A moving magnet type planar motor stator and planar motor

Abstract

The utility model relates to a kind of moving-magnetic type planar motor stator and planar motor, comprising: stator body and first box, the stator body includes stator PCB board, metal plate and drive PCB board, the metal plate upper and lower sides respectively with stator PCB board and drive PCB board contact and fixedly connected, the first box top is formed with opening, the metal plate blocks the opening on the first box and is fixedly connected with the first box, the first box and metal plate are formed with first inner cavity, the first inner cavity is filled with heat conducting oil.The utility model metal plate of stator body blocks the first box to form first inner cavity, the heat conducting oil of first inner cavity is in contact with metal plate, drive PCB board and copper column absorbs heat, and heat conducting oil is discharged by heat dissipation device, heat conducting oil plays the role of heat absorption and heat equalization, improves the heat dissipation efficiency of stator body;The heat absorption of heat conducting oil is large, can reduce the temperature fluctuation of stator body, to improve the accuracy of mover movement.

Description

Technical Field

[0001] This utility model relates to the field of planar motors, and in particular to a moving magnet planar motor stator and a planar motor. Background Technology

[0002] A planar motor with a moving magnet has a permanent magnet embedded in its mover, which, driven by the stator, can levitate and move and rotate precisely on a plane. The advantages of planar motors are high precision, fast response, and no mechanical transmission losses. They are commonly used in lithography machines, precision equipment, and other fields.

[0003] Because moving-magnet planar motors have very limited space and a highly compact structure, there is very little room for heat dissipation, making it easy for heat to accumulate in the stator. Sustained high stator temperatures can cause insulation aging, reduced efficiency, and localized heating can affect the positional accuracy of the mover. Utility Model Content

[0004] The present invention aims to solve the above problems by providing a moving magnet planar motor stator and a planar motor, which solves the problem of poor heat dissipation of the moving magnet planar motor stator.

[0005] A moving magnet planar motor stator includes: a stator body and a first housing. The stator body includes a stator PCB board, a metal plate and a drive PCB board. The upper and lower sides of the metal plate are in contact with and fixedly connected to the stator PCB board and the drive PCB board, respectively. An opening is formed on the top of the first housing. The metal plate seals the opening on the first housing and is fixedly connected to the first housing. The first housing and the metal plate form a first inner cavity, which is filled with heat-conducting oil.

[0006] Preferably, the stator body further includes a copper column, which penetrates the stator PCB board, the metal plate and the drive PCB board, and the copper column contacts and is fixedly connected to the stator PCB board, the metal plate and the drive PCB board.

[0007] Preferably, it also includes a heat dissipation device, which is connected to the first housing and is used to cool the heat transfer oil.

[0008] Preferably, the heat dissipation device is a heat dissipation fin, a cooling water pipe, or an evaporator.

[0009] Preferably, the heat dissipation device is fixedly connected to the first housing.

[0010] Preferably, it further includes a first pump, which is located in a first inner cavity. The first pump is fixedly connected to the first housing via a bracket. The first pump is used to drive the heat transfer oil to move between the heat dissipation device and the drive PCB board.

[0011] Preferably, it further includes a heat pipe and a second housing, the second housing forming a closed second inner cavity, the two ends of the heat pipe respectively penetrating into the first inner cavity and the second inner cavity of the first housing, the heat pipe being fixedly connected to the first housing and the second housing respectively, the heat dissipation device being fixedly connected to the second housing, and a first heat-conducting medium being disposed in the second inner cavity.

[0012] Preferably, it further includes a second housing and a second pump. The second housing has a second inner cavity and a liquid outlet and a liquid inlet. The first housing has a first interface and a second interface communicating with its inner first cavity. The inlet and outlet of the second pump are respectively connected to the first interface and the liquid inlet. The liquid outlet and the second interface are connected. The heat dissipation device is fixedly connected to the second housing. Heat transfer oil is provided in the second inner cavity.

[0013] Preferably, it further includes a connecting pipe, the two ends of which are respectively connected to the liquid outlet and the second interface; a filter element is provided inside the connecting pipe.

[0014] A planar motor using the stator described above, characterized in that it comprises: a mover, wherein the stator body drives the mover to levitate and move by magnetic force.

[0015] This invention has the following advantages: the metal plate of the stator body seals the first housing to form a first inner cavity. The heat-conducting oil in the first inner cavity contacts the metal plate, the drive PCB board and the copper pillar to absorb heat, and dissipates the heat of the heat-conducting oil through the heat dissipation device. The heat-conducting oil plays a role in absorbing and equalizing heat, thereby improving the heat dissipation efficiency of the stator body. The heat-conducting oil has a large heat absorption capacity, which can reduce the temperature fluctuation of the stator body, thereby improving the accuracy of the mover movement. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0017] Figure 1 : Front sectional view of Embodiment 1;

[0018] Figure 2 : Front sectional view of Embodiment 2;

[0019] Figure 3 : Front sectional view of Embodiment 3;

[0020] Figure 4 Example 4: Front sectional view. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and examples:

[0022] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] Example 1:

[0026] like Figure 1 As shown, this embodiment provides a moving magnet planar motor stator, including: a stator body 1 and a first housing 2. The stator body 1 includes a stator PCB board 11, a metal plate 12 and a drive PCB board 13. The upper and lower sides of the metal plate 12 are in contact with and fixedly connected to the stator PCB board 11 and the drive PCB board 13, respectively. An opening is formed on the top of the first housing 2. The metal plate 12 blocks the opening on the first housing 2 and is fixedly connected to the first housing 2. The first housing 2 and the metal plate 12 form a first inner cavity 20, which is filled with heat-conducting oil.

[0027] The stator PCB board 11 includes a stator coil that drives the rotor 9, and the drive PCB board 13 is equipped with a control device for controlling the stator coil.

[0028] Preferably, the stator body 1 further includes a copper pillar 14, which penetrates the stator PCB board 11, the metal plate 12 and the drive PCB board 13, and the copper pillar 14 contacts and is fixedly connected to the stator PCB board 11, the metal plate 12 and the drive PCB board 13.

[0029] Preferably, the heat-conducting oil is transformer oil.

[0030] Preferably, the first housing 2 is made of metal.

[0031] During operation, the heat generated by the stator coil on the stator PCB board 11 is transferred to the metal plate 12 and copper pillar 14, and some of the heat is transferred to the drive PCB board 13. The copper pillar 14 and drive PCB board 13 exchange heat with the heat transfer oil, and the heat transfer oil exchanges heat with the first housing 2. In a non-vacuum environment, the first housing 2 exchanges heat with the outside air.

[0032] Example 2:

[0033] like Figure 2 As shown, this embodiment is a further improvement on the basis of embodiment one, and also includes a heat dissipation device 3. The heat dissipation device 3 is connected to the first housing 2 and is used to cool the heat transfer oil.

[0034] Preferably, the heat dissipation device 3 is a heat dissipation fin, a cooling water pipe, or an evaporator.

[0035] When the working environment is a non-vacuum environment, the heat dissipation device 3 can be a heat dissipation fin; the heat dissipation device 3 can be a cooling water pipe or an evaporator, which can be applied to vacuum or non-vacuum environments.

[0036] Preferably, the heat dissipation device 3 is fixedly connected to the first housing 2.

[0037] Preferably, it also includes a first pump 4, which is located in the first inner cavity 20. The first pump 4 is fixedly connected to the first housing 2 via a bracket 41. The first pump 4 is used to drive the heat transfer oil to move between the heat dissipation device 3 and the drive PCB board 13.

[0038] Preferably, the first housing 2 has a first interface 21, which is fixedly and detachably connected to the sealing cover 23.

[0039] When the heat dissipation device 3 is a heat dissipation fin, the heat dissipation fin is in contact with the first housing 2. During operation, the heat from the heat-conducting oil in the first inner cavity 20 is transferred to the heat dissipation fin, and the heat dissipation fin transfers the heat to the air outside the first housing 2.

[0040] Preferably, it also includes a cooling fan 31, which is fixedly connected to the heat dissipation device 3 and is used to accelerate the airflow around the heat dissipation fins.

[0041] When the heat dissipation device 3 is a cooling water pipe or an evaporator, the cooling water pipe or evaporator can be installed inside or outside the first housing 2. When installed in the first housing 2, the cooling water pipe or evaporator needs to be in contact with the first housing 2. The cooling water pipe contains a liquid with a temperature lower than the heat transfer oil, and the cooler pipe wall exchanges heat with the heat transfer oil. The liquid in the evaporator evaporates, absorbing heat and carrying away heat from the heat transfer oil on the outside of the evaporator.

[0042] Example 3:

[0043] like Figure 3 As shown, this embodiment is a further improvement on embodiment one, and also includes a heat pipe 5 and a second housing 6. The second housing 6 forms a closed second inner cavity 60. The two ends of the heat pipe 5 are respectively inserted into the first inner cavity 20 and the second inner cavity 60 of the first housing 2. The heat pipe 5 is fixedly connected to the first housing 2 and the second housing 6, respectively. The heat dissipation device 3 is fixedly connected to the second housing 6. The heat-conducting oil in the first inner cavity 20 plays a role in heat equalization.

[0044] Preferably, it also includes a heat dissipation device 3, which is connected to the first housing 2 and is used to cool the heat transfer oil.

[0045] More preferably, the heat dissipation device 3 is a heat dissipation fin, a cooling water pipe, or an evaporator.

[0046] During operation, heat pipe 5 transfers heat to the first heat-conducting medium inside the second chamber 6, which then exchanges heat with the heat dissipation device 3. The first inner cavity 20 and the second inner cavity 60 are not connected, allowing the liquid (first heat-conducting medium) inside the second inner cavity 60 to be different from the heat-conducting oil. The second inner cavity 60 can hold a liquid with a higher specific heat capacity. Simultaneously, the second chamber 6 is located away from the space-constrained surroundings of the stator body 1, allowing its volume to be larger than the first chamber 2, thus accommodating more liquid and increasing the heat absorption of the liquid within the second inner cavity 60. By absorbing heat through a liquid with a higher specific heat capacity and larger volume, the large amount of heat absorbed prevents the stator body 1 from overheating in a short period. Furthermore, the volume of the heat-conducting oil needs to be reduced, allowing for a smaller volume of the first chamber 2, facilitating its arrangement and installation.

[0047] Example 4:

[0048] like Figure 4As shown, this embodiment is a further improvement based on embodiment one, and also includes a second housing 6 and a second pump 7. The second housing 6 forms a second inner cavity 60, and the second housing 6 forms a liquid outlet 61 and a liquid inlet 62. The first housing 2 forms a first interface 21 and a second interface 22 that communicate with its internal first inner cavity 20. The water inlet and water outlet of the second pump 7 are respectively connected to the first interface 21 and the liquid inlet 62. The liquid outlet 61 and the second interface 22 are connected. The heat dissipation device 3 is fixedly connected to the second housing 6.

[0049] Preferably, it also includes a heat dissipation device 3, which is connected to the first housing 2 and is used to cool the heat transfer oil.

[0050] More preferably, the heat dissipation device 3 is a heat dissipation fin, a cooling water pipe, or an evaporator.

[0051] Preferably, it also includes a connecting pipe 8, the two ends of which are respectively connected to the liquid outlet 61 and the second interface 22; a filter element is provided inside the connecting pipe 8.

[0052] During operation, the heat transfer oil, after absorbing heat in the first inner cavity 20, is driven by the second pump 7. The heat transfer oil sequentially enters the second inner cavity 60 through the first interface 21, the second pump 7, and the inlet 62. During the flow of the heat transfer oil in the second inner cavity 60... Figure 4 The heat exchanger 3 (cooling water pipe or evaporator) in the stator body exchanges heat with the heat transfer oil. After the temperature drops, the heat transfer oil returns to the first inner cavity 20 through the outlet 61, the connecting pipe 8, and the second interface 22. The returned heat transfer oil absorbs the heat from the copper pillar 14 and the drive PCB board 13. The heat transfer oil circulates in the first inner cavity 20 and the second inner cavity 60, carrying away the heat from the stator body 1.

[0053] Example 5:

[0054] like Figures 1 to 4 As shown, a planar motor using a stator as described in Embodiments 1 to 4 is characterized in that it includes: a mover 9, the mover 9 being equipped with a permanent magnet, and the stator body 1 driving the mover 9 to levitate and move by magnetic force.

[0055] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A stator for a moving magnet planar motor, characterized in that, include: The stator body (1) and the first housing (2) are provided. The stator body (1) includes a stator PCB board (11), a metal plate (12) and a drive PCB board (13). The upper and lower sides of the metal plate (12) are in contact with and fixedly connected to the stator PCB board (11) and the drive PCB board (13) respectively. An opening is formed on the top of the first housing (2). The metal plate (12) blocks the opening on the first housing (2) and is fixedly connected to the first housing (2). The first housing (2) and the metal plate (12) form a first inner cavity (20). The first inner cavity (20) is filled with heat-conducting oil.

2. The stator of a moving magnet planar motor according to claim 1, characterized in that: The stator body (1) also includes a copper column (14), which penetrates the stator PCB board (11), the metal plate (12) and the drive PCB board (13). The copper column (14) contacts and is fixedly connected to the stator PCB board (11), the metal plate (12) and the drive PCB board (13).

3. The stator of a moving magnet planar motor according to claim 1, characterized in that: It also includes a heat dissipation device (3), which is connected to the first housing (2) and is used to cool the heat transfer oil.

4. The stator of a moving magnet planar motor according to claim 3, characterized in that: The heat dissipation device (3) is a heat dissipation fin, a cooling water pipe or an evaporator.

5. The stator of a moving magnet planar motor according to claim 3, characterized in that: The heat dissipation device (3) is fixedly connected to the first housing (2).

6. The stator of a moving magnet planar motor according to claim 5, characterized in that: It also includes a first pump (4), which is located in the first inner cavity (20). The first pump (4) is fixedly connected to the first housing (2) via a bracket (41). The first pump (4) is used to drive the heat transfer oil to move between the heat dissipation device (3) and the drive PCB board (13).

7. The stator of a moving magnet planar motor according to claim 3, characterized in that: It also includes a heat pipe (5) and a second housing (6), the second housing (6) forming a closed second inner cavity (60), the two ends of the heat pipe (5) respectively passing through the first inner cavity (20) and the second inner cavity (60) of the first housing (2), the heat pipe (5) being fixedly connected to the first housing (2) and the second housing (6) respectively, the heat dissipation device (3) being fixedly connected to the second housing (6), and a first heat-conducting medium being provided in the second inner cavity (60).

8. The stator of a moving magnet planar motor according to claim 3, characterized in that: It also includes a second housing (6) and a second pump (7). The second housing (6) forms a second inner cavity (60). The second housing (6) forms an outlet (61) and an inlet (62). The first housing (2) forms a first interface (21) and a second interface (22) that communicate with its internal first inner cavity (20). The inlet and outlet of the second pump (7) are respectively connected to the first interface (21) and the inlet (62). The outlet (61) and the second interface (22) are connected. The heat dissipation device (3) is fixedly connected to the second housing (6). The second inner cavity (60) is provided with heat transfer oil.

9. The stator of a moving magnet planar motor according to claim 8, characterized in that: It also includes a connecting pipe (8), the two ends of which are connected to the liquid outlet (61) and the second interface (22) respectively; a filter element is provided inside the connecting pipe (8).

10. A planar motor using a stator as described in any one of claims 1 to 9, characterized in that, include: The mover (9) is equipped with a permanent magnet, and the stator body (1) drives the mover (9) to levitate and move by magnetic force.

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