High voltage electrode structure for an ion pump

Abstract

The utility model provides a kind of high voltage electrode structure for ion pump, including electrode body, glass cover and protective shell, electrode body is equipped with first limit part, second limit part and the ceramic body around being equipped between two limit parts;Glass cover is sealed cover and is equipped in ceramic body, and the cavity between glass cover and ceramic body is injected with colloid;Protective shell cover is equipped outside glass cover, and elastic member is equipped in the gap between protective shell and glass cover.The utility model's structure design is reasonable, by additional sealing glass cover outside ceramic body, and by injecting colloid, ceramic body is completely wrapped in colloid, so that it is in sealed state, no gap, effectively reduce the harm of condensate and radiation to electrode, improve the adaptability of electrode in harsh environment;And install elastic member in the gap between protective shell and glass cover, effectively prevent the movement of glass cover, improve the stability and anti-seismic performance of overall structure.

Description

Technical Field

[0001] This utility model relates to the field of vacuum electronic device technology, and in particular to a high-voltage electrode structure for ion pumps. Background Technology

[0002] An ion pump is a commonly used vacuum extraction device. Its working principle involves using a high-voltage electric field to ionize gas molecules and then capturing the ions through electrodes, thereby achieving the purpose of pumping gas. In the structure of an ion pump, the high-voltage electrode is one of its core components, responsible for providing a stable high-voltage electric field to ensure the normal operation of the ion pump.

[0003] Common high-voltage electrode structures for ion pumps mainly include an electrode body, insulating ceramic, and connecting components. Chinese patent CN107293899A discloses a high-voltage electrode structure for an ion pump, including a grounding connecting cylinder and a standard high-voltage connector. The inner wall of one end of the grounding connecting cylinder is provided with an internal thread that mates with the threaded connector of the ion pump. The connecting conductor end of the standard high-voltage connector is welded with a high-voltage inner conductor, and the outer periphery of the end of the high-voltage inner conductor is provided with an external thread that mates with the threaded hole of the terminal block at the end of the threaded connector of the ion pump.

[0004] However, existing high-voltage electrodes for ion pumps generally suffer from the following technical problems: first, they are easily affected by ambient humidity, leading to condensation damage; second, they are prone to arcing under high-pressure environments, damaging the vacuum system; third, their lifespan is limited, requiring frequent replacement; fourth, they are susceptible to corrosion under radiation conditions; and fifth, maintenance and replacement are not convenient. These problems seriously affect the working efficiency and service life of ion pumps, thus necessitating a new high-voltage electrode structure to solve them. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a high-voltage electrode structure for ion pumps, which solves the problems of condensation hazards, high-voltage arcing damaging the vacuum system, limited electrode life, easy corrosion under radiation conditions, and inconvenient maintenance and replacement in the prior art.

[0006] To achieve the above and other related objectives, this utility model provides a high-voltage electrode structure for an ion pump, comprising an electrode body, a glass cover, and a protective shell. The electrode body is provided with a first limiting part, a second limiting part, and a ceramic body wound between the two limiting parts. The two ends of the electrode body are also provided with a first high-voltage input rod and a second high-voltage input rod, respectively. The glass cover seals the ceramic body therein, and the cavity between the glass cover and the ceramic body is filled with colloid. The protective shell is provided outside the glass cover, and an elastic element is provided in the gap between the protective shell and the glass cover.

[0007] In one embodiment of this utility model, the elastic element is a spring, and the spring is sleeved on the outside of the first high-voltage input rod.

[0008] In one embodiment of this utility model, the protective shell has a first through hole and a second through hole at both ends, respectively. The high voltage line is connected to the first high voltage input rod through the first through hole, and the second high voltage input rod passes through the second through hole and is connected to the ion pump.

[0009] In one embodiment of this utility model, the high-voltage line and the first high-voltage input rod are connected by a quick-release structure.

[0010] In one embodiment of the present invention, the top end of the first high-voltage input rod is provided with a plug extending out of the first through hole, the plug having an opening, and the end of the high-voltage line having a connector that mates with the opening.

[0011] In one embodiment of this utility model, a heating block is also installed outside the protective shell.

[0012] In one embodiment of the present invention, the protective shell includes a first shell and a second shell. The first shell is a cylinder with one end open and the other end having a first through hole. The second shell includes two semi-cylinders and a clamp. The clamp is used to connect the two semi-cylinders into a cylinder with both ends open. One end of the second shell is engaged with the opening of the first shell.

[0013] In one embodiment of this utility model, the protective shell is made of stainless steel.

[0014] In one embodiment of the present invention, the electrode body further includes a flange disposed outside the second limiting portion, and the protective shell is disposed outside the flange.

[0015] In one embodiment of the present invention, the electrode body is made of Kovar alloy and its surface is plated with nickel.

[0016] As described above, the high-voltage electrode structure for ion pumps of this invention has the following beneficial effects:

[0017] 1. This utility model adds a sealed glass cover to the ceramic body and completely encapsulates the ceramic body in the colloid by injecting colloid, so that it is in a sealed state without leaving gaps, which effectively reduces the damage of condensation and radiation to the electrode and improves the adaptability of the electrode in harsh environments.

[0018] 2. By installing elastic elements in the gap between the protective shell and the glass cover, the movement of the glass cover is effectively prevented, thereby improving the overall structural stability and seismic performance.

[0019] 3. By adding a heating block to the outside of the protective shell, the entire electrode structure can be heated, reducing the generation of condensate and further improving the working reliability of the electrode;

[0020] 4. The high-voltage line input rod adopts a quick-connect structure, which makes the maintenance and replacement of the electrodes more convenient and greatly reduces maintenance costs and time.

[0021] 5. The electrode body is made of Kovar alloy and nickel-plated, which improves the corrosion resistance and conductivity of the electrode and extends its service life.

[0022] 6. The insulating ceramic body is glazed, which effectively prevents the insulating ceramic body from cracking due to high-voltage arcing, and improves the service life and safety of the electrode. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the high-voltage electrode structure for an ion pump disclosed in an embodiment of this utility model.

[0024] Figure 2 This is a schematic diagram of the structure of the electrode body disclosed in the embodiments of this utility model.

[0025] Figure 3 This is a schematic diagram of the high-voltage electrode structure disclosed in the embodiments of this utility model applied to an ion pump.

[0026] Figure 4 This is a cross-sectional schematic diagram of the high-voltage electrode structure disclosed in the embodiments of this utility model applied to an ion pump.

[0027] Component designation explanation

[0028] 100. Electrode body; 110. First high-voltage input rod; 120. First limiting part; 130. Ceramic body; 140. Second limiting part; 150. Flange; 160. Second high-voltage input rod; 170. Insert; 200. Glass cover; 210. Colloid; 300. Protective shell; 310. First shell; 320. Second shell; 330. Clamp; 400. Spring; 500. Heating block; 600. High-voltage wire; 610. Plug; 700. Ion pump. Detailed Implementation

[0029] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. It should be noted that, unless otherwise specified, the following embodiments and features can be combined with each other.

[0030] Please see Figures 1-4This embodiment provides a high-voltage electrode structure for an ion pump, including an electrode body 100, a glass cover 200, and a protective shell 300. The electrode body 100 has a first limiting portion 120, a second limiting portion 140, and a ceramic body 130 wound between the two limiting portions. A flange 150 is provided beside the second limiting portion 140 for connection to the ion pump 700. A first high-voltage input rod 110 and a second high-voltage input rod 160 are respectively provided at both ends of the electrode body 100, wherein the first high-voltage input rod 110 is located at one end of the first limiting portion 120, and the second high-voltage input rod 160 is located at one end of the flange 150. The glass cover 200 seals the ceramic body 130 within it, and the cavity between the glass cover 200 and the ceramic body 130 is filled with a colloid 210. The protective shell 300 covers the glass cover 200, and an elastic element is provided in the gap between the protective shell 300 and the glass cover 200.

[0031] Specifically, refer to Figure 2 The electrode body 100 has a cylindrical structure. A first limiting part 120 and a second limiting part 140 are respectively disposed at both ends of the electrode body 100, and the area between the two limiting parts is the middle region of the electrode body 100. A ceramic body 130 is wound around the middle region of the electrode body 100. The ceramic body 130 has a ring-shaped spiral structure and is fitted onto the outer circumferential surface of the electrode body 100. The diameters of the first limiting part 120 and the second limiting part 140 are larger than the diameter of the middle region of the electrode body 100, thereby confining the ceramic body 130 between the two limiting parts and preventing the ceramic body 130 from moving axially along the electrode body 100.

[0032] The glass cover 200 is a hollow cylindrical structure with an inner diameter larger than the outer diameter of the ceramic body 130, thus forming a cavity between the glass cover 200 and the ceramic body 130. The glass cover 200 completely encloses the ceramic body 130 within it, and its two ends are respectively sealed to the first limiting part 120 and the second limiting part 140, forming a sealed space. The cavity between the glass cover 200 and the ceramic body 130 is filled with a colloid 210, which is an insulating material that further enhances the insulation performance of the electrode structure. The glass cover 200 is a double-layered glass cover, providing even stronger sealing and protection.

[0033] The protective shell 300 is also a hollow cylindrical structure, with the glass cover 200 encased inside it. The length of the protective shell 300 is greater than the length of the glass cover 200, thus creating a gap between the protective shell 300 and the glass cover 200. An elastic element, a spring 400, is installed in the gap between the protective shell 300 and the glass cover 200, and is sleeved on the outside of the first high-voltage input rod 110. Specifically, one end of the spring 400 abuts against the outer end of the glass cover 200, and the other end abuts against the inner wall of the protective shell 300, thereby forming an elastic support between the glass cover 200 and the protective shell 300. This not only prevents the glass cover 200 from moving within the protective shell 300, but also effectively buffers external impact forces, protecting the glass cover 200 from damage.

[0034] In this embodiment, the protective shell 300 has a first through hole and a second through hole at both ends. The second high-voltage input rod 160 passes through the second through hole and connects to the ion pump 700. The high-voltage wire 600 connects to the first high-voltage input rod 110 through the first through hole, and the high-voltage wire 600 and the first high-voltage input rod 110 are connected by a quick-release structure. Specifically, the top end of the first high-voltage input rod 110 is provided with a plug 170 extending out of the first through hole. The plug 170 has a socket, and the end of the high-voltage wire 600 is provided with a connector that mates with the socket. The quick-release structure allows for easy connection or disconnection of the high-voltage wire 600 and the first high-voltage input rod 110, facilitating maintenance and replacement.

[0035] Furthermore, a heating block 500 is also installed outside the protective shell 300. The heating block 500 is used to heat the high-voltage electrode structure in a low-temperature environment to ensure the normal operation of the high-voltage electrode structure. The heating block 500 can be a heating element such as a heating wire or a heating plate, and the heating temperature is adjusted by controlling the magnitude of the current.

[0036] Furthermore, the protective shell 300 includes a first shell 310 and a second shell 320. The first shell 310 is a cylinder with one end open and a first through hole at the other end. The second shell 320 includes two semi-cylinders and a clamp 330, which is used to connect the two semi-cylinders into a cylinder with both ends open. One end of the second shell 320 engages with the opening of the first shell 310. This structural design allows for easy disassembly of the protective shell 300, facilitating maintenance and replacement of the internal structure. The protective shell 300 is made of stainless steel, which has good mechanical strength and corrosion resistance, effectively protecting the internal glass cover 200 and electrode body 100, and extending the service life of the high-voltage electrode structure.

[0037] Furthermore, the electrode body 100 is made of Kovar alloy and its surface is plated with nickel. Kovar alloy has good electrical conductivity and mechanical strength, and the nickel plating on the surface can further improve the electrical conductivity and corrosion resistance of the electrode body 100.

[0038] Furthermore, the surface of the ceramic body 130 is glazed, which effectively prevents the insulating ceramic from cracking due to high-voltage arcing, and improves the service life and safety of the electrode.

[0039] The high-voltage electrode structure for an ion pump provided in this embodiment achieves high insulation and impact resistance of the high-voltage electrode structure by setting a first limiting part, a second limiting part, and a ceramic body wrapped between the two limiting parts on the electrode body, sealing the ceramic body with a glass cover, filling the cavity between the glass cover and the ceramic body with colloid, covering the outside of the glass cover with a protective shell, and setting an elastic element in the gap between the protective shell and the glass cover, thereby improving the working stability and service life of the ion pump.

[0040] In summary, the present invention features a reasonable structural design. By adding a sealed glass cover to the ceramic body and completely encapsulating the ceramic body within the colloid through injection, it achieves a sealed state without gaps. This effectively reduces the damage to the electrodes caused by condensation and radiation, and improves the electrodes' adaptability to harsh environments. Furthermore, the addition of an elastic element in the gap between the protective shell and the glass cover effectively prevents the glass cover from moving, improving the overall structural stability and seismic performance. Therefore, the present invention effectively overcomes the various shortcomings of existing technologies and possesses high industrial applicability.

[0041] The terms used in this specification, such as "upper", "lower", "left", "right", "front", "back", "middle" and "one", are merely for clarity of description and are not intended to limit the scope of implementation of this utility model. Any changes or adjustments to their relative relationships, without substantially altering the technical content, shall also be considered within the scope of implementation of this utility model.

[0042] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit this utility model. All equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A high-voltage electrode structure for an ion pump, characterized in that, The device includes an electrode body, a glass cover, and a protective shell. The electrode body has a first limiting part, a second limiting part, and a ceramic body wrapped between the two limiting parts. The two ends of the electrode body are also provided with a first high-voltage input rod and a second high-voltage input rod, respectively. The glass cover seals the ceramic body inside, and the cavity between the glass cover and the ceramic body is filled with colloid. The protective shell is provided outside the glass cover, and an elastic element is provided in the gap between the protective shell and the glass cover.

2. The high-voltage electrode structure for an ion pump according to claim 1, characterized in that, The elastic element is a spring, which is sleeved on the outside of the first high-voltage input rod.

3. The high-voltage electrode structure for an ion pump according to claim 1, characterized in that, The protective shell has a first through hole and a second through hole at its two ends, respectively. The high voltage line is connected to the first high voltage input rod through the first through hole, and the second high voltage input rod is connected to the ion pump after passing through the second through hole.

4. The high-voltage electrode structure for an ion pump according to claim 3, characterized in that, The high-voltage line is connected to the first high-voltage input rod using a quick-release structure.

5. The high-voltage electrode structure for an ion pump according to claim 4, characterized in that, The top of the first high-voltage input rod is provided with a plug extending out of the first through hole. The plug has a socket, and the end of the high-voltage line is provided with a connector that mates with the socket.

6. The high-voltage electrode structure for an ion pump according to claim 1, characterized in that, A heating block is also installed on the outside of the protective shell.

7. The high-voltage electrode structure for an ion pump according to any one of claims 1 to 6, characterized in that, The protective shell includes a first shell and a second shell. The first shell is a cylinder with one end open and a first through hole at the other end. The second shell includes two semi-cylinders and a clamp. The clamp is used to connect the two semi-cylinders into a cylinder with both ends open. One end of the second shell is engaged with the opening of the first shell.

8. The high-voltage electrode structure for an ion pump according to any one of claims 1 to 6, characterized in that, The protective shell is made of stainless steel.

9. The high-voltage electrode structure for an ion pump according to any one of claims 1 to 6, characterized in that, The electrode body also includes a flange disposed outside the second limiting part, and the protective shell is disposed outside the flange.

10. The high-voltage electrode structure for an ion pump according to any one of claims 1 to 6, characterized in that, The electrode body is made of Kovar alloy and its surface is plated with nickel.

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