A vacuum annealing apparatus

Abstract

The utility model discloses vacuum annealing equipment, including annealing bin, air inlet device, air extraction device and heating device, heating device sets up in the annealing bin, air inlet device sets up above heating device, air extraction device sets up below heating device, air inlet device includes first air inlet pipe, and first air inlet pipe includes thick pipe and the thin pipe of embedding in thick pipe, and the first air inlet pipe is made into spiral structure with thick pipe and thin pipe synchronous bending, the top of thin pipe is provided with a plurality of first air outlet holes of interval arrangement, the bottom of thick pipe is provided with a plurality of second air outlet holes of interval arrangement to heating device. The utility model can avoid the situation that the gas concentrated impact to the film surface in annealing equipment leads to the inhomogeneous or gas suspension on the film above and is difficult to play the role, effectively improves the processing efficiency and improves the processing quality.

Description

Technical Field

[0001] This utility model relates to the field of optoelectronic material preparation equipment technology, specifically a vacuum annealing device. Background Technology

[0002] As a representative of new energy technologies, perovskite photovoltaic technology's rapid efficiency advancements are inseparable from the continuous iteration of material systems and process technologies. Annealing is a crucial step in the fabrication of perovskite solar cells, and the annealing of perovskite thin films is of paramount importance, serving as a key control point determining the crystallinity quality of the perovskite film. The annealing process, through thermodynamic driving of solvent evaporation, ion rearrangement, and grain growth in the precursor solution, directly affects the film's phase purity, grain boundary density, and defect state concentration. The control of annealing process parameters and equipment significantly impacts device efficiency.

[0003] In existing technologies, perovskite thin film annealing is mostly performed on a hot stage in an atmospheric environment. The substrate annealed on the hot stage is affected by factors such as humidity and temperature in the environment. Therefore, in actual operation, if specific temperature and humidity are required for annealing, the temperature and humidity of the entire environment need to be adjusted, resulting in significant waste and affecting the accuracy of adjustment. To solve this problem, researchers use ovens to create relatively small, sealed environments, thereby reducing environmental control costs and energy waste, and introducing a certain amount of inert gas or organic solvent for atmospheric annealing. However, in a high-temperature, sealed environment, the gas suspended above the cavity has difficulty acting on the film surface. Furthermore, if the action is achieved through the free movement of the gas, the action time will be too long, causing damage to the film. Ensuring the uniformity of gas action during annealing is also a research challenge. Therefore, improvements are urgently needed. Utility Model Content

[0004] The technical problem solved by this utility model is to provide a vacuum annealing device to overcome the shortcomings in the above-mentioned background technology.

[0005] The technical problem solved by this utility model is achieved by the following technical solution:

[0006] A vacuum annealing apparatus includes an annealing chamber, an air inlet device, an air extraction device, and a heating device. The heating device is disposed inside the annealing chamber, the air inlet device is disposed above the heating device, and the air extraction device is disposed below the heating device. The air inlet device includes a first air inlet pipe, which includes a thick pipe and a thin pipe embedded in the thick pipe. The thick pipe and the thin pipe are simultaneously bent to form a spiral structure in the first air inlet pipe. The top of the thin pipe is provided with a plurality of first air outlets arranged at intervals, and the bottom of the thick pipe is provided with a plurality of second air outlets arranged at intervals facing the heating device.

[0007] In this invention, the air intake device further includes a second air intake pipe, which has the same structure as the first air intake pipe and is also spiral in shape and embedded in the first air intake pipe.

[0008] In this invention, the first air outlet holes on the inner thin tubes of the first and second air inlets are evenly distributed, and the size of the first air outlet holes increases sequentially along the gas delivery direction.

[0009] In this invention, the second air outlets on the thicker pipe are evenly distributed on the first and second air inlets, and the second air outlets on the thicker pipe and the first air outlets on the thinner pipe are staggered.

[0010] In this invention, the gap between the first air intake pipe and the second air intake pipe is 0.5 to 1 cm.

[0011] In this invention, the ratio of the inner diameter of the thicker pipe to the thinner pipe on both the first and second air intake pipes is 1:2 to 3.

[0012] In this invention, the projection of the spiral structure completely covers or is larger than the heating device.

[0013] In this invention, the heating device includes a platform, on which a heating plate and a heat-conducting layer are sequentially arranged. Inside the heating plate, at least two independent heating tubes are arranged in a spiral pattern at intervals.

[0014] In this invention, the heating plate is a heat-conducting aluminum plate, and a receiving cavity is provided inside the aluminum plate, with the heating tube disposed inside the receiving cavity.

[0015] In this invention, the thermally conductive layer is thermally conductive silicone.

[0016] Beneficial effects: The vacuum annealing equipment described in this utility model uses a unique coarse-tube-within-a-fine-tube design in its air inlet device. After the gas enters, it escapes through the fine tube and enters the coarse tube. It is then buffered and redistributed within the coarse tube before escaping evenly downwards through the second air outlet at the bottom of the coarse tube. Combined with the air extraction device, this allows the gas to be evenly delivered to the film located on the heating device and interact with the film surface. This avoids the situation in annealing equipment where the gas concentrates and impacts the film surface, resulting in unevenness or the gas suspending above the film and failing to function effectively. This effectively improves processing efficiency and processing quality.

[0017] The vacuum annealing equipment of this utility model has an air intake device including a first air intake pipe and a second air intake pipe that are independent of each other, so that different gases can be introduced at the same time according to the annealing needs during the processing, and the needs of high processing efficiency and uniformity can be met at the same time. Attached Figure Description

[0018] Figure 1This is a schematic diagram of the structure of this utility model.

[0019] Figure 2 This is a schematic diagram of the structure of the first air intake pipe or the second air intake pipe in a preferred embodiment of the present invention.

[0020] Figure 3 This is a top view of the first and second air intake pipes in a preferred embodiment of the present invention.

[0021] Figure 4 This is a schematic diagram of the heating plate in a preferred embodiment of the present invention.

[0022] The components are: 1. Annealing chamber; 2. Air intake device; 21. First air intake pipe; 211. Coarse pipe; 2111. Second air outlet; 212. Fine pipe; 2121. First air outlet; 22. Second air intake pipe; 3. Heating device; 31. Heat-conducting layer; 32. Heating plate; 33. Platform; 34. Heating tube; 4. Air extraction device. Detailed Implementation

[0023] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the following description, in conjunction with specific illustrations, further elaborates on this utility model.

[0024] See Figures 1-4 As shown, a vacuum annealing apparatus includes an annealing chamber 1, an air inlet device 2, an air extraction device 4, and a heating device 3. The heating device 3 is disposed inside the annealing chamber 1, and the perovskite film to be annealed is placed on the heating device 3. Figure 1 As shown, the heating device 3 includes a stage 33, on which a heating plate 32 and a heat-conducting layer 31 are sequentially arranged. Figure 4 As shown, the heating plate 32 has two independent and spaced-apart spiral heating tubes 34 inside. In a preferred embodiment, the heating plate 32 is a thermally conductive aluminum plate with an internal cavity. The heating tubes 34 are disposed within the cavity. The two independently temperature-controlled and spirally arranged heating tubes 34 ensure uniform heating and reduce temperature deviations caused by a single heating tube 34. The thermally conductive layer 31 is a thermally conductive silicone rubber. The flexible thermally conductive layer 31 ensures good adhesion of the perovskite film due to its deformation properties, preventing gaps between the perovskite film and the flexible thermally conductive layer 31 caused by heating deformation, thus ensuring uniform heating in all areas.

[0025] The air intake device 2 is positioned above the heating device 3, such as... Figure 1 , Figure 2As shown, the air intake device 2 includes a first air intake pipe 21, which includes a thick pipe 211 and a thin pipe 212 embedded in the thick pipe 211. The thick pipe 211 and the thin pipe 212 are bent synchronously to make the first air intake pipe 21 into a spiral structure. The projection of the spiral structure can completely cover the heating device 3. The top of the thin pipe 212 is provided with a plurality of first air outlet holes 2121 arranged at intervals, and the bottom of the thick pipe 211 is provided with a plurality of second air outlet holes 2111 arranged at intervals facing the heating device 3. By using a unique coarse tube 211 enclosing a fine tube 212, during the annealing process, the gas escapes from the fine tube 212 and enters the coarse tube 211. It is then buffered and redistributed within the coarse tube 211 before escaping evenly downwards through the second vent 2111 at the bottom of the coarse tube 211. Combined with the downward guidance of the extraction device 4, the gas can be evenly transferred to the film located on the heating device 3 and interact with the film surface. This avoids the situation in the annealing equipment where the gas concentrates and impacts the film surface, resulting in unevenness or the gas suspending above the film and failing to function properly.

[0026] In a preferred embodiment, such as Figure 3 As shown, the heating device 3 also includes a second air inlet pipe 22. The second air inlet pipe 22 has the same structure as the first air inlet pipe 21, and it also has a spiral structure and is embedded in the first air inlet pipe 21. The gap between the first air inlet pipe 21 and the second air inlet pipe 22 is 0.5-1 cm. The projection of the spiral structure formed by the first air inlet pipe 21 and the second air inlet pipe 22 completely covers or is larger than the heating device 3. Thus, in actual operation, the first air inlet pipe 21 and the second air inlet pipe 22 allow independent air intake, which can simultaneously control two gases. Different gases can be introduced at different times, meeting the needs of high processing efficiency and uniformity, thereby better meeting the needs of various application scenarios.

[0027] In a further improved embodiment, the first air outlet holes 2121 on the thin tubes 212 inside the first air inlet pipe 21 and the second air inlet pipe 22 are evenly spaced, and the diameter of the first air outlet holes 2121 increases sequentially along the gas conveying direction; while on the first air inlet pipe 21 and the second air inlet pipe 22, the second air outlet holes 2111 on the thick tubes 211 are evenly distributed and have the same size, and the second air outlet holes 2111 on the thick tubes 211 and the first air outlet holes 2121 on the thin tubes 212 are staggered, thereby better ensuring the uniformity of gas outlet speed and gas outlet distribution.

[0028] In this invention, the ratio of the inner diameter of the thicker pipe 211 to the thinner pipe 212 on the first air intake pipe 21 and the second air intake pipe 22 is 1:2 to 3, preferably 1:2, thereby ensuring sufficient gas buffer space.

[0029] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0031] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "connection", "linking", "fixing", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components.

[0032] The above description, in conjunction with specific embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, several simple deductions or substitutions can be made without departing from the concept of the present invention.

Claims

1. A vacuum annealing apparatus, characterized in that, The device includes an annealing chamber, an air intake device, an air extraction device, and a heating device. The heating device is located inside the annealing chamber, the air intake device is located above the heating device, and the air extraction device is located below the heating device. The air intake device includes a first air intake pipe, which includes a thick pipe and a thin pipe embedded in the thick pipe. The thick pipe and the thin pipe are bent simultaneously to make the first air intake pipe have a spiral structure. The top of the thin pipe has a plurality of first air outlets arranged at intervals, and the bottom of the thick pipe has a plurality of second air outlets arranged at intervals facing the heating device.

2. The vacuum annealing equipment according to claim 1, characterized in that, The air intake device also includes a second air intake pipe, which has the same structure as the first air intake pipe and is also spiral-shaped and embedded in the first air intake pipe.

3. The vacuum annealing equipment according to claim 1 or 2, characterized in that, The first air outlet holes on the thin tubes inside the first and second air inlets are evenly distributed, and the size of the first air outlet holes increases sequentially along the gas delivery direction.

4. The vacuum annealing equipment according to claim 3, characterized in that, On the first and second air inlets, the second air outlets on the thicker pipes are evenly distributed, and the second air outlets on the thicker pipes and the first air outlets on the thinner pipes are staggered.

5. The vacuum annealing equipment according to claim 2, characterized in that, The gap between the first air intake pipe and the second air intake pipe is 0.5~1cm.

6. The vacuum annealing equipment according to claim 2, characterized in that, The ratio of the inner diameter of the thicker pipe to the thinner pipe on both the first and second air intake pipes is 1:2 to 3.

7. The vacuum annealing equipment according to claim 1, characterized in that, The projection of the spiral structure completely covers or is larger than the heating device.

8. The vacuum annealing equipment according to claim 1, characterized in that, The heating device includes a platform, on which a heating plate and a heat-conducting layer are arranged in sequence. Inside the heating plate, at least two independent heating tubes are arranged in a spiral arrangement at intervals.

9. The vacuum annealing equipment according to claim 8, characterized in that, The heating plate is a heat-conducting aluminum plate, and a cavity is provided inside the aluminum plate, with the heating tube disposed inside the cavity.

10. The vacuum annealing equipment according to claim 8, characterized in that, The thermally conductive layer is thermally conductive silicone.

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