A feeding device for semiconductor production

Abstract

The utility model discloses a kind of feeding devices for semiconductor production, it is related to semiconductor production technical field, including motor cabinet, four-axis horizontal multi-joint type clean mechanical arm is installed in motor cabinet top surface middle part, four-axis horizontal multi-joint type clean mechanical arm includes lifting base, big arm, small arm and end rotating shaft, mounting seat is fixedly connected on end rotating shaft, two guide rods are symmetrically fixedly connected in mounting seat top surface, disc is fixedly connected in two guide rods top end, semi-enclosed cover is fixedly connected in disc bottom surface, semi-enclosed cover bottom end is fixedly connected with mounting seat outer wall bottom end;The utility model is through the cooperation of n-shaped block, plug-in block and the jack of upper mechanical finger and lower mechanical finger, it is convenient to quickly install mechanical finger, improves the replacement efficiency, and then the quick fixing function of mechanical finger can be realized;Finally solve the problem that the mechanical finger of existing device is replaced by bolt fixation, replacement process is complicated, time-consuming is relatively long, production efficiency is low, improve production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a feeding device for semiconductor manufacturing. Background Technology

[0002] In the semiconductor manufacturing process, wafer transport is a critical step, which usually requires the cooperation of robotic arms and robotic fingers; the performance of the feeding device directly affects product quality and production efficiency.

[0003] Different wafer sizes require different mechanical fingers. Existing devices typically use bolts to fix and replace mechanical fingers, which is cumbersome, time-consuming to disassemble and install, and reduces production efficiency. Therefore, improvements are needed to address these issues. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a feeding device for semiconductor production.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: a feeding device for semiconductor production, comprising a motor cabinet, wherein a four-axis horizontal multi-joint cleanroom robotic arm is mounted on the center of the top surface of the motor cabinet, the four-axis horizontal multi-joint cleanroom robotic arm comprising a lifting base, a large arm, a small arm, and an end-rotating shaft, a mounting base coaxially fixed to the end-rotating shaft, two guide rods symmetrically fixed to the top surface of the mounting base, a disc fixed to the top of the two guide rods, and a semi-enclosed cover fixed to the bottom surface of the disc. The bottom end is fixedly connected to the bottom end of the outer wall of the mounting base. A lower mounting plate is fixedly connected to the outer wall of the mounting base extending from the opening of the semi-enclosed cover. A lower mechanical finger is installed at one end of the lower mounting plate. A stepper motor is installed in the middle of the top surface of the disc. A lead screw rotatably disposed in the middle of the top surface of the mounting base is coaxially fixed to the output shaft of the stepper motor. A lifting plate is sleeved on the lead screw and the guide rod. An upper mounting plate extending from the opening of the semi-enclosed cover is fixedly connected to one side of the outer wall of the lifting plate. An upper mechanical finger mirror-shaped to the lower mechanical finger is installed at one end of the upper mounting plate.

[0006] Preferably, a plurality of vacuum suction cups are evenly installed on the opposing surfaces of the upper and lower mechanical fingers, and vacuum suction tubes communicating with the vacuum suction cups are provided on the opposing surfaces of the upper and lower mechanical fingers. One end of each of the two vacuum suction tubes is connected to a vacuum machine installed on the opposing surfaces of the lower and upper mounting plates, respectively.

[0007] Preferably, the lower mounting plate and the upper mounting plate are provided with rectangular slots for mounting the upper mechanical finger and the lower mechanical finger. An n-shaped block is rotatably mounted on both sides of the rectangular slot. Multiple inserts are fixed to the bottom of the opposite surfaces of the two n-shaped blocks. The upper mechanical finger and the lower mechanical finger are provided with corresponding insertion holes for the inserts.

[0008] Preferably, an unlocking groove is provided at one end of the top surface of the n-shaped block, a push block is slidably provided in the unlocking groove, a spring block is provided at the lower end of the n-shaped block in the unlocking groove, the top surface of the spring block is fixedly connected to the push block, and a corresponding slot for the spring block is provided on the inner wall of one end of the rectangular slot.

[0009] Preferably, a rectangular plate is protruding from the bottom surface of the rectangular slot, and a rubber block is fixed to one end of the rectangular plate. A limiting groove corresponding to the shape of the rectangular plate is opened on the opposite sides of the upper and lower mechanical fingers.

[0010] Preferably, the upper and lower mechanical fingers are made of 316L stainless steel and undergo electrolytic polishing treatment on the surface, and the vacuum suction cup is made of semiconductor-grade silicone.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model facilitates the quick installation of mechanical fingers by using the cooperation of the n-shaped block, the insert block and the insertion holes of the upper and lower mechanical fingers, thereby improving the replacement efficiency and enabling the quick fixation function of the mechanical fingers; furthermore, the cooperation of the push block, the spring clip block and the slot facilitates the unlocking of the fixed mechanical fingers, improving the ease of operation and enabling the quick disassembly function of the mechanical fingers; ultimately, it solves the problem that the replacement process of mechanical fingers using bolts for fixing and replacing is cumbersome, time-consuming and inefficient, thus improving production efficiency. Attached Figure Description

[0012] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0013] Figure 1 This is a first-view schematic diagram of the overall structure proposed in this utility model;

[0014] Figure 2 This is a first-view schematic diagram of the overall structure of the lower robotic arm proposed in this utility model;

[0015] Figure 3 This is a schematic diagram of the overall cross-sectional structure of the n-shaped block proposed in this utility model;

[0016] Figure 4 This is a second-view schematic diagram of the overall structure of the lower robotic arm proposed in this utility model.

[0017] The numbers in the diagram are: 1. Motor cabinet; 2. Four-axis horizontal multi-joint cleanroom robotic arm; 3. Mounting base; 4. Guide rod; 5. Lower mounting plate; 6. Lower robotic finger; 7. Stepper motor; 8. Upper robotic finger; 9. Vacuum suction cup; 10. Vacuum machine; 11. N-shaped block; 12. Rectangular plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0019] Example: See Figures 1 to 4This utility model discloses a feeding device for semiconductor production, comprising a motor cabinet 1. A four-axis horizontal multi-joint cleanroom robotic arm 2 is mounted on the center of the top surface of the motor cabinet 1. The four-axis horizontal multi-joint cleanroom robotic arm 2 includes a lifting base, a large arm, a small arm, and an end rotating shaft. A mounting base 3 is coaxially fixed to the end rotating shaft. Two guide rods 4 are symmetrically fixed to the top surface of the mounting base 3. A disc is fixed to the top of the two guide rods 4. A semi-enclosed cover is fixed to the bottom surface of the disc. The bottom end of the semi-enclosed cover is fixed to the bottom end of the outer wall of the mounting base 3. A lower mounting plate 5 is fixed to the outer wall of the mounting base 3 extending from the opening of the semi-enclosed cover. A lower robotic finger 6 is mounted on one end of the lower mounting plate 5. A stepper motor 7 is installed in the middle. A lead screw, rotatably mounted in the center of the top surface of the mounting base 3, is coaxially fixed to the output shaft of the stepper motor 7. A lifting plate is sleeved on the lead screw and guide rod 4. An upper mounting plate extending from the opening of the semi-enclosed cover is fixed to one side of the outer wall of the lifting plate. An upper mechanical finger 8, mirror-image of the lower mechanical finger 6, is mounted on one end of the upper mounting plate. The four-axis horizontal multi-joint cleanroom robotic arm 2 is model JCR4400, featuring high precision and high cleanliness. The stepper motor 7 uses a model 57HS22 stepper motor, providing high control precision. Through this structure, flexible movement of the robotic arm and precise lifting and lowering of the upper mechanical finger 8 can be achieved, enabling the precise gripping of wafers. The picking and transport mechanisms provide basic operational support, and the above-mentioned structure forms the basic framework of the device. Multiple vacuum suction cups 9 are evenly mounted on the opposing surfaces of the upper mechanical finger 8 and the lower mechanical finger 6. Vacuum suction tubes communicating with the vacuum suction cups 9 are located on the opposing surfaces of the upper mechanical finger 8 and the lower mechanical finger 6. One end of each of the two vacuum suction tubes is connected to a vacuum generator 10 mounted on the opposing surfaces of the lower mounting plate 5 and the upper mounting plate, respectively. The vacuum generator 10 uses a CHELIC ev series vacuum generator, which has high vacuum and low noise. The vacuum suction cups 9 are made of semiconductor-grade silicone, possessing excellent sealing and cleanliness. Through the above structure, the vacuum suction cups 9 can firmly adhere to... The wafer is protected from slippage or damage during transport, improving gripping stability. Rectangular slots for mounting the upper robotic finger 8 and lower robotic finger 6 are provided on the lower mounting plate 5 and upper mounting plate. N-shaped blocks 11 are rotatably mounted on both sides of the rectangular slots. Multiple inserts are fixed to the bottom of the opposing surfaces of the two N-shaped blocks 11. Corresponding insertion holes are provided on the upper robotic finger 8 and lower robotic finger 6. The N-shaped blocks 11 are made of aluminum alloy, which is lightweight and high-strength. Through this structure, the inserts on the N-shaped blocks 11 cooperate with the insertion holes on the robotic fingers, enabling quick installation and fixation of the robotic fingers, providing a structural basis for convenient replacement of the robotic fingers.

[0020] In this invention, an unlocking groove is provided at one end of the top surface of the n-shaped block 11, and a push block is slidably provided in the unlocking groove. A spring-loaded block is provided at the lower end of the unlocking groove of the n-shaped block 11, and the top surface of the spring-loaded block is fixedly connected to the push block. A corresponding slot for the spring-loaded block is provided on the inner wall of one end of the rectangular slot. The spring-loaded block is made of spring steel, which has good elasticity and strong durability. Through the above structure, the push block drives the spring-loaded block to engage or disengage with the slot, which can quickly lock or unlock the n-shaped block 11, further improving the convenience of replacing the mechanical finger. A rectangular plate 12 is protruding from the bottom surface of the rectangular slot, and a rubber block is fixedly connected to one end of the rectangular plate 12. A corresponding rectangular plate 12 is provided on the opposite sides of the upper mechanical finger 8 and the lower mechanical finger 6. The device features a 2-shaped limiting groove; a rectangular plate 12 made of stainless steel for high strength; and a rubber block made of nitrile rubber for good elasticity. Through this structure, the rectangular plate 12, in conjunction with the limiting groove, provides guidance and positioning, ensuring the mechanical finger is inserted correctly. The rubber block acts as a buffer, enhancing connection stability. The upper mechanical finger 8 and lower mechanical finger 6 are made of 316L stainless steel with electrolytic polishing treatment. The vacuum suction cup 9 is made of semiconductor-grade silicone. 316L stainless steel offers excellent corrosion resistance and cleanliness, and the electrolytic polishing treatment reduces contaminant adsorption. This structure allows the mechanical finger to meet the high cleanliness requirements of semiconductor production, extending the device's service life.

[0021] Working Principle: In the application of this invention, the motor cabinet 1 provides the installation foundation and power support for the entire device. The four-axis horizontal multi-joint cleanroom robotic arm 2, through the coordinated movement of the lifting base, upper arm, forearm, and end-rotating shaft, drives the mounting base 3 and the upper and lower robotic fingers 8 to move flexibly in the horizontal and vertical directions, achieving precise adjustment of the wafer's pick-up and place position. When a wafer needs to be gripped, the stepper motor 7 drives the lead screw to rotate. Under the limiting action of the guide rod 4, the lifting plate drives the upper mounting plate and the upper robotic finger 8 to move up and down, cooperating with the lower robotic finger 6 to complete the clamping action of the wafer. At the same time, the vacuum machine 10 is started, using vacuum suction... The tube creates negative pressure in the vacuum suction cup 9, firmly adsorbing the wafer and ensuring a stable grip. To replace the mechanical finger with a different size, push the push block on the n-shaped block 11; the spring clip will disengage from the slot. Rotate the n-shaped block 11 to separate the insert from the insertion hole on the mechanical finger, allowing for quick removal of the old mechanical finger. When installing a new mechanical finger, insert it into the rectangular slot. The rectangular plate 12 acts as a guide, and its embedded limiting groove ensures proper positioning. Once the mechanical finger is inserted correctly, rotate the n-shaped block 11 to insert the insert into the insertion hole. The spring clip engages in the slot to complete the fixation. The rubber block provides cushioning, further enhancing the stability of the connection. The device is now in use.

[0022] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A feeding device for semiconductor manufacturing, comprising a motor cabinet (1), characterized in that: A four-axis horizontal multi-joint cleanroom robotic arm (2) is installed in the middle of the top surface of the motor cabinet (1). The four-axis horizontal multi-joint cleanroom robotic arm (2) includes a lifting base, a large arm, a small arm, and an end rotating shaft. A mounting base (3) is coaxially fixed to the end rotating shaft. Two guide rods (4) are symmetrically fixed to the top surface of the mounting base (3). A disc is fixed to the top of the two guide rods (4). A semi-enclosed cover is fixed to the bottom surface of the disc. The bottom end of the semi-enclosed cover is fixed to the bottom end of the outer wall of the mounting base (3). The outer wall of the mounting base (3) is connected from the semi-enclosed cover to the bottom end of the outer wall of the mounting base (3). A lower mounting plate (5) is fixedly attached to the opening of the closed cover. A lower mechanical finger (6) is installed at one end of the lower mounting plate (5). A stepper motor (7) is installed in the middle of the top surface of the disc. A lead screw is fixedly attached to the output shaft of the stepper motor (7) and rotated in the middle of the top surface of the mounting base (3). A lifting plate is sleeved on the lead screw and the guide rod (4). An upper mounting plate extending from the opening of the semi-closed cover is fixedly attached to one side of the outer wall of the lifting plate. An upper mechanical finger (8) mirror-image of the lower mechanical finger (6) is installed at one end of the upper mounting plate.

2. The feeding device for semiconductor production according to claim 1, characterized in that: Multiple vacuum suction cups (9) are evenly installed on the opposite surfaces of the upper mechanical finger (8) and the lower mechanical finger (6). Vacuum suction tubes communicating with the vacuum suction cups (9) are provided on the opposite sides of the upper mechanical finger (8) and the lower mechanical finger (6). One end of each of the two vacuum suction tubes is connected to a vacuum machine (10) installed on the opposite sides of the lower mounting plate (5) and the upper mounting plate, respectively.

3. The feeding device for semiconductor production according to claim 2, characterized in that: The lower mounting plate (5) and the upper mounting plate are provided with rectangular slots for installing the upper mechanical finger (8) and the lower mechanical finger (6). N-shaped blocks (11) are rotatably installed on both sides of the rectangular slots. Multiple inserts are fixed to the bottom of the opposite surfaces of the two N-shaped blocks (11). The upper mechanical finger (8) and the lower mechanical finger (6) are provided with corresponding insertion holes for the inserts.

4. A feeding device for semiconductor production according to claim 3, characterized in that: An unlocking groove is provided at one end of the top surface of the n-shaped block (11), and a push block is slidably provided in the unlocking groove. A spring block is provided at the lower end of the unlocking groove of the n-shaped block (11). The top surface of the spring block is fixedly connected to the push block. A corresponding slot for the spring block is provided on the inner wall of one end of the rectangular slot.

5. A feeding device for semiconductor production according to claim 4, characterized in that: A rectangular plate (12) is protruding from the bottom surface of the rectangular slot. A rubber block is fixed to one end of the rectangular plate (12). The upper mechanical finger (8) and the lower mechanical finger (6) have corresponding limiting grooves in the shape of the rectangular plate (12) on their opposite sides.

6. A feeding device for semiconductor production according to claim 5, characterized in that: The upper mechanical finger (8) and the lower mechanical finger (6) are made of 316L stainless steel and are electrolytically polished on the surface. The vacuum suction cup (9) is made of semiconductor-grade silicone.

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