Wafer frame cassette

Abstract

A wafer frame box includes a first housing, a second housing, at least one horizontal moving member and at least one vertical moving member. The horizontal moving member is configured to move between a limiting position abutting against a second opening portion of the second housing to limit the first housing and the second housing from moving along a vertical direction and a releasing position away from the second opening portion of the second housing. The vertical moving member is configured to move between a stop position abutting against the horizontal moving member to limit the horizontal moving member from moving along a horizontal direction and a releasing position away from the horizontal moving member. Through the double limiting design of the horizontal moving member and the vertical moving member, the overall box body can effectively improve the structural stability and sealing effect.

Description

Technical Field

[0001] This utility model relates to a wafer frame box, and more particularly to a wafer frame box for improving structural stability and sealing effect. Background Technology

[0002] In existing technologies, wafer carriers such as wafer frame boxes are commonly used for the transportation and storage of 12-inch wafers or wafer frames. To avoid vibration or particulate contamination during handling, the boxes must be securely sealed and fixed. The industry-standard octagonal wafer box (such as an octagonal box) typically consists of a top cover and a bottom cover, secured by a single type of snap-fit ​​fastener around the box for easy opening and closing and a simple structure.

[0003] However, this type of structure relies solely on a single-point latch to restrict the relative movement between the upper and lower covers, resulting in insufficient stability. In particular, in both the vertical and horizontal directions, vibrations during transport or lateral forces can cause the latch to loosen and the cover to shift, thereby reducing the reliability of wafer protection. Furthermore, single-point latches cannot effectively restrict the sliding or micro-movement of the housing in multiple axes, which can easily lead to the generation of particles or damage to the wafer.

[0004] Therefore, in order to overcome the shortcomings and deficiencies of the prior art, it is necessary to provide an improved wafer frame box to solve the problems existing in the prior art. Utility Model Content

[0005] In view of this, the main objective of this utility model is to provide a wafer frame box that utilizes a dual limiting design of horizontal and vertical moving parts to effectively improve the overall structural stability and sealing effect of the box.

[0006] To achieve the above objectives, the present invention provides a wafer frame cassette, comprising a first housing, a second housing, at least one horizontal moving member, and at least one vertical moving member. The first housing includes a first opening; the second housing includes a second opening, configured to combine with the first opening of the first housing to define a wafer accommodating space between the first housing and the second housing; the horizontal moving member is disposed on the first opening of the first housing, and configured to move between a limiting position abutting against the second opening of the second housing to restrict movement of the first housing and the second housing in a vertical direction, and a release position away from the second opening of the second housing; the vertical moving member is disposed on the second opening of the second housing, and configured to move between a stop position abutting against the horizontal moving member to restrict movement of the horizontal moving member in a horizontal direction, and a release position away from the horizontal moving member.

[0007] In one embodiment of the present invention, the first opening includes at least one first slide rail, and a groove of the horizontal moving member is configured to slide along the first slide rail.

[0008] In one embodiment of the present invention, the second opening includes at least one second slide rail, and the slide groove of the horizontal moving member is configured to slide to the second slide rail at a restricted position, so that the slide groove abuts against the first slide rail and the second slide rail.

[0009] In one embodiment of the present invention, the second slide rail has an inclined surface, and the slide groove has a stepped portion, which slides along the inclined surface and is pressed together.

[0010] In one embodiment of the present invention, the first opening further includes at least one positioning part, which is disposed on the first slide rail and configured to allow the horizontal moving member to slide to the release position for engagement and fixation.

[0011] In one embodiment of the present invention, the horizontal moving member includes two arcuate protrusions, which are configured to allow a user's finger to rest against them.

[0012] In one embodiment of the present invention, the second opening further includes at least one movable groove, and the vertical moving member is configured to slide in the movable groove.

[0013] In one embodiment of the present invention, the vertical moving member includes a body and an extension rod, the extension rod extending from the body toward a first housing in one direction, and the extension rod is configured to abut against the horizontal moving member at a stop position.

[0014] In one embodiment of the present invention, the second opening further includes at least one guide groove, which is configured to allow the extension rod of the vertical moving member to pass through, so as to position the extension rod against a position of the horizontal moving member.

[0015] In one embodiment of the present invention, the vertical moving member further includes a protrusion portion disposed on the body and configured for the user's finger to rest against.

[0016] As described above, this wafer frame box utilizes a dual-limiting design with both horizontal and vertical moving parts, ensuring that the first and second housings are simultaneously restricted in both the horizontal and vertical directions when closed. This significantly improves the overall structural stability and sealing effect of the box. Compared to traditional wafer box designs using only a single snap-fit ​​component, this invention effectively prevents the box from loosening or shifting due to handling or vibration, and reduces the risk of wafer damage or particle generation, resulting in a more robust structure. Furthermore, both the horizontal and vertical moving parts are manually operated, conforming to ergonomic design principles, providing ease of use and good feedback, thus enhancing user efficiency and accuracy in practical operations. Attached Figure Description

[0017] Figure 1 This is a perspective view of one embodiment of the wafer frame box of this utility model.

[0018] Figure 2 This is an exploded view of one embodiment of the wafer frame box of this utility model.

[0019] Figure 3 This is a partial view of the horizontal moving member in the release position and the vertical moving member in the detached position of an embodiment of the wafer frame box of this utility model.

[0020] Figure 4 This is a partial view of the horizontal moving member in the restricted position and the vertical moving member in the released position of an embodiment of the wafer frame box of this utility model.

[0021] Figure 5 This is a partial view of the horizontal moving member in the restricted position and the vertical moving member in the stopped position of an embodiment of the wafer frame box of this utility model.

[0022] Figure 6 yes Figure 5 A plan view. Detailed Implementation

[0023] The following descriptions of the embodiments are with reference to the accompanying drawings, illustrating specific embodiments in which the present invention can be implemented. Furthermore, directional terms used in this invention, such as up, down, top, bottom, front, back, left, right, inside, outside, side, surrounding, center, horizontal, transverse, vertical, longitudinal, axial, radial, uppermost, or lowermost, are merely directions with reference to the accompanying drawings. Therefore, the directional terms used are for the purpose of explaining and understanding the present invention, and not for limiting the present invention.

[0024] Reference Figure 1 The figure shown is a perspective view of an embodiment of the wafer frame box of this utility model, wherein the wafer frame box includes a first housing 2, a second housing 3, two horizontal moving parts 4 and two vertical moving parts 5. In other embodiments, the wafer frame box may also be provided with only one horizontal moving part 4 and one vertical moving part 5. The detailed structure, assembly relationship and operating principle of each component will be described in detail below.

[0025] Reference Figure 2 The figure shown is an exploded view of an embodiment of the wafer frame box of the present invention. The first housing 2 includes a first opening 21, and the second housing 3 includes a second opening 31. The second opening 31 of the second housing 3 is configured to combine with the first opening 21 of the first housing 2 to define a wafer accommodating space 6 between the first housing 2 and the second housing 3. A plurality of carrier frames 7 of the wafer frame box are respectively disposed in the first housing 2 and the second housing 3 for carrying a plurality of wafers.

[0026] Reference Figure 3 The image shows a partial view of the horizontal moving member in the release position and the vertical moving member in the detached position of an embodiment of the wafer frame cassette of this utility model. In this embodiment, the horizontal moving member 4 is disposed on the first opening 21 of the first housing 2 and is capable of moving horizontally left and right. The horizontal moving member 4 is configured to move between a restricted position and a release position. In the restricted position, the horizontal moving member 4 abuts against the second opening 31 of the second housing 3 to restrict the first housing 2 and the second housing 3 from moving in a vertical direction. In the release position, the horizontal moving member 4 moves away from the second opening 31 of the second housing 3.

[0027] Furthermore, the vertical moving member 5 is disposed on the second opening 31 of the second housing 3 and is capable of moving vertically up and down. The vertical moving member 5 is configured to move between a stop position and a release position. In the stop position, the vertical moving member 5 abuts against the horizontal moving member 4 to restrict the horizontal moving member 4 from moving in a horizontal direction. In the release position, the vertical moving member 5 moves away from the horizontal moving member 4.

[0028] Reference Figure 4 The image shows a partial view of the horizontal moving member in the restricted position and the vertical moving member in the released position of an embodiment of the wafer frame cassette of this utility model. The first opening 21 includes a first slide rail 211, and the horizontal moving member 4 has a slide groove 41 (see...). Figure 3 and Figure 6 The second opening 31 is configured to slide along the first slide rail 211; the second opening 31 includes a second slide rail 311 (see...). Figure 3 and Figure 6 The slide groove 41 of the horizontal moving member 4 is configured to slide to the second slide rail 311 at a restricted position, so that the slide groove 41 abuts against the first slide rail 211 and the second slide rail 311. In this embodiment, the second slide rail 311 has an inclined surface, and the slide groove 41 has a stepped portion 411 (see...). Figure 6 In the restricted position, the stepped part 411 slides along the inclined plane and is pressed tightly.

[0029] Reference Figure 5 The image shown is a partial view of the horizontal moving member in the restricted position and the vertical moving member in the stopped position according to an embodiment of the wafer frame box of this utility model. Figure 6 for Figure 5 In the plan view, the first opening 21 also includes a positioning part 212, which is disposed on the first slide rail 211 and configured to allow the horizontal moving member 4 to slide to the release position for engagement and fixation.

[0030] like Figure 3 and Figure 6As shown, the horizontal moving member 4 includes two arcuate protrusions 42, which are configured to allow a user's finger to rest against. The second opening 31 also includes a movable groove 312 and a guide groove 313. The vertical moving member 5 is configured to slide in the movable groove 312. Specifically, the vertical moving member 5 includes a body 51, an extension rod 52, and a protrusion 53. The extension rod 52 extends from the body 51 toward the first housing 2 and is configured to abut against the horizontal moving member 4 at a stop position. The guide groove 313 is configured to allow the extension rod 52 of the vertical moving member 5 to pass through, thereby positioning the extension rod 52 against the horizontal moving member 4 at a certain position. The protrusion 53 is disposed on the body 51 and is configured to allow a user's finger to rest against.

[0031] Based on the above structure, such as Figure 3 As shown, when the horizontal moving part 4 and the vertical moving part 5 are released, the first housing 2 and the second housing 3 can be opened to load or unload the wafer. When the first housing 2 and the second housing 3 are closed, they cooperate... Figure 4 As shown, when the user manipulates the arcuate protrusion 42 with their finger, the horizontal moving member 4 moves from the released position to the restricted position. It is then pressed together by sliding along the inclined surface of the second slide rail 311 via the stepped portion 411 of the slide groove 41, causing the slide groove 41 to abut against the first slide rail 211 and the second slide rail 311, thus restricting the vertical movement of the first housing 2 and the second housing 3. Next, as... Figure 5 As shown, when the user then moves the synaptic part 53 with their finger, the extension rod 52 of the vertical moving part 5 abuts against the horizontal moving part 4 through the guide groove 313, so that the horizontal moving part 4 is fixed and its movement in the horizontal direction is restricted, thereby strengthening the limiting effect of the horizontal moving part 4 on the first housing 2 and the second housing 3.

[0032] Conversely, the user can use their finger to pry the synaptic 53 to return the vertical moving member 5 to the released position, causing the extension rod 52 to disengage from the horizontal moving member 4. Then, the user can use their finger to pry the arcuate protrusion 42 to return the horizontal moving member 4 to the release position. At this time, the horizontal moving member 4 is engaged and fixed in the positioning part 212, and the slide groove 41 only abuts against the first slide rail 211, so that the first housing 2 and the second housing 3 can be opened.

[0033] As described above, this wafer frame box utilizes a dual limiting design with a horizontal moving member 4 and a vertical moving member 5. This design allows the first housing 2 and the second housing 3 to be simultaneously restricted in both the horizontal and vertical directions when closed, significantly improving the overall structural stability and sealing effect of the box. Specifically, when the user manipulates the arc-shaped protrusion 42, the horizontal moving member 4 moves from the release position to the restriction position, providing vertical restriction for the first housing 2 and the second housing 3. Then, the extension rod 52 of the vertical moving member 5 abuts against the horizontal moving member 4, further fixing its position and providing horizontal restriction. Compared to traditional wafer box designs using only a single snap-fit ​​component, this invention effectively prevents the box from loosening or shifting due to handling or vibration, reducing the risk of wafer damage or particle generation, and resulting in a more robust structure. Furthermore, both the horizontal and vertical moving members are manually operated, conforming to ergonomic design principles, making them convenient to use and providing good feedback, thus improving user efficiency and accuracy in practical operations.

[0034] This utility model has been described by the above-described related embodiments; however, the above embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. On the contrary, modifications and equivalent provisions contained in the spirit and scope of the claims are all included within the scope of this utility model.

Claims

1. A wafer frame box, characterized in that: The wafer frame box includes: A first housing, including a first opening; A second housing includes a second opening configured to combine with the first opening of the first housing to define a wafer accommodating space between the first housing and the second housing; At least one horizontal moving member is disposed on the first opening of the first housing, the horizontal moving member being configured to move between the limiting position abutting against the second opening of the second housing to restrict movement of the first housing and the second housing in a vertical direction, and the releasing position away from the second opening of the second housing; and At least one vertical moving member is disposed on the second opening of the second housing, the vertical moving member being configured to move between a stop position that abuts against the horizontal moving member to limit the horizontal moving member's movement in a horizontal direction and a release position away from the horizontal moving member.

2. The wafer frame box as described in claim 1, characterized in that: The first opening includes at least one first slide rail, and a groove of the horizontal moving member is configured to slide along the first slide rail.

3. The wafer frame box as described in claim 2, characterized in that: The second opening includes at least one second slide rail, and the groove of the horizontal moving member is configured to slide to the second slide rail at the restricted position, such that the groove abuts against the first slide rail and the second slide rail.

4. The wafer frame box as described in claim 3, characterized in that: The second slide rail has an inclined surface, and the slide groove has a stepped portion, which slides along the inclined surface and is pressed together.

5. The wafer frame box as described in claim 4, characterized in that: The first opening further includes at least one positioning part, which is disposed on the first slide rail and configured to allow the horizontal moving member to slide to the release position for engagement and fixation.

6. The wafer frame box as described in claim 5, characterized in that: The horizontal moving part includes two arcuate protrusions configured to allow a user's finger to rest against.

7. The wafer frame box as described in claim 6, characterized in that: The second opening also includes at least one movable groove, in which the vertical moving member is configured to slide.

8. The wafer frame box as described in claim 7, characterized in that: The vertical moving member includes a body and an extension rod extending from the body toward the first housing in one direction, and the extension rod is configured to abut against the horizontal moving member at the stop position.

9. The wafer frame box as described in claim 8, characterized in that: The second opening further includes at least one guide groove configured for the extension rod of the vertical moving member to pass through, thereby positioning the extension rod against a position of the horizontal moving member.

10. The wafer frame box as described in claim 9, characterized in that: The vertical moving member further includes a synaptic portion disposed on the body and configured for the user's finger to rest against.

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