetic energy and hurtle towards the anode at high speed. When these high-speed electrons bombard the anode target surface, their kinetic energy is rapidly converted into other forms of energy, a portion of which is radiated as X-rays, thus generating X-rays.

[0003] However, during X-ray tube operation, the electron bombardment of the target is relatively concentrated, resulting in a very high energy density per unit area on the target surface and a highly concentrated heat generation. The target material has limited heat dissipation capacity, making it difficult to quickly dissipate the generated heat, leading to a rapid increase in target surface temperature. Prolonged exposure to high temperatures causes thermal fatigue and melting of the target material, resulting in severe wear and tear, shortening its lifespan, and increasing operating costs. Furthermore, most existing X-ray tubes use a single material as the target. Different elements produce characteristic X-rays with specific energies under electron bombardment, but a single-material target can only produce one type of characteristic X-ray, significantly limiting its application scenarios. In fields requiring comprehensive analysis or detection of multiple characteristic X-rays, X-ray tubes with single-material targets cannot meet practical needs and cannot play a greater role. Utility Model Content

[0004] The purpose of this invention is to provide an X-ray tube that can change the deflection trajectory of electrons within the tube shell assembly, enabling electrons to bombard the corresponding target material and generate X-rays that meet the requirements, thereby expanding the application scenarios of X-ray tubes.

[0005] To achieve the above objectives, the following technical solution is provided:

[0006] X-ray tubes include:

[0007] The housing assembly includes an anode flange, a cathode flange, and a ceramic housing extending in a straight direction. The anode flange and the cathode flange are both made of Kovar alloy. The anode flange is fixedly disposed at a first port of the ceramic housing, and the cathode flange is fixedly disposed at a second port of the ceramic housing.

[0008] An anode assembly includes a substrate having at least two target materials, the substrate being disposed on the anode flange and closing the central hole of the anode flange, the target materials facing the interior of the housing assembly;

[0009] A cathode assembly is disposed on the cathode flange and closes the central hole of the cathode flange. The emitting end of the cathode assembly faces the inside of the tube shell assembly. The cathode assembly is used to emit electrons and bombard the target material.

[0010] A deflection assembly is disposed on a housing assembly and is used to change the deflection trajectory of electrons within the housing assembly.

[0011] As an alternative to the X-ray tube, the substrate is made of diamond or beryllium.

[0012] As an alternative to the X-ray tube, the target material includes tungsten, molybdenum, silver, or copper.

[0013] As an alternative to the X-ray tube, at least two of the target materials have a fan-shaped deposition area on the substrate; or

[0014] The deposition areas of at least two of the target materials on the substrate are distributed in a ring shape.

[0015] As an optional solution for the X-ray tube, the anode assembly further includes a target flange. The inner wall surface of the target flange is provided with a first limiting step portion, and the substrate stops and abuts against the first limiting step portion. The inner wall surface of the anode flange is provided with a second limiting step portion, and the target flange is inserted into the anode flange. The lower end face of the target flange stops and abuts against the second limiting step portion, and the upper end face of the target flange is flush with the upper end face of the anode flange.

[0016] As an optional X-ray tube, the cathode assembly includes a filament base and a cathode filament disposed on the upper end face of the filament base. The inner wall of the cathode flange is provided with a third limiting step. The filament base is inserted into the cathode flange. The upper end face of the filament base is in stop contact with the third limiting step. The lower end face of the filament base is flush with the lower end face of the cathode flange.

[0017] As an optional solution for the X-ray tube, the cathode assembly also includes a cathode cover, which is fastened to the upper end face of the filament base, and the cathode cover has an opening corresponding to the position of the cathode filament.

[0018] As an alternative to the X-ray tube, a focusing tube is provided on the lower end face of the anode flange, and the focusing tube, the tube shell assembly, the anode assembly and the cathode assembly are all located on the same axis.

[0019] As an alternative to the X-ray tube, the deflection assembly includes several pairs of coils, which are circumferentially spaced around the anode flange.

[0020] As an alternative to the X-ray tube, the deflection assembly includes several pairs of electrode plates, which are circumferentially spaced around the anode flange.

[0021] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0022] The X-ray tube provided by this invention uses vacuum brazing to weld anode flanges and cathode flanges to two ends of a ceramic shell. Both the anode and cathode flanges are made of Kovar alloy, which has a similar coefficient of thermal expansion to ceramic, helping to prevent weld cracking. The ceramic shell has excellent pressure resistance and high-temperature resistance, improving the structural strength and performance stability of the X-ray tube. This makes the X-ray tube suitable for high-pressure vacuum-sealed environments, maintaining a stable vacuum seal and preventing damage. This also helps reduce energy loss before electrons emitted from the cathode assembly bombard the target material on the substrate, improving the X-ray tube's electrical energy utilization efficiency.

[0023] The X-ray tube provided by this utility model has the substrate of the anode assembly placed on the anode flange and the center hole of the anode flange sealed. The target material faces the inside of the tube shell assembly. The cathode assembly is placed on the cathode flange and the center hole of the cathode flange is sealed. The emitting end of the cathode assembly faces the inside of the tube shell assembly. The deflection assembly is placed on the tube shell assembly. Electrons are emitted from the cathode assembly to the target material. Under the action of the deflection assembly, the electrons can change their deflection trajectory, so that the electrons can selectively bombard different areas of the target material, avoiding the relatively concentrated bombardment points, which would lead to high temperature concentration.

[0024] The X-ray tube provided by this invention has at least two types of target materials deposited in different regions on the substrate. Under the action of the deflection component, electrons can bombard different types of target materials on the substrate, thereby generating X-rays with different characteristics and expanding the application scenarios of the X-ray tube. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the assembly of the X-ray tube in an embodiment of this utility model;

[0027] Figure 2 This is a schematic diagram of the tube shell assembly in an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the anode assembly in an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the substrate structure in an embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the first distribution of the target material on the substrate in an embodiment of this utility model;

[0031] Figure 6 This is a schematic diagram of the second distribution of the target material on the substrate in an embodiment of this utility model;

[0032] Figure 7 This is a schematic diagram of the third distribution of the target material on the substrate in an embodiment of this utility model;

[0033] Figure 8 This is a schematic diagram of the cathode assembly in an embodiment of the present invention;

[0034] Figure 9 This is a schematic diagram of the deflection component in this embodiment of the present invention, which uses several pairs of coils.

[0035] Figure 10 This is a schematic diagram of the deflection component in this embodiment of the present invention, which uses several pairs of electrode sheets.

[0036] Figure label:

[0037] 1. Tube and shell assembly; 2. Anode assembly; 3. Cathode assembly; 4. Deflection assembly; 5. Focusing tube;

[0038] 11. Anode flange; 111. Second limiting step; 12. Cathode flange; 121. Third limiting step; 13. Ceramic housing;

[0039] 21. Target material; 22. Substrate; 23. Target flange; 231. First limiting step portion;

[0040] 31. Filament base; 32. Cathode filament; 33. Cathode cover; 331. Opening;

[0041] 41. Coil; 42. Electrode plate. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0043] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0044] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0045] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0046] As a core device capable of generating X-rays, the basic structure of an X-ray tube mainly consists of three key parts: a cathode, an anode, and a vacuum shell. These parts work together to complete the task of generating X-rays.

[0047] In the operation of an X-ray tube, the cathode plays a crucial role as the electron emission source. When an electric current is applied to the cathode, the cathode material is heated. As the temperature rises, electrons inside the cathode gain sufficient energy to break free from the atomic nuclei and are emitted from the cathode surface. Simultaneously, a high voltage is applied across both the cathode and anode, creating a powerful accelerating electric field between them. Under the influence of this accelerating electric field, the emitted electrons gain extremely high kinetic energy and hurtle towards the anode at high speed. When these high-speed electrons bombard the anode target surface, their kinetic energy is rapidly converted into other forms of energy, a portion of which is radiated as X-rays, thus generating X-rays.

[0048] The vacuum chamber plays a crucial role in ensuring the smooth operation of the X-ray tube. It provides a suitable vacuum environment for electron movement, allowing electrons to stably follow their predetermined trajectories without colliding with gas molecules. Collisions with gas molecules result in energy loss, reducing the electron's kinetic energy and consequently affecting its energy when bombarding the anode target, ultimately weakening the intensity and reducing the mass of the generated X-rays. Therefore, maintaining a stable vacuum environment is fundamental to ensuring the normal and efficient operation of the X-ray tube.

[0049] However, existing X-ray tube technologies suffer from several significant problems with their vacuum shells. Currently, most vacuum shells are made of glass. While glass offers some transparency and insulation, it exhibits poor heat resistance and mechanical strength. During X-ray tube operation, the cathode heating and electron emission, along with the high-speed impact of electrons on the anode, generate substantial heat, causing the tube's internal temperature to rise. Glass has limited heat resistance, and under prolonged exposure to high temperatures, its physical properties gradually change, leading to softening and deformation. Furthermore, X-ray tubes must withstand pressure during operation. Glass's low mechanical strength makes it difficult to withstand significant pressure. Under the combined effects of prolonged high temperature and pressure, the airtightness of the glass vacuum shell cannot be effectively guaranteed, potentially leading to leaks, disrupting the vacuum environment, and ultimately affecting the normal operation of the X-ray tube.

[0050] Furthermore, manufacturing vacuum shells made of glass presents significant challenges. The production process requires flame-heating and joining glass components to form a complete vacuum shell. However, this flame-heating joining process demands extremely high operator skill; parameters such as heating temperature, time, and joining force must be precisely controlled. Even slight errors can result in incomplete joining, creating gaps and compromising the airtightness of the vacuum shell. Moreover, due to the properties of glass, it is prone to cracking during the heating and joining process, leading to a high scrap rate, which not only increases production costs but also impacts production efficiency.

[0051] Besides the issues with the vacuum casing, existing X-ray tubes also have some shortcomings in terms of the anode target material. When an X-ray tube is operating, the electron bombardment of the target is relatively concentrated, resulting in a very high energy density per unit area on the target surface and a highly concentrated heat generation. However, the target material has limited heat dissipation capacity, making it difficult to quickly dissipate the generated heat, leading to a rapid increase in target surface temperature. Prolonged exposure to high temperatures can cause thermal fatigue and melting of the target material, resulting in severe wear and tear, shortening its lifespan, and increasing operating costs.

[0052] Furthermore, most existing X-ray tubes use a single material as the target. Different elements produce characteristic X-rays with specific energies when bombarded by electrons, but a single-material target can only produce one or a few specific characteristic X-rays, which greatly limits its application scenarios. In some fields that require comprehensive analysis or detection of multiple characteristic X-rays, X-ray tubes with single-material targets cannot meet practical needs and cannot play a greater role.

[0053] In order to alter the deflection trajectory of electrons within the tube assembly, enabling them to bombard the target material and generate X-rays that meet requirements, thereby expanding the application scenarios of X-ray tubes, this embodiment provides an X-ray tube, which is described below in conjunction with... Figures 1 to 10 The specific content of this embodiment will be described in detail.

[0054] like Figures 1 to 8As shown, the X-ray tube provided in this embodiment includes a shell assembly 1, an anode assembly 2, a cathode assembly 3, and a deflection assembly 4. The shell assembly 1 serves as the basic support structure of the entire X-ray tube. The shell assembly 1 includes an anode flange 11, a cathode flange 12, and a ceramic outer shell 13 extending in a straight direction. Both the anode flange 11 and the cathode flange 12 are made of Kovar alloy, which has unique physical properties and a coefficient of thermal expansion very similar to that of ceramics. During manufacturing, an advanced vacuum brazing method is used to fix the anode flange 11 at the first port of the ceramic outer shell 13, and the cathode flange 12 at the second port of the ceramic outer shell 13. Because the coefficient of thermal expansion of Kovar alloy is similar to that of ceramics, stress concentration caused by temperature changes can be effectively avoided during welding, thus greatly helping to prevent cracking at the welded joints and ensuring the structural integrity and stability of the shell assembly 1. The ceramic shell 13 itself possesses superior performance. It not only has excellent pressure resistance, maintaining structural stability under high pressure without deformation or damage, but also outstanding high-temperature resistance, withstanding the high temperatures generated during X-ray tube operation without softening or melting. These excellent properties collectively enhance the overall structural strength and performance stability of the X-ray tube, making it perfectly suited for high-pressure vacuum sealing environments and able to maintain a stable vacuum seal for extended periods, resistant to damage from external factors. A stable vacuum sealing environment is crucial for the performance of the X-ray tube, effectively reducing energy loss of electrons emitted from the cathode assembly 3 before they bombard the target 21 on the substrate 22. In a non-vacuum environment, electrons collide with air molecules, losing some energy; however, in a stable vacuum environment, electrons can bombard the target 21 with higher energy, significantly improving the electrical energy utilization efficiency of the X-ray tube and converting more electrical energy into X-ray radiation. The anode assembly 2 includes a substrate 22 having at least two types of target materials 21. The substrate 22 is disposed on the anode flange 11 and closes the central hole of the anode flange 11. The target materials 21 face the interior of the housing assembly 1. This arrangement allows electrons to bombard the target materials 21 smoothly, thereby exciting X-rays. The cathode assembly 3 is disposed on the cathode flange 12 and closes the central hole of the cathode flange 12. The emitting end of the cathode assembly 3 faces the interior of the housing assembly 1. The cathode assembly 3 is used to emit electrons and bombard the target materials 21. The deflection assembly 4 is disposed on the housing assembly 1 and is used to change the deflection trajectory of electrons within the housing assembly 1.

[0055] The X-ray tube provided by this invention, due to the presence of the deflection component 4, prevents electrons from concentrating on a fixed area of ​​the target material 21 as in traditional X-ray tubes. Electrons can selectively bombard different areas of the target material 21 under the action of the deflection component 4. This change effectively avoids the problem of highly concentrated target surface temperature caused by relatively concentrated electron bombardment. In traditional X-ray tubes, concentrated electron bombardment causes a rapid increase in local temperature on the target surface, while the target material 21 has limited heat dissipation capacity, making it difficult to quickly dissipate heat. Prolonged exposure to high temperatures leads to thermal fatigue and melting of the target material 21, resulting in severe wear and tear, significantly shortening its lifespan and increasing operating costs. In this embodiment, the X-ray tube, by altering the electron bombardment trajectory through the deflection component 4, allows heat to be distributed more evenly on the surface of the target material 21, reducing local temperature, effectively alleviating thermal fatigue and melting problems, extending the lifespan of the target material 21, and reducing operating costs.

[0056] Furthermore, in this embodiment, the X-ray tube has at least two types of target materials 21 deposited in different regions on the substrate 22. Under the action of the deflection component 4, electrons can flexibly bombard different types of target materials 21 on the substrate 22. Different elements produce characteristic X-rays with specific energies under electron bombardment. By selecting different target materials 21 for bombardment, X-rays with different characteristics can be generated. This feature greatly expands the application scenarios of the X-ray tube. In some fields requiring comprehensive analysis or detection of multiple characteristic X-rays, such as the analysis of complex material compositions in materials science and the precise detection of different tissues and organs in medical imaging, traditional X-ray tubes using a single type of target material 21 can only produce one specific type of characteristic X-ray, failing to meet practical needs. However, the X-ray tube in this embodiment can control the electron bombardment of different target materials 21 according to specific needs through the deflection component 4, generating multiple characteristic X-rays, thereby providing more comprehensive and accurate data support for research and applications in these fields and playing a greater role.

[0057] Furthermore, the substrate 22 is made of diamond or beryllium. Diamond has extremely high thermal conductivity, being one of the highest known natural materials. During the operation of the X-ray tube, electron bombardment of the target 21 generates a large amount of heat, which is rapidly transferred to the substrate 22. When the substrate 22 is made of diamond, its high thermal conductivity allows heat to be quickly conducted away from the contact area between the target 21 and the electron bombardment, achieving efficient heat dissipation. This effectively avoids excessive heat accumulation in the target 21, reducing the probability of thermal fatigue and melting caused by high temperatures, thus significantly extending the service life of the target 21. For example, in some X-ray detection equipment that operates continuously for extended periods, using a diamond substrate 22 can ensure stable operation of the X-ray tube for a longer period, reducing the number of equipment downtimes due to target 21 damage, and improving the efficiency and reliability of the equipment. Diamond has extremely high hardness, which allows the substrate 22 to maintain good structural integrity when facing high-energy physical processes such as electron bombardment, making it less prone to wear or deformation. Meanwhile, diamond also possesses excellent chemical stability, being inert to most chemicals and resistant to corrosion. This ensures that substrate 22 operates stably for extended periods in harsh environments, without affecting the performance of the X-ray tube, further improving its reliability and lifespan. Beryllium metal is characterized by low density and high strength. Its low density allows the beryllium substrate 22 to maintain structural strength while remaining relatively lightweight. This lighter weight reduces the overall load on the equipment, improving its mobility and energy efficiency. Its high strength ensures that substrate 22 will not easily crack or deform when subjected to the impact forces and thermal stresses generated by electron bombardment, maintaining the normal operating structure of the X-ray tube and ensuring the stability and reliability of X-ray generation. Beryllium metal has good X-ray transmittance, meaning that when X-rays are generated and propagate within the tube, the absorption and scattering of X-rays by the beryllium substrate 22 are minimal. Compared to some materials with strong X-ray absorption, using beryllium substrate 22 reduces energy loss during X-ray propagation, increasing X-ray output intensity and penetration. This enables clearer and more accurate detection results for applications requiring high-intensity X-rays for inspection or imaging, such as the detection of internal defects in thick metal parts in industrial non-destructive testing, thus improving the application effect and detection accuracy of the X-ray tube.

[0058] Furthermore, the target material 21 can be made of tungsten, molybdenum, silver, or copper. Different metallic elements have unique atomic structures and electronic energy level distributions. When electrons bombard these metallic targets 21, they excite electron transitions within the atoms of the target material 21, thereby generating characteristic X-rays with specific energies and wavelengths. Tungsten, molybdenum, silver, and copper each produce different characteristic X-rays, allowing the X-ray tube to generate suitable X-rays by selecting different targets 21 according to specific application requirements. For example, in the field of medical imaging, imaging different tissues and organs requires X-rays of different energies to obtain optimal contrast and resolution. Tungsten targets 21 produce higher-energy X-rays, suitable for imaging tissues with higher density, such as bone; while copper targets 21 produce relatively lower-energy X-rays, more suitable for imaging tissues with lower density, such as soft tissues. By flexibly changing the target material 21 or using combinations of multiple targets 21, the X-ray tube can meet diverse imaging needs in medical imaging, improving the accuracy and reliability of diagnosis. The X-rays generated by the molybdenum target 21 have unique advantages in analyzing certain light element materials, enabling more accurate detection of the content and distribution of light elements in the material. Meanwhile, the X-rays generated by the silver target 21 can provide clearer diffraction patterns in certain material analysis experiments, helping researchers to gain a deeper understanding of the material's microstructure. In the field of industrial non-destructive testing, for different types of workpieces and defect detection, appropriate targets 21 can be selected according to specific circumstances to improve the sensitivity and accuracy of detection, ensuring the quality and safety of industrial production.

[0059] In some application scenarios, such as Figure 5 and Figure 6 As shown, at least two types of target materials 21 are deposited in a fan-shaped distribution on the substrate 22; in other application scenarios, such as Figure 7 As shown, at least two types of target materials 21 are deposited in a ring-shaped distribution on the substrate 22.

[0060] For example, the process of depositing a target on a diamond substrate is as follows: First, surface treatment of the diamond is the fundamental and crucial step of the entire process. (During storage and transportation, the surface of the diamond inevitably becomes contaminated with various oils and impurities, and may also absorb a certain amount of moisture. If these oils, impurities, and moisture are not thoroughly removed, they will seriously affect the adhesion between the target and the diamond substrate, leading to quality problems such as target detachment and uneven deposition. Therefore, professional cleaning equipment and suitable cleaning agents are required to thoroughly clean the diamond surface. The cleaning process may include multiple soaking, ultrasonic cleaning, rinsing, etc., to ensure that the surface oils and moisture are completely removed, achieving a high degree of cleanliness on the diamond surface.) (State); After surface cleaning, the pretreated diamond substrate is carefully placed into the vacuum chamber (the vacuum chamber is the core environment of the entire deposition process, and its internal vacuum level has a crucial impact on the deposition process and target quality. After placing the diamond substrate, the vacuum pumping system needs to be activated to evacuate the chamber. As the pumping proceeds, the gas molecules in the chamber gradually decrease, and the vacuum level continuously increases. When the vacuum level of the vacuum chamber reaches the extremely high vacuum level of 1E-5Pa, it means that the impurity gas content in the chamber is extremely low, creating an ideal pollution-free environment for the subsequent sputtering deposition process); After reaching the required vacuum level, high-purity Ar gas is introduced into the vacuum chamber (Ar gas plays an important role in the sputtering deposition process). The role of the gas is as follows: Ar ions, acting as the working gas, are ionized into plasma under the influence of an electric field. These plasma ions bombard the target surface at high speed, sputtering target atoms and depositing them onto the diamond substrate. Before the formal deposition, a pre-sputtering operation is required. During this operation, a baffle is placed in front of the target 21 to block the sputtered atoms from depositing onto the diamond substrate. The main purpose of pre-sputtering is to remove impurities, oxides, and other contaminants from the target 21 surface. If these contaminants are deposited directly onto the diamond substrate, they will reduce the purity and performance of the target 21. After a period of pre-sputtering to ensure the target 21 surface is thoroughly cleaned, the baffle is removed, and the formal deposition stage begins. During deposition, precise adjustment of the sputtering power is required (the sputtering power directly affects the energy of Ar ions and the intensity of bombardment of the target, thus affecting the number and energy of sputtered target atoms. By properly adjusting the sputtering power, the diamond substrate can be heated to a suitable temperature. An appropriate substrate temperature helps improve the diffusion ability and bonding force of target atoms on the substrate surface, promoting the formation of a uniform and dense film on the diamond surface). Next, according to the specific target composition requirements, the diamond is moved to the direction directly opposite the tungsten target (during the movement, it is important to ensure smooth and accurate operation to avoid collisions or vibrations to the diamond substrate that could affect the deposition effect). After the diamond position is stable, sputtering of the tungsten target onto the diamond surface begins.By controlling the sputtering time, a micrometer-thick tungsten film can be sputtered onto the diamond surface. After the tungsten target sputtering is complete, the sputtering power supply should be turned off promptly. At this point, since the diamond substrate and the deposited tungsten film still have a certain temperature, the sample needs to be allowed to cool naturally within the vacuum chamber for a period of time. The cooling process should be slow to avoid defects such as cracks or peeling of the film due to rapid temperature changes. After the sample has completely cooled, it is removed from the vacuum chamber. At this point, the process of depositing tungsten target material on a diamond substrate is essentially complete.

[0061] For targets with different composition zones, the process flow is the same as described above in terms of pretreatment of the diamond substrate, achieving vacuum, and introducing Ar gas. After completing the preliminary preparations, the zoned target deposition stage begins. Different target zones are deposited sequentially; that is, the diamond substrate is moved to the opposite direction of each target according to a predetermined order and process parameters for sputtering deposition. During each zone's deposition process, parameters such as sputtering power and time must be strictly controlled to ensure that the target deposition quality and thickness of each zone meet the requirements. This zoned target deposition method allows for the precise deposition of targets with different compositions on diamond substrates, meeting the needs of applications with specific requirements for the distribution of target composition.

[0062] Furthermore, the anode assembly 2 also includes a target flange 23. A first limiting step 231 is circumferentially provided on the inner wall of the target flange 23. The substrate 22 stops and abuts against the first limiting step 231. A second limiting step 111 is provided on the inner wall of the anode flange 11. The target flange 23 is inserted into the anode flange 11, with its lower end face stopping and abutting against the second limiting step 111. The upper end face of the target flange 23 is flush with the upper end face of the anode flange 11. The first limiting step 231 circumferentially provided on the inner wall of the target flange 23 provides a precise positioning reference for the substrate 22. When installing the substrate 22, the substrate 22 with the target material 21 is horizontally placed into the target flange 23. The operator can quickly and accurately place the substrate 22 in the correct position based on the position of the first limiting step 231, ensuring the stability of the substrate 22 inside the target flange 23 and allowing the substrate 22 to be firmly fixed inside the target flange 23. During assembly, the second limiting step 111 provides a clear stop position for the target flange 23, eliminating concerns for operators about inserting the target flange 23 too deeply or too shallowly. This axial positioning ensures a stable relative position between the target flange 23 and the anode flange 11, allowing for a tight fit. The stable fixation between the target flange 23 and the anode flange 11 ensures that the anode assembly 2 always maintains a good working condition.

[0063] Furthermore, the cathode assembly 3 includes a filament base 31 and a cathode filament 32 disposed on the upper end face of the filament base 31. The inner wall of the cathode flange 12 is provided with a third limiting step 121. The filament base 31 is inserted into the cathode flange 12, with its upper end face abutting against the third limiting step 121, and its lower end face flush with the lower end face of the cathode flange 12. The third limiting step 121 on the inner wall of the cathode flange 12 provides a precise axial positioning reference for the filament base 31. During assembly, the operator can accurately insert the filament base 31 into the cathode flange 12 based on the position of the third limiting step 121 until the upper end face of the filament base 31 abuts against the third limiting step 121. This positioning method avoids axial position deviations that may occur during manual installation, ensuring the accurate installation position of the filament base 31 within the cathode flange 12. The upper end face of the filament base 31 abuts against the third limiting step 121, which makes the filament base 31 stably fixed within the cathode flange 12.

[0064] Furthermore, the cathode assembly 3 also includes a cathode cover 33, which is fastened to the upper surface of the filament base 31. The cathode cover 33 has an opening 331 corresponding to the position of the cathode filament 32. By adding the cathode cover 33, this design provides a clear channel for the cathode filament 32 to emit electrons. During operation, the cathode filament 32 emits a large number of electrons after being heated. Without the guidance of the cathode cover 33 and its opening 331, electrons might diffuse randomly in the surrounding space, resulting in reduced electron utilization and ineffective reaching of the target position. The opening 331 of the cathode cover 33 constrains the range of electron movement, ensuring that electrons can only be emitted along the direction defined by the opening 331, thereby guaranteeing the accuracy of the electron emission path and improving electron utilization efficiency.

[0065] Furthermore, a focusing tube 5 is provided on the lower end face of the anode flange 11. The focusing tube 5, the shell assembly 1, the anode assembly 2, and the cathode assembly 3 are all located on the same axis, providing a straight and precise channel for the transmission of the electron beam. Electrons emitted by the cathode filament 32 in the cathode assembly 3 move towards the anode assembly 2 under the action of the electric field. Since all components are coaxial, the electron beam can be stably transmitted along this predetermined axis, reducing electron beam scattering and deflection. The setting of the focusing tube 5 further enhances the focusing effect of the electron beam. When the electron beam enters the focusing tube 5, the inner wall of the focusing tube 5 causes the electron beam to converge. Since the focusing tube 5 is coaxial with the other components, this focusing effect can be matched with the natural transmission direction of the electron beam to achieve more precise focusing.

[0066] Optionally, the deflection component 4 has an optional configuration, such as Figure 1 Combination Figure 9As shown, the deflection assembly 4 includes several pairs of coils 41, which are circumferentially spaced around the anode flange 11. Since the several pairs of coils 41 are circumferentially spaced around the anode flange 11, the deflection angle of the electron beam can be precisely adjusted by controlling the current parameters of each pair of coils 41, such as current magnitude, direction, and energizing time.

[0067] Alternatively, in addition to the coil 41 form, the deflection assembly 4 has another alternative, such as... Figure 1 Combination Figure 10 As shown, the deflection assembly 4 includes several pairs of electrode plates 42, which are circumferentially spaced around the anode flange 11. After being energized, the electrode plates 42 can quickly establish an electric field. When it is necessary to change the deflection direction of the electron beam, the voltage on the electrode plates 42 can be quickly adjusted to immediately change the distribution of the electric field, thereby rapidly deflecting the electron beam. Understandably, the number of coils 41 or electrode plates 42 is even.

[0068] The X-ray tube provided in this application can be used to emit X-rays to inspect the internal structure and location of micro-solder joints of electronic and microelectronic assemblies. For example, it can be used to analyze the internal condition of any applicable components such as microelectronic systems, encapsulated components, cables, fixtures, and plastic parts. The X-ray tube can be used with X-ray flaw detectors in fields such as machinery and metallurgy, petrochemicals, steel, shipbuilding, and thermal engineering. Of course, the X-ray tube can also be used in other applicable fields such as X-ray fluorescence spectroscopy (XRF), as long as the X-rays emitted by the tube meet the corresponding detection and analysis requirements. This application does not limit the specific application of the X-ray tube.

[0069] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0070] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. An X-ray tube, characterized in that, include: The tube housing assembly (1) includes an anode flange (11), a cathode flange (12), and a ceramic shell (13) extending in a straight direction. The anode flange (11) and the cathode flange (12) are both made of Kovar alloy. The anode flange (11) is fixedly disposed at the first port of the ceramic shell (13), and the cathode flange (12) is fixedly disposed at the second port of the ceramic shell (13). The anode assembly (2) includes a substrate (22) having at least two types of targets (21), the substrate (22) being disposed on the anode flange (11) and closing the central hole of the anode flange (11), the targets (21) facing the interior of the housing assembly (1); A cathode assembly (3) is disposed on the cathode flange (12) and closes the center hole of the cathode flange (12). The emitting end of the cathode assembly (3) faces the inside of the shell assembly (1). The cathode assembly (3) is used to emit electrons and bombard the target material (21). A deflection component (4) is disposed on the housing assembly (1) and is used to change the deflection trajectory of electrons within the housing assembly (1).

2. The X-ray tube according to claim 1, characterized in that, The substrate (22) is made of diamond or beryllium.

3. The X-ray tube according to claim 1, characterized in that, The target material (21) is made of tungsten, molybdenum, silver or copper.

4. The X-ray tube according to claim 1, characterized in that, At least two of the target materials (21) have a fan-shaped distribution in the deposition area on the substrate (22); or At least two of the target materials (21) are deposited in a ring-shaped distribution on the substrate (22).

5. The X-ray tube according to claim 1, characterized in that, The anode assembly (2) further includes a target flange (23), the inner wall surface of the target flange (23) is provided with a first limiting step (231) in the circumferential direction, the substrate (22) stops and abuts against the first limiting step (231), the inner wall surface of the anode flange (11) is provided with a second limiting step (111), the target flange (23) is inserted into the anode flange (11), the lower end surface of the target flange (23) stops and abuts against the second limiting step (111), and the upper end surface of the target flange (23) is flush with the upper end surface of the anode flange (11).

6. The X-ray tube according to claim 5, characterized in that, The cathode assembly (3) includes a filament base (31) and a cathode filament (32) disposed on the upper end face of the filament base (31). The inner wall of the cathode flange (12) is provided with a third limiting step (121). The filament base (31) is inserted into the cathode flange (12). The upper end face of the filament base (31) is in stop contact with the third limiting step (121). The lower end face of the filament base (31) is flush with the lower end face of the cathode flange (12).

7. The X-ray tube according to claim 6, characterized in that, The cathode assembly (3) also includes a cathode cover (33), which is fastened to the upper end face of the filament base (31). The cathode cover (33) has an opening (331) corresponding to the position of the cathode filament (32).

8. The X-ray tube according to claim 7, characterized in that, A focusing tube (5) is provided on the lower end face of the anode flange (11). The focusing tube (5), the shell assembly (1), the anode assembly (2) and the cathode assembly (3) are all located on the same axis.

9. The X-ray tube according to any one of claims 1-8, characterized in that, The deflection assembly (4) includes several pairs of coils (41), which are circumferentially spaced around the anode flange (11).

10. The X-ray tube according to any one of claims 1-8, characterized in that, The deflection assembly (4) includes several pairs of electrode plates (42), which are circumferentially spaced around the anode flange (11).

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