A furnace body quick wiring ceramic safety protection structure

Abstract

The utility model relates to semiconductor heat treatment equipment technical field especially discloses a kind of quick wiring ceramic safety protection structures for furnace body, including wiring base, protective cover and wiring structure, the wiring base is set on outside heating furnace body, protective cover cover is set on wiring base to prevent miscontact and heat radiation influence, wiring base is equipped with wire hole, wire hole is used to connect external heater or sensor cable, wiring structure includes lead column and quick release assembly, lead column is electrically connected with electrical element in heating furnace body by wire hole, lead column is connected with wiring base by quick release assembly. The utility model is electrically connected by wiring base, lead column and quick release assembly, and realizes heat and electric double protection by protective cover. Lead column is connected with electrical element in furnace and then worn to outside, which is convenient for quick connection with external cable. Realize the quick, safe, maintainable electrical connection of heating furnace body and external control system, prevent high-temperature scald and electric shock risk.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor heat treatment equipment technology, and in particular discloses a quick-connect ceramic safety protection structure for furnace body. Background Technology

[0002] With the widespread application of industrial furnaces in fields such as semiconductors, metal heat treatment, and new energy materials, the furnace body typically integrates multiple sets of electrical components such as heaters, thermocouples, and sensors. These components need to be connected to the control system via external cables, making the installation of electrical wiring interfaces between the furnace body and the external environment an essential requirement.

[0003] However, the furnace body is usually in a high-temperature state during operation, and the wiring parts are severely affected by heat radiation and ambient temperature, which can easily cause problems such as loose terminals, aging of insulation layers, or oxidation of leads, thereby affecting the safety and stability of equipment operation. Especially during repeated maintenance and disassembly, conventional wiring methods are not only cumbersome to operate, but also pose risks of burns and accidental electric shock.

[0004] Therefore, how to provide a wiring structure that is safe, reliable, easy to quickly assemble and disassemble, and has good thermal protection capabilities while ensuring electrical performance has become a technical problem that urgently needs to be solved in this field. Utility Model Content

[0005] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide a wiring structure that is safe, reliable, easy to quickly assemble and disassemble, and has good thermal protection capabilities.

[0006] To achieve the above objectives, this utility model provides a quick-connect ceramic safety protection structure for a furnace body, comprising a wiring base for installation on an external heating furnace body, a protective cover, and a wiring structure mounted on the wiring base. The wiring base is mounted on the external heating furnace body. The protective cover covers the wiring base and wiring structure to prevent accidental contact with the heat radiation effect. The wiring base has a wire-passing hole. The wiring structure includes a lead-in post and a quick-release assembly. The lead-in post passes through the wire-passing hole and is electrically connected to electrical components inside the furnace body. The lead-in post is connected to the wiring base via the quick-release assembly. This utility model achieves electrical connection through the wiring base, lead-in post, and quick-release assembly, and provides dual thermal and electrical protection through the protective cover. After the lead-in post is connected to the electrical components inside the furnace, it extends to the outside, facilitating quick connection with external cables. This achieves a quick, safe, and maintainable electrical connection between the furnace body and the external control system, reducing disassembly and assembly time and preventing the risk of high-temperature burns and electric shock. Unlike traditional welding or screw-fixed wiring methods, this structure has modular disassembly and assembly functions and thermal protection functions, resulting in higher integration and safer operation.

[0007] Specifically, the quick-release assembly includes a first plate, a second plate, bolts, and nuts. The first and second plates are located on opposite sides of the terminal base. The bolts sequentially pass through the second plate, the terminal base, and the first plate, connecting to the nut. The first plate and the terminal base clamp the lead post. The first and second plates are electrically connected to the lead post to form a terminal block. The plates are fixed by bolts, ensuring stable clamping of the lead post and maintaining its conductive state. This symmetrical structure ensures mechanical strength and reliable electrical connection. It is easy to assemble and disassemble, provides strong clamping force, and ensures stable electrical connection, preventing thermal loosening or poor contact. Unlike direct screw crimping, this plate-clamping structure provides both mechanical stability and quick replacement capability.

[0008] Specifically, the first plate has a U-shaped groove on the side near the lead post, and the lead post is installed in the U-shaped groove. The U-shaped groove is used to limit the displacement of the lead post. The U-shaped groove confines the lead post in the longitudinal and lateral directions, preventing it from sliding due to thermal expansion or vibration, improving the installation stability of the lead post, reducing conductive failures caused by wear and displacement, and increasing the structural guiding function. Compared with the planar clamping method, it is more reliable and has better shock resistance.

[0009] Specifically, an elastic washer is provided between the first plate and the nut. The elastic washer is made of nickel-molybdenum alloy plate with a thickness of 0.8-1.2mm. The elastic washer is used to absorb the expansion and deformation of the quick-release assembly under high temperature. The elastic washer compensates for loosening caused by thermal expansion, maintains the fastening force, improves the high temperature resistance of the quick-release structure, and prevents loosening of the contact. In traditional structures, screws are prone to loosening at high temperatures. This design significantly improves structural stability and conductivity durability.

[0010] Specifically, the plate includes a high-temperature alloy layer and a platinum-rhodium alloy layer covering the outside of the high-temperature alloy layer. The platinum-rhodium alloy layer enhances the conductivity of the plate. The outer platinum-rhodium layer improves surface conductivity and provides corrosion resistance. It improves overall conductivity and heat oxidation resistance, making it particularly suitable for harsh high-temperature environments. Compared to traditional iron or copper conductive plates, this structure is more temperature resistant and has stable long-term conductivity.

[0011] Specifically, the protective cover includes a first plate, supporting sections bent from both ends of the first plate, and mounting sections bent from the free ends of the supporting sections. The mounting sections are connected to the external heating furnace body via fasteners. The first plate has heat dissipation holes. The Z-shaped structure forms a shielding space, preventing accidental external contact and guiding heat flow through the heat dissipation holes for exhaust. It combines protection and ventilation, facilitating operation while improving thermal safety. The Z-shaped design is novel, integrating shielding, strength, and heat dissipation channels.

[0012] Specifically, the protective cover includes a flange base and an oxide ceramic layer covering the outside of the flange base. The oxide ceramic layer is an integrally formed structure used for heat insulation and electrical insulation. By isolating heat radiation and providing electrical insulation capabilities through the ceramic layer, the safety and insulation reliability of high-temperature areas are improved. Unlike the method of adding a liner to a metal shell, this structure is lighter, more integrated, and has better thermal insulation performance.

[0013] Specifically, the oxide ceramic layer is made of alumina ceramic or silica ceramic, and its thickness is 2-4 mm. The thick ceramic layer provides strong thermal insulation and electrical insulation properties, preventing heat conduction to the outer metal layer. This improves the overall temperature resistance and electrical shock resistance of the protective cover. Traditional ceramics only provide partial coverage; this structure achieves overall protection with optimized thickness.

[0014] Specifically, the wiring base is an integrated ceramic structure with a high-temperature resistant insulating layer coated on its surface. This high-temperature resistant insulating layer is either a ceramic composite silicone coating or a boron nitride coating. The ceramic substrate possesses inherent insulation properties, while the coating enhances heat resistance and surface anti-fouling capabilities. The overall structure provides reliable insulation, improving long-term stable operation. Compared to the traditional metal base + insulating pad approach, the integrated structure is more compact and safer.

[0015] Specifically, a sleeve is installed inside the through-hole, and the sleeve is fitted onto the lead post. The sleeve is used to isolate the wiring base from the lead post. The sleeve forms an inner layer of thermal and electrical insulation, preventing direct contact between the lead post and the ceramic hole wall. This improves electrical safety and prevents arcing or partial discharge. Unlike through-hole structures without insulation, the built-in sleeve provides a double insulation barrier.

[0016] The beneficial effects of this utility model are as follows: It adopts a quick-release assembly, using a plate and bolts to clamp the lead post, eliminating the need for welding and making the wiring process efficient and convenient, suitable for environments requiring frequent maintenance. The plate body is coated with a high-temperature alloy and platinum-rhodium alloy, possessing excellent heat resistance and conductivity; the elastic gasket structure absorbs thermal expansion deformation, preventing poor contact caused by thermal stress. The protective cover uses a ceramic-coated structure, providing good heat insulation and electrical insulation; the overall cover is installed at the wiring location, effectively preventing the risk of accidental contact, burns, or electric shock. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a quick-connect ceramic safety protection structure for a furnace body according to the present invention;

[0018] Figure 2 This is an exploded view of the wiring structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the protective cover of this utility model.

[0020] The reference numerals in the figures include:

[0021] 1. Wiring base; 2. Protective cover; 3. Wiring structure; 4. Lead post; 5. Quick release assembly; 6. First plate; 7. Second plate; 8. Bolt; 9. Nut; 10. U-shaped groove; 11. Elastic washer; 12. First plate section; 13. Support section; 14. Mounting section; 15. Heat dissipation hole; 16. Sleeve. Detailed Implementation

[0022] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0023] Please see Figures 1 to 3 As shown, this utility model discloses a quick-connect ceramic safety protection structure for a furnace body, comprising a wiring base 1 for installation on an external heating furnace body, a protective cover 2, and a wiring structure 3 mounted on the wiring base 1. The wiring base 1 is mounted on the external heating furnace body. The protective cover 2 covers the wiring base 1 and wiring structure 3 to prevent accidental contact with the heat radiation effect. The wiring base 1 has a wire passage hole. The wiring structure 3 includes a lead post 4 and a quick-release assembly 5. The lead post 4 passes through the wire passage hole and is electrically connected to electrical components inside the furnace body. The lead post 4 is connected to the wiring base 1 via the quick-release assembly 5. This utility model achieves electrical connection through the wiring base 1, lead post 4, and quick-release assembly 5, and provides dual protection against heat and electricity through the protective cover 2. After the lead post 4 is connected to the electrical components inside the furnace, it extends to the outside, facilitating quick connection with external cables. This achieves a quick, safe, and maintainable electrical connection between the furnace body and the external control system, reducing disassembly and assembly time and preventing the risk of high-temperature burns and electric shock. Unlike traditional welding or screw-fixed wiring methods, this structure features modular assembly and disassembly, as well as thermal protection, resulting in higher integration and safer operation.

[0024] The quick-release assembly 5 includes a first plate 6, a second plate 7, bolts 8, and nuts 9. The first plate 6 and second plate 7 are located on opposite sides of the terminal base 1. Bolts 8 sequentially pass through the second plate 7, the terminal base 1, and the first plate 6, connecting to the nuts 9. The first plate 6 and the terminal base 1 cooperate to clamp the lead post 4. The first plate 6, second plate 7, and lead post 4 are electrically connected to form a terminal block. The plates are fixed by bolts 8, ensuring stable clamping of the lead post 4 and maintaining its conductive state. This symmetrical structure ensures mechanical strength and reliable electrical connection. It is easy to assemble and disassemble, provides strong clamping force, and ensures stable electrical connection, avoiding thermal loosening or poor contact. Unlike direct screw crimping, this plate-clamping structure provides both mechanical stability and quick replacement capability.

[0025] The first plate 6 has a U-shaped groove 10 on the side near the lead post 4. The lead post 4 is installed in the U-shaped groove 10, which restricts the displacement of the lead post 4. The U-shaped groove 10 confines the lead post 4 in the longitudinal and lateral directions, preventing it from sliding due to thermal expansion or vibration, improving the installation stability of the lead post 4, reducing conductive failures caused by wear and displacement, and increasing the structural guiding function. Compared with the planar clamping method, it is more reliable and has better shock resistance.

[0026] An elastic washer 11 is provided between the first plate 6 and the nut 9. The elastic washer 11 is made of nickel-molybdenum alloy plate and has a thickness of 0.8-1.2 mm. The elastic washer 11 is used to absorb the expansion and deformation of the quick-release assembly 5 under high temperature. The elastic washer 11 compensates for loosening caused by thermal expansion, maintains the fastening force, improves the high temperature resistance of the quick-release structure, and prevents loosening of the contact. In traditional structures, screws are prone to loosening at high temperatures. This design significantly improves the structural stability and conductivity durability.

[0027] Specifically, in this embodiment, the thickness of the elastic pad 11 is 1.0 mm.

[0028] The plate comprises a high-temperature alloy layer and a platinum-rhodium alloy layer covering the outside of the high-temperature alloy layer. The platinum-rhodium alloy layer enhances the conductivity of the plate. The outer platinum-rhodium layer improves surface conductivity and provides corrosion resistance. It enhances overall conductivity and heat oxidation resistance, making it particularly suitable for harsh high-temperature environments. Compared to traditional iron or copper conductive plates, this structure is more temperature resistant and has stable long-term conductivity.

[0029] The protective cover 2 includes a first plate portion 12, a support portion 13 bent from both ends of the first plate portion 12, and a mounting portion 14 bent from the free end of the support portion 13. The mounting portion 14 is connected to the external heating furnace body via fasteners. The first plate portion 12 is provided with heat dissipation holes 15. The Z-shaped structure forms a shielding space, preventing accidental external contact and guiding heat flow through the heat dissipation holes 15 for discharge. It combines protection and ventilation, facilitating operation while improving thermal safety. The Z-shaped design is novel, combining shielding, strength, and heat dissipation channels.

[0030] The protective cover 2 includes a flange base and an oxide ceramic layer covering the outside of the flange base. The oxide ceramic layer is an integrally formed structure used for heat insulation and electrical insulation. By isolating heat radiation and providing electrical insulation, the ceramic layer improves the safety and insulation reliability of high-temperature areas. Unlike a metal shell with an inner lining, this structure is lighter, more integrated, and has better thermal insulation performance.

[0031] The oxide ceramic layer is made of alumina ceramic or silica ceramic, and its thickness is 2-4 mm. The thick ceramic layer provides strong thermal insulation and electrical insulation properties, preventing heat conduction to the outer metal layer. This improves the overall temperature resistance and electrical shock resistance of the protective cover 2. Traditional ceramics only provide partial coverage; this structure achieves overall protection with optimized thickness.

[0032] Specifically, in this embodiment, the thickness of the oxide ceramic layer is 2 mm.

[0033] The wiring base 1 is an integrated ceramic structure. The surface of the wiring base 1 is coated with a high-temperature resistant insulating layer, which is either a ceramic composite silicone coating or a boron nitride coating. The ceramic substrate possesses inherent insulation, while the coating enhances heat resistance and surface anti-fouling capabilities. The overall structure provides reliable insulation, improving long-term stable operation. Compared to the traditional metal base + insulating pad method, the integrated structure is more compact and safer.

[0034] A sleeve 16 is installed inside the through-hole, and the sleeve 16 is fitted onto the lead post 4. The sleeve 16 is used to isolate the wiring base 1 from the lead post 4. The sleeve 16 forms an inner layer of thermal and electrical insulation, preventing the lead post 4 from directly contacting the ceramic hole wall. This improves electrical safety and prevents arcing or partial discharge. Unlike through-hole structures without insulation, the built-in sleeve 16 provides a double insulation barrier.

[0035] During installation, the wiring base 1 is fixed to a predetermined position on the external heating furnace body using fasteners. The lead wire 4 is led out from the electrical components inside the furnace body, passing through the wire hole and the built-in sleeve 16 of the wiring base 1. The first plate 6 and the second plate 7 are placed on either side of the wiring base 1. The lead wire 4 is placed in the U-shaped groove 10 of the first plate 6, aligned with the bolt 8 holes. The bolt 8 passes sequentially through the second plate 7, the wiring base 1, and the first plate 6. After the elastic washer 11 is fitted, it is connected to the nut 9, completing the tightening and conductive connection of the lead wire 4. The protective cover 2 is aligned with the wiring base 1 and the wiring structure 3. The mounting part 14 is connected to the furnace body using fasteners, ensuring the protective cover 2 is securely installed. When wiring is required, the external cable is connected to the first plate 6 or the second plate 7, and the bolt 8 clamps the external cable.

[0036] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A quick-connect ceramic safety protection structure for a furnace body, characterized in that, The device includes a wiring base (1) for installation on an external heating furnace body, a protective cover (2), and a wiring structure (3) mounted on the wiring base (1). The wiring base (1) is mounted on the external heating furnace body. The protective cover (2) covers the wiring base (1) and the wiring structure (3) to prevent accidental contact with the heat radiation. The wiring base (1) is provided with a wire hole. The wiring structure (3) includes a lead post (4) and a quick-release assembly (5). The lead post (4) passes through the wire hole and is electrically connected to the electrical components inside the furnace body. The lead post (4) is connected to the wiring base (1) via the quick-release assembly (5).

2. The quick-connect ceramic safety protection structure for furnace body according to claim 1, characterized in that: The quick-release assembly (5) includes a first plate (6), a second plate (7), a bolt (8), and a nut (9). The first plate (6) and the second plate (7) are located on both sides of the wiring base (1). The bolt (8) passes through the second plate (7), the wiring base (1), and the first plate (6) in sequence and is connected to the nut (9). The first plate (6) and the wiring base (1) cooperate to clamp the lead post (4). The first plate (6), the second plate (7), and the lead post (4) are electrically connected to form a wiring terminal.

3. The quick-connect ceramic safety protection structure for furnace body according to claim 2, characterized in that: The first plate (6) has a U-shaped groove (10) on the side near the lead post (4), and the lead post (4) is installed in the U-shaped groove (10). The U-shaped groove (10) is used to limit the displacement of the lead post (4).

4. The quick-connect ceramic safety protection structure for a furnace body according to claim 2, characterized in that: An elastic washer (11) is provided between the first plate (6) and the nut (9). The elastic washer (11) is made of nickel-molybdenum alloy plate and has a thickness of 0.8-1.2 mm. The elastic washer (11) is used to absorb the expansion deformation of the quick-release assembly (5) under high temperature.

5. The quick-connect ceramic safety protection structure for a furnace body according to claim 2, characterized in that: The plate includes a high-temperature alloy layer and a platinum-rhodium alloy layer covering the outside of the high-temperature alloy layer. The platinum-rhodium alloy layer is used to enhance the conductivity of the plate.

6. The quick-connect ceramic safety protection structure for furnace body according to claim 1, characterized in that: The protective cover (2) includes a first plate (12), a support (13) bent from both ends of the first plate (12), and a mounting (14) bent from the free end of the support (13). The mounting (14) is connected to the heating furnace body of the outside via fasteners. The first plate (12) is provided with heat dissipation holes (15).

7. The quick-connect ceramic safety protection structure for furnace body according to claim 1, characterized in that: The protective cover (2) includes a flange base layer and an oxide ceramic layer covering the outside of the flange base layer. The oxide ceramic layer is an integrally formed structure and is used for heat insulation and electrical insulation.

8. The quick-connect ceramic safety protection structure for a furnace body according to claim 7, characterized in that: The oxide ceramic layer is made of alumina ceramic or silicon oxide ceramic, and the thickness of the oxide ceramic layer is 2-4 mm.

9. The quick-connect ceramic safety protection structure for a furnace body according to claim 1, characterized in that: The wiring base (1) is an integral ceramic structure. The surface of the wiring base (1) is coated with a high-temperature resistant insulating layer, which is a ceramic composite silicone coating or a boron nitride coating.

10. A quick-connect ceramic safety protection structure for a furnace body according to claim 1, characterized in that: A sleeve (16) is installed in the wire hole. The sleeve (16) is sleeved on the lead post (4). The sleeve (16) is used to isolate the wiring base (1) from the lead post (4).

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