一种用于CVD尾气处理的模块化过滤装置

By employing a modular filtration device with cooling and a multi-layer filtration structure, the problems of effective removal of particulate matter and equipment clogging in CVD exhaust gas were solved, enabling stable exhaust gas treatment and long-term equipment operation.

CN224506622UActive Publication Date: 2026-07-17ADVANCED NANO COATING TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ADVANCED NANO COATING TECH CO LTD
Filing Date
2025-06-16
Publication Date
2026-07-17

Smart Images

  • Figure CN224506622U_ABST
    Figure CN224506622U_ABST
Patent Text Reader

Abstract

本实用新型公开了一种用于CVD尾气处理的模块化过滤装置，涉及过滤装置技术领域。旋风除尘筒的侧壁上固定连接有连接管，连接管的左侧端设置有冷却机构，旋风除尘筒的下端固定连接有收集箱，旋风除尘筒的右侧设置有过滤箱，过滤箱内侧设置有过滤膜一、过滤袋和过滤膜二。本装置设置有冷却机构，进而实现CVD尾气降温操作，降温后的CVD尾气中气态金属化合物转变为固态颗粒，并在旋风除尘筒内进行沉淀并收集，进而有效避免对后续的精细过滤装置造成堵塞，影响设备使用的问题。在过滤箱中设置有不对称纤维束、无纺布袋式、楔形褶层玻璃纤维的三层过滤结构，进而能够实现对尾气中细小颗粒进行逐级清理，进而提高过滤效果。
Need to check novelty before this filing date? Find Prior Art