Atmospheric pressure plasma generation device

Abstract

The utility model relates to the technical field of semiconductor, especially relates to an atmospheric pressure plasma generating device, it includes plasma generating cavity, ceramic electrode, bottom plate electrode, ceramic electrode is installed in plasma generating cavity, bottom plate electrode is installed in the bottom of plasma generating cavity, ceramic electrode is flat plate type electrode, the surface of bottom plate electrode is equipped with concave-convex structure, ceramic electrode and bottom electrode all exert high voltage electricity to carry out discharge and produce plasma, one of the two electrodes of the device is designed into concave-convex surface structure, increases the discharge area of electrode itself, improves the generation efficiency and production of plasma, improves the discharge efficiency and cleaning efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to an atmospheric pressure plasma generating device. Background Technology

[0002] In the current panel and semiconductor industry, atmospheric pressure plasma technology has become one of the core methods of surface treatment. Among them, dielectric barrier discharge is the mainstream plasma generation method, mainly used for cleaning and activation of product surfaces to improve adhesion performance in subsequent processes.

[0003] However, existing dielectric barrier discharge (DBD) devices have certain structural limitations: their core is mostly a system consisting of two parallel plate electrodes, with one or two layers of dielectric (such as insulating materials like ceramics) placed between the electrodes according to process requirements. By applying high voltage to the electrodes, the gas in the gap is ionized, thereby generating plasma. However, due to the fixed surface area of ​​the plate electrodes, the amount of plasma that can be excited per unit area has a natural bottleneck—under the premise of unchanged electrode size, even if parameters such as voltage and frequency are adjusted, it is difficult to break through the upper limit of plasma generation, which to some extent restricts the improvement of processing efficiency. Utility Model Content

[0004] This invention provides an atmospheric pressure plasma generator, which aims to solve the problem that existing two-layer flat electrode technology is insufficient to increase plasma generation.

[0005] This utility model provides an atmospheric pressure plasma generating device, including a plasma generating chamber, a ceramic electrode, and a base plate electrode. The ceramic electrode is installed in the plasma generating chamber, and the base plate electrode is installed at the bottom of the plasma generating chamber. The ceramic electrode is a flat plate electrode, and the surface of the base plate electrode has a concave-convex structure. High voltage is applied to both the ceramic electrode and the base plate electrode to discharge and generate plasma.

[0006] As a further improvement of this utility model, the surface concave-convex structure of the base plate electrode includes an upper and lower toothed structure, the upper and lower toothed structure is provided with multiple toothed bars, the multiple toothed bars are distributed in parallel on the surface of the base plate electrode, and adjacent toothed bars form a sawtooth shape.

[0007] As a further improvement of this utility model, the junctions of adjacent racks and the tips of the rack teeth are provided with rounded corners.

[0008] As a further improvement of this utility model, the surface concave-convex structure of the base plate electrode includes a groove-shaped structure, the groove-shaped structure including a plurality of strip grooves, and the plurality of strip grooves are opened in parallel on the surface of the base plate electrode.

[0009] As a further improvement of this utility model, the base plate electrode is provided with multiple through-holes.

[0010] As a further improvement of this utility model, the ceramic electrode includes a ceramic plate and an electrode metal, wherein the electrode metal is embedded in the ceramic plate.

[0011] As a further improvement of this utility model, the plasma generating cavity includes a main body, a cover plate, and a bottom plate. The cover plate and the bottom plate are respectively connected to the upper and lower ends of the main body. The ceramic electrode is connected above the bottom and located inside the plasma generating cavity. The bottom plate electrode is connected below the bottom plate and located outside the plasma generating cavity.

[0012] As a further improvement of this utility model, the atmospheric pressure plasma generator also includes an air inlet connector and a high-pressure plug. The air inlet connector is installed on the cover plate and connects to the plasma generating chamber, and the high-pressure plug is installed on the cover plate.

[0013] The beneficial effects of this invention are: one of the two electrodes of this device is designed with a concave-convex surface structure, which increases the discharge area of ​​the electrode itself, improves the plasma generation efficiency and output, and improves the discharge efficiency and cleaning efficiency. Attached Figure Description

[0014] Figure 1 This is an exploded view of the atmospheric pressure plasma generator of this utility model;

[0015] Figure 2 This is a structural diagram of the base plate electrode with upper and lower toothed structure of this utility model;

[0016] Figure 3 This is a side view of the bottom plate electrode structure with upper and lower toothed structure of this utility model;

[0017] Figure 4 This is an enlarged view of a portion of the base plate electrode with upper and lower toothed structure of this utility model;

[0018] Figure 5 This is a structural diagram of the base plate electrode with a slotted structure according to this utility model;

[0019] Figure 6 This is a plan view of the base plate electrode structure with a slotted structure of this utility model;

[0020] Figure 7 This is a cross-sectional view of the bottom plate electrode structure with a groove-like structure of this utility model;

[0021] Figure 8 This is an enlarged view of a portion of the base plate electrode with a groove-like structure according to this utility model. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0023] like Figure 1 As shown, the present invention provides an atmospheric pressure plasma generating device, comprising a plasma generating chamber 1, a ceramic electrode 2, and a bottom plate electrode 3. The ceramic electrode 2 is installed inside the plasma generating chamber 1, and the bottom plate electrode 3 is installed at the bottom of the plasma generating chamber 1. The ceramic electrode 2 is a flat plate electrode, and the surface of the bottom plate electrode 3 is provided with a concave-convex structure. High voltage is applied to both the ceramic electrode 2 and the bottom electrode to discharge and generate plasma.

[0024] In order to improve the plasma cleaning efficiency within the same structure and space, the structure of this device uses a conventional flat plate electrode for the ceramic electrode 2, and the bottom plate electrode 3 at the bottom of the plasma generating chamber 1 is designed with a concave-convex surface structure to increase its discharge area. Thus, when a high voltage is applied, the ceramic electrode 2 and the bottom electrode can generate more plasma after discharge.

[0025] like Figures 2 to 4 As shown, the surface uneven structure of the base plate electrode 3 includes upper and lower tooth-like structures 4, each with multiple toothed strips 5. These strips 5 are distributed parallel to each other on the surface of the base plate electrode 3, with adjacent strips 5 forming a serrated shape. The junctions of adjacent strips 5 and the tips of the teeth 5 are rounded with corners 6. The uneven structure can be made into upper and lower tooth-like structures, and through the rounded corners 6 of the serrated structure, more discharge surfaces are increased between the base plate 12 and the electrode 3, thus generating more plasma.

[0026] like Figures 5 to 8 As shown, the surface uneven structure of the base plate electrode 3 includes a slot-shaped structure 7, which includes multiple strip-shaped grooves 8, which are parallel to each other on the surface of the base plate electrode 3. The uneven surface structure can also be designed as a slot, and the multiple concave strip-shaped grooves 8 are equivalent to a surface-downward extension, which increases the discharge area of ​​the inner wall of the slot and can generate more plasma.

[0027] The base plate electrode 3 is provided with multiple through-holes 9. After the introduced gas is ionized by the two electrodes, the generated plasma is discharged from the through-holes 9 and comes into contact with the surface of the product being cleaned to complete the plasma cleaning. For the base plate electrode 3 with upper and lower toothed structure 4, the through-holes 9 can be set at the bottom of the junction of the toothed racks 5. For the base plate electrode 3 with slotted structure 7, the through-holes 9 can be set at the bottom of the strip groove 8.

[0028] The ceramic electrode 2 includes a ceramic plate and an electrode metal, with the electrode metal embedded within the ceramic plate. The electrode metal inside the ceramic plate still uses the conventional flat plate electrode. The metal inside the ceramic plate acts as an electrode, and the ceramic acts as a dielectric, working in conjunction with the base plate electrode 3 to ionize and generate plasma.

[0029] The plasma generating chamber 1 includes a main body 11, a cover plate 10, and a bottom plate 12. The cover plate 10 and the bottom plate 12 are respectively connected to the upper and lower ends of the main body 11. The ceramic electrode 2 is connected above the bottom and located inside the plasma generating chamber 1. The bottom plate electrode 3 is connected below the bottom plate 12 and located outside the plasma generating chamber 1.

[0030] The plasma generating chamber 1 is divided into three structures: a cover plate 10, a main body 11, and a base plate 12. The base plate electrode 3 connected to the lower part of the base plate 12 serves as one electrode, the metal inside the ceramic electrode 2 serves as another electrode, and the ceramic serves as the dielectric. When a high voltage is applied to the ceramic electrode 2, a large amount of plasma is generated between the two electrodes.

[0031] The atmospheric pressure plasma generator also includes an air inlet connector 13 and a high-voltage plug 14. The air inlet connector 13 is mounted on the cover plate 10 and connects to the plasma generating chamber 1. The high-voltage plug 14 is mounted on the cover plate 10. The air inlet connector 13 is used to connect to an external gas supply device, supplying gas to the plasma generating chamber 1 to ionize it into plasma gas under high pressure. The high-voltage plug 14 is connected to an external power source to apply high voltage to the ceramic electrode 2 and the bottom electrode.

[0032] This invention increases the discharge area of ​​the electrode within the same space, thereby increasing the amount of plasma generated during discharge and improving discharge and cleaning efficiency.

[0033] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the protection scope of the present invention.

Claims

1. An atmospheric pressure plasma generator, characterized in that, It includes a plasma generating chamber, a ceramic electrode, and a base plate electrode. The ceramic electrode is installed in the plasma generating chamber, and the base plate electrode is installed at the bottom of the plasma generating chamber. The ceramic electrode is a flat electrode, and the surface of the base plate electrode has a concave-convex structure. High voltage is applied to both the ceramic electrode and the base plate electrode to discharge and generate plasma.

2. The atmospheric pressure plasma generator according to claim 1, characterized in that, The surface of the base plate electrode has an uneven structure including upper and lower toothed structures. The upper and lower toothed structures are provided with multiple toothed strips, which are distributed in parallel on the surface of the base plate electrode, and adjacent toothed strips form a serrated shape.

3. The atmospheric pressure plasma generator according to claim 2, characterized in that, The junctions of adjacent racks and the tips of the rack teeth are all rounded.

4. The atmospheric pressure plasma generator according to claim 1, characterized in that, The surface of the base plate electrode has a groove-like structure, which includes multiple strip grooves that are opened in parallel on the surface of the base plate electrode.

5. The atmospheric pressure plasma generator according to claim 1, characterized in that, The base plate electrode is provided with multiple through-holes.

6. The atmospheric pressure plasma generator according to claim 1, characterized in that, The ceramic electrode includes a ceramic plate and an electrode metal, with the electrode metal embedded within the ceramic plate.

7. The atmospheric pressure plasma generator according to claim 1, characterized in that, The plasma generating chamber includes a main body, a cover plate, and a bottom plate. The cover plate and the bottom plate are respectively connected to the upper and lower ends of the main body. The ceramic electrode is connected above the bottom and located inside the plasma generating chamber. The bottom plate electrode is connected below the bottom plate and located outside the plasma generating chamber.

8. The atmospheric pressure plasma generator according to claim 7, characterized in that, It also includes an air inlet connector and a high-pressure plug. The air inlet connector is mounted on the cover plate and connected to the plasma generating chamber, and the high-pressure plug is mounted on the cover plate.

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